JPS6140827A - Preparation of porous glass plate - Google Patents

Preparation of porous glass plate

Info

Publication number
JPS6140827A
JPS6140827A JP16336984A JP16336984A JPS6140827A JP S6140827 A JPS6140827 A JP S6140827A JP 16336984 A JP16336984 A JP 16336984A JP 16336984 A JP16336984 A JP 16336984A JP S6140827 A JPS6140827 A JP S6140827A
Authority
JP
Japan
Prior art keywords
porous glass
glass
porous
particles
glass body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16336984A
Other languages
Japanese (ja)
Other versions
JPH0556293B2 (en
Inventor
Toshiro Ikuma
伊熊 敏郎
Shozo Morimoto
詔三 森本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Priority to JP16336984A priority Critical patent/JPS6140827A/en
Publication of JPS6140827A publication Critical patent/JPS6140827A/en
Publication of JPH0556293B2 publication Critical patent/JPH0556293B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/14Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1469Means for changing or stabilising the shape or form of the shaped article or deposit
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/14Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1453Thermal after-treatment of the shaped article, e.g. dehydrating, consolidating, sintering
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Glass Compositions (AREA)
  • Glass Melting And Manufacturing (AREA)

Abstract

PURPOSE:To prepare a porous glass plate having uniform bulk density easily by allowing raw material for forming glass to react in flame, prepg. a porous glass body by depositing generated fine glass particles on a base plate, and cutting to sheets after sintering. CONSTITUTION:A raw material for forming glass such as SiCl4, H2 and O2 as combustion gas are fed to a synthesizing burner 1, and flame hydrolysis reaction is caused in the flame 2, and generated fine glass particles 3 are deposited on a flat base plate 4. Obtd. porous glass body 5A is heated uniformly with a heatig device 6 and sintered to the degree that each fine glass particle 3 welds to each other firmly but the voids between the fine particles are not buried completely. Then, obtd. block of the porous glass body 5B having uniform bulk density and pore size is cut to a specified thickness. Thus, an aimed porous glass plate 7 is obtd.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は均一な組成及び嵩密度を有する多孔質ガラス板
を製造する方法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method for producing porous glass sheets having uniform composition and bulk density.

〔従来技術〕[Prior art]

従来多孔質ガラス板としてはバイコールガラスが知うれ
ている。バイコールガラスははうけい酸ガラスを通常の
方法で溶融、成形し、このガラスを転移温度域で熱処理
して1Ja20−B203に富む相と5i02に富む相
に分離した後酸処理することにより、Na20−B2O
3’、に富む相を徐々に溶出して5i02に富む部分を
多孔質ガラスとする方法である0 〔発明が解決しようとする問題点〕 上述した従来方法では使用し得るガラス組成は分相しゃ
すい極く特殊なものに限られ、また孔径の制御が非常に
難しいという問題がある。
Vycor glass is conventionally known as a porous glass plate. Vycor glass is produced by melting and molding silicate glass using a conventional method, heat-treating this glass in the transition temperature range to separate it into a 1Ja20-B203-rich phase and a 5i02-rich phase, and then acid-treating it to form Na20. -B2O
This is a method in which the phase rich in 3' is gradually eluted, and the part rich in 5i02 is made into porous glass. There are problems in that it is limited to very special types and it is extremely difficult to control the pore diameter.

〔問題点を解決する手段〕[Means to solve problems]

SiCl4等のガラス形成原料を火炎中で加水分解反応
させることによって得られるガラス微粒子を基材上に堆
積させて棒状、ブロック状等の多孔質ガラス体を作成し
、次いでこれを高温で加熱焼結して均一な嵩密度を有す
る多孔質ガラス体とした後板状に切断加工する。
Glass fine particles obtained by hydrolyzing a glass forming raw material such as SiCl4 in a flame are deposited on a base material to create a porous glass body in the shape of a rod or block, which is then heated and sintered at a high temperature. The porous glass body is made into a porous glass body having a uniform bulk density, and then cut into a plate shape.

