JPS6142284A - Displacement increasing device - Google Patents

Displacement increasing device

Info

Publication number
JPS6142284A
JPS6142284A JP16414884A JP16414884A JPS6142284A JP S6142284 A JPS6142284 A JP S6142284A JP 16414884 A JP16414884 A JP 16414884A JP 16414884 A JP16414884 A JP 16414884A JP S6142284 A JPS6142284 A JP S6142284A
Authority
JP
Japan
Prior art keywords
piezoelectric element
displacement
point
spring member
laminated piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16414884A
Other languages
Japanese (ja)
Inventor
Masato Hayashi
正人 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Original Assignee
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Semiconductor Manufacturing Co Ltd, Kansai Nippon Electric Co Ltd filed Critical Renesas Semiconductor Manufacturing Co Ltd
Priority to JP16414884A priority Critical patent/JPS6142284A/en
Publication of JPS6142284A publication Critical patent/JPS6142284A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04Constructional details
    • H02N2/043Mechanical transmission means, e.g. for stroke amplification

Landscapes

  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To simplify and reduce the size by surrounding two laminated piezoelectric elements by substantially elliptical cylindrical spring member, and using one point of short axis of the member as a displacing movable point. CONSTITUTION:Two laminated piezoelectric elements 10a, 10b are connected integrally in series to form a square rod-shaped laminated piezoelectric element 10 utilizing voltage longitudinal effect, and the element 10 is surrounded by elliptical-sectional or rhombic substantially elliptical cylindrical spring member 12. The opposed two points of the long axis of the member 12 are secured by means 14, one point of short axis direction is secured by securing means 13, and the other point of the short axis is used as movable point. When the element 10 elongates or contract longitudinally, the elongation is enlarged to prevent at the movable point.

Description

【発明の詳細な説明】 瓜二上勿且里豆丘 この発明はVTR装置のトラッキング補正装置などに用
いられる変位拡大装置で、詳し、くけ印加電圧の大きさ
に応じて伸縮量が変化する圧電素子の変位拡大装置に関
する。
[Detailed Description of the Invention] This invention relates to a displacement magnifying device used in a tracking correction device of a VTR device, etc. The present invention relates to an element displacement magnifying device.

一芝求曳弦■ 例えば回転ヘッド型VTR装置は第6図に示すように磁
気テープ(1)の走行方向に対し回転軸を傾斜させて配
置された回転シリンダ(2)の外周に部分的に磁気ヘッ
ド(3)を取(−1け、回転シリンダ(2)を定速回転
させて走行する磁気テープ(1)に設けられた第7図に
示すような斜め方向の記憶トランク(4)(4)−上に
磁気ヘッド(3)を順次に走査さセて記録の再生を行っ
ている。このVTR装置で磁気テープ(1)走行速度を
2倍、3倍と速くしてピクチャーサーチを行う場合、回
転シリンダ(2)は定速回転するので、そのままでは磁
気ヘッド(3)は第7図点線で示すように記録トランク
(4)(4L−−一上を正確に走査せず位置ずれ走査し
てノイズを発生し、再生画像の乱れ等を招く。そこでピ
クチャーサーチを行う場合には、磁気ヘッド(3)を上
記位置ずれを補正する方向に動かすトラッキング調整を
行っている。
For example, as shown in Figure 6, a rotary head type VTR device has a rotary head partially attached to the outer periphery of a rotary cylinder (2) arranged with its rotary axis inclined with respect to the running direction of the magnetic tape (1). Take the magnetic head (3) (-1) and insert the diagonal storage trunk (4) as shown in Figure 7, which is provided on the magnetic tape (1) that runs by rotating the rotary cylinder (2) at a constant speed. 4) - The recording is played back by sequentially scanning the magnetic head (3) above.In this VTR device, the running speed of the magnetic tape (1) is doubled or tripled to perform a picture search. In this case, since the rotary cylinder (2) rotates at a constant speed, the magnetic head (3) will not accurately scan over the recording trunk (4) (4L) as shown by the dotted line in FIG. This generates noise and causes disturbances in reproduced images. Therefore, when performing a picture search, tracking adjustment is performed to move the magnetic head (3) in a direction that corrects the positional deviation.

