JPS6150758U - - Google Patents

Info

Publication number
JPS6150758U
JPS6150758U JP13522784U JP13522784U JPS6150758U JP S6150758 U JPS6150758 U JP S6150758U JP 13522784 U JP13522784 U JP 13522784U JP 13522784 U JP13522784 U JP 13522784U JP S6150758 U JPS6150758 U JP S6150758U
Authority
JP
Japan
Prior art keywords
target
film
substrate
vacuum chamber
resistant metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13522784U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0230442Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984135227U priority Critical patent/JPH0230442Y2/ja
Publication of JPS6150758U publication Critical patent/JPS6150758U/ja
Application granted granted Critical
Publication of JPH0230442Y2 publication Critical patent/JPH0230442Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1984135227U 1984-09-07 1984-09-07 Expired JPH0230442Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984135227U JPH0230442Y2 (https=) 1984-09-07 1984-09-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984135227U JPH0230442Y2 (https=) 1984-09-07 1984-09-07

Publications (2)

Publication Number Publication Date
JPS6150758U true JPS6150758U (https=) 1986-04-05
JPH0230442Y2 JPH0230442Y2 (https=) 1990-08-16

Family

ID=30693726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984135227U Expired JPH0230442Y2 (https=) 1984-09-07 1984-09-07

Country Status (1)

Country Link
JP (1) JPH0230442Y2 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5538919A (en) * 1978-09-05 1980-03-18 Nec Corp Sputtering apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5538919A (en) * 1978-09-05 1980-03-18 Nec Corp Sputtering apparatus

Also Published As

Publication number Publication date
JPH0230442Y2 (https=) 1990-08-16

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