JP3568404B2 - Method and apparatus for manufacturing quartz glass crucible - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method and an apparatus for manufacturing a quartz glass crucible used for a silicon single crystal pulling apparatus, for example.
[0002]
[Prior art]
A silicon single crystal used as a substrate of a semiconductor device is mainly manufactured by a Czochralski method (CZ method). In this method, a polycrystalline silicon raw material is charged in a crucible, the polycrystalline silicon raw material is melted by heating the crucible from the surroundings, and the suspended seed crystal is immersed in a silicon melt and gradually pulled up. , For growing a silicon single crystal ingot.
Conventionally, a crucible made of quartz glass has often been used as a crucible for performing the CZ method. A method for producing this type of quartz glass crucible is disclosed in, for example, Japanese Patent Application Laid-Open No. 1-160836.
[0003]
That is, the manufacturing method disclosed therein involves rotating a hollow mold made of a carbonaceous material having a predetermined porosity and air permeability, loading a quartz glass raw material powder therein, and centrifuging the raw material powder. Is formed in layers, and while the raw material powder is melted by a heat source such as an arc, the outside of the hollow mold is depressurized by a vacuum device to obtain a quartz glass crucible.
This type of quartz glass crucible for producing a single crystal ingot by the above-mentioned CZ method has a better inner surface state, and in particular, a higher crucible perimeter in order to prevent the occurrence of crystal defects and the like in the single crystal ingot. At present, wall thickness dimensional accuracy is required, and even when a crucible is manufactured by the above-described process, a skilled worker almost always manufactures a crucible while supplying a quartz glass raw material powder as a raw material.
[0004]
On the other hand, quartz glass crucibles form an opaque quartz glass layer in which a number of closed pores are evenly distributed on the outer periphery to transfer heat uniformly to the silicon melt, and minimize erosion to the silicon melt. In order to further ensure the stability of the melt surface, a so-called double-layer crucible having a transparent quartz glass layer substantially free of air bubbles on the inner peripheral side is generally used.
Then, in order to manufacture such a two-layer crucible, in the manufacturing method described above, when loading the quartz glass raw material powder into the rotated carbonaceous hollow mold, first, the coarse-grained raw material powder is charged. Further, a method of loading finer raw material powder on the inner surface thereof is usually performed, and at present, this loading is also performed by a skilled worker manually.
[0005]
[Problems to be solved by the invention]
However, even when performed by skilled workers, it is inevitable that the dimensional accuracy of the inner surface state and the thickness of the crucible will vary. There is a technical problem that a high working efficiency has not been obtained.
The present invention has been made in view of the technical problem as described above, no irregularities are formed on the inner surface of the crucible, and the thickness of the crucible is substantially uniform over the entire circumference of the crucible, or, for example, It is an object of the present invention to provide a manufacturing method and a manufacturing apparatus capable of achieving an arbitrary thickness control such as increasing the thickness of only a small R portion of a crucible bottom with high accuracy. Also, it is an object of the present invention to provide a manufacturing method and a manufacturing apparatus in which the quality of the inner surface state and the dimensional accuracy of the crucible are hardly varied, and in addition, in manufacturing the two-layer crucible as described above, the work efficiency can be improved. The purpose is.
[0006]
[Means for Solving the Problems]
The method for manufacturing a quartz glass crucible according to the present invention made to achieve the above-mentioned object has a bottomed shape in which an inner peripheral surface is formed in a cylindrical shape and is rotatably arranged so that an axis is in a vertical direction. The outer frame and the outer peripheral surface are formed in a columnar shape, are inserted into the outer frame from above so that the axis is in the vertical direction, and are arranged rotatably with the axis shifted from the axis of the outer frame. By rotating the inner frame and the inner frame together in the same direction, and supplying the quartz glass raw material powder from the upper portion of the narrow gap portion of the gap formed by the outer frame and the inner frame, Forming a raw material powder layer on the surface, moving the inner frame to the upper portion by substantially aligning the axis of the outer frame with the axis of the inner frame, and pulling the inner frame from the outer frame; The heating means is inserted into the outer frame in the state and inserted into the inner peripheral portion of the outer frame and melted, and the quartz glass layer It made so as to obtain a quartz glass crucible by a step of forming.