上記トラッキング補正を行うには8倍速で再生した場合
磁気ヘッドを最大400μm程度変位させる必要があり
、このような補正を行う装置としては圧電横効果を利用
したバイモルフ型圧電素子(圧電セラミック素子)が一
般に使用されている。これは第8図に示すように長尺な
上述バイモルフ型圧電素−f(5)の一端を固定台(6
)に固定し、他端上に磁気ヘッド(3)を固定したもの
で、圧電素子(5)に電圧を印加すると圧電素子(5)
が固定台(6)を支点に反ってM端側の磁気ヘッド(3
)の位置が変位する。この変位量は印加する電圧の大き
さに応じるもので、磁気ヘッド(3)を400μm程度
変位させるには約500■の電圧が必要とされている。
In order to perform the tracking correction described above, it is necessary to displace the magnetic head by a maximum of about 400 μm when playing at 8x speed, and a bimorph type piezoelectric element (piezoelectric ceramic element) that uses piezoelectric transverse effect is used as a device to perform such correction. Commonly used. As shown in FIG. 8, one end of the long bimorph piezoelectric element-f(5) is fixed to
), and a magnetic head (3) is fixed on the other end, and when a voltage is applied to the piezoelectric element (5), the piezoelectric element (5)
The magnetic head (3) on the M end side bends around the fixed base (6) as a fulcrum.
) is displaced. The amount of displacement depends on the magnitude of the applied voltage, and approximately 500 μm of voltage is required to displace the magnetic head (3) by approximately 400 μm.

ところが、このようなバイモルフ型電圧素子は構造が簡
単な利点を有するが、駆動電圧が最大500v程度と高
く、また駆動の繰り返しで歪みがM積されてヒ;(テリ
シスが大きくなり、そのため同し、印加電圧で同じ変位
量が得られなくなる問題があった。
However, although such a bimorph type voltage element has the advantage of a simple structure, the driving voltage is as high as 500 V at maximum, and distortion is multiplied by M due to repeated driving. , there was a problem that the same amount of displacement could not be obtained with the applied voltage.

上記問題点を解決するものとして、バイモルフ型圧電素
子の代りに圧電縦効果を利用した積層型圧電1子を磁気
へラドの変位源に利用したものがある。この積層型圧電
素子は駆動電圧が低く、歪みはほとんど蓋積されないが
、積層型圧電素子自体の変位量は最大で約10μ…と小
さくて変位量の拡大装置を付設しなければVTR装置の
トラッキング補正に利用できない。
As a solution to the above-mentioned problems, there is a method in which a laminated piezoelectric single element utilizing a piezoelectric longitudinal effect is used as a displacement source of a magnetic herad instead of a bimorph piezoelectric element. The drive voltage of this laminated piezoelectric element is low, and there is almost no distortion, but the amount of displacement of the laminated piezoelectric element itself is small, about 10 μ at maximum, and tracking of VTR equipment is required unless a displacement magnifying device is attached. Cannot be used for correction.

上記積層型圧電素子の変位拡大装置として例えば第9図
に示すものがある。この第9図における(7)は圧電縦
効果を利用した積層型圧電(セラミック)素子、(8)
は変位拡大装置で、両端が圧電素子(7)の縦方向の両
端A、Bに固定された山形の板状座屈バネ(9)で構成
される。この座屈バネ(9)の山形頂部に相当する中央
部上に磁気ヘッド(3)が固定される。
For example, there is a device shown in FIG. 9 as a displacement magnifying device for the laminated piezoelectric element. In this Figure 9, (7) is a laminated piezoelectric (ceramic) element that utilizes the piezoelectric longitudinal effect, and (8)
is a displacement amplifying device, which is composed of a chevron-shaped plate-shaped buckling spring (9) whose both ends are fixed to both vertical ends A and B of a piezoelectric element (7). A magnetic head (3) is fixed on the center portion of the buckling spring (9), which corresponds to the chevron-shaped top.

圧電素子(7)は回転シリンダ(2)に縦方向伸縮自在
に取付けられ、圧電素子(7)に電圧を印加すると両端
A、Bが縦方向に動き、この動きで座屈バネ(9)の両
端が開く方向に動き、この動きは拡大されて座屈バネ(
9)の中央部の板厚方向の動きに伝達され、磁気ヘッド
(3)を動かす。
The piezoelectric element (7) is attached to the rotating cylinder (2) so that it can be expanded and contracted in the vertical direction, and when a voltage is applied to the piezoelectric element (7), both ends A and B move in the vertical direction, and this movement causes the buckling spring (9) to move. Both ends move in the direction of opening, and this movement is magnified to create a buckling spring (
9) in the thickness direction of the plate, which moves the magnetic head (3).

