JPS6144832U - Quartz fork support mechanism for wafer insertion - Google Patents
Quartz fork support mechanism for wafer insertionInfo
- Publication number
- JPS6144832U JPS6144832U JP12759984U JP12759984U JPS6144832U JP S6144832 U JPS6144832 U JP S6144832U JP 12759984 U JP12759984 U JP 12759984U JP 12759984 U JP12759984 U JP 12759984U JP S6144832 U JPS6144832 U JP S6144832U
- Authority
- JP
- Japan
- Prior art keywords
- fork support
- quartz fork
- support mechanism
- quartz
- cartridge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図ａは本考案に係る石英フォーク支持台および其の
近傍の関係部材を示す図、第１図ｂは石英フォークが支
持台に取付けられた状態を石英フォークの先端から見た
図、第２図は石英フォークにカートリッジを載置した状
態を示す図、第３図は半導体ウエハを搭載したカートリ
ッジを、石英フォークに載置して炉芯管内に挿入中の状
態を炉芯管の管軸方向から見た図である。
１・・・・・・石英フォーク、２・・・・・・炉芯管、
３・・曲力ートリツジ、４・・・・・・ウェハ、５・・
曲取付け部、６・・・・・・本考案に係る石英フォーク
支持台、７・・曲石英フォーク固定バンド、８・・・・
・・取付け部側に固定されフォーク支持台側の孔と隙間
なく嵌合してぃる位置決めピン兼用のロックねじ、９・
・・・・・フォーク支持台側の長九と係合している位置
決めピン兼用の位置調整用偏芯ピン、１０・曲・取付け
部の馬鹿孔を通過しフォーク支持台のねじ孔に係合して
いるロツクねじ、１１・・曲適当な厚さのものを選択し
て用いるスペーサ、１２・・曲フォーク支持台を締め付
け固定するロックナット、１３・・・・・・フォーク支
持台の取手。FIG. 1a is a diagram showing the quartz fork support base and related parts in the vicinity according to the present invention, FIG. Figure 2 shows the cartridge mounted on the quartz fork, and Figure 3 shows the cartridge with a semiconductor wafer mounted on the quartz fork and inserted into the furnace core tube. It is a figure seen from the direction. 1...quartz fork, 2...furnace core tube,
3...bending force, 4... wafer, 5...
Curved mounting portion, 6... Quartz fork support base according to the present invention, 7... Curved quartz fork fixing band, 8...
・Lock screw that doubles as a positioning pin that is fixed to the mounting part and fits tightly into the hole on the fork support side, 9.
・・・・・・Eccentric pin for position adjustment that also serves as a positioning pin that engages with the long 9 on the fork support side, 10, curved, passes through the hole in the mounting part and engages with the screw hole on the fork support 11. A spacer of an appropriate thickness for the curve, 12. A lock nut for tightening and fixing the curved fork support, 13. A handle for the fork support.
Claims (1)
体ウエハを、他物に接触することなく挿入し、炉芯管内
壁面にカートリッジごとソフトランデイングさせる装置
のカートリッジ載置挿入用石英フォークを、高精度に加
工され位置姿勢調整および位置形め手段を備えた石英フ
ォーク支持台を介して、ソフトランデイング装置の取付
け部に支持させるようにしたことを特徴とするウェハ挿
入用石英フォーク支持機構。A quartz fork for placing and inserting a cartridge into a device that inserts semiconductor wafers aligned and mounted in a cartridge into the core tube of a heat treatment furnace without contacting other objects, and softly lands the entire cartridge on the inner wall surface of the furnace core tube with high precision. A quartz fork support mechanism for wafer insertion, characterized in that the quartz fork support mechanism is supported by a mounting portion of a soft landing device via a processed quartz fork support base equipped with position/orientation adjustment and position shaping means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12759984U JPS6144832U (en) | 1984-08-24 | 1984-08-24 | Quartz fork support mechanism for wafer insertion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12759984U JPS6144832U (en) | 1984-08-24 | 1984-08-24 | Quartz fork support mechanism for wafer insertion |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6144832U true JPS6144832U (en) | 1986-03-25 |
| JPH0142341Y2 JPH0142341Y2 (en) | 1989-12-12 |
Family
ID=30686241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12759984U Granted JPS6144832U (en) | 1984-08-24 | 1984-08-24 | Quartz fork support mechanism for wafer insertion |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6144832U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5636129A (en) * | 1979-08-31 | 1981-04-09 | Hitachi Ltd | Method and device for heat treatment of semiconductor thin plate |
| JPS5645020A (en) * | 1979-09-21 | 1981-04-24 | Hitachi Ltd | Boat loader |
| JPS57170523A (en) * | 1981-04-15 | 1982-10-20 | Kokusai Electric Co Ltd | Conveying method for wafer boat |
-
1984
- 1984-08-24 JP JP12759984U patent/JPS6144832U/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5636129A (en) * | 1979-08-31 | 1981-04-09 | Hitachi Ltd | Method and device for heat treatment of semiconductor thin plate |
| JPS5645020A (en) * | 1979-09-21 | 1981-04-24 | Hitachi Ltd | Boat loader |
| JPS57170523A (en) * | 1981-04-15 | 1982-10-20 | Kokusai Electric Co Ltd | Conveying method for wafer boat |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0142341Y2 (en) | 1989-12-12 |
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