JPS6142204B2 - - Google Patents
Info
- Publication number
- JPS6142204B2 JPS6142204B2 JP56062116A JP6211681A JPS6142204B2 JP S6142204 B2 JPS6142204 B2 JP S6142204B2 JP 56062116 A JP56062116 A JP 56062116A JP 6211681 A JP6211681 A JP 6211681A JP S6142204 B2 JPS6142204 B2 JP S6142204B2
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- support base
- pyroelectric
- electrode
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000008188 pellet Substances 0.000 claims description 31
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 238000000151 deposition Methods 0.000 description 8
- 238000009423 ventilation Methods 0.000 description 8
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 230000008021 deposition Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 229920006332 epoxy adhesive Polymers 0.000 description 4
- 150000002894 organic compounds Chemical class 0.000 description 4
- 230000002950 deficient Effects 0.000 description 3
- 229910001120 nichrome Inorganic materials 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
Description
【発明の詳細な説明】
本発明は入射赤外線変化量に応じて電荷を発生
する焦電体ペレツトを備えた赤外線検出器に関す
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an infrared detector equipped with a pyroelectric pellet that generates a charge depending on the amount of change in incident infrared radiation.
通常、入射赤外線変化量に応じて電荷を発生す
る焦電体ペレツトはその散逸熱が小である程出力
が増大する特性を有しており、従つて従来のペレ
ツトは断熱されるべく宙吊り状態に支持されてい
た。しかし乍ら、焦電体ペレツトはその厚さが数
10μｍと極めて薄く且つ形状も数ミリ角と小さい
ため、上述のように宙吊りにする場合取扱いに困
難を有し検出器の量産性が低かつた。 Normally, pyroelectric pellets that generate electric charge according to the amount of change in incident infrared rays have the characteristic that the smaller their dissipated heat, the greater the output. Therefore, conventional pellets are suspended in the air in order to be insulated. It was supported. However, the thickness of pyroelectric pellets is several
Since it is extremely thin at 10 μm and has a small shape of several millimeters square, it is difficult to handle when suspended in the air as described above, and the mass productivity of the detector is low.
そこで、最近では上面に凹部を有する支持台を
準備し、この支持台上面に焦電体ペレツトをエポ
キシ系接着剤にて接着することにより上記ペレツ
トを支持してなる検出器が提案されている。そし
て、上記凹部の存在により上記ペレツトは充分に
断熱されているから、ペレツトの散逸熱は極めて
小さく抑えられている。 Recently, a detector has been proposed in which a support base having a recessed portion on the upper surface is prepared, and a pyroelectric pellet is adhered to the upper surface of the support base using an epoxy adhesive to support the pellet. Since the pellets are sufficiently insulated due to the presence of the recesses, the heat dissipated from the pellets is kept to an extremely low level.
処で、上記ペレツトの表、裏面には夫々ニクロ
ムの真空蒸着により表、裏面電極が形成されてい
るが、上記表面電極は検出器の製造中に上記接着
剤などから発生する有機化合物ガスの影響により
充分な蒸着力の下に蒸着できない。即ち、検出器
の製造においては、支持台の凹部を有する上面
に、予め裏面電極が真空蒸着された焦電体ペレツ
トを裏面電極が支持台上面に対向するようにして
エポキシ系接着剤にて接着し、この状態で斯る接
着剤を加熱硬化するのであるが、この場合接着剤
などから有機化合物ガスが発生し、斯るガスはペ
レツトにて塞がれた凹部内に充満してしまう。 The front and back electrodes are formed on the front and back surfaces of the pellet by vacuum deposition of nichrome, respectively, but the surface electrodes are affected by the organic compound gas generated from the adhesive etc. during the manufacturing of the detector. Due to this, it is not possible to deposit with sufficient deposition force. That is, in manufacturing the detector, a pyroelectric pellet, on which a back electrode has been vacuum-deposited in advance, is bonded to the recessed upper surface of the support base using an epoxy adhesive, with the back electrode facing the top surface of the support base. However, in this state, the adhesive is heated and cured, but in this case, organic compound gas is generated from the adhesive and the like, and this gas fills the recesses filled with the pellets.
