JPS6150758U - - Google Patents
Info
- Publication number
- JPS6150758U JPS6150758U JP13522784U JP13522784U JPS6150758U JP S6150758 U JPS6150758 U JP S6150758U JP 13522784 U JP13522784 U JP 13522784U JP 13522784 U JP13522784 U JP 13522784U JP S6150758 U JPS6150758 U JP S6150758U
- Authority
- JP
- Japan
- Prior art keywords
- target
- film
- substrate
- vacuum chamber
- resistant metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 229920000728 polyester Polymers 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984135227U JPH0230442Y2 (et) | 1984-09-07 | 1984-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984135227U JPH0230442Y2 (et) | 1984-09-07 | 1984-09-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6150758U true JPS6150758U (et) | 1986-04-05 |
| JPH0230442Y2 JPH0230442Y2 (et) | 1990-08-16 |
Family
ID=30693726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984135227U Expired JPH0230442Y2 (et) | 1984-09-07 | 1984-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0230442Y2 (et) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5538919A (en) * | 1978-09-05 | 1980-03-18 | Nec Corp | Sputtering apparatus |
-
1984
- 1984-09-07 JP JP1984135227U patent/JPH0230442Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5538919A (en) * | 1978-09-05 | 1980-03-18 | Nec Corp | Sputtering apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0230442Y2 (et) | 1990-08-16 |