JPS6145418Y2 - - Google Patents

Info

Publication number
JPS6145418Y2
JPS6145418Y2 JP19317182U JP19317182U JPS6145418Y2 JP S6145418 Y2 JPS6145418 Y2 JP S6145418Y2 JP 19317182 U JP19317182 U JP 19317182U JP 19317182 U JP19317182 U JP 19317182U JP S6145418 Y2 JPS6145418 Y2 JP S6145418Y2
Authority
JP
Japan
Prior art keywords
valve
stopper
desk
roller
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19317182U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5998164U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19317182U priority Critical patent/JPS5998164U/ja
Publication of JPS5998164U publication Critical patent/JPS5998164U/ja
Application granted granted Critical
Publication of JPS6145418Y2 publication Critical patent/JPS6145418Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
JP19317182U 1982-12-22 1982-12-22 高真空ゲ−トバルブ Granted JPS5998164U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19317182U JPS5998164U (ja) 1982-12-22 1982-12-22 高真空ゲ−トバルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19317182U JPS5998164U (ja) 1982-12-22 1982-12-22 高真空ゲ−トバルブ

Publications (2)

Publication Number Publication Date
JPS5998164U JPS5998164U (ja) 1984-07-03
JPS6145418Y2 true JPS6145418Y2 (en, 2012) 1986-12-20

Family

ID=30415530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19317182U Granted JPS5998164U (ja) 1982-12-22 1982-12-22 高真空ゲ−トバルブ

Country Status (1)

Country Link
JP (1) JPS5998164U (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2504499Y2 (ja) * 1990-07-23 1996-07-10 株式会社日本製鋼所 真空用ゲ―トバルブ

Also Published As

Publication number Publication date
JPS5998164U (ja) 1984-07-03

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