従つて、その後表面電極を真空蒸着するのであ
るが、これに際しペレツト周辺を真空にすべく、
凹部に充満したガスをもペレツトの接着部分など
の微視的な隙間を通して排気するにも、充分には
排気できない。しかるに、このガスは除々にでは
あるがペレツトの接着部分などの微視的隙間から
漏れているから、次の工程である表面電極の蒸着
は蒸着部分、即ちペレツト表面に上記ガスが存在
する下で行なわれ、よつて表面電極は充分な蒸着
力の下に蒸着できないのである。 Therefore, the surface electrode is then vacuum-deposited, but in order to create a vacuum around the pellet,
Even if the gas filling the recesses is exhausted through microscopic gaps such as the adhesive parts of the pellets, it is not possible to exhaust the gas sufficiently. However, since this gas is leaking gradually from microscopic gaps such as the adhesive part of the pellet, the next step, the deposition of the surface electrode, is performed in the presence of the above gas at the deposition part, that is, on the pellet surface. Therefore, the surface electrode cannot be deposited under sufficient deposition force.
この場合、次に表面電極に引出線を超音波ポン
デイングするのに充分な強度でボンデイングでき
ず、従つてボンデイング不良が発生して、不良品
の発生率が高いと云う欠点がある。 In this case, there is a drawback that bonding cannot be performed with sufficient strength for next ultrasonic bonding of the lead wire to the surface electrode, resulting in defective bonding and a high incidence of defective products.
本発明は斯る点に鑑みてなされたもので、以下
本発明実施例を、侵入警報器の検知部に用いる焦
電型赤外線検出器について、図面に基づいて詳述
する。 The present invention has been made in view of these points, and embodiments of the present invention will be described below in detail with reference to the drawings regarding a pyroelectric infrared detector used in a detection section of an intruder alarm.
第１図において、１は入射赤外線変化量に応じ
て電荷を発生するタンクル酸リチウム
（LiTaO3）結晶等で形成された焦電体ペレツト、
２及び３は夫々ニクロム（Ni−Cr）の真空蒸着
により形成された上記ペレツト１の表、裏面電極
で、表面電極２は互いに分離され且つ同形状を有
する第１及び第２表面電極２ａ，２ｂからなつて
おり、裏面電極３は上記ペレツト１の裏面全面に
施されている。４ａ及び４ｂは夫々第１及び第２
引出線５ａ，５ｂを上記第１及び第２表面電極２
ａ，２ｂに超音波ボンデイングするための第１及
び第２パツドで、該第１及び第２バツドは夫々ア
ルミニウム等の真空蒸着膜から成り上記第１及び
第２表面電極２ａ，２ｂの角部に設けられてい
る。 In FIG. 1, 1 is a pyroelectric pellet made of lithium tanchlorate (LiTaO 3 ) crystal, etc., which generates electric charge according to the amount of change in incident infrared rays;
Reference numerals 2 and 3 denote front and back electrodes of the pellet 1 formed by vacuum evaporation of nichrome (Ni-Cr), respectively, and the front electrodes 2 are separated from each other and have first and second surface electrodes 2a and 2b having the same shape. The back electrode 3 is applied to the entire back surface of the pellet 1. 4a and 4b are the first and second
The leader lines 5a and 5b are connected to the first and second surface electrodes 2.
The first and second pads are for ultrasonic bonding to the electrodes 2a and 2b, and the first and second pads are each made of a vacuum-deposited film of aluminum or the like, and are attached to the corners of the first and second surface electrodes 2a and 2b. It is provided.
上記焦電体ペレツト１前面において、人が矢印
Ａの如く通過すると、まず第１表面電極２ａ側の
ペレツト１にて人体から放射された赤外線に基づ
いて入射赤外線量が変化する。斯る場合、第１表
面電極２ａ側のペレツト１に電荷が発生し、斯る
電荷による信号が第１表面電極２ａ及び裏面電極
３、第２表面電極２ｂを介して第１、第２引出し
線５ａ，５ｂから外部へ導出される。次いで第２
表面電極２ｂ側のペレツト１にて入射赤外線量が
変化する。斯る場合も同様にして信号が第１、第
２引出し線５ａ，５ｂから外部へ導出される。そ
して、これらの信号に基づいて侵入警報器からは
警報が発せられる。 When a person passes in front of the pyroelectric pellet 1 as shown by arrow A, the amount of incident infrared rays changes at the pellet 1 on the first surface electrode 2a side based on the infrared rays emitted from the human body. In such a case, an electric charge is generated in the pellet 1 on the side of the first front electrode 2a, and a signal due to the electric charge is transmitted to the first and second lead lines via the first front electrode 2a, the back electrode 3, and the second front electrode 2b. 5a and 5b to the outside. Then the second
The amount of incident infrared rays changes in the pellet 1 on the surface electrode 2b side. In such a case, signals are similarly led out from the first and second lead lines 5a and 5b. Based on these signals, the intruder alarm issues an alarm.
