JPS6139160B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a translational circular motion table.

Conventionally, this type of movable table generally moves in an arcuate translation under a fixed swing radius. Furthermore, when it is desired to change the radius of rotation of the translational movement, there is a method of combining the movement of the x- and y-tables in the x direction and the y-direction (also called an interpolation method) to obtain a circular translational movement of the xy table. These conventional methods have the disadvantage that the arc radius cannot be changed, or even if the arc radius can be changed, the table control method becomes complicated in the case of an interpolation method. Furthermore, the interpolation method has the disadvantage that it is difficult in principle to obtain a perfect circle because circular motion is obtained from a combination of linear motions of the x and y tables.

An object of the present invention is to eliminate such drawbacks and to provide a table that can perform translational movement of a circle or arc of a desired radius by simply providing radius information and angle information of the circular arc of translational movement. Still another object of the present invention is to provide a circular or arcuate graphic drawing device or graphic processing device using a table that performs translational motion according to the present invention. That is, according to the present invention, a table that moves in the x and y directions, a drive shaft that transmits force only in the x and y directions or their combined direction and is connected to the table at one point and does not apply rotational force to the table; a drive shaft support having a rack at one end for linearly moving the drive shaft; a pinion meshing with the rack;
It is equipped with a motor that rotates the pinion, a guide that holds the support base so that the support base can move linearly, and a motor that rotates the guide, and the shaft that rotates the pinion and the shaft that rotates the guide are on concentric axes, Said 2
By rotating the two motors synchronously or asynchronously, a translation table is obtained in which the position of the drive shaft is rotated by a required amount from the concentric shaft.

Further, the translation table according to the present invention,
Energy from the energy source is irradiated onto the energy absorbing member using a combination moving table with an x/y table that moves independently in the direction and the y direction, and a wave energy output source such as a laser or an electron beam. A graphic drawing device or graphic processing device is obtained.

Next, one embodiment of the present invention will be described in detail. FIG. 1 is an operational explanatory diagram showing typical movements of a moving table that performs translational movement according to the present invention, and 1 is a moving table. Figure 1a is an explanatory diagram for the case of performing circular translational motion with radius r ₁ , where the moving table moves to the left (x direction) by an arbitrary point r ₁ toward the plane of the paper and reaches the radius r 1. It shows that it is reached by a circular translation of ₁ , and the angle made with any point is θ ₁ . FIG. 1b shows an arcuate translation locus of radius r ₂ that moves by an arcuate motion radius r ₂ centering on an arbitrary reference position and in the composite direction of x and y. θ ₃ is the angle made by and
θ ₂ indicates that the arbitrary point has moved in a direction that makes an angle of θ ² with the x-axis. Figure 1c shows that has made a circular motion with radius r ₃ .

FIG. 2 is a mechanical configuration diagram showing an embodiment of the present invention, in which 1 is a moving table and 2 is a moving table drive shaft, the upper part of which is joined to the moving table 1 and the other end is fixed to the slider 3. The drive shaft 2 can apply force to the movable table 2 in the x and y directions and their combined direction at the junction point thereof, but cannot apply rotational force to the movable table 1. The x and y directions here are as shown in FIG. The slider 3 has a shape as shown in FIG. 2, and one end of the lower part is made into a rack, and the other end faces the rack and is guided by a guide 4. Further, a drive shaft 2 is firmly connected to the upper part of the slider 3. Further, the movable table 1 is guided in the y direction by two guides 5, and the guides 5 are firmly fixed to the movable plate 6. The moving plate 6 is guided by two guides 7 in the x direction. When the guide 7 is based on the device casing 8, the moving table 1 can be moved in the x, y, and composite directions.

Reference numeral 9 denotes a motor which rotates by the required amount at the required speed for the required time in response to an external signal. 10 is a gear connected to the motor 9. Further, the motor 9 is attached to the housing 8.

