JPS6152961A - Manufacturing method of gold alloy wire - Google Patents

Manufacturing method of gold alloy wire

Info

Publication number
JPS6152961A
JPS6152961A JP59174368A JP17436884A JPS6152961A JP S6152961 A JPS6152961 A JP S6152961A JP 59174368 A JP59174368 A JP 59174368A JP 17436884 A JP17436884 A JP 17436884A JP S6152961 A JPS6152961 A JP S6152961A
Authority
JP
Japan
Prior art keywords
gold alloy
alloy wire
manufacturing
wire
gold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59174368A
Other languages
Japanese (ja)
Inventor
Kazuo Sawada
沢田 和夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP59174368A priority Critical patent/JPS6152961A/en
Publication of JPS6152961A publication Critical patent/JPS6152961A/en
Priority to US06/898,835 priority patent/US4702302A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22DCASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D11/00Continuous casting of metals, i.e. casting in indefinite lengths
    • B22D11/005Continuous casting of metals, i.e. casting in indefinite lengths of wire
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/741Apparatus for manufacturing means for bonding, e.g. connectors
    • H01L24/745Apparatus for manufacturing wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/43Manufacturing methods
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144Gold (Au) as principal constituent

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Continuous Casting (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 発明の分野 この発明は、たとえば耐食ろう付線、半導体配線用導体
および装飾用細線などの細物金合金線の製造方法に関す
る。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for manufacturing thin gold alloy wires, such as corrosion-resistant brazing wires, conductors for semiconductor wiring, and fine decorative wires.

先行技術の説明 金線もしくは金合金線は耐食ろう付線、半導体素子の配
線用導体、あるいは装飾用細線として用いられたりする
が、このような場合に細線であることを求められること
も多い。
Description of Prior Art Gold wire or gold alloy wire is used as a corrosion-resistant brazing wire, a wiring conductor for semiconductor devices, or a fine wire for decoration, and in such cases, the wire is often required to be thin.

通常金属細線を製造するには溶解、鋳造、熱間加工、冷
間伸線加工とその間多くの場合、表面切削や皮剥や熱処
理などの工程を経て作製される。
Normally, thin metal wires are produced through melting, casting, hot working, cold wire drawing, and in many cases, processes such as surface cutting, peeling, and heat treatment.

金や金合金はきわめて高価なため上述のような多工程で
は工程中の試料ロスが伴ない、加工コストが高くつくと
いった問題を有していた。このように従来の絹物導体の
製造方法は、煩雑な工程を経るものであるため製品の歩
留りが低く、かつ、大がかりな設備を必要とすることな
どの他、様々な欠点を有するものであった。
Since gold and gold alloys are extremely expensive, the multi-step process described above has the problem of sample loss during the process and high processing costs. As described above, conventional silk conductor manufacturing methods have various drawbacks, such as low product yields due to complicated processes and the need for large-scale equipment. Ta.

他方、鉛などの低融点金属からなる九線製造方法として
、溶融材料を訓いジェット流として液体中に噴出させて
丸線を得る方法が知られている。
On the other hand, as a method for producing nine wires made of a low melting point metal such as lead, a method is known in which a round wire is obtained by ejecting a molten material into a liquid as a jet stream.

しかしながら、溶融金合金は金属流の安定性に乏しく、
そのため溶融金属から細物導体を直接製線することは極
めて困難で、よく直接製線できても、短尺であったり、
表面形状が平滑でなかったりする。
However, molten gold alloys have poor metal flow stability;
For this reason, it is extremely difficult to make thin conductors directly from molten metal, and even if wires can be made directly, they may be short or short.
The surface shape may not be smooth.

発明の目的 それゆえに、この発明の目的は、金合金溶融物から細物
金合金線を安価に直接製線し得る方法を提供することに
ある。
OBJECTS OF THE INVENTION Therefore, an object of the present invention is to provide a method for directly producing thin gold alloy wire from a molten gold alloy at low cost.

