JPS63193844U - - Google Patents
Info
- Publication number
- JPS63193844U JPS63193844U JP8533187U JP8533187U JPS63193844U JP S63193844 U JPS63193844 U JP S63193844U JP 8533187 U JP8533187 U JP 8533187U JP 8533187 U JP8533187 U JP 8533187U JP S63193844 U JPS63193844 U JP S63193844U
- Authority
- JP
- Japan
- Prior art keywords
- support substrate
- communicates
- conductor layer
- via holes
- electrostatic chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 5
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8533187U JPS63193844U (it) | 1987-05-30 | 1987-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8533187U JPS63193844U (it) | 1987-05-30 | 1987-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63193844U true JPS63193844U (it) | 1988-12-14 |
Family
ID=30940641
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8533187U Pending JPS63193844U (it) | 1987-05-30 | 1987-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63193844U (it) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012142615A (ja) * | 1999-02-17 | 2012-07-26 | Applied Materials Inc | 多層電極を有する薄板状セラミック及び製造方法 |
| JP2015529968A (ja) * | 2012-07-17 | 2015-10-08 | エーエスエムエル ネザーランズ ビー．ブイ． | 静電クランプ、リソグラフィ装置及び方法 |
| JP2019204903A (ja) * | 2018-05-24 | 2019-11-28 | 日本特殊陶業株式会社 | 電極埋設部材の製造方法 |
| JP2019212668A (ja) * | 2018-05-31 | 2019-12-12 | 日本特殊陶業株式会社 | 電極埋設部材 |
-
1987
- 1987-05-30 JP JP8533187U patent/JPS63193844U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012142615A (ja) * | 1999-02-17 | 2012-07-26 | Applied Materials Inc | 多層電極を有する薄板状セラミック及び製造方法 |
| JP2015529968A (ja) * | 2012-07-17 | 2015-10-08 | エーエスエムエル ネザーランズ ビー．ブイ． | 静電クランプ、リソグラフィ装置及び方法 |
| JP2019204903A (ja) * | 2018-05-24 | 2019-11-28 | 日本特殊陶業株式会社 | 電極埋設部材の製造方法 |
| JP2019212668A (ja) * | 2018-05-31 | 2019-12-12 | 日本特殊陶業株式会社 | 電極埋設部材 |