尚、上記ペレツト１において、例えば白熱球の
点灯により白熱球から放射される赤外線に対して
は、入射赤外線量が変化しても第１及び第２引出
し線５ａ，５ｂからの出力信号は存在しない。即
ち、斯る場合、ペレツト１全面に亘つて等量の赤
外線が同時に入射するから、第１及び第２表面電
極２ａ，２ｂには等量且つ同符号の電荷が同時に
発生し、従つて第１及び第２表面電極２ａ，２ｂ
の電荷は相殺された第１及び第２引出し線５ａ，
５ｂからは信号が出力されない。 In addition, in the pellet 1, for example, for infrared rays emitted from an incandescent bulb when the incandescent bulb is lit, there is no output signal from the first and second lead lines 5a and 5b even if the amount of incident infrared rays changes. . That is, in such a case, since the same amount of infrared rays is simultaneously incident on the entire surface of the pellet 1, charges of the same amount and the same sign are simultaneously generated on the first and second surface electrodes 2a and 2b, and therefore the first and second surface electrodes 2a, 2b
The charges of the first and second lead lines 5a,
No signal is output from 5b.
６は燐青銅からなる支持台で、該支持台上面に
は上記ペレツト１がエポキシ系接着剤６ａにて接
着支持されている。上記支持台６の構造を更に説
明するに、上記支持台６の上面には外周縁部７以
外を深さ0.1〜0.2mmに酸エツチングすることによ
り凹部８が形成されている。該凹部により上記ペ
レツト１は充分に断熱され、ペレツト１の散逸熱
は極めて小さく抑えられている。更に、上記外周
縁部７の４辺にはその中央部に深さＤが0.05mm以
上で幅Ｗが0.3mm以上の通気溝９，９……………
が酸エツチングされていると共に、上記支持台６
には凹部８から下面に至る直径１mm以上の通気孔
１０が打抜かれている。 Reference numeral 6 denotes a support base made of phosphor bronze, and the pellet 1 is adhesively supported on the upper surface of the support base using an epoxy adhesive 6a. To further explain the structure of the support base 6, a recess 8 is formed on the upper surface of the support base 6 by acid etching the area other than the outer peripheral edge 7 to a depth of 0.1 to 0.2 mm. The pellet 1 is sufficiently insulated by the recess, and the heat dissipated from the pellet 1 is suppressed to an extremely low level. Furthermore, ventilation grooves 9, 9 having a depth D of 0.05 mm or more and a width W of 0.3 mm or more are provided in the center of the four sides of the outer peripheral edge 7.
is acid-etched, and the support base 6
A ventilation hole 10 with a diameter of 1 mm or more is punched out from the recess 8 to the lower surface.
次に上記検出器を得るための製造方法を第２図
において説明する。まず、第２図Ａに示す如く、
最終的に分割されて支持台６となる広面積の支持
台原板６′を準備する。該原板の上面には、予め
多数の凹部８，８……………が互いに等間隔で酸
エツチングされていると共に最終的に分割されて
外周縁部７の一辺となる隔壁７′，７′……………
の中央部にも夫々通気溝９′，９′……………が酸
エツチングされている。更に、支持台原板６′に
は夫々の凹部８，８……………から下面に至る通
気孔１０，１０……………が打抜かれている。 Next, a manufacturing method for obtaining the above detector will be explained with reference to FIG. First, as shown in Figure 2A,
A wide-area support base original plate 6' that will eventually be divided into support bases 6 is prepared. On the upper surface of the original plate, a large number of recesses 8, 8, . ……………
Ventilation grooves 9', 9', . Furthermore, ventilation holes 10, 10...... are punched out in the support base plate 6', extending from the respective recesses 8, 8...... to the lower surface.
