JPH0150193B2 - - Google Patents

Info

Publication number
JPH0150193B2
JPH0150193B2 JP60128887A JP12888785A JPH0150193B2 JP H0150193 B2 JPH0150193 B2 JP H0150193B2 JP 60128887 A JP60128887 A JP 60128887A JP 12888785 A JP12888785 A JP 12888785A JP H0150193 B2 JPH0150193 B2 JP H0150193B2
Authority
JP
Japan
Prior art keywords
displacement
laminated piezoelectric
metal plate
buckling spring
thermal expansion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60128887A
Other languages
Japanese (ja)
Other versions
JPS61288782A (en
Inventor
Shigeaki Ookubo
Masato Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kansai Nippon Electric Co Ltd
Original Assignee
Kansai Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kansai Nippon Electric Co Ltd filed Critical Kansai Nippon Electric Co Ltd
Priority to JP60128887A priority Critical patent/JPS61288782A/en
Publication of JPS61288782A publication Critical patent/JPS61288782A/en
Publication of JPH0150193B2 publication Critical patent/JPH0150193B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04Constructional details
    • H02N2/043Mechanical transmission means, e.g. for stroke amplification

Landscapes

  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Description

【発明の詳細な説明】 産業上の利用分野 本発明は変位拡大装置に関し、詳しくはVTR
装置のトラツキング補正用磁気ヘツドのアクチユ
エータに好適な変位拡大装置に関すものである。
[Detailed Description of the Invention] Industrial Application Field The present invention relates to a displacement magnifying device, and more particularly, to a VTR.
The present invention relates to a displacement magnifying device suitable for an actuator of a magnetic head for tracking correction of an apparatus.

従来の技術 一般にVTR装置では、第3図及び第4図に示
すように磁気テープ1の走行方向に対し回転軸を
若干傾斜させて配置された回転シリンダ2の周縁
の180゜の対称位置に記録・再生用の磁気ヘツド3
a,3bを取付け、第5図に示すように上記回転
シリンダ2を定速回転させて走行する磁気テープ
1に所定角度傾斜して設けられた記録トラツク
A1、B1、A2、B2、…上に、上記磁気ヘツド3
a,3bを交互に走査させて記録・再生を行つて
いる。
BACKGROUND ART In general, in a VTR device, as shown in FIGS. 3 and 4, recording is performed at 180° symmetrical positions on the periphery of a rotary cylinder 2, which is arranged with its rotation axis slightly inclined with respect to the running direction of the magnetic tape 1.・Magnetic head 3 for playback
A and 3b are attached to the recording track, which is inclined at a predetermined angle on the magnetic tape 1 which runs by rotating the rotary cylinder 2 at a constant speed as shown in FIG.
A 1 , B 1 , A 2 , B 2 , ... Above the magnetic head 3
A and 3b are scanned alternately to perform recording and reproduction.

上記VTR装置では、スロー、スピードサーチ
等の可変速特殊再生機能を有するのが一般的であ
り、例えばスロー再生時には、磁気テープ1の走
行速度を遅くして磁気ヘツド3a,3bで1つの
記録トラツクをn回ずつ読み取るように送査する
ことにより1/nのスピードで再生する。またス
ピードサーチ時には、上記磁気テープ1の走行速
度を早くして磁気ヘツド3a,3bで(n−1)
個の記録トラツクを跳ばして走査することにより
n倍のスピードで再生する。ところで、この特殊
再生時、上記VTR装置の回転シリンダ2が定速
回転するので、磁気ヘツド3a,3bが記録トラ
ツク上を正確に走査せず再生画像にノイズバンド
が発生する。
The above-mentioned VTR devices generally have variable speed special playback functions such as slow playback and speed search. For example, during slow playback, the running speed of the magnetic tape 1 is slowed down so that the magnetic heads 3a and 3b can play one recording track. The data is transmitted at a speed of 1/n by being read n times at a time. In addition, during the speed search, the running speed of the magnetic tape 1 is increased and the magnetic heads 3a and 3b are moved to (n-1).
By skipping and scanning the recording tracks, reproduction is performed at n times the speed. By the way, during this special reproduction, since the rotating cylinder 2 of the VTR device rotates at a constant speed, the magnetic heads 3a and 3b do not accurately scan the recording track, resulting in noise bands in the reproduced image.