発明の構成 この発明は、0.001〜1重量%のBeが添加された
金合金溶融物を細孔またはスリットより噴出させて流体
中にて凝固させることを特徴とする細物金合金線の製造
方法である。rBe  が添加された金合金溶融物」を
用いることにより、溶融物の粘性、表面張力および表面
酸化状態、またノズルとのぬれ性にも微妙な変化が生じ
、そのため金合金溶融物のジェット流が安定する。この
発明は、この知見に基づくものである。
Structure of the Invention The present invention provides a thin gold alloy wire characterized in that a molten gold alloy to which 0.001 to 1% by weight of Be is added is ejected from a pore or slit and solidified in a fluid. This is the manufacturing method. By using a gold alloy melt containing rBe, subtle changes occur in the viscosity, surface tension, and surface oxidation state of the melt, as well as its wettability with the nozzle, and as a result, the jet flow of the gold alloy melt Stabilize. This invention is based on this knowledge.

ro、oo1〜1重量%」とした理由は、0.001重
量%以下では金合金溶融物が粒子状となりやすく、連続
的かつ均一な線を得ることが困難だからであり、他方1
重量%以上の濃度では溶融流安定効果が飽和するのに対
してBe  含有率の上昇による特性変化や均一性の保
証などが問題となるからである。
The reason why it is set as 1 to 1% by weight is that if it is less than 0.001% by weight, the gold alloy melt tends to become particulate and it is difficult to obtain a continuous and uniform line.
This is because when the concentration exceeds % by weight, the effect of stabilizing the melt flow is saturated, whereas an increase in the Be content causes problems such as changes in characteristics and ensuring uniformity.

また、用途により、Si、 Cu、 Sn、 Zn、 
In、 Ag。
Also, depending on the application, Si, Cu, Sn, Zn,
In, Ag.

Ge、 Ga、 kl、 Pd、 Pt、 Pb、 M
g、 Fe、 Ni、 Co、 Ca。
Ge, Ga, kl, Pd, Pt, Pb, M
g, Fe, Ni, Co, Ca.

B、 Bi、 P  などからなる群から選択される一
種以上の元素が多くとも50重量%含有された金合金溶
融物が用いられる。これにより様々な強度および融点の
細物会合金線を得ることができる。
A gold alloy melt containing at most 50% by weight of one or more elements selected from the group consisting of B, Bi, P, etc. is used. This makes it possible to obtain fine aggregated gold wires of various strengths and melting points.

「細孔またはスリットより噴出させて流体中にて凝固さ
せる」方法については、回転水中紡糸法、流水凝固装置 得る。なお、「流体」としては、水に限られず様々な流
体を使用し得る。
For the method of "coagulating in a fluid by ejecting it from a pore or slit", a rotating underwater spinning method and a flowing water coagulating device are used. Note that the "fluid" is not limited to water, and various fluids can be used.

流体中で凝固させな後、平均減面率5%以上の冷間加工
が施されてもよい。断面の均一化、強度の向上および軟
化後の柔軟性の向上が果たし得るからである。
After solidifying in a fluid, cold working with an average reduction in area of 5% or more may be performed. This is because the cross section can be made uniform, the strength can be improved, and the flexibility after softening can be improved.

この発明のその他の特徴は、図面を参照して行なう以下
の実施例についての説明゛により一層明らかとなろう。
Other features of the invention will become clearer from the following description of embodiments with reference to the drawings.

実施例の説明 実施例1゜ 第1図および第2図に正面図および側面図で示す回転水
中紡糸装置の黒鉛るつぼ1内で、0.2重量%のBe 
 を含有するAu−Be合金を溶解した。この溶解は、
黒鉛るつぼlの周囲に配置されたヒータ2の加熱により
行った。次に、黒鉛るつぼ1の上方からX方向にAr 
 ガスを黒鉛るつぼ1内に導入し、その圧力によりAu
−Be溶融物を回転ドラム8の内周−面に形成された厚
さ15飢の回転水中に、黒鉛るつぼ1の底部の丸孔から
噴出させた。これKより、断面形状が円形で表面の形状
が滑らかな直径0.2皿の金合金線4が得られた。なお
比較のため同一方法により純度99.99%の純金を溶
融きせ噴出させたが、球状の粒子となり、長尺体が得ら
れなかった。
DESCRIPTION OF EXAMPLES Example 1 0.2% by weight of Be
An Au-Be alloy containing . This dissolution is
Heating was performed using a heater 2 placed around the graphite crucible 1. Next, Ar is applied in the X direction from above the graphite crucible 1.
Gas is introduced into the graphite crucible 1, and the pressure causes the Au
The -Be melt was jetted out from a round hole at the bottom of the graphite crucible 1 into rotating water having a thickness of 15 mm formed on the inner peripheral surface of the rotating drum 8. From this K, a gold alloy wire 4 having a circular cross-sectional shape and a smooth surface having a diameter of 0.2 disks was obtained. For comparison, pure gold with a purity of 99.99% was melted and ejected using the same method, but the resulting particles were spherical and no elongated bodies were obtained.