ベ  しよ゛と る  点 上記変位拡大装置(8)は積層型圧電素子(7)の利点
を生かすものとして有望視されているが、変位拡大率が
低くて、実際にVTR装置のトラッキング補正装置に使
用する場合は圧電素子(7)と座屈バネ(9)の間に、
てこの原理で圧電素子(7)の変位を拡大して座屈バネ
(9)に伝達する別の変位拡大機構を装着する必要があ
って、装置全体が大型化、複雑化する問題を含んでいた
Points to consider The displacement magnification device (8) described above is seen as promising as a device that takes advantage of the advantages of the laminated piezoelectric element (7), but its displacement magnification rate is low and it is actually used in tracking correction devices of VTR devices. When using the piezoelectric element (7) and the buckling spring (9),
It is necessary to install another displacement amplification mechanism that uses the lever principle to amplify the displacement of the piezoelectric element (7) and transmit it to the buckling spring (9), which causes the problem that the entire device becomes larger and more complicated. there was.

門意、を解決jA太泣豊手段 本発明は上記変位拡大装置の問題点に鑑みてなされたも
ので、この問題点を解決する本発明の技術的手段は圧電
縦効果を利用した積層型圧電素子の縦方向両端に長軸方
向の対向2点が固定されて圧電素子を囲む断面楕円形若
しくは菱形の略楕円状筒形バネ部材と、このバネ部材の
端軸方向の2点の一方を固定する固定手段とで構成し、
前記バネ材の短軸方向の他の一点を変位する遊点として
、ここに磁気ヘッドなどの変位体を装着することである
The present invention has been made in view of the above-mentioned problems with the displacement magnifying device, and the technical means of the present invention to solve these problems is a multilayer piezoelectric device that utilizes the piezoelectric longitudinal effect. A generally elliptical cylindrical spring member with an elliptical or diamond-shaped cross section that surrounds the piezoelectric element with two opposing points in the long axis direction fixed at both ends of the element in the longitudinal direction, and one of the two points in the end axis direction of this spring member is fixed. and a fixing means for
Another point in the short axis direction of the spring material is to be used as a free point for displacing a displacement body such as a magnetic head.

作朋 上記積層型圧電素子が電圧印加で伸縮すると、この伸縮
変位量はバネ材の短軸方向の2点に各々に拡大されて伝
達されて2点を動かそうとするが、この2点の内の1点
は固定されているので残り1点のみが2点に伝達される
動きの拡大率の2倍の拡大率でもって動き、従来品に無
い拡大率の大なる変位拡大装置が提供できる。
When the laminated piezoelectric element described above expands and contracts by applying a voltage, the amount of this expansion and contraction displacement is magnified and transmitted to two points in the short axis direction of the spring material, and attempts to move the two points. Since one of the points is fixed, only the remaining one moves with a magnification rate that is twice the magnification rate of the movement transmitted to the two points, making it possible to provide a displacement magnification device with a large magnification rate not found in conventional products. .

実流朋 本発明の基本的実施例を第1図及び第2図を基づき説明
すると、(10)は電圧縦効果を利用した1本の角棒状
積層型圧電素子で、図面では2つの積層型圧電素子(1
0a )、(10b )を直列に連結一体化ししたもの
を示す。(11)は本発明による変位拡大装置で、1つ
の無端帯状で断面が略楕円状の筒形バネ部材(12)と
、バネ部材(12)の端軸方向の2点p、、 、P4の
内の1点P3を固定する固定手段(13)で構成される
A basic embodiment of the present invention will be explained based on FIGS. 1 and 2. (10) is one rectangular bar-shaped laminated piezoelectric element that utilizes the longitudinal voltage effect, and in the drawing, two laminated piezoelectric elements are shown. Piezoelectric element (1
0a) and (10b) are connected and integrated in series. (11) is a displacement magnifying device according to the present invention, which includes one endless band-shaped cylindrical spring member (12) with a substantially elliptical cross section, and two points p, , P4 in the end axis direction of the spring member (12). It is comprised of a fixing means (13) for fixing one point P3 within.

バネ部材(12)は長軸方向の対向の2点p。The spring member (12) has two opposing points p in the longitudinal direction.