〔作 用〕[For production]

基材上にガラス微粒子の堆積で形成される多孔質体は、
微粒子の付着成長時の付着面の温度が分布を持つため嵩
密度に局所的なバラツキがあるが、次に全体を高温で均
一に加熱処理することにより、個々めガラス微粒子の表
面層が融解して隣接する微粒子同志が融着する。
A porous body formed by depositing glass particles on a base material is
There is local variation in bulk density due to the temperature distribution of the adhering surface during the adhesion and growth of fine particles, but by uniformly heating the entire glass particle at a high temperature, the surface layer of each individual glass fine particle melts. Adjacent fine particles are fused together.

そして上記の加熱焼結処理を、ガラス微粒子が完全に融
解して粒子間の空隙が無くなる前の段階で止めることに
より、隣接ガラス微粒子間に空孔が残り、しかもこの空
孔は全体に均一な大きさおよび密度で存在するので、焼
結処理を終えた母材を適宜厚みで切断すれば、嵩密度の
均一な多孔質ガラス板を得ることができる。
By stopping the heating and sintering process described above before the glass particles are completely melted and the voids between the particles disappear, pores remain between adjacent glass particles, and these pores are uniform throughout. Since they exist in various sizes and densities, by cutting the sintered base material to an appropriate thickness, a porous glass plate with uniform bulk density can be obtained.

〔効 果〕〔effect〕

本発明によれば、ガラス微粒子の堆積によって粒子間に
生じる空隙が多孔質ガラス板中の空孔となるので、母材
の大きさにかかわりなく均一な大きさの空孔が全体に一
様に形成され、高度に均一な嵩密度をもつ多孔質ガラス
板を得ることができる。また、加熱焼結処理の温度条件
を変えるだけで空孔の大きさを非常に広い範囲にわたり
変えることが可能となる。
According to the present invention, the voids created between the particles due to the accumulation of glass fine particles become voids in the porous glass plate, so that the voids of uniform size are uniformly distributed throughout the porous glass plate regardless of the size of the base material. A porous glass plate having a highly uniform bulk density can be obtained. Furthermore, the size of the pores can be varied over a very wide range simply by changing the temperature conditions of the heating and sintering process.

〔実施例〕〔Example〕

以下本発明を図面に示した実施例について詳細篇に説明
する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to embodiments shown in the drawings.

第1図において合成バーナ/にガラス形成原料として5
ifJ4を、燃焼ガスとしてH2及び02をそれぞれ供
給する。バーナ火炎コ中で火炎加水分解反応により生成
された5i02から成るガラス微粒子3はバーナlの下
方に配置された平板上の基材を上に付着堆積していき、
多孔質ガラス体jAが形成される。ここで得られる多孔
質ガラス体SAは、ガラス微粒子の付着堆積時の付着面
温度が分布をもつため嵩密度が場所によって異なる。
In Figure 1, 5 is used as a glass forming raw material in the synthesis burner/.
IfJ4 is supplied as combustion gas, and H2 and 02 are respectively supplied as combustion gas. The glass particles 3 made of 5i02 produced by the flame hydrolysis reaction in the burner l are deposited on the base material on the flat plate placed below the burner l.
A porous glass body jA is formed. The porous glass body SA obtained here has a bulk density that differs depending on the location because the temperature on the adhesion surface during deposition of the glass particles has a distribution.

次にこの多孔質ガラス体Sの全体を加熱装置乙によって
均一に加熱して、ガラス微粒子同志が強固に融着し、且
つ粒子間の空隙が完全には埋まらない程度まで焼結させ
る。上記の焼結処理によって得られたブロック状の多孔
質ガラス体5Bは嵩密度および孔径が均一となっている
。そして上記焼結処理時の温度を適当に選ぶことにより
、多孔質ガラス体!B中の空孔の大きさを広い範囲にわ
たって制御することができる。
Next, the entire porous glass body S is uniformly heated by a heating device B to sinter the glass particles to the extent that they are firmly fused together and the voids between the particles are not completely filled. The block-shaped porous glass body 5B obtained by the above sintering process has a uniform bulk density and pore diameter. By appropriately selecting the temperature during the above sintering process, a porous glass body can be created! The size of the pores in B can be controlled over a wide range.

