JPS6141449B2 - - Google Patents
Info
- Publication number
- JPS6141449B2 JPS6141449B2 JP7536978A JP7536978A JPS6141449B2 JP S6141449 B2 JPS6141449 B2 JP S6141449B2 JP 7536978 A JP7536978 A JP 7536978A JP 7536978 A JP7536978 A JP 7536978A JP S6141449 B2 JPS6141449 B2 JP S6141449B2
- Authority
- JP
- Japan
- Prior art keywords
- surface acoustic
- acoustic wave
- frequency
- propagation velocity
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010897 surface acoustic wave method Methods 0.000 claims description 48
- 239000000758 substrate Substances 0.000 claims description 16
- 230000001902 propagating effect Effects 0.000 claims description 7
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 6
- 239000010408 film Substances 0.000 description 22
- 239000006185 dispersion Substances 0.000 description 16
- 230000000694 effects Effects 0.000 description 6
- 239000007772 electrode material Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7536978A JPS553214A (en) | 1978-06-23 | 1978-06-23 | Elastic surface wave device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7536978A JPS553214A (en) | 1978-06-23 | 1978-06-23 | Elastic surface wave device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS553214A JPS553214A (en) | 1980-01-11 |
| JPS6141449B2 true JPS6141449B2 (US20080094685A1-20080424-C00004.png) | 1986-09-16 |
Family
ID=13574226
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7536978A Granted JPS553214A (en) | 1978-06-23 | 1978-06-23 | Elastic surface wave device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS553214A (US20080094685A1-20080424-C00004.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6243656Y2 (US20080094685A1-20080424-C00004.png) * | 1985-04-01 | 1987-11-13 | ||
| JPS6350071Y2 (US20080094685A1-20080424-C00004.png) * | 1986-11-13 | 1988-12-22 |
-
1978
- 1978-06-23 JP JP7536978A patent/JPS553214A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6243656Y2 (US20080094685A1-20080424-C00004.png) * | 1985-04-01 | 1987-11-13 | ||
| JPS6350071Y2 (US20080094685A1-20080424-C00004.png) * | 1986-11-13 | 1988-12-22 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS553214A (en) | 1980-01-11 |