、P2が圧電素子(10)の両端A°、B′にロウ材な
どの固定部材(14)、(14)で固定されて圧電素子
(10)を収容し囲うもので、短軸方向の2点P3 、
p4の内の非固定側の内の】点p 4上が変位体装置位
置で、ここに例えば磁気ヘッド(3)が固足さ、れて、
この変位拡大装置(11)はV TR装置のトランキン
グ補正に用いられ、次の動作を行う。
, P2 are fixed to both ends A° and B' of the piezoelectric element (10) with fixing members (14), (14) such as brazing material to house and surround the piezoelectric element (10), and 2 in the short axis direction. Point P3,
Point p4 on the non-fixed side of p4 is the position of the displacement body device, and for example, a magnetic head (3) is fixed here,
This displacement magnifying device (11) is used for trunking correction of the VTR device, and performs the following operations.

バネ部材(12)の固定点P3は固定手段(13)を介
してV T’ R装置の回転シリンダに固定される。而
して、圧電素子(10)に電圧を印加すると圧電素子(
10)は縦方向に伸び、この全体の伸び足を2αとする
と圧電素子(10)は第3図の実線に示すように両端A
”、B”が共にαず一つ伸びる。ここでいまPlと23
間、P3と1)2間、P2と24間、P4とPl間の長
さが夫々同一で一定と考えると、第4図に示すように圧
電素子(10)の伸び量(変位量)2αに応じた変位量
βで圧電素子(10)が点P3側に寄る。この変位量β
はαより大きく、この拡大原理は第9図の変位拡大装置
の拡大原理と同じである。
The fixing point P3 of the spring member (12) is fixed to the rotating cylinder of the V T'R device via fixing means (13). Thus, when a voltage is applied to the piezoelectric element (10), the piezoelectric element (10)
10) extends in the vertical direction, and if the total length of this extension is 2α, the piezoelectric element (10) has both ends A as shown by the solid line in Fig. 3.
``, B'' are both extended by α. Here now Pl and 23
Assuming that the lengths between P3 and 1)2, between P2 and 24, and between P4 and Pl are the same and constant, the amount of elongation (displacement) 2α of the piezoelectric element (10) as shown in FIG. The piezoelectric element (10) moves toward the point P3 with a displacement amount β corresponding to . This displacement amount β
is larger than α, and this expansion principle is the same as that of the displacement expansion device shown in FIG.

一方、バネ部材(12)の磁気ヘッド(3)が固定され
た遊点P4も圧電素子(10)の伸び量2αに応じて同
じ変位量βで変位するが、点P4の場合は圧電素子(1
0)自体がβだけ変位しているので結果的に2βだけ変
位する。従って、本発明品は第9図の従来品に比べ同じ
駆動電圧で磁気ヘッド(3)を2倍の拡大率で変位させ
ることができ、また第9図の従来品と同じ変位で磁気ヘ
ッド(3)を動かす場合はrgA?電圧を少くすること
ができる。
On the other hand, the free point P4 to which the magnetic head (3) of the spring member (12) is fixed is also displaced by the same displacement amount β according to the elongation amount 2α of the piezoelectric element (10), but in the case of point P4, the piezoelectric element ( 1
0) itself has been displaced by β, resulting in a displacement of 2β. Therefore, compared to the conventional product shown in FIG. 9, the product of the present invention can displace the magnetic head (3) at twice the magnification rate with the same driving voltage, and can also displace the magnetic head (3) with the same displacement as the conventional product shown in FIG. 3) If you want to move rgA? The voltage can be reduced.

尚、本発明はVTR装置のトラッキング補正用の変位拡
大装置に限らず使用でき、通用装置によってけバネ部材
(12)に真円形のものを使用し、でもよい。また尚更
大の拡大率を必要とする場合は例えば第5図に示すよう
に、バネ部材(12)の芦点P4に長尺な硬質平板(1
5)をその中心より外れた一中、P5で固定し、平板(
15)の!!3.P5に近い方の一端を固定台(16)
に固定し、点P5より遠い方の遊端上に磁気ヘッド等の
変位体(17)を固定する。するとバネ部材(12)の
点P4の変位にて平板(15)が固定台(16〉を支点
に揺動し、てこの原理で点P4の変位が尚更に拡大され
て変位体(17)に伝達される。
Incidentally, the present invention can be used not only as a displacement magnifying device for tracking correction of a VTR device, but also a perfectly circular spring member (12) may be used in accordance with a general-purpose device. If an even larger magnification is required, for example, as shown in FIG.
5) is fixed with P5 at the center of the plate (
15)! ! 3. Fix one end near P5 to the fixing base (16)
A displacement body (17) such as a magnetic head is fixed on the free end farther from point P5. Then, due to the displacement of the point P4 of the spring member (12), the flat plate (15) swings around the fixed base (16>), and the displacement of the point P4 is further expanded by the lever principle, and the displacement body (17) communicated.