次に、焼”結処理で得られた多孔質ガラス体jBを所定
の厚みに切断し、必要に応じて研磨等の後加工を施せば
多孔質ガラス板7が得られる。第2図に他の実施例を示
す。
Next, the porous glass body jB obtained by the sintering process is cut to a predetermined thickness, and if necessary, post-processing such as polishing is performed to obtain a porous glass plate 7. An example is shown below.

本例ではバーナlの火炎λ中で生成されるガラス微粒子
3を棒状の回転する出発基材ダに付着させつつ基材グの
軸線方向に基材tまたはバーナlを移動させ、ガラス微
粒子をほぼ円柱状に付着堆積させて多孔質ガラス体jA
を成形する。次にこの円柱状多孔質ガラス体jAを加熱
装置にで全体にわたり加熱焼結処理することにより、嵩
密度および空孔が均一な多孔質ガラス体sBが得られる
In this example, the glass particles 3 generated in the flame λ of the burner L are attached to the rod-shaped rotating starting substrate DA, and the substrate t or the burner 1 is moved in the axial direction of the base material G, so that the glass particles are almost completely removed. A porous glass body is deposited in a cylindrical shape.
to form. Next, by heating and sintering the entire columnar porous glass body jA in a heating device, a porous glass body sB having a uniform bulk density and pores is obtained.

この多孔質ガラス体tBを軸線に垂直に一定厚みで切断
することにより円盤状の多孔質ガラス板7を得ることが
できる。このような多孔質ガラス板は高純度の石英板、
ガラス板等の母材として有用である。次に具体的数値例
について説明する。
A disc-shaped porous glass plate 7 can be obtained by cutting this porous glass body tB perpendicularly to the axis at a constant thickness. Such porous glass plates are made of high-purity quartz plates,
It is useful as a base material for glass plates, etc. Next, specific numerical examples will be explained.

5iOIIaを原料として5i02多孔質ガラス体を作
成したところ合成直後の微粒子の大きさは約0.1μm
1嵩密度は中心付近で0.3g/Cm々周辺部で約0、
/ g/Cm”、平均o、rg7cm”であった。この
多孔質ガラス体を/300″Cで約20分加熱焼結処理
した結果、直径70mm、長さ210mm、嵩密度o、
sざg/am”で全体にわたり嵩密度が均一な多孔質ガ
ラス棒が得られた。この多孔質ガラス体を電子顕微鏡で
観察したところ粒子の大きさがo、is〜0.2!;l
1mで空孔の大きさがO1g〜!、0μmであり、板状
に容易に切断加工することができた。また上記と同一の
未焼結多孔質ガラス体を7600°Cで約30分間加熱
焼結処理した結果、直径3!;mm、長さ/1)0mm
When a 5i02 porous glass body was created using 5iOIIa as a raw material, the size of the fine particles immediately after synthesis was approximately 0.1 μm.
1 Bulk density is 0.3g/Cm near the center, approximately 0 at the periphery,
/ g/Cm", average o, rg7cm". As a result of heating and sintering this porous glass body at /300"C for about 20 minutes, it has a diameter of 70 mm, a length of 210 mm, a bulk density of o,
A porous glass rod having a uniform bulk density throughout the entire body was obtained with a particle size of sg/am''. When this porous glass body was observed with an electron microscope, the particle size was o, is ~ 0.2!; l
The size of the pores is O1g in 1m! , 0 μm, and could be easily cut into a plate shape. Moreover, as a result of heating and sintering the same unsintered porous glass body as above at 7600°C for about 30 minutes, the diameter was 3! ;mm, length/1)0mm
.

嵩密度2.0 g/Cm3で石英ガラスの真密度(2,
2g/Cm’)に近く全体にわたり嵩密度が均一な多孔
質ガラス棒が得られた。この多孔質棒中の空孔の大きさ
は0.1−0.3μmで前述の/!;00″C焼結処理
のものに比べて空孔が小さくち密であり切断加工性は通
常の石英ガラスと類似したものであった。
The true density of quartz glass (2,
A porous glass rod with a uniform bulk density of approximately 2 g/Cm') was obtained. The size of the pores in this porous rod is 0.1-0.3 μm, as described above. The pores were smaller and denser than those subjected to 00''C sintering treatment, and the cutting workability was similar to that of ordinary quartz glass.

