JPS614145A - 電子線装置 - Google Patents

電子線装置

Info

Publication number
JPS614145A
JPS614145A JP59125743A JP12574384A JPS614145A JP S614145 A JPS614145 A JP S614145A JP 59125743 A JP59125743 A JP 59125743A JP 12574384 A JP12574384 A JP 12574384A JP S614145 A JPS614145 A JP S614145A
Authority
JP
Japan
Prior art keywords
electron beam
scanning
supplied
objective lens
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59125743A
Other languages
English (en)
Japanese (ja)
Other versions
JPH035020B2 (cs
Inventor
Seiichi Nakagawa
中川　清一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP59125743A priority Critical patent/JPS614145A/ja
Publication of JPS614145A publication Critical patent/JPS614145A/ja
Publication of JPH035020B2 publication Critical patent/JPH035020B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • H01J37/2955—Electron or ion diffraction tubes using scanning ray

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP59125743A 1984-06-19 1984-06-19 電子線装置 Granted JPS614145A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59125743A JPS614145A (ja) 1984-06-19 1984-06-19 電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59125743A JPS614145A (ja) 1984-06-19 1984-06-19 電子線装置

Publications (2)

Publication Number Publication Date
JPS614145A true JPS614145A (ja) 1986-01-10
JPH035020B2 JPH035020B2 (cs) 1991-01-24

Family

ID=14917693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59125743A Granted JPS614145A (ja) 1984-06-19 1984-06-19 電子線装置

Country Status (1)

Country Link
JP (1) JPS614145A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12347640B2 (en) 2018-06-04 2025-07-01 Hitachi High-Tech Corporation Electron beam apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12347640B2 (en) 2018-06-04 2025-07-01 Hitachi High-Tech Corporation Electron beam apparatus

Also Published As

Publication number Publication date
JPH035020B2 (cs) 1991-01-24

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