JPS6149813B2 - - Google Patents
Info
- Publication number
- JPS6149813B2 JPS6149813B2 JP2686278A JP2686278A JPS6149813B2 JP S6149813 B2 JPS6149813 B2 JP S6149813B2 JP 2686278 A JP2686278 A JP 2686278A JP 2686278 A JP2686278 A JP 2686278A JP S6149813 B2 JPS6149813 B2 JP S6149813B2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- deflection
- intensity distribution
- center
- waveform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 73
- 230000003287 optical effect Effects 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2686278A JPS54120397A (en) | 1978-03-09 | 1978-03-09 | Electron beam exposure device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2686278A JPS54120397A (en) | 1978-03-09 | 1978-03-09 | Electron beam exposure device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54120397A JPS54120397A (en) | 1979-09-18 |
JPS6149813B2 true JPS6149813B2 (hu) | 1986-10-31 |
Family
ID=12205089
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2686278A Granted JPS54120397A (en) | 1978-03-09 | 1978-03-09 | Electron beam exposure device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54120397A (hu) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01137045A (ja) * | 1987-11-19 | 1989-05-30 | Nozawa Sangyo Kk | 鉄骨構造建物の外壁の施工方法 |
JPH01122107U (hu) * | 1988-02-13 | 1989-08-18 |
-
1978
- 1978-03-09 JP JP2686278A patent/JPS54120397A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01137045A (ja) * | 1987-11-19 | 1989-05-30 | Nozawa Sangyo Kk | 鉄骨構造建物の外壁の施工方法 |
JPH01122107U (hu) * | 1988-02-13 | 1989-08-18 |
Also Published As
Publication number | Publication date |
---|---|
JPS54120397A (en) | 1979-09-18 |
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