JPS6154432A - Instrument for measuring optically surface physical properties - Google Patents

Abstract

PURPOSE:To make fluorescence measurement with the same device without exchanging a sample by providing the 2nd radiation source and a light absorber additionally to a reflectance measuring instrument. CONSTITUTION:The 2nd radiation source 38 such as Ar laser or the like is arranged to make tilted incident radiation to obtain the fluorescence of the surface 29 to be detected, and fiber for detection is used in common as fiber 15 used for ordinary reflectance measurement. Fluorescence scattering is made on the surface 29 to be detected by excitation radiation from the radiation source 38 and its reflected light is detected by the fiber 15 for the reflectance measurement to observe the fluorescence characteristic. Further, a regular reflection component of the radiation source 38 is eliminated by a light absorber 39. Thus, the fluorescence measurement by using the same fiber 15 for detection can be made.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an optical surface property measuring device for measuring surface reflectance and fluorescence of a substance.

[Prior Art] The basic form of the reflectance measuring device in the present invention is described in the reference document rJournal of Chemical Phys.
ics J7918, 15・0ctober・1
983. P, 3701-37H. The basic concept of this measuring device will be explained below with reference to FIG.

The radiant flux 3-1, 3-2 from the radiant source 1 is converted into a parallel radiant flux 3-3 by the elliptical reflector 2, and is converted into a parallel radiant flux 3-3 by the monochromator.
4. The output radiation flux from the monochromator 4 passes through the input section 5 of the Y-shaped fiber 50 to the fiber 6.
．． 7 respectively. The radiant flux is transmitted alternately by the chopper 8 between the fibers 6 and 9 and between the fibers 7 and 10, the radiant flux from the fiber 9 is transmitted from its end face 11 to the test surface 29, and the radiant flux from the fiber IO is transmitted from its end face 12. The reference surface 30 is alternately irradiated from each other. The reflected radiation flux 13 from the test surface 29 is transmitted from the end face 11 to the fiber 15, and the reflected radiation flux 14 from the reference surface 30 is transmitted from the end face 12 to the fiber 16, and is incident on a monochromator 17.

The emitted radiant flux 34 from the monochromator 17 is inputted to the photomultiplier 19 via a light-shielding tube 35, etc.
After that, a log amblifier 20, a bypass filter 21, an amblifier 22, a phase recirculating circuit 23,
Microcomputer 2 via A-D converter 25
7 as a digital signal.

The monochromators 4 and 17 are synchronously wavelength-scanned via step motors 1B-1 and 18-2 using a signal 33 previously stored in the microcomputer 27. In addition, the scanning signal 24 of the chopper 8
is input to the microcomputer 27 via a phase synchronized circuit.

Next, the signals input to the microcomputer 27 will be explained.

In FIG. 3, let rl+r2 be the signals reflected from the test surface 29 and the reference surface 30 and input to the microcomputer 27 via the electrical amplification system.

rl+r2 is expressed as follows.

r,=IQXtIXRI rl = I. Xt2 XR2 However, each symbol represents the following items.

Io: Light source intensity (the amplification rate by the amplification system is also included in this term) tl: Transmittance of the optical system on the detection side of the test surface t2: Transmittance of the optical system on the reference surface detection side R1: Reflection of the test surface Rate R2: Reference surface reflectance The reflectance R of the test surface 28 is calculated by dividing the above r by rl and further dividing by the term As for correcting the difference between tl and t2. It is obtained by multiplying by the theoretical reflectance RT. This can be expressed as follows.

・・・・・・・・・(1) In equation (1), R2嬌RT is used. As for As, when the same material as the reference surface is placed on the test surface, it is reflected from there and the amplification system The signal value (Io
7, the electrically amplified signals rl and r2 of the radiant flux reflected from the test surface 29 and the reference surface 30 are the period of the chip 8. The signals are transmitted alternately at intervals of the period T in synchronization with T.

FIG. 2 shows the relationship between rl+r2 and period T. Therefore, the average value of the sum of several r's can be taken as the value of rl, or the average value of the sum of several rl's can be taken as the value of rl.