[0007]
Further, the method for manufacturing a quartz glass crucible according to the present invention is characterized in that an inner peripheral surface is formed in a cylindrical shape, and a bottomed outer frame rotatably disposed so that an axis thereof is in a vertical direction, and an outer peripheral surface includes: The outer frame and the inner frame are formed by rotating in the same direction together with the rotatable inner frame inserted from above into the outer frame so that the axis is in the vertical direction and formed in a cylindrical shape. Forming a plurality of powder layers of different raw materials in the thickness direction on the inner peripheral surface of the outer frame by supplying different quartz glass raw material powders to the outer frame side and the inner frame side from the upper portion of the gap to be formed. And, by moving the inner frame to the upper part, a step of pulling out the inner frame from the outer frame, and inserting a heating means into the outer peripheral portion of the outer frame in a rotating state into the outer peripheral portion of the outer frame to be melted, and using different raw materials. Forming a quartz glass layer in a layered manner in the thickness direction. Made to obtain.
[0008]
In this case, from the upper part of the gap formed by the outer frame and the inner frame, in order to supply different quartz glass raw material powder between the outer frame side and the inner frame side, a partition plate is provided inside and simultaneously. It is preferable to use raw material powder supply devices that discharge different quartz glass raw material powders.
Also, in the case of manufacturing the above-mentioned multilayer quartz glass crucible, preferably, the outer frame and the inner frame are arranged in a state where the axis of the outer frame is shifted from the axis of the inner frame, and the outer frame and the inner frame are rotated together in the same direction. Thus, the raw material powder of quartz glass is supplied from above the narrow gap portion of the gap formed by the outer frame and the inner frame.
Further, in any case of adopting any of the manufacturing methods described above, the heating means is preferably made to use arc heat generated between the pair of electrodes, and the rotation speed of the outer frame and the inner frame is Both are desirably set in the range of 70 to 85 rpm.
[0009]
On the other hand, the apparatus for manufacturing a quartz glass crucible according to the present invention has a bottomed outer frame in which the inner peripheral surface is formed in a cylindrical shape and is rotatably arranged so that the axis is in the vertical direction, and the outer peripheral surface has The outer frame is formed in a columnar shape, is disposed in the outer frame so that the axis is in the vertical direction, and is shifted from the axis of the outer frame when inserted into the outer frame. The raw material powder is supplied from the upper part of the narrow gap portion of the gap formed between the inner frame and the outer frame and the inner frame that is driven to rotate in the same direction, and the raw material powder layer is formed on the inner peripheral surface of the outer frame. The raw material powder supply device arranged so as to cause the raw material powder layer formed on the inner peripheral surface of the outer frame to be inserted into the outer frame in a state where the inner frame is pulled out from the outer frame, and quartz A heating means for forming a glass crucible is provided as a basic configuration.
[0010]
In this case, in the raw material powder supply device, a partition plate is disposed inside, and different raw material powders are supplied between the outer frame side and the inner frame side in the thickness direction, thereby forming a multilayer quartz glass crucible. Is configured to obtain
And preferably, the supply port of the raw material powder supply device is a narrow gap portion on a horizontal line connecting the axis of the outer frame and the axis of the inner frame, and the center of the axis of the inner frame sandwiching the line. It is desirable that they are arranged within the range of ± 10 degrees, and it is more desirable that the position be on the near side in the rotation direction on a horizontal line connecting the axis of the outer frame and the axis of the inner frame.
[0011]
According to the method and apparatus for manufacturing a quartz glass crucible described above, a bottomed outer frame rotatably disposed so that the axes thereof are perpendicular to each other, and an inner frame disposed in the outer frame. , Are both driven to rotate in the same direction. Then, the quartz glass raw material powder is supplied from above the narrow gap portion of the gaps formed by displacing the axis center of the inner frame with respect to the axis center of the outer frame.
Thereby, the supplied raw material powder is held on the inner surface side of the outer frame by the centrifugal force caused by the rotation of the outer frame to form a raw material layer, and the raw material layer is pushed by a narrow gap between the outer frame and the inner frame. It is pressed to form a uniform thickness.
[0012]
On the other hand, both the outer frame and the inner frame are driven to rotate in the same direction, and the raw material powder of quartz glass is supplied from the upper portion of the narrow gap portion due to the misalignment of the axes of both. Thus, it is possible to form a raw material layer having a uniform thickness on the inner peripheral surface of the outer frame while minimizing the frictional action between the outer frame and the inner frame via the raw material layer.