11 is a gear that meshes with gear 10, and shaft 1
2, and the shaft 12 is firmly connected to the guide 4 at its upper end. Therefore, when the motor 9 rotates, the rotation is transmitted to the guide 4 through the gears 10 and 11 and the shaft 12. Reference numeral 13 denotes a motor which, like the motor 9, rotates by the required amount at the required speed for the required time in response to an external signal. 14 is a gear and motor 1
It is connected to 3. Similarly, 15 is a gear and is gear 1.
4 is interlocked. A shaft 16 is connected to a pinion 17 through an internal hole formed in the shaft 12. That is, a pinion 17 is attached to the upper end of the shaft 16, and a gear 15 is attached to the lower end. This relationship is shown in the cross-sectional view of the main part in FIG.

Therefore, when the motor 13 rotates, the gears 14,1
5. The pinion 17 rotates through the shaft 16, and the slider 3, which engages with the pinion at the rack portion, moves linearly in one direction while being guided by the guide 4. Naturally, the drive shaft mounted on the slider 3 also moves by the same amount in the same direction, and the moving table 1 also moves in x and y while being guided by the guides 5 and 7 by the force applied from the drive shaft 2. move in a direction or a composite direction. In FIG. 2, the slider 3 is guided by the guide 4 so that the moving direction is in the y direction, but when a rotation signal indicating the rotation angle of the guide 4 is given to the motor 9,
The moving direction of the slider 3 is not particularly limited to the x and y axis directions, but can be moved in the composite direction of x and y, that is, in any direction of 360 degrees,
A moving table 1 connected via a drive shaft 2
will also follow the movement.

FIG. 4 is a plan view of the slider 3. In FIG. 4, the center of the shaft 16 and the center of the drive shaft 2 are separated by r. If the slider 3 and pinion 17 rotate in the same direction and at the same speed in the direction of arrow A in this state, the drive shaft 2 and shaft 1 on the slider 3
Since the distance between the centers of 6 does not change, the axis 2 moves in a circle with a radius r. Therefore, as shown in Fig. 4, the shaft 16
If the centers of the drive shafts 2 and 2 are connected to each other with a distance r apart from each other, and a signal is given to the motors 9 and 13 so that the pinion 17 and the guide 4 rotate in the same direction at the same rotational speed, the movable table 1 will have a radius Performs circular translation of r. Next, the operation of the translation table according to the present invention as shown in FIG. 1b will be described.

The central axes of the shaft 16 and the drive shaft 2 in the reference position state are aligned.

Since the moving direction of the drive shaft 2 is at a position of θ ₂ with respect to the x-axis, in order to determine this direction, the guide 4
In order to orient the slider 3 in the above direction, the motors 9 and 13 are rotated by the required amount. The rotation of the motor 13 is such that when the guide 4 rotates in the direction of θ ₂ , the pinion 17 also rotates in the same direction and by the same angle, so that the shaft 1
This is to keep the axes of the drive shaft 2 and the drive shaft 2 aligned. Next, the motor 13 is driven to rotate the pinion 17 to move the drive shaft 2 by r ₂ in the direction of θ ₂ with respect to the previously determined x-axis. Next, when motor 9 and motor 13 are oriented by θ ₂ , the rotation angle of pinion 17 and guide 4 is converted to θ ₃ in the same direction.
When rotated by , the moving table 1 performs an arcuate translational movement of radius r ₂ toward ~. As explained above, when determining the circular translation radius, the motor 13 is rotated so that a relative positional deviation occurs between the pinion 17 and the rack portion of the slider 3. Also, when giving a circular translational motion with a constant radius to the moving table 1,
The motors 9 and 13 are rotated so that no relative positional deviation occurs between the racks of the pinion 17 and the slider 3. In this way, by combining the simultaneous rotation of the motors 9 and 13 or the rotation of only one of them as necessary, it is possible to easily obtain table motions as shown in FIG. 1 a, b, and c and their combinations. Therefore, it can be used effectively as a moving table for various precision machining operations.

