JPS6152401B2 - - Google Patents

Info

Publication number
JPS6152401B2
JPS6152401B2 JP55181223A JP18122380A JPS6152401B2 JP S6152401 B2 JPS6152401 B2 JP S6152401B2 JP 55181223 A JP55181223 A JP 55181223A JP 18122380 A JP18122380 A JP 18122380A JP S6152401 B2 JPS6152401 B2 JP S6152401B2
Authority
JP
Japan
Prior art keywords
film thickness
light
output
film
reflected interference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55181223A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57104806A (en
Inventor
Myozo Maeda
Seiya Ogawa
Shoji Ishida
Shigeru Arai
Tadatoshi Suenaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55181223A priority Critical patent/JPS57104806A/ja
Publication of JPS57104806A publication Critical patent/JPS57104806A/ja
Publication of JPS6152401B2 publication Critical patent/JPS6152401B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP55181223A 1980-12-23 1980-12-23 Thickness control of grinding painted film Granted JPS57104806A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55181223A JPS57104806A (en) 1980-12-23 1980-12-23 Thickness control of grinding painted film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55181223A JPS57104806A (en) 1980-12-23 1980-12-23 Thickness control of grinding painted film

Publications (2)

Publication Number Publication Date
JPS57104806A JPS57104806A (en) 1982-06-30
JPS6152401B2 true JPS6152401B2 (enrdf_load_stackoverflow) 1986-11-13

Family

ID=16096961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55181223A Granted JPS57104806A (en) 1980-12-23 1980-12-23 Thickness control of grinding painted film

Country Status (1)

Country Link
JP (1) JPS57104806A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5966115A (ja) * 1982-10-08 1984-04-14 Hitachi Ltd 薄膜欠陥検査装置
FI83911C (fi) * 1986-05-14 1992-01-10 Tapio Technologies Oy Foerfarande och anordning foer maetning av ett hinnartat eller skivlikt bands tjocklek.
JP2851620B2 (ja) * 1988-06-10 1999-01-27 株式会社日立製作所 薄膜研磨装置の制御方法
JP6260899B2 (ja) * 2014-01-27 2018-01-17 三菱重工業株式会社 押込量調整装置、及び押込量調整装置を備えた研磨装置

Also Published As

Publication number Publication date
JPS57104806A (en) 1982-06-30

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