Then, for example, an arc heating means is inserted into the inner peripheral portion of the outer frame in a rotating state, and the raw material layer is heated and melted, whereby a finished quartz glass crucible can be obtained.
[0013]
Further, by supplying different quartz glass raw material powders to the outer frame side and the inner frame side from above the gap formed by the outer frame and the inner frame, a plurality of raw material powders are provided on the inner peripheral surface of the outer frame. The layers can be formed to a substantially uniform thickness.
For this, for example, a raw material supply hopper that provides a partition plate inside and simultaneously discharges different raw material powders of quartz glass can be used, and a multilayer raw material powder layer is simultaneously melted by an arc rotation melting method as described above. Thus, a finished quartz glass crucible having a multilayer structure can be obtained.
According to this manufacturing method, it is possible to obtain a finished quartz glass crucible much more efficiently than in the above-described conventional manufacturing method, and it is possible to improve the productivity.
[0014]
In any of the manufacturing methods described above, it is preferable that the rotation speeds of the outer frame and the inner frame are both in the range of 70 to 85 rpm. That is, when the rotation speed is less than 70 rpm, a problem occurs that the raw material powder layer formed on the inner peripheral surface of the outer frame collapses, and the yield of the crucible finished product is reduced. When the rotation speed exceeds 85 rpm, the supplied raw material powder does not enter the lower bottom portion of the outer frame but stays at the upper portion, and the whole material becomes thinner. Yield decreases.
[0015]
Further, as described above, the supply position of the raw material powder is set at ± 10 degrees around the axis of the inner frame sandwiching the line in a narrow gap portion on a horizontal line connecting the axis of the outer frame and the axis of the inner frame. By setting in the range, a more uniform crucible finished product can be obtained. That is, when the ratio exceeds this range, the raw material powder easily accumulates at the bottom, and it is difficult to form the side wall portion of the powder compact. Even if a crucible-shaped powder compact is formed on the inner peripheral surface of the outer frame, a difference in packing density of the raw material powder between the bottom portion and the side wall portion (dense bottom portion and sparse sidewall portion) occurs, and arc melting occurs. In this case, there arises a problem that the bulk density of the crucible, in other words, the distribution of closed pores varies.
[0016]
In particular, it is more preferable to set the supply position of the raw material powder in a range of 0 to 10 degrees, which is on the near side in the rotation direction starting from a horizontal line connecting the axis of the outer frame and the axis of the inner frame. By setting the supply position of the raw material powder in the above-described range, the filling of the raw material powder in the side wall portion of the powder compact becomes good, and the homogeneity of density and the uniformity of the thickness of the quartz glass crucible are easily obtained. .
[0017]
Here, the outer frame is preferably made of a carbonaceous material, particularly high-purity graphite having an ash content of 10 ppm or less. The reason is that when the raw material powder is pressed by the inner frame to form a crucible-shaped powder compact, it has a certain coefficient of friction and is relatively porous, so that it is roughened to a certain degree by ordinary machining. This is because the material has a surface state. Further, the material can be easily purified.
On the other hand, the inner frame is preferably made of a siliceous material, particularly high-purity quartz glass. In addition, a fused quartz refractory whose main raw material is a powder obtained by pulverizing and classifying fused quartz may be used. The reason for this is that the inner frame has a high degree of rubbing with the raw material powder, and wear resistance is important. Moreover, since wear is inevitable, high purity is more preferable. In particular, when a carbon material is used as in the case of the outer frame, carbon powder may be mixed into the powder compact and cause abnormal foaming when the arc is melted.
[0018]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, a method and an apparatus for manufacturing a quartz glass crucible according to the present invention will be described based on an embodiment shown in the drawings. FIG. 1 is a sectional view showing each step of manufacturing a quartz glass crucible in accordance with the manufacturing method according to the present invention. The upper half in FIGS. 1 (a) to 1 (e) is shown in the state of the center in the vertical direction, and the lower half in FIGS. 1 (a) to 1 (d) is shown in the state of the center in the horizontal direction. I have.
As shown in FIG. 1A, a bottomed outer frame 1 whose inner peripheral surface is formed in a cylindrical shape and is rotatably arranged so that an axis 1a is vertical, and an outer peripheral surface is cylindrical And a rotatable inner frame 2 inserted from above into the outer frame 1 so that the axis 2a is in the vertical direction.