以上のように、焼結処理条件を制御することによって目
標とする大きさの空孔をもつ多孔質ガラス体が容易に得
られることが確認できた。
As described above, it was confirmed that a porous glass body with pores of a target size can be easily obtained by controlling the sintering conditions.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(イ)、(ロ)、(ハ)は本発明の一実施例を示
す図、第2図(イ)、(ロ)、()→は本発明の他の実
施例を段階的に示す図である。 /・・・バーナ !・・譬火炎 3・・・ガラス微粒子 q・ ・・基材!;A、SB・
・・多孔質ガラス体 6・・・加熱装置 7・・・多孔質ガラス板特許出願人
 日本板硝子株式会社 代理人 弁理士 大 野 精 市 第1図 (イ) (八) 第2 (イ) (八)
Figures 1 (a), (b), and (c) are diagrams showing one embodiment of the present invention, and Figure 2 (a), (b), and ()→ show another embodiment of the present invention step by step. FIG. /...Burna! ...Flame 3...Glass particles q...Base material! ;A, SB・
... Porous glass body 6 ... Heating device 7 ... Porous glass plate Patent applicant Nippon Sheet Glass Co., Ltd. Agent Patent attorney Seiichi Ohno Figure 1 (a) (8) No. 2 (a) ( Eight)

Claims (2)

【特許請求の範囲】[Claims] (1)ガラス形成原料を火炎中で反応させることによっ
て得られるガラス微粒子を基材に堆積させて多孔質ガラ
ス体を作成し、次いでこれを高温で加熱焼結して均一な
嵩密度を有する多孔質ガラス体とした後板状に切断加工
することを特徴とする多孔質ガラス板の製造方法。
(1) Glass fine particles obtained by reacting glass forming raw materials in a flame are deposited on a base material to create a porous glass body, which is then heated and sintered at high temperature to create a porous glass body with uniform bulk density. 1. A method for producing a porous glass plate, which comprises forming a porous glass body into a glass body and then cutting the porous glass plate into a plate shape.
(2)特許請求の範囲第1項において、ガラス形成原料
としてSiCl_4を用いる多孔質ガラス板の製造方法
(2) A method for producing a porous glass plate according to claim 1, using SiCl_4 as a glass forming raw material.
JP16336984A 1984-08-02 1984-08-02 Preparation of porous glass plate Granted JPS6140827A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16336984A JPS6140827A (en) 1984-08-02 1984-08-02 Preparation of porous glass plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16336984A JPS6140827A (en) 1984-08-02 1984-08-02 Preparation of porous glass plate

Publications (2)

Publication Number Publication Date
JPS6140827A true JPS6140827A (en) 1986-02-27
JPH0556293B2 JPH0556293B2 (en) 1993-08-19

Family

ID=15772573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16336984A Granted JPS6140827A (en) 1984-08-02 1984-08-02 Preparation of porous glass plate

Country Status (1)

Country Link
JP (1) JPS6140827A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008069194A1 (en) * 2006-12-05 2008-06-12 Shin-Etsu Quartz Products Co., Ltd. Synthetic opaque quartz glass and process for production thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008069194A1 (en) * 2006-12-05 2008-06-12 Shin-Etsu Quartz Products Co., Ltd. Synthetic opaque quartz glass and process for production thereof
JP5314429B2 (en) * 2006-12-05 2013-10-16 信越石英株式会社 Synthetic opaque quartz glass and method for producing the same
KR101403349B1 (en) * 2006-12-05 2014-06-05 신에쯔 세끼에이 가부시키가이샤 Synthetic opaque quartz glass and process for production thereof
US10843954B2 (en) 2006-12-05 2020-11-24 Shin-Etsu Quartz Products Co., Ltd. Synthetic opaque quartz glass and method for producing the same

Also Published As

Publication number Publication date
JPH0556293B2 (en) 1993-08-19

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