JPS6150652U - - Google Patents
Info
- Publication number
- JPS6150652U JPS6150652U JP1984133692U JP13369284U JPS6150652U JP S6150652 U JPS6150652 U JP S6150652U JP 1984133692 U JP1984133692 U JP 1984133692U JP 13369284 U JP13369284 U JP 13369284U JP S6150652 U JPS6150652 U JP S6150652U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- liquid
- polishing plate
- bucket
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 19
- 239000007788 liquid Substances 0.000 claims description 9
- 239000004744 fabric Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984133692U JPS6150652U (cs) | 1984-09-03 | 1984-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984133692U JPS6150652U (cs) | 1984-09-03 | 1984-09-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6150652U true JPS6150652U (cs) | 1986-04-05 |
Family
ID=30692230
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984133692U Pending JPS6150652U (cs) | 1984-09-03 | 1984-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6150652U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009214233A (ja) * | 2008-03-11 | 2009-09-24 | Ikuhiro Ikeda | 研磨装置 |
-
1984
- 1984-09-03 JP JP1984133692U patent/JPS6150652U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009214233A (ja) * | 2008-03-11 | 2009-09-24 | Ikuhiro Ikeda | 研磨装置 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH02113332U (cs) | ||
| JPS6150652U (cs) | ||
| JPS61166748U (cs) | ||
| JPS6259164U (cs) | ||
| JPS6183032U (cs) | ||
| JPS6041155U (ja) | 洗剤自動計量供給装置 | |
| JPS6343428U (cs) | ||
| JPS63193031U (cs) | ||
| JPH02132941U (cs) | ||
| JPH02117028U (cs) | ||
| JPH0245632U (cs) | ||
| JPS6030534U (ja) | ウエフア洗浄用シャワ−槽 | |
| JPH0215864U (cs) | ||
| JPH0173384U (cs) | ||
| JPS646943U (cs) | ||
| JPH0266224U (cs) | ||
| JPS6364344U (cs) | ||
| JPH0290845U (cs) | ||
| JPS6094161U (ja) | シヤワ−式洗浄機 | |
| JPS6041153U (ja) | 搾乳機用自動洗剤計量供給装置 | |
| JPS62126681U (cs) | ||
| JPS6455890U (cs) | ||
| JPH0335U (cs) | ||
| JPS5951588U (ja) | 洗剤溶解装置 | |
| JPS62189050U (cs) |