そこで上記磁気ヘツド3a,3bのトラツク外
れによるノイズ発生を防止するために、可変速特
殊再生時に磁気ヘツド3a,3bを、上記トラツ
ク外れを補正する方向に所定量変位させて記録ト
ラツクに追従させるトラツキング補正を必要とす
る。
Therefore, in order to prevent the generation of noise due to the magnetic heads 3a, 3b being off track, tracking is performed in which the magnetic heads 3a, 3b are displaced by a predetermined amount in a direction that corrects the above track deviation during variable speed special playback to follow the recording track. Requires correction.

このトラツキング補正をするための磁気ヘツド
3a,3bのアクチユエータとして本出願人は、
先に積層型圧電体を利用した変位拡大装置を出願
している(特願昭59−93470号及び特願昭59−
164148号)。この変位拡大装置は、印加電圧に応
じて伸縮変形する積層型圧電体と、該積層型圧電
体に連結された金属板及び座屈バネとからなり、
この座屈バネに上記磁気ヘツド3a,3bが装着
されている。上記変位拡大装置を介して回転シリ
ンダ2の所定位置に取付けられた磁気ヘツド3
a,3bは、特殊再生時、変位拡大装置の積層型
圧電体に印加された電圧値に応じ、該積層型圧電
体を伸縮変形させると共に、その積層型圧電体の
変形を前記金属板及び座屈バネにて拡大すること
により、トラツク外れを補正する方向に所定量変
位されて記録トラツクに追従する。
As an actuator for the magnetic heads 3a and 3b for this tracking correction, the applicant has
We have previously applied for a displacement magnification device using a laminated piezoelectric material (Japanese Patent Application No. 1983-93470 and Japanese Patent Application No. 1983-
No. 164148). This displacement magnifying device consists of a laminated piezoelectric material that expands and deforms in accordance with applied voltage, a metal plate and a buckling spring connected to the laminated piezoelectric material,
The magnetic heads 3a, 3b are attached to this buckling spring. The magnetic head 3 is attached to a predetermined position of the rotating cylinder 2 via the displacement magnifying device.
a and 3b expand and contract the laminated piezoelectric body according to the voltage value applied to the laminated piezoelectric body of the displacement magnifying device during special reproduction, and the deformation of the laminated piezoelectric body is caused by the metal plate and the seat. By expanding with a bending spring, it is displaced by a predetermined amount in a direction that corrects for off-track, and follows the recording track.

発明が解決しようとする問題点 上記変位拡大装置は、上述したように積層型圧
電体、金属板及び座屈バネの3種の異なつた素材
から構成されているため、各素材についてその温
度特性も異なり使用温度範囲が限定される。即
ち、上記積層型圧電体、金属板及び座屈バネの各
素材の熱膨張係数が異なるため、VTR装置の使
用時における温度上昇によつて上記3者が熱膨張
変形し、各素材の変形量が相乗されて変位拡大装
置に装着された磁気ヘツドが、磁気テープの記録
トラツク幅以上に変位してしまうことがある。こ
の場合、特殊再生時におけるトラツキング補正で
上記磁気ヘツドを初期位置に設定することが困難
になる。
Problems to be Solved by the Invention As mentioned above, the displacement magnifying device is composed of three different materials: a laminated piezoelectric material, a metal plate, and a buckling spring, so the temperature characteristics of each material also differ. However, the operating temperature range is limited. In other words, since the thermal expansion coefficients of the laminated piezoelectric body, metal plate, and buckling spring are different, the three materials undergo thermal expansion and deformation due to the temperature rise during use of the VTR device, and the amount of deformation of each material changes. As a result, the magnetic head attached to the displacement magnifying device may be displaced by more than the recording track width of the magnetic tape. In this case, it becomes difficult to set the magnetic head to the initial position by tracking correction during special reproduction.