そして、第２図Ｂに示す如く、裏面に裏面電極
３′を真空蒸着してなり、100〜200μｍの比較的
厚さが大きい焦電体ウエハ１′をその裏面電極
３′を厚板６′の上面に対向させた配置にてエポキ
シ系接着剤６ａにて接着し、該接着剤を加熱硬化
する。この時、接着剤６ａなどから有機化合物ガ
スが発生し、このガスは凹部８，８……………に
充満する。しかるに、斯るガスは凹部８，８……
………から顕著に排気される。即ち、次に第２図
Ｃに示す如く、ウエハ１′をその表面より研摩し
て該ウエハの厚みを数10μｍとした後に、ウエハ
1′の表面に第１表面電極２ａ，２ａ……………及
び第２表面電極２ｂ，２ｂ……………を真空蒸着
するのに先立つてウエハ１′周辺を真空にする
に、この場合凹部８，８……………に充満したガ
スは通気溝９′，９′……………及び通気孔１０，
１０……………を通つて外部へ排気されるのであ
る。従つて、次に、ウエハ１′を研摩した後第１
表面電極２ａ，２ａ……………及び第２表面電極
２ａ，２ｂ……………を真空蒸着する場合、上記
ガスはウエハ１′周辺から充分に排気されている
ので、表面電極２ａ，２ａ及び２ｂ，２ｂ………
……は充分な蒸着力の下に蒸着される。 As shown in FIG. 2B, a pyroelectric wafer 1' having a relatively large thickness of 100 to 200 μm and having a back electrode 3' vacuum-deposited on its back surface is connected to a thick plate 6'. It is bonded with an epoxy adhesive 6a so as to face the upper surface of the substrate, and the adhesive is cured by heating. At this time, organic compound gas is generated from the adhesive 6a and the like, and this gas fills the recesses 8, 8, . . . . However, such gas flows into the recesses 8, 8...
Significant exhaust gas is emitted from... That is, as shown in FIG. 2C, after polishing the surface of the wafer 1' to a thickness of several tens of μm,
In this case, the area around the wafer 1' is evacuated before vacuum-depositing the first surface electrodes 2a, 2a...... and the second surface electrodes 2b, 2b...... on the surface of the wafer 1'. The gas filled in the recesses 8, 8, 8, 8, 9, 9, 9, 10, 10, 10, 10, 10, 10, 10,
It is exhausted to the outside through 10. Therefore, next, after polishing the wafer 1', the first
When vacuum-depositing the surface electrodes 2a, 2a and the second surface electrodes 2a and 2b, the gas is sufficiently exhausted from around the wafer 1'. and 2b, 2b……
... is deposited under sufficient deposition power.
而して、第２図Ｃでの一点鎖線で示す位置でウ
エハ１′などをタイシングする。その後、第１表
面電極２ａ，２ａ……………及び第２表面電極２
ｂ，２ｂ……………に夫々第１引出線５ａ，５ａ
……………及び第２引出線５ｂ，５ｂ……………
を超音波ボンデイングすれば、第１図に示す如き
検出器が大量に得られる。ここに、表面電極２
ａ，２ａ……………及び、２ｂ，２ｂ……………
の蒸着強度は充分に確保されているので、上記ボ
ンデイングは充分な強度で行なうことができる。 The wafer 1', etc., is then tiled at the position indicated by the dashed line in FIG. 2C. After that, the first surface electrodes 2a, 2a...... and the second surface electrodes 2
b, 2b......first leader lines 5a, 5a, respectively.
……………and second leader line 5b, 5b………………
By ultrasonic bonding, a large quantity of detectors as shown in FIG. 1 can be obtained. Here, surface electrode 2
a, 2a......and 2b, 2b......
Since the vapor deposition strength of is sufficiently ensured, the bonding described above can be performed with sufficient strength.