溌訓μJ九里 本発明によれば略楕円形断面の筒形バネ部材内に圧電素
子を収納固定するだけの小形で簡単な構造で圧電素子の
変位を十分実用に値する拡大率で拡大し得る装置かiI
2供でき、特にVTR装置のトランキング補正装置にお
いて実施効果大なるものが提供できる。
According to the present invention, there is provided a device capable of magnifying the displacement of a piezoelectric element at a sufficiently practical magnification ratio with a small and simple structure in which a piezoelectric element is housed and fixed within a cylindrical spring member having a substantially elliptical cross section. kaii
In particular, it is possible to provide a trunking correction device for a VTR device with great implementation effects.

【図面の簡単な説明】 第1図及び第2図は本発明の一実施例を示す正面図及び
平面図、第3図は第1図装置の動作時の正面図、第4図
は第3図の動作を説明するための動作原理図、第5図は
本発明の応用例を示す斜視図Cある。第6図は回転ヘッ
ド型V ’FR装置の要部概略斜視図、第7図は第6図
の磁気テープ上の記憶トランク概略図、第8図及び第9
図は従来の変位拡大装置の二側を示す各概略正面図であ
る。 (10)−m−積層型圧電素子、(11)  変位拡大
装置、(12)−バネ部材、(1,3)−固定手段。 江   原       秀 。 ・、、′ 1圓ij:、l・−
[Brief Description of the Drawings] Figures 1 and 2 are a front view and a plan view showing an embodiment of the present invention, Figure 3 is a front view of the device in Figure 1 during operation, and Figure 4 is a FIG. 5 is a perspective view C showing an application example of the present invention. FIG. 6 is a schematic perspective view of the main parts of the rotating head type V'FR device, FIG. 7 is a schematic diagram of the storage trunk on the magnetic tape in FIG. 6, and FIGS.
The figures are schematic front views showing two sides of a conventional displacement amplifying device. (10)-m-Laminated piezoelectric element, (11) Displacement magnifying device, (12)-Spring member, (1,3)-Fixing means. Hide Ehara.・,,′ 1 circle ij:,l・−

Claims (1)

【特許請求の範囲】[Claims] (1)縦効果を利用する積層型圧電素子、この圧電素子
を略楕円状断面の長軸方向に沿って収容する筒形バネ部
材、及びこのバネ部材をその短軸方向に沿った所定位置
で固定する固定手段を具備したことを特徴とする変位拡
大装置。
(1) A laminated piezoelectric element that utilizes a longitudinal effect, a cylindrical spring member that accommodates this piezoelectric element along the major axis direction of a substantially elliptical cross section, and a cylindrical spring member that accommodates this piezoelectric element at a predetermined position along the minor axis direction. A displacement magnifying device characterized by comprising a fixing means for fixing.
JP16414884A 1984-08-03 1984-08-03 Displacement increasing device Pending JPS6142284A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16414884A JPS6142284A (en) 1984-08-03 1984-08-03 Displacement increasing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16414884A JPS6142284A (en) 1984-08-03 1984-08-03 Displacement increasing device

Publications (1)

Publication Number Publication Date
JPS6142284A true JPS6142284A (en) 1986-02-28

Family

ID=15787654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16414884A Pending JPS6142284A (en) 1984-08-03 1984-08-03 Displacement increasing device

Country Status (1)