問題点を解決するための手段 本発明は上記問題点に鑑みて提案されたもので
あり、構成部材3者の各素材を温度上昇による変
形量が相殺されるよう選定し、その使用温度範囲
を拡張することに着目したものである。すなわ
ち、この問題点を解決するための技術的手段は、
印加電圧の大きさに応じて伸縮変形する積層型圧
電体と、一端部が積層型圧電体に連結されて該積
層型圧電体の変位量を拡大する一対のアームと、
該アームの他端部間に橋架された帯板状の座屈バ
ネとからなり、上記積層型圧電体、アーム及び座
屈バネの3者は、温度変化に対する座屈バネの拡
大変位置を可及的に小さくするよう、上記3者に
ついて所望の熱膨張温度係数を有する素材を選定
することによつて組合せ構成したものである。
Means for Solving the Problems The present invention has been proposed in view of the above problems, and the materials of the three constituent members are selected so that the amount of deformation due to temperature rise is offset, and the operating temperature range is The focus is on expansion. In other words, the technical means to solve this problem are:
a laminated piezoelectric body that expands and deforms depending on the magnitude of an applied voltage; a pair of arms that have one end connected to the laminated piezoelectric body to expand the amount of displacement of the laminated piezoelectric body;
It consists of a band-shaped buckling spring bridged between the other ends of the arm, and the laminated piezoelectric body, the arm, and the buckling spring can expand and change the position of the buckling spring in response to temperature changes. In order to minimize the overall size, the above three materials are combined by selecting materials having a desired thermal expansion temperature coefficient.

作 用 上記技術的手段のように、装置使用時での温度
変化に対する拡大変位置量が可及的に小さくなる
ように、積層型圧電体、アーム及び座屈バネの各
素材を選定すれば、装置の使用温度範囲が拡張さ
れて前記問題点を容易に解決し得る。
Effect If the materials of the laminated piezoelectric body, the arm, and the buckling spring are selected so that the amount of expansion displacement due to temperature changes during use of the device is as small as possible, as in the above technical means, The above-mentioned problems can be easily solved by expanding the operating temperature range of the device.

実施例 本発明に係る変位拡大装置をVTR装置におけ
る磁気ヘツドのアクチユエータに適用した実施例
を第1図及び第2図を参照しながら説明する。第
1図及び第2図に於いては、4は後述する積層型
圧電体の変位を拡大するための金属板で、この金
属板4は、回転シリンダ2(第3図及び第4図参
照)に固定された門形の固定基部5と、該固定基
部5の両側に対称配置された一対のL字状アーム
6,6と、固定基部5とアーム6,6の一端部6
a,6aとを連結する肉薄で可撓性のヒンジ部
7,7と、上記両アーム6,6の一端部6a,6
a同士を連結する肉薄で可撓性の連結部8とで構
成されている。9は上記連結部8と固定基部5の
中央部とで挟持された積層セラミツク等の積層型
圧電体、10は両アーム6,6の遊端部6b,6
bに橋架固定された帯板状の座屈バネで、この座
屈バネ10の中央に設けられたヘツド取付部11
に磁気ヘツド3a,3bが固着される。
Embodiment An embodiment in which the displacement amplifying device according to the present invention is applied to an actuator of a magnetic head in a VTR device will be described with reference to FIGS. 1 and 2. In FIGS. 1 and 2, 4 is a metal plate for enlarging the displacement of a laminated piezoelectric body, which will be described later, and this metal plate 4 is connected to the rotating cylinder 2 (see FIGS. 3 and 4). A portal-shaped fixed base 5 fixed to the fixed base 5, a pair of L-shaped arms 6, 6 arranged symmetrically on both sides of the fixed base 5, and one end 6 of the fixed base 5 and the arms 6, 6.
a, 6a, and one end portions 6a, 6 of both arms 6, 6.
It is composed of a thin and flexible connecting part 8 that connects the parts a to each other. 9 is a laminated piezoelectric material such as a laminated ceramic sandwiched between the connecting portion 8 and the center of the fixed base 5; 10 is a free end portion 6b of both arms 6, 6;
A buckling spring in the form of a band plate fixed to the bridge b, and a head mounting portion 11 provided at the center of this buckling spring 10.
Magnetic heads 3a and 3b are fixed to the magnetic heads 3a and 3b.

