JPS6145854B2 - - Google Patents
Info
- Publication number
- JPS6145854B2 JPS6145854B2 JP13660978A JP13660978A JPS6145854B2 JP S6145854 B2 JPS6145854 B2 JP S6145854B2 JP 13660978 A JP13660978 A JP 13660978A JP 13660978 A JP13660978 A JP 13660978A JP S6145854 B2 JPS6145854 B2 JP S6145854B2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- electron beam
- charged particle
- circuit
- deflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 13
- 239000002245 particle Substances 0.000 claims description 11
- 238000010894 electron beam technology Methods 0.000 description 22
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000000605 extraction Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13660978A JPS5563822A (en) | 1978-11-06 | 1978-11-06 | Electron beam device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13660978A JPS5563822A (en) | 1978-11-06 | 1978-11-06 | Electron beam device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5563822A JPS5563822A (en) | 1980-05-14 |
JPS6145854B2 true JPS6145854B2 (US20090163788A1-20090625-C00002.png) | 1986-10-09 |
Family
ID=15179292
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13660978A Granted JPS5563822A (en) | 1978-11-06 | 1978-11-06 | Electron beam device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5563822A (US20090163788A1-20090625-C00002.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6435957U (US20090163788A1-20090625-C00002.png) * | 1987-08-31 | 1989-03-03 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61250953A (ja) * | 1985-04-27 | 1986-11-08 | Jeol Ltd | イオンビ−ム描画装置 |
JPS622534A (ja) * | 1985-06-28 | 1987-01-08 | Nippon Telegr & Teleph Corp <Ntt> | 電子ビ−ム露光装置 |
JP2686483B2 (ja) * | 1987-12-02 | 1997-12-08 | 株式会社日立製作所 | 電子線描画露光量補正方法 |
-
1978
- 1978-11-06 JP JP13660978A patent/JPS5563822A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6435957U (US20090163788A1-20090625-C00002.png) * | 1987-08-31 | 1989-03-03 |
Also Published As
Publication number | Publication date |
---|---|
JPS5563822A (en) | 1980-05-14 |
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