Country Link
JP (1) JPS6142284A (en)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63277955A (en) * 1987-05-09 1988-11-15 Ngk Spark Plug Co Ltd Displacement expansion driving device
JPH01318564A (en) * 1988-06-20 1989-12-25 Omron Tateisi Electron Co Ultrasonic motor
JPH06310771A (en) * 1993-04-22 1994-11-04 Nec Corp Displacement amplifying mechanism for piezoelectric element and driving method therefor
FR2740276A1 (en) * 1995-10-20 1997-04-25 Cedrat Rech AMPLIFIED HIGH RAISEUR PIEZOACTIVE ACTUATOR
GB2378574A (en) * 2001-06-15 2003-02-12 Legrand Sa Freely resonating piezoelectric power generating apparatus
JP2008526416A (en) * 2005-01-13 2008-07-24 センティエント メディカル リミテッド Hearing implant
JP2009038901A (en) * 2007-08-01 2009-02-19 Toshiba Corp Piezoelectric motor, and camera device
US7506967B2 (en) 2005-03-11 2009-03-24 Samsung Electro-Mechanics Co., Ltd Ink jet head having an electrostatic actuator, ink cartridge, and inkjet printer
JP2014204618A (en) * 2013-04-08 2014-10-27 樋口 俊郎 Electromagnetic actuator
US8920496B2 (en) 2007-03-03 2014-12-30 Sentient Medical Limited Ossicular replacement prosthesis
JP2015101102A (en) * 2013-11-21 2015-06-04 ゼロックス コーポレイションXerox Corporation Dynamic adjustable focus for led writing bar using piezoelectric stack
US9417017B2 (en) 2012-03-20 2016-08-16 Thermal Corp. Heat transfer apparatus and method
CN108322086A (en) * 2018-01-09 2018-07-24 长春理工大学 Piezoelectric vibrator
JP2019213401A (en) * 2018-06-07 2019-12-12 パナソニックIpマネジメント株式会社 Vibration type actuator and personal care device
EP2936575B1 (en) * 2012-12-20 2020-11-04 Dav Piezoelectric actuator and associated fabrication process
JP2021145507A (en) * 2020-03-13 2021-09-24 翔栄システム株式会社 Piezo stage

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63277955A (en) * 1987-05-09 1988-11-15 Ngk Spark Plug Co Ltd Displacement expansion driving device
JPH01318564A (en) * 1988-06-20 1989-12-25 Omron Tateisi Electron Co Ultrasonic motor
JPH06310771A (en) * 1993-04-22 1994-11-04 Nec Corp Displacement amplifying mechanism for piezoelectric element and driving method therefor
FR2740276A1 (en) * 1995-10-20 1997-04-25 Cedrat Rech AMPLIFIED HIGH RAISEUR PIEZOACTIVE ACTUATOR
GB2378574A (en) * 2001-06-15 2003-02-12 Legrand Sa Freely resonating piezoelectric power generating apparatus
GB2378574B (en) * 2001-06-15 2004-09-22 Legrand Sa Improvements in and relating to piezo-active devices
US6936953B2 (en) 2001-06-15 2005-08-30 Legrand Use of a piezo-active device and an appliance and a system including it
JP2008526416A (en) * 2005-01-13 2008-07-24 センティエント メディカル リミテッド Hearing implant
US8864645B2 (en) 2005-01-13 2014-10-21 Sentient Medical Limited Hearing implant
US7910010B2 (en) 2005-03-11 2011-03-22 Samsung Electro-Mechanics Co., Ltd. Ink jet head having an electrostatic actuator and manufacturing method of the same
US7506967B2 (en) 2005-03-11 2009-03-24 Samsung Electro-Mechanics Co., Ltd Ink jet head having an electrostatic actuator, ink cartridge, and inkjet printer
US8920496B2 (en) 2007-03-03 2014-12-30 Sentient Medical Limited Ossicular replacement prosthesis
JP2009038901A (en) * 2007-08-01 2009-02-19 Toshiba Corp Piezoelectric motor, and camera device
US9417017B2 (en) 2012-03-20 2016-08-16 Thermal Corp. Heat transfer apparatus and method
EP2936575B1 (en) * 2012-12-20 2020-11-04 Dav Piezoelectric actuator and associated fabrication process
JP2014204618A (en) * 2013-04-08 2014-10-27 樋口 俊郎 Electromagnetic actuator
JP2015101102A (en) * 2013-11-21 2015-06-04 ゼロックス コーポレイションXerox Corporation Dynamic adjustable focus for led writing bar using piezoelectric stack
CN108322086A (en) * 2018-01-09 2018-07-24 长春理工大学 Piezoelectric vibrator
JP2019213401A (en) * 2018-06-07 2019-12-12 パナソニックIpマネジメント株式会社 Vibration type actuator and personal care device
JP2021145507A (en) * 2020-03-13 2021-09-24 翔栄システム株式会社 Piezo stage

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