VTR装置によるスロー、スピードサーチ等の
特殊再生時でのトラツキング補正では、積層型圧
電体9にトラツキング補正信号に応じた駆動電圧
が印加されると、この印加電圧の大きさに応じて
積層型圧電体9が伸長し、この積層型圧電体9の
伸長に応じて両アーム6,6がヒンジ部7,7を
支点として回動する。この両アーム6,6の回動
により両アーム6,6の遊端部6b,6bが、積
層型圧電体9の変位量を拡大して第3図及び第4
図実線矢印方向に変位し、更に座屈バネ10が、
上記アーム6,6の遊端部6b,6bの変位量を
拡大して第4図実線矢印方向、即ち、トラツク外
れを補正する方向に変位し、磁気ヘツド3a,3
bのトラツキング補正がなされる。
In tracking correction during special playback such as slow and speed search by a VTR device, when a driving voltage according to a tracking correction signal is applied to the laminated piezoelectric body 9, the laminated piezoelectric body The body 9 expands, and in response to the expansion of the laminated piezoelectric body 9, the arms 6, 6 rotate about the hinge parts 7, 7 as fulcrums. This rotation of both arms 6, 6 causes the free ends 6b, 6b of both arms 6, 6 to expand the amount of displacement of the laminated piezoelectric body 9, as shown in FIGS.
The buckling spring 10 is displaced in the direction of the solid arrow in the figure, and the buckling spring 10 is
The free ends 6b, 6b of the arms 6, 6 are displaced in the direction of the solid line arrow in FIG.
Tracking correction of b is performed.

ところで上記VTR装置の特殊再生におけるト
ラツキング補正で使用される変位拡大装置では、
その使用状態での温度上昇により該変位拡大装置
を構成する積層型圧電体9、金属板4及び座屈バ
ネ10が熱膨張変形してその使用温度範囲が限定
されるばかりでなく、磁気ヘツド3a,3aの初
期位置も設定しずらいため、上記3者の温度上昇
による変形量が相殺されるようにその各素材を選
定する必要がある。現状では、積層型圧電体9と
しては積層セラミツクが使用され、また座屈バネ
10としてはリン青銅が使用されるため、最終的
に金属板4の素材によつて決定される。
By the way, in the displacement magnifying device used for tracking correction in special playback of the above-mentioned VTR device,
Due to temperature rise during use, the laminated piezoelectric body 9, metal plate 4, and buckling spring 10 constituting the displacement amplifying device undergo thermal expansion and deformation, which not only limits the operating temperature range, but also causes the magnetic head 3a to , 3a is also difficult to set, so it is necessary to select the respective materials so that the amount of deformation caused by the temperature rise of the three mentioned above cancels out. Currently, laminated ceramic is used as the laminated piezoelectric body 9, and phosphor bronze is used as the buckling spring 10, so the final value is determined by the material of the metal plate 4.

