JPS6151814A - パーマロイ薄膜及び垂直磁気記録媒体の製造方法 - Google Patents

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Publication number

JPS6151814A

JPS6151814A JP17317584A JP17317584A JPS6151814A JP S6151814 A JPS6151814 A JP S6151814A JP 17317584 A JP17317584 A JP 17317584A JP 17317584 A JP17317584 A JP 17317584A JP S6151814 A JPS6151814 A JP S6151814A

Authority

JP

Japan

Prior art keywords

thin film

recording medium

permalloy thin

magnetic recording

coercive force

Prior art date

1984-08-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

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• 229910000889 permalloy Inorganic materials 0.000 title claims abstract description 37
• 239000010409 thin film Substances 0.000 title claims abstract description 34
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 17
• 239000001301 oxygen Substances 0.000 claims abstract description 17
• 229910052760 oxygen Inorganic materials 0.000 claims abstract description 17
• 239000012298 atmosphere Substances 0.000 claims abstract description 8
• 238000005289 physical deposition Methods 0.000 claims abstract description 5
• 238000004544 sputter deposition Methods 0.000 claims description 32
• 239000010408 film Substances 0.000 claims description 23
• 239000000758 substrate Substances 0.000 claims description 19
• 230000005415 magnetization Effects 0.000 claims description 17
• 229910052742 iron Inorganic materials 0.000 claims description 2
• 229910052759 nickel Inorganic materials 0.000 claims description 2
• 239000011261 inert gas Substances 0.000 abstract description 4
• 230000035945 sensitivity Effects 0.000 abstract description 4
• 239000010410 layer Substances 0.000 description 37
• 239000007789 gas Substances 0.000 description 11
• 238000010586 diagram Methods 0.000 description 5
• 229910052786 argon Inorganic materials 0.000 description 4
• 239000011651 chromium Substances 0.000 description 4
• 230000000052 comparative effect Effects 0.000 description 4
• 238000000034 method Methods 0.000 description 4
• 229910000599 Cr alloy Inorganic materials 0.000 description 3
• 230000015572 biosynthetic process Effects 0.000 description 3
• 238000006243 chemical reaction Methods 0.000 description 3
• 238000005259 measurement Methods 0.000 description 3
• PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
• XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
• XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
• 229910045601 alloy Inorganic materials 0.000 description 2
• 239000000956 alloy Substances 0.000 description 2
• 230000007423 decrease Effects 0.000 description 2
• 238000000151 deposition Methods 0.000 description 2
• 230000008021 deposition Effects 0.000 description 2
• 230000000694 effects Effects 0.000 description 2
• 150000002500 ions Chemical class 0.000 description 2
• 229920000139 polyethylene terephthalate Polymers 0.000 description 2
• 239000005020 polyethylene terephthalate Substances 0.000 description 2
• 241000255789 Bombyx mori Species 0.000 description 1
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
• 230000002159 abnormal effect Effects 0.000 description 1
• 239000012300 argon atmosphere Substances 0.000 description 1
• 238000003491 array Methods 0.000 description 1
• 235000014121 butter Nutrition 0.000 description 1
• 239000000788 chromium alloy Substances 0.000 description 1
• 239000010941 cobalt Substances 0.000 description 1
• 229910017052 cobalt Inorganic materials 0.000 description 1
• GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
• 239000000498 cooling water Substances 0.000 description 1
• 229910052802 copper Inorganic materials 0.000 description 1
• 239000010949 copper Substances 0.000 description 1
• 239000013078 crystal Substances 0.000 description 1
• 230000007123 defense Effects 0.000 description 1
• 239000002355 dual-layer Substances 0.000 description 1
• 238000011156 evaluation Methods 0.000 description 1
• 230000026030 halogenation Effects 0.000 description 1
• 238000005658 halogenation reaction Methods 0.000 description 1
• 239000000463 material Substances 0.000 description 1
• 239000000203 mixture Substances 0.000 description 1
• 238000011017 operating method Methods 0.000 description 1
• 239000002245 particle Substances 0.000 description 1
• 238000005240 physical vapour deposition Methods 0.000 description 1
• -1 polyethylene terephthalate Polymers 0.000 description 1
• 230000008929 regeneration Effects 0.000 description 1
• 238000011069 regeneration method Methods 0.000 description 1
• 238000011160 research Methods 0.000 description 1
• 239000013077 target material Substances 0.000 description 1
• 229910002070 thin film alloy Inorganic materials 0.000 description 1
• 238000002834 transmittance Methods 0.000 description 1
• WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
• 229910052721 tungsten Inorganic materials 0.000 description 1
• 239000010937 tungsten Substances 0.000 description 1
• 238000007740 vapor deposition Methods 0.000 description 1
• 239000002966 varnish Substances 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
• 238000004804 winding Methods 0.000 description 1