In this way, the relationship between the reflectance R1 from the test surface obtained by using rI+r2 and equation (1) with respect to the wavelength variable by the monochromator, and the relative difference in reflectance from the two types of test surfaces. The relationship to the wavelength variable by the monochromator is displayed on the plotter 28 or the cathode ray tube 3B, or recorded on the disk 37.

Note that the fiber in the above text is not limited to a fiber, and may be a selfoc, an image-forming relay using a lens, or a waveguide exhibiting internal reflection.

[Problems to be Solved by the Invention] Conventional devices can only measure the surface reflectance of the surface to be tested, and it is necessary to prepare another device to measure fluorescence. It was very inconvenient as the work was duplicated.

The present invention has been made by paying attention to such problems.
The object of the present invention is to provide a device that can perform fluorescence measurements using the same detection fiber using a simple and easy-to-implement method.

[Means for Solving the Problems] Fig. 1 shows the basic concept of the present invention. The radiation source is arranged to provide oblique illumination to obtain the fluorescence of the surface to be examined. 38 is a light absorber (
Cow horn shaped with black paint on the inside to prevent reflection)
Yes, it is.

The detection fiber also serves as the fiber 15 used for normal reflectance measurement.

[Function] Excitation radiation (Ar laser, etc.) from the second radiation source 38 causes fluorescence scattering on the test surface, and the reflected light is detected by the reflectance measurement fiber 15 to observe fluorescence characteristics. . Note that the specular reflection component of the radiation source 38 is reflected by the light absorber 3
removed by 9.

[Example] On the wood flow side, in the apparatus diagram shown in FIG. 3, a second radiation source 3 is installed in the irradiation section for the test surface as shown in FIG.
8 and a light absorber 39 were installed. Therefore, the configuration of the other devices and the flow of signals after the monochromator 17 are as explained in the above-mentioned [Prior Art]. By configuring the apparatus in this manner and applying excitation radiation to the surface to be measured, the reflected fluorescence light can be detected by the fiber 15 for measuring reflectance. Note that the surface to be tested is L-B (
Langmuir-Prodgett) membranes and the like are also included.

[Effects of the Invention] According to the present invention, by additionally installing a second radiation source and a light absorber in a normal reflectance measuring device, fluorescence measurement can be performed with the same device without replacing the sample. be able to.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing the basic concept of the present invention, and FIG.
Graph showing the relationship between the signal rl+r2 and the period T, 3rd
FIG. 1 is a configuration diagram showing a basic form of a reflectance measuring device according to the present invention. 1; Radiation source 2; Elliptical reflector 3-1.3-2; Radiant flux 3-3; Parallel radiant flux 4.17; Monochromator 5; Y-shaped fiber human powered sound center 6.7, 9, 10 ,15.1B, ,Fiber8.
40; Chopper 11.12; One end face of fiber 13.14. Reflected radiation flux 1B-1, 18-2; Step motor 19; Photo multiplier 20: Log amplifier 21; Bypass filter 22; Amblifier 23; Phase synchronization circuit 24; Scanning signal 25 of chopper 8; A-D converter 27; Microcomputer 28; Plotter 28; Test surface 30; Reference surface 31, cooler 32; Stabilized power supply 33; Step motor 18-1, 18-2 scanning signal 34
emitted radiant flux 35 from monochromator 17; light-shielding tube 36; cathode ray tube 37; disk 38; fJS2 radiation source 38; light absorber 50; Y-shaped fiber rI; Amplified signal r2; electrically amplified signal T of the radiant flux reflected from the reference surface 30; scanning period of the chip 8

Claims (1)

[Claims] 1) Light from a radiation source is irradiated onto a surface to be inspected via a first monochromator, and the reflected radiation flux is incident on a second monochromator to electrically detect information. In the measuring device, apart from the radiation source, a second radiation source for detecting fluorescence is provided.
An optical surface property measuring device characterized in that it is provided with a radiation source. 2) at a position where specularly reflected light from the second radiation source occurs;
An optical surface property measuring device according to claim 1, which is provided with a light absorber.