ここで、上記積層型圧電体9の素材、即ち積層
セラミツクの熱膨張係数をTc、座屈バネ10の
素材、即ちリン青銅の熱膨張係数をTP、金属板
4の素材の熱膨張係数をTK、また上記金属板4
及び座屈バネ10の各変位拡大率をα1、α2とする
と、温度上昇による金属板4の変位係数NAは、
NA=α2(Tc−TK)、座屈バネ10の変位係数NB
は、NB=α1(TP−TK)となる。従つて、変位拡
大装置の座屈バネ10による全体的な拡大変位係
数Nは、N=NA+NB=α1(Tc−TK)+α2(TP
TK)本出願人による実験では、上記金属板4の
素材として、SUS(ステンレス鋼)、SKD(工具用
鋼)、インバー(抵膨張合金)を使用し、各素材
のうち、積層型圧電体9、金属板4及び座屈バネ
10の温度上昇による変形量が相殺されて上記座
屈バネ10の全体的な拡大変位量が磁気テープの
記録トラツク幅、例えば30μm以下になるように
所望の素材を選定した。この実験では、Tc=−
44×10-7/℃、TP=180×10-7/℃の各熱膨張係
数を有する積層型圧電体9及び座屈バネ10を使
用した結果、SUS製の金属板4の場合、その熱
膨張係数TK=170×10-7/℃から座屈バネ10の
拡大変位量が+60μmとなつた。またSKD製の金
属板4の場合、その熱膨張係数TK=130×10-7
℃から上記拡大変位量が+10μmとなり、更にイ
ンバー製の金属板4の場合、その熱膨張係数TK
=35×10-7/℃から拡大変位量が−110μmとなつ
た。尚、上記拡大変位量は、室温から80℃まで温
度上昇させた状態での実験データである。
Here, Tc is the thermal expansion coefficient of the material of the laminated piezoelectric body 9, that is, laminated ceramic, T P is the thermal expansion coefficient of the material of the buckling spring 10, that is, phosphor bronze, and T is the thermal expansion coefficient of the material of the metal plate 4. T K , and the metal plate 4
and the displacement magnification factors of the buckling spring 10 are α 1 and α 2 , the displacement coefficient N A of the metal plate 4 due to temperature rise is as follows:
N A = α 2 (Tc - T K ), displacement coefficient N B of buckling spring 10
becomes N B1 (T P −T K ). Therefore, the overall expansion displacement coefficient N due to the buckling spring 10 of the displacement expansion device is N=N A +N B = α 1 (Tc − T K ) + α 2 (T P
T K ) In the experiments conducted by the applicant, SUS (stainless steel), SKD (tool steel), and Invar (resistive expansion alloy) were used as the materials for the metal plate 4, and of each material, laminated piezoelectric 9. Use a desired material so that the amount of deformation due to the temperature rise of the metal plate 4 and the buckling spring 10 is canceled out, and the overall expansion displacement amount of the buckling spring 10 is equal to or less than the recording track width of the magnetic tape, for example, 30 μm. was selected. In this experiment, Tc=−
As a result of using the laminated piezoelectric material 9 and the buckling spring 10 having respective thermal expansion coefficients of 44×10 -7 /℃ and T P =180×10 -7 /℃, in the case of the SUS metal plate 4, the The expansion displacement amount of the buckling spring 10 became +60 μm from the thermal expansion coefficient T K =170×10 -7 /°C. In addition, in the case of the metal plate 4 made from SKD, its thermal expansion coefficient T K = 130 × 10 -7 /
℃, the above expansion displacement amount is +10 μm, and in the case of the metal plate 4 made of Invar, its thermal expansion coefficient T K
=35×10 -7 /°C, the expanded displacement amount became -110 μm. Note that the above expansion displacement amount is experimental data obtained when the temperature was raised from room temperature to 80°C.

この実験結果から、金属板4の素材にSKDを
選定した場合、座屈バネ10の温度上昇による全
体的な拡大変位量が、磁気テープの記録トラツク
幅以下にすることができ、温度上昇による拡大変
位量が小さい最適の変位拡大装置を得ることが可
能となる。
From this experimental result, when SKD is selected as the material for the metal plate 4, the overall expansion displacement due to the temperature rise of the buckling spring 10 can be made less than the recording track width of the magnetic tape, and the expansion due to the temperature rise. It becomes possible to obtain an optimal displacement magnification device with a small amount of displacement.

尚、上記実施例では、VTR装置のトラツキン
グ補正に使用される磁気ヘツドのアクチユエータ
に適用した場合についても説明したが、本発明は
これに限定されることなく、上記磁気ヘツド以外
のものの変位を拡大する場合にも適用可能である
のは勿論である。
In the above embodiment, a case has been described in which the present invention is applied to an actuator of a magnetic head used for tracking correction of a VTR device, but the present invention is not limited to this, and can be applied to amplify the displacement of something other than the magnetic head. Of course, it is also applicable to cases where

発明の効果 本発明によれば、温度上昇による拡大変位量が
可及的に小さくなるように各素材を選定したこと
により、装置の使用温度範囲が拡張されると共
に、変位初期位置を容易に設定することが可能と
なつて温度特性の優れた変位拡大装置を提供する
ことができる。
Effects of the Invention According to the present invention, each material is selected so that the amount of expanded displacement due to temperature rise is as small as possible, so that the operating temperature range of the device is expanded and the initial displacement position can be easily set. This makes it possible to provide a displacement amplifying device with excellent temperature characteristics.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明に係る変位拡大装置を磁気ヘツ
ドのアクチユエータに適用した一実施例を示す平
面図、第2図は第1図の正面図である。第3図は
一般的なVTR装置の回転シリンダ及び磁気テー
プを示す斜視図、第4図は第3図の平面図、第5
図は磁気テープの記録トラツクを示す部分平面図
である。 6……アーム、9……積層型圧電体、10……
座屈バネ。
FIG. 1 is a plan view showing an embodiment in which a displacement amplifying device according to the present invention is applied to an actuator of a magnetic head, and FIG. 2 is a front view of FIG. 1. Fig. 3 is a perspective view showing the rotating cylinder and magnetic tape of a general VTR device, Fig. 4 is a plan view of Fig. 3, and Fig. 5
The figure is a partial plan view showing a recording track of a magnetic tape. 6...Arm, 9...Laminated piezoelectric material, 10...
Buckling spring.