実施例2゜ 実施例1と同一の方法で直径0.15Mの、Au  に
CulO%、Sn 5%、Zn0.3%、In 1%、
Ag 5%、Be0.4%を添加した組成の金合金線を
得た。次に、トンネル炉内で連続的に焼鈍させた後、直
径0.03肌まで伸線した。このとき表面が平滑なため
伸aと加工性は良好であり、かつ高い生産性を示した。
Example 2゜By the same method as in Example 1, a diameter of 0.15M was made of Au with CuO%, Sn 5%, Zn 0.3%, In 1%,
A gold alloy wire having a composition containing 5% Ag and 0.4% Be was obtained. Next, the wire was continuously annealed in a tunnel furnace and then drawn to a diameter of 0.03 skin. At this time, since the surface was smooth, elongation and workability were good, and high productivity was exhibited.

実施例3゜ 不純物として、Si、 Ge、 Ga、 AI!、Pd
、 Pt、 Pb。
Example 3゜Si, Ge, Ga, AI! as impurities! , Pd
, Pt, Pb.

Mg、 Fe、 Ni、 Co、 Ca、 B、 Bi
、 Pをそれぞれ0.05〜2%の範囲で合計20%含
有し、0.5重量%のBeを含有するAu−Be系合金
を、第3図に正面断面図で示す流水凝固装置により、実
施例1と同様に直径0.2ruILの金合金線に直接凝
固させた。なお、第3図において、lは黒鉛るつぼ、2
はヒータを示し、黒鉛るつぼ1の下方には流水供給用の
クンク5が配置されている。金合金の凝固は、黒鉛るつ
ぼ1の上方から矢印X方向にArガスを導入し、その圧
力により黒鉛るつぼlの底部から銀合金溶融物を噴出さ
せ、タンク5から流れ落ちる流水中に接触させることに
より行った。
Mg, Fe, Ni, Co, Ca, B, Bi
, P in a total range of 0.05 to 2%, and a total of 20%, and 0.5% by weight of Be. As in Example 1, it was directly solidified into a gold alloy wire with a diameter of 0.2 ruIL. In addition, in Fig. 3, l is a graphite crucible, and 2
indicates a heater, and a sink 5 for supplying running water is arranged below the graphite crucible 1. The gold alloy is solidified by introducing Ar gas from above the graphite crucible 1 in the direction of the arrow X, and using the pressure, the molten silver alloy is ejected from the bottom of the graphite crucible 1 and brought into contact with the flowing water flowing down from the tank 5. went.

発明の効果 以上のように、この発明によ゛れば、0.001〜1重
量%のBe が添加された金合金溶融物を用いることよ
り、金合金溶融物のジェット流を安定化することができ
、そのため金合金溶融物から細物金合金線を直接製線す
ることができる。したがって製造工程を大幅に簡略化す
ることができ、かつ、中間の熱処理工程をも著しく低減
し得るので、歩留りを飛躍的に向上することができると
ともに、エネルギー消費も極めて少なくし得る。
Effects of the Invention As described above, according to the present invention, by using the gold alloy melt to which 0.001 to 1% by weight of Be is added, the jet flow of the gold alloy melt can be stabilized. Therefore, thin gold alloy wire can be made directly from the gold alloy melt. Therefore, the manufacturing process can be greatly simplified, and the intermediate heat treatment process can also be significantly reduced, so that the yield can be dramatically improved and energy consumption can be extremely reduced.

この発明は、耐食ろう付線、半導体配線用導体、装飾用
細線などの各種金合金細物材料に利用することができる
The present invention can be used for various gold alloy thin materials such as corrosion-resistant brazed wires, semiconductor wiring conductors, and decorative thin wires.