[0019]
The outer frame 1 is entirely made of, for example, a carbonaceous material, and its inner bottom is formed in a hemispherical shape along the diameter of the inner peripheral surface. The inner frame 2 is entirely formed of, for example, a quartz glass material, and the lower end portion is formed in a hemispherical shape along the diameter of the outer peripheral surface. In the state shown in FIG. 1A, the axis 2 a of the inner frame 2 is arranged so as to be shifted from the axis 1 a of the outer frame 1.
For example, in the case of manufacturing an 18-inch quartz glass crucible, the deviation between the axes 1a and 2a is about 2 to 3 mm.
The outer frame 1 and the inner frame 2 are configured to be driven to rotate in the same direction about their respective axes as rotation centers.
[0020]
Reference numeral 3 shown in FIG. 1 (a) is a hopper as a raw material powder supply device for supplying a raw material powder of quartz glass, and a raw material supply port 3a of the hopper 3 is connected to the outer frame 1 which is in a rotating state. The quartz glass raw material powder G is supplied between the outer frame 1 and the inner frame 2 from above the narrow gap portion of the gap formed between the outer frame 1 and the inner frame 2.
FIG. 1B shows a state in which the raw material powder G is supplied from the hopper 3 between the outer frame 1 and the inner frame 2, and the supplied raw material powder G is formed in a layer on the inner peripheral surface of the outer frame 1. Is shown.
[0021]
FIG. 2 is a horizontal sectional view showing a state in which the raw material powder G is supplied between the outer frame 1 and the inner frame 2 to form a raw material powder layer on the inner peripheral surface of the outer frame 1. The raw material supply port 3a of the hopper 3 is located at a position slightly closer to the rotation direction in a narrow gap portion among gaps formed by the outer frame 1 and the inner frame 2 which are both rotated, that is, a reference numeral in FIG. 4 are arranged.
The end face of the supply port of the raw material powder supply device denoted by reference numeral 4 has the center 2a of the inner frame sandwiching the horizontal line L1 connecting the axis 1a of the outer frame 1 and the axis 2a of the inner frame 2 as described above. Is preferably set within a range of ± 10 degrees, and in this embodiment, the powder supply port end face 4 is disposed at a position on the near side in the rotation direction of the line L1 at 10 degrees.
[0022]
In this case, when an 18-inch quartz glass crucible is manufactured as described above, the amount of displacement between the axes 1a and 2a is about 2 to 3 mm, and the distance between the two in a narrower gap is about 15 mm. You.
Therefore, the raw material powder G supplied between the outer frame 1 and the inner frame 2 causes the eccentric state of the outer surface of the inner frame 2, particularly the portion close to the inner peripheral surface of the outer frame 1, to cause the inside of the outer frame 1. It is pressed against the peripheral surface and is formed into a uniform layer of about 15 mm by the centrifugal force.
[0023]
With the raw material powder layer G formed on the inner peripheral surface of the outer frame 1 in this way, as shown in FIG. 1C, the axis 1a of the outer frame 1 and the axis 2a of the inner frame 2 are aligned. The inner frame 2 is pulled out from the outer frame 1 by causing the inner frame 2 to move upward as shown in FIG.
Subsequently, as shown in FIG. 1 (e), an arc discharge device composed of a pair of electrodes 5a and 5b as a heating means is inserted from above into the outer frame 1 in a rotating state, and generated on the electrodes 5a and 5b. The raw material powder layer G formed on the inner peripheral surface of the outer frame 1 is melted by the generated arc discharge heat to form a quartz glass layer, and a quartz glass crucible is formed in the outer frame 1. The quartz glass crucible formed in the outer frame 1 in this manner is removed from the outer frame 1 to obtain a finished crucible.
[0024]
Here, for example, in Japanese Utility Model Publication No. 6-16926, the thickness of the upper edge portion of the quartz glass crucible is formed to be thinner over the entire circumference than the thickness of the other portions, and the inner surface has a step due to the thin portion. A configuration of a crucible is disclosed.
FIG. 3 shows a preferred mode for obtaining a quartz glass crucible having such a configuration, for example. That is, FIGS. 3A and 3B respectively correspond to FIGS. 1A and 1B described above, and are slightly enlarged.
[0025]
As shown in FIG. 3, a thick portion 2 b is arranged on the upper part of the inner frame 2 so as to be coaxial with the axis 2 a of the inner frame 2. A raw material powder layer G is formed on the inner peripheral surface of the frame 1. In this case, the thickness of the thin portion Gt in the raw material powder layer is appropriately adjusted by selecting the outer diameter of the upper end portion of the inner frame 2 and the diameter of the lower cylindrical portion.