Claims (1)

【特許請求の範囲】 1 印加電圧の大きさに応じて、伸縮変形する積
層形圧電体の一端が、門形固定基部底部に接続さ
れ、積層形圧電体の他端が該門形固定基部両脚部
の一部に設けたヒンジ部にて連結され、かつ対称
配置した一対のL字状アームの一端部を連結され
た連結部に接続した金属板と該一対のL字状アー
ムの遊端部間に橋架された帯板状で、かつ中央部
にワーク取付部を形成した座屈バネとで構成した
変位拡大装置において、積層形圧電体の熱膨張係
数Tc、金属板材の熱膨張係数Tk、座屈バネ材の
熱膨張係数Tp、金属板の形状で決まる変位拡大
率α1、座屈バネの長さ及び初期曲げ量で決まる変
位拡大率α2との間に、 |α1(Tc−Tk)+α2(Tp−Tk)| ≦200×10-7/℃ の関係が成立するように組合せたことを特徴とす
る変位拡大装置。
[Claims] 1. One end of the laminated piezoelectric body that expands and contracts depending on the magnitude of the applied voltage is connected to the bottom of the gate-shaped fixed base, and the other end of the laminated piezoelectric body is connected to both legs of the gate-shaped fixed base. A metal plate that is connected by a hinge part provided in a part of the part and has one end part of a pair of symmetrically arranged L-shaped arms connected to the connected connecting part, and a free end part of the pair of L-shaped arms. In a displacement amplifying device composed of a buckling spring that is bridged between strips and has a workpiece attachment part formed in the center, the thermal expansion coefficient Tc of the laminated piezoelectric material, the thermal expansion coefficient Tk of the metal plate material, Between the thermal expansion coefficient Tp of the buckling spring material, the displacement magnification rate α 1 determined by the shape of the metal plate, and the displacement magnification rate α 2 determined by the length and initial bending amount of the buckling spring, |α 1 (Tc− A displacement magnifying device characterized in that the displacement magnifying device is combined so that the following relationship holds: Tk) + α 2 (Tp − Tk) | ≦200×10 -7 /°C
JP60128887A 1985-06-13 1985-06-13 Displacement enlarging device Granted JPS61288782A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60128887A JPS61288782A (en) 1985-06-13 1985-06-13 Displacement enlarging device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60128887A JPS61288782A (en) 1985-06-13 1985-06-13 Displacement enlarging device

Publications (2)

Publication Number Publication Date
JPS61288782A JPS61288782A (en) 1986-12-18
JPH0150193B2 true JPH0150193B2 (en) 1989-10-27

Family

ID=14995807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60128887A Granted JPS61288782A (en) 1985-06-13 1985-06-13 Displacement enlarging device

Country Status (1)

Country Link
JP (1) JPS61288782A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020124068A (en) * 2019-01-31 2020-08-13 国立大学法人東京工業大学 Displacement magnification device with variable and zero thermal expansion and variable shape secondary mirror unit including the same

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01185175A (en) * 1988-01-14 1989-07-24 Nec Corp Mechanical amplifier mechanism
DE102005023767A1 (en) * 2005-05-19 2006-11-23 Otto-Von-Guericke-Universität Magdeburg Electrostrictive actuator for valve is mounted between legs of bent lift arm by draw elements

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020124068A (en) * 2019-01-31 2020-08-13 国立大学法人東京工業大学 Displacement magnification device with variable and zero thermal expansion and variable shape secondary mirror unit including the same

Also Published As

Publication number Publication date
JPS61288782A (en) 1986-12-18

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