以上の説明から明らかな如く、本発明によれ
ば、入射赤外線変化量に応じて電荷を発生する焦
電体ペレツトを支持台の上面に接着してなる焦電
型赤外線検出器において、上記支持台上面の外周
縁部以外に凹部を形成し、且つ上記支持台に上記
凹部と外部とを通気せしめるための通気部を形成
したから、ペレツトの断熱が高くその出力を増大
できると共に検出器の量産性を向上できる。更
に、検出器の製造中に凹部に有機化合物ガスが充
満しても斯るガスは表面電極の真空蒸着時には充
分に排気されるので表面電極の蒸着強度は堅固と
なり、表面電極への引出線のボンデイングを充分
な強度の下に行なうことができ、従つてボンデイ
ング不良が発生することはなく、不良品の発生率
を顕著に抑制できる。 As is clear from the above description, according to the present invention, in a pyroelectric infrared detector in which a pyroelectric pellet that generates an electric charge according to the amount of change in incident infrared rays is adhered to the upper surface of a support, the support Since a recess is formed in a region other than the outer peripheral edge of the upper surface, and a ventilation section is formed in the support base to allow ventilation between the recess and the outside, the pellet has high heat insulation, and its output can be increased, and the detector can be mass-produced. can be improved. Furthermore, even if the concave part is filled with organic compound gas during the manufacture of the detector, this gas is sufficiently exhausted during vacuum deposition of the surface electrode, so the strength of the deposition on the surface electrode is strong, and the lead wire to the surface electrode is Bonding can be performed with sufficient strength, so bonding defects do not occur, and the incidence of defective products can be significantly suppressed.
第１図は本発明実施例検出器の一部分解斜視
図、第２図Ａ乃至Ｃは同検出器を製造するための
工程別図を示し、第２図Ａは一部斜視図、第２図
Ｂ及びＣは一部拡大断面図である。
１……焦電体ペレツト、２ａ，２ｂ……第１、
第２表面電極、３……裏面電極、６……支持台、
８……凹部、９……通気溝、１０……通気孔。
FIG. 1 is a partially exploded perspective view of a detector according to an embodiment of the present invention, FIGS. 2A to C are diagrams showing steps for manufacturing the same detector, FIG. B and C are partially enlarged sectional views. 1... Pyroelectric pellet, 2a, 2b... 1st,
2nd surface electrode, 3... back electrode, 6... support base,
8... recess, 9... ventilation groove, 10... ventilation hole.
Claims (1)
電体ペレツトを支持台の上面に接着してなる焦電
型赤外線検出器において、上記支持台上面の外周
縁部以外に凹部を形成し、且つ上記支持台に上記
凹部と外部とを通気せしめるための通気部を形成
したことを特徴とする焦電型赤外線検出器。1. In a pyroelectric infrared detector in which a pyroelectric pellet that generates an electric charge according to the amount of change in incident infrared rays is adhered to the top surface of a support base, a recess is formed in a region other than the outer peripheral edge of the top surface of the support base, and A pyroelectric infrared detector characterized in that the support base is provided with a vent for ventilating the recess and the outside.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56062116A JPS57175929A (en) | 1981-04-23 | 1981-04-23 | Detector for pyroelectric type infrared ray |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56062116A JPS57175929A (en) | 1981-04-23 | 1981-04-23 | Detector for pyroelectric type infrared ray |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57175929A JPS57175929A (en) | 1982-10-29 |
| JPS6142204B2 true JPS6142204B2 (en) | 1986-09-19 |
Family
ID=13190759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56062116A Granted JPS57175929A (en) | 1981-04-23 | 1981-04-23 | Detector for pyroelectric type infrared ray |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57175929A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6367002U (en) * | 1986-10-23 | 1988-05-06 | ||
| US10709847B2 (en) | 2015-01-20 | 2020-07-14 | L.O.M. Laboratories Inc. | Retractable needle syringe with unitary propellant release module |
| US10765815B2 (en) | 2014-10-31 | 2020-09-08 | L.O.M. Laboratories Inc. | Retractable needle syringe |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69011199T2 (en) * | 1989-05-18 | 1995-03-02 | Murata Manufacturing Co | Pyroelectric IR sensor. |
| US5323025A (en) * | 1989-05-18 | 1994-06-21 | Murata Mfg. Co., Ltd. | Pyroelectric IR-sensor having a low thermal conductive ceramic substrate |
| EP0630058A3 (en) * | 1993-05-19 | 1995-03-15 | Siemens Ag | Process for forming an arrangement of pyrodetectors by electrochemically etching a silicon substrate. |
-
1981
- 1981-04-23 JP JP56062116A patent/JPS57175929A/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6367002U (en) * | 1986-10-23 | 1988-05-06 | ||
| US10765815B2 (en) | 2014-10-31 | 2020-09-08 | L.O.M. Laboratories Inc. | Retractable needle syringe |
| US10709847B2 (en) | 2015-01-20 | 2020-07-14 | L.O.M. Laboratories Inc. | Retractable needle syringe with unitary propellant release module |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57175929A (en) | 1982-10-29 |
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