The processing after forming the powder compact in this way is the same as (c) to (e) shown in FIG. Then, the crucible body is formed by the arc rotation melting method.
[0026]
Next, FIGS. 4 and 5 show another preferred embodiment which is made in the manufacture of a quartz glass crucible. That is, FIG. 5 shows that different quartz glass raw material powders are supplied to the outer frame side and the inner frame side from the upper part of the gap formed by the outer frame and the inner frame, both of which are rotated in the same direction. 1 shows a state in which a plurality of powder layers are formed from different raw materials. In FIG. 4, reference numerals 1 and 2 indicate a part of the outer frame and the inner frame.
In this embodiment, a raw material supply hopper 3 provided with a partition plate 3b therein is used to supply different quartz glass raw material powders G1 and G2 to the gap between the outer frame 1 side and the inner frame 2 side. .
[0027]
That is, the partition plate 3b is disposed at the center of the hopper 3, divides the inside of the hopper 3 into two parts, and the partition plate 3b is disposed up to a portion reaching the raw material supply port 3a of the hopper 3. Therefore, by supplying different raw material powders G1 and G2 to the inside of the two divided hoppers, different raw material powders are simultaneously discharged, and a plurality of powder layers G1 and G2 formed of different raw materials in the gap thickness direction. Can be formed.
The above-mentioned different quartz glass powders are, for example, powders having different average particle diameters (G1: coarse particles, G2: fine particles) or powders having different types (G1: natural quartz, G2: Synthetic silica).
[0028]
The processing steps after forming the raw material powder in layers in this manner are the same as those shown in FIG. FIG. 5 shows a cross-sectional state of the finished crucible product which has been removed from the outer frame 1 through the arc rotation melting step. As shown in FIG. 5, a two-layer crucible having a quartz glass layer formed of the raw material powder G1 on the outside and a quartz glass layer formed of the raw material powder G2 on the inside can be obtained. As a result, a quartz glass crucible having a multilayer structure in which the boundaries between the respective layers are appropriately mixed can be efficiently produced.
[0029]
In this case, as the quartz glass raw material powder G1 supplied to the outside, for example, a quartz glass raw material powder composed of coarse particles having an average of 100 μm is used, and as the quartz glass raw material powder G2 supplied to the inside, quartz composed of fine particles having an average of 50 μm is used. By using glass raw material powder, uniform heat distribution can be obtained by including microbubbles on the outside, and the inner surface is almost bubble-free, and a two-layer structure in which a transparent quartz glass layer with a smooth surface is formed A quartz glass crucible can be obtained.
[0030]
【The invention's effect】
As is clear from the above description, according to the method and the apparatus for manufacturing a quartz glass crucible according to the present invention, the outer frame and the inner frame are slightly eccentric and are driven to rotate in the same direction, and the gap between the two is reduced. Since the quartz glass powder is supplied from the narrow gap, the raw material powder layer can be formed with a uniform thickness set by the narrow gap between the outer frame and the inner frame. Therefore, the finished crucible product can secure a good inner surface state with as little irregularities as possible and a higher wall thickness dimensional accuracy especially around the entire crucible, and can reduce the occurrence of crystal defects and the like in the single crystal ingot. It becomes.
[0031]
Also, when obtaining a quartz glass crucible having a configuration in which the thickness of the upper edge is made thinner than the thickness of the other portions over the entire circumference, the outer diameter of the upper end of the inner frame and the diameter of the lower cylindrical portion thereof are also reduced. By selecting, the thickness of the upper edge portion can be freely adjusted, high dimensional accuracy can be ensured, and work efficiency can be improved.
Further, for example, by using a raw material supply hopper that provides a partition plate inside and simultaneously discharges different silica glass raw material powders, it is possible to simultaneously form a plurality of raw material powder layers, and to use the arc rotation melting method together As a result, it is possible to efficiently produce a quartz glass crucible having a multilayer structure in which the boundary portions are appropriately mixed.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view illustrating a method for manufacturing a quartz glass crucible according to the present invention in the order of steps.
FIG. 2 is an enlarged sectional view showing a supply position of a raw material powder in a step shown in FIG.
FIG. 3 is a cross-sectional view showing some steps of another preferred manufacturing method according to the present invention.
FIG. 4 is a cross-sectional view showing some steps of still another preferred manufacturing method according to the present invention.
