JPS6153938U - - Google Patents
Info
- Publication number
- JPS6153938U JPS6153938U JP13742984U JP13742984U JPS6153938U JP S6153938 U JPS6153938 U JP S6153938U JP 13742984 U JP13742984 U JP 13742984U JP 13742984 U JP13742984 U JP 13742984U JP S6153938 U JPS6153938 U JP S6153938U
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- interlayer insulating
- contact hole
- width
- upper electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011229 interlayer Substances 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13742984U JPS6153938U (it) | 1984-09-11 | 1984-09-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13742984U JPS6153938U (it) | 1984-09-11 | 1984-09-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6153938U true JPS6153938U (it) | 1986-04-11 |
Family
ID=30695842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13742984U Pending JPS6153938U (it) | 1984-09-11 | 1984-09-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6153938U (it) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07147332A (ja) * | 1994-08-01 | 1995-06-06 | Fujitsu Ltd | 半導体装置の製造方法 |
| JPH07147333A (ja) * | 1994-08-01 | 1995-06-06 | Fujitsu Ltd | 半導体記憶装置及びその製造方法 |
-
1984
- 1984-09-11 JP JP13742984U patent/JPS6153938U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07147332A (ja) * | 1994-08-01 | 1995-06-06 | Fujitsu Ltd | 半導体装置の製造方法 |
| JPH07147333A (ja) * | 1994-08-01 | 1995-06-06 | Fujitsu Ltd | 半導体記憶装置及びその製造方法 |