【図面の簡単な説明】[Brief explanation of drawings]

第1図および第2図はこの発明を実施するための装置の
一例を示す正面断面図および側面断面図である。第8図
は、この発明を実施するための装置の他の例を示す正面
断面図である。 図において、4・は細線としての金合金線を示す。 セ10 子3図 −K)2図 クン7
FIGS. 1 and 2 are a front sectional view and a side sectional view showing an example of an apparatus for carrying out the present invention. FIG. 8 is a front sectional view showing another example of the apparatus for carrying out the invention. In the figure, 4 indicates a gold alloy wire as a thin wire. Se10 Child 3 Figure-K) 2 Figure Kun 7

Claims (3)

【特許請求の範囲】[Claims] (1)0.001〜1重量%のBeが添加された金合金
溶融物を細孔またはスリットより噴出させて流体中にて
凝固させることを特徴とする金合金線の製造方法。
(1) A method for producing a gold alloy wire, which comprises ejecting a molten gold alloy to which 0.001 to 1% by weight of Be has been added through pores or slits and solidifying it in a fluid.
(2)前記金合金溶融物としてSi、Cu、Sn、Zn
、In、Ag、Ge、Ga、Al、Pd、Pt、Pb、
Mg、Fe、Ni、Co、Ca、B、Bi、P、などか
らなる群から選択される一種以上の元素が多くとも50
重量%含有されているものを用いる、特許請求の範囲第
(1)項記載の金合金線の製造方法。
(2) Si, Cu, Sn, Zn as the gold alloy melt
, In, Ag, Ge, Ga, Al, Pd, Pt, Pb,
At most 50 elements selected from the group consisting of Mg, Fe, Ni, Co, Ca, B, Bi, P, etc.
A method for manufacturing a gold alloy wire according to claim (1), which uses a gold alloy wire containing % by weight.
(3)前記流体中で凝固させる方法が回転体の内側に遠
心力で固定された液体流体中に金合金溶融物を細孔また
はスリットより噴出させて凝固させることを特徴とする
特許請求の範囲第(1)項または第(2)項の金合金線
の製造方法。
(3) Claims characterized in that the method of solidifying in the fluid comprises ejecting the molten gold alloy from pores or slits into the liquid fluid fixed by centrifugal force inside a rotating body and solidifying it. The method for producing a gold alloy wire according to item (1) or item (2).
JP59174368A 1983-02-23 1984-08-22 Manufacturing method of gold alloy wire Pending JPS6152961A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP59174368A JPS6152961A (en) 1984-08-22 1984-08-22 Manufacturing method of gold alloy wire
US06/898,835 US4702302A (en) 1983-02-23 1986-08-20 Method of making thin alloy wire

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59174368A JPS6152961A (en) 1984-08-22 1984-08-22 Manufacturing method of gold alloy wire

Publications (1)

Publication Number Publication Date
JPS6152961A true JPS6152961A (en) 1986-03-15

Family

ID=15977392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59174368A Pending JPS6152961A (en) 1983-02-23 1984-08-22 Manufacturing method of gold alloy wire

Country Status (1)

Country Link
JP (1) JPS6152961A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6159420A (en) * 1996-05-28 2000-12-12 Tanaka Denshi Kogyo K.K. Gold alloy wire and method for making a bump
JP2011143455A (en) * 2010-01-15 2011-07-28 Toyota Motor Corp Method and device of manufacturing magnet material

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3272625A (en) * 1965-10-18 1966-09-13 James Cohn Beryllium-gold alloy and article made therefrom
JPS5564948A (en) * 1978-11-10 1980-05-16 Itsuo Onaka Production of fine metal wire

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3272625A (en) * 1965-10-18 1966-09-13 James Cohn Beryllium-gold alloy and article made therefrom
JPS5564948A (en) * 1978-11-10 1980-05-16 Itsuo Onaka Production of fine metal wire

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6159420A (en) * 1996-05-28 2000-12-12 Tanaka Denshi Kogyo K.K. Gold alloy wire and method for making a bump
US6213382B1 (en) 1996-05-28 2001-04-10 Tanaka Denshi Kogyo K.K. Method for making a bump
JP2011143455A (en) * 2010-01-15 2011-07-28 Toyota Motor Corp Method and device of manufacturing magnet material

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