FIG. 5 is a sectional view showing a form of a product manufactured by the manufacturing method shown in FIG. 4;
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Outer frame 1a Outer frame axis 2 Inner frame 2a Inner frame axis 2b Thick part 3 Raw material powder supply device (hopper)
3a Raw material supply port 3b Partition plate 4 Raw material supply port end face 5a, 5b Electrode (heating means)
G, G1, G2 Raw material powder (raw material powder layer)

Claims (8)

The inner peripheral surface is formed in a cylindrical shape, and a bottomed outer frame rotatably arranged so that the axis is in the vertical direction, and the outer peripheral surface is formed in a columnar shape, and the axis is in the vertical direction. The inner frame is inserted into the outer frame from above, and the inner frame that is rotatably arranged with the axis shifted from the axis of the outer frame is rotated together in the same direction. A step of forming a raw material powder layer on the inner peripheral surface of the outer frame by supplying quartz glass raw material powder from the upper portion of the narrow gap portion among the formed gaps;
By moving the inner frame upward with the axis of the outer frame substantially aligned with the axis of the inner frame, a step of pulling out the inner frame from the outer frame,
A method of producing a quartz glass crucible by a step of inserting a heating means into the inner periphery of the outer frame in a rotating state and melting the same to form a quartz glass layer. The inner peripheral surface is formed in a cylindrical shape, and a bottomed outer frame rotatably arranged so that the axis is in the vertical direction, and the outer peripheral surface is formed in a columnar shape, and the axis is in the vertical direction. By rotating the rotatable inner frame inserted from above into the outer frame together in the same direction, the outer frame side and the inner frame side from the upper part of the gap formed by the outer frame and the inner frame Supplying different quartz glass raw material powders to form a plurality of powder layers of different raw materials in the thickness direction on the inner peripheral surface of the outer frame,
A step of pulling the inner frame from the outer frame by moving the inner frame to the upper part,
A step of inserting a heating means into the inner frame of the outer frame in a rotating state and melting the inner frame to form a quartz glass layer of a different material in a layered manner in a thickness direction to obtain a silica glass crucible. Manufacturing method. From the upper part of the gap formed by the outer frame and the inner frame, in order to supply different quartz glass raw material powders between the outer frame side and the inner frame side, a partition plate is provided inside and simultaneously different quartz 3. The method for producing a quartz glass crucible according to claim 2, wherein a raw material powder supply device that discharges the glass raw material powder is used. It is arranged with the axis of the outer frame and the axis of the inner frame shifted from each other, by rotating the outer frame and the inner frame together in the same direction, of the gap formed by the outer frame and the inner frame, The method for producing a quartz glass crucible according to claim 2 or 3, wherein the quartz glass raw material powder is supplied from above the narrow gap. The method for manufacturing a quartz glass crucible according to any one of claims 1 to 4, wherein a rotation speed of the outer frame and the inner frame is 70 to 85 rpm. A bottomed outer frame whose inner peripheral surface is formed in a cylindrical shape and is rotatably arranged so that the axis is in the vertical direction,
A state in which the outer peripheral surface is formed in a columnar shape, is disposed in the outer frame so that the axis is in the vertical direction, and the axis is shifted from the axis of the outer frame when inserted into the outer frame. An inner frame that is driven to rotate in the same direction with the outer frame,
Among the gaps formed by the outer frame and the inner frame, the raw material powder is supplied from above the narrow gap portion, and a raw material powder supply device arranged to form a raw material powder layer on the inner peripheral surface of the outer frame,
In a state where the inner frame is pulled out from the outer frame, a heating means for forming a quartz glass crucible by melting the raw material powder layer formed on the inner peripheral surface of the outer frame by being inserted into the outer frame is provided. Quartz glass crucible manufacturing equipment. In the raw material powder supply device, a partition plate is disposed inside, and by supplying different raw material powders in the thickness direction between the outer frame side and the inner frame side, a multilayer quartz glass crucible is obtained. 7. The apparatus for manufacturing a quartz glass crucible according to claim 6, wherein: The supply port of the raw material powder supply device is a narrow gap portion on a horizontal line connecting the axis of the outer frame and the axis of the inner frame, and ± 10 degrees around the axis of the inner frame sandwiching the line. The apparatus for manufacturing a quartz glass crucible according to claim 6 or 7, wherein the apparatus is arranged in the range of (1).

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