Next, one embodiment of the application of the moving table according to the present invention will be described based on FIGS. 5 and 6. Figure 5 is a principle diagram of the wafer round processing device, Figure 6
The figure shows the shape of a wafer rounded. In FIG. 6, 23 is a wafer, and 41 is a pellet formed from a wafer into a relatively large circle. 4
2 is a small pellet. In this embodiment, the table is moved in circular translation while irradiating the wafer with a laser beam, and various round processing of wafers is performed.

In FIG. 5, reference numeral 20 denotes a laser light source, which emits laser light only when a signal is applied from the drive circuit 30. In FIG. Reference numeral 21 denotes a reflecting mirror, and the laser beam emitted from the laser light source is bent by 90 degrees, focused by a focusing lens 22, and irradiated onto a wafer 23. 24 is a wafer mount, and 25 is a translation table according to the present invention. 26 is an x,y table,
Move the wafer to the required x and y coordinate position. 2
8 is a drive circuit for the translation table 25, 27 is a drive circuit for the x, y table 26, and 29 is a computer.

In FIG. 6, the x, y table 26 moves
Place wafer 2 in a position that can be irradiated with the laser beam at position 0 ₁ .
carry 3. Next, the translation table 25 is shown in FIG.
Do the exercises shown below. If the laser beam is irradiated only during ~ in Figure 1c during this period, 41
One round pellet as shown in the figure is made. Next, the x, y table 26 moves the wafer to the position ₀₂ where the laser beam is irradiated, and performs the same round processing.

The round cutting of the small pellets 42 can be achieved by the translational movement table 25 performing a translational movement of a circle with a small radius.

As described above, if the x, y table 26 is equipped with a translation table suitable for circular motion and the wafer is rounded by irradiating the wafer with a laser beam only when necessary, the control unit and simple computer will be very simple. You can perform round cutting of wafers using this program.

In this embodiment, a laser beam strong enough to cut a wafer is used as a light source, but it can also be applied to a graphic drawing device by appropriately combining a light source and an energy absorbing member.

The translational motion table of the present invention has a drive shaft 2 rotated by a motor 9, so that it can perform circular translation of a perfect circle, compared to a table that performs a circular translational motion synthesized by the movements of the x and y tables that perform linear motion. You can get an exercise table. Furthermore, since the radius can be changed by an external signal, it is very effective when used for drawing or processing circles or arc shapes.

[Brief explanation of the drawing]

Fig. 1 is an operational explanatory diagram showing typical movements of a translation table according to the present invention, Fig. 2 is a mechanical configuration diagram showing an embodiment of the present invention, and Fig. 3 is a cross-sectional view of the main parts of Fig. 2. 4 is a plan view of the slider 3, FIG. 5 is an explanatory diagram of a wafer round processing apparatus which is an application example of the present invention, and FIG. 6 is a diagram showing the shape of wafer round processing. DESCRIPTION OF SYMBOLS 1...Moving table surface, 2...Moving table drive shaft, 3...Slider, 4, 5...Guide, 6...Moving plate, 9, 13...Motor, 17...Pinion, 20...
Laser light source, 23... Wafer, 25... Translation table, 26... x, y table, 27, 28, 30
...Drive circuit.

Claims (1)

[Claims] 1 A table that moves in orthogonal x-axis and y-axis directions, and a drive shaft that transmits force only in the x- and y-axis directions or their combined direction, is connected to the table at one point, and does not apply rotational force to the table. , a support for the drive shaft having a rack at one end thereof for linearly moving the drive shaft, a pinion meshing with the rack, and a motor rotating the pinion;
The support base includes a guide that holds the support base for linear movement, and a motor that rotates the guide, and an axis that rotates the pinion and an axis that rotates the guide are coaxial axes, and the two By rotating two motors synchronously or asynchronously,
A translation table characterized in that the drive shaft is rotated by displacing the position of the drive shaft by a necessary amount from the concentric shaft.