JP2001150163A - Adjustment device of laser output - Google Patents

Abstract

PROBLEM TO BE SOLVED: To comparatively easily realize a fine intensity adjustment of a beam. SOLUTION: The adjustment device for laser output 20/20f is provided with a first light transmissible plate 21A turnable around the center of a first axis (axial center of a shaft 22A) perpendicular 7 to the laser output direction y of a laser beam source 10 and having front and rear faces parallel to the first axis, a second light transmissible plate 21B whose plate thickness is substantially the same as that of the first plate and is turnable around the center of a second axis (axial center of a shaft 22B) separated by a predetermined distance in the laser output direction y, and rotating mechanisms 23A and 23B for setting a rotation angle of the first and the second light transmissible plates 21A and 21B with a relation that their front faces are located on the sides of an isosceles triangle. Further, a laser beam radiation system having two divided laser heads, each of which is adjustable in the laser output intensity, is provided with a first output adjustment device 20f, a beam splitter 90, and a second output adjustment device 20s.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser processing apparatus for performing processing such as welding, cutting, drilling, heating, and melting, and more particularly to a laser processing apparatus for adjusting the strength of a processing output laser. The output adjustment device;

[0002]

2. Description of the Related Art Hitherto, adjustment of the output level of a high-output laser of random deflection has been mainly performed by adjusting the input voltage to a laser oscillator. In this method, there are problems such as a change in beam mode and an unstable oscillation output, and the output adjustment range is limited. There is also a method of lowering the beam intensity by inserting a beam splitter into the optical path, but the beam intensity cannot be changed in multiple steps or continuously.

[0003]

SUMMARY OF THE INVENTION The present invention provides a fine bead.
It is an object of the present invention to relatively easily adjust the system strength.

[0004]

Means for Solving the Problems (1) A first light source (10) rotatable about a first axis (22A) perpendicular to the laser output direction (y) of the laser light source (10). First having front and back surfaces parallel to one axis
A light-transmitting plate (21A); a second axis having substantially the same thickness as the first light-transmitting plate (21A) and being separated from the first axis by a predetermined distance in the laser output direction (y) and parallel to the first axis; 2nd rotatable around (22B axis)
A second light-transmitting plate (21B) having front and back surfaces parallel to the axis; and
A rotation mechanism (23A, 23B) for setting the rotation angles of the first and second light-transmitting plates (21A, 21B) so that their surfaces are located on the isosceles of the isosceles triangle. Laser output adjustment device (20 / 20f).

[0005] In order to facilitate understanding, reference numerals in parentheses for corresponding elements or corresponding items in the embodiment shown in the drawings and described later are added for reference. The same applies to the following.

As shown in FIG. 4, the first light transmitting plate (21A) is set at a rotation angle at which the incident angle of the laser beam LB becomes θ1, and the incident angle of the laser beam transmitted through the first light transmitting plate (21A) is changed. Similarly, when the second light-transmitting plate (21B) is set at a rotation angle that becomes θ1,
By defining the rotation angles of the first and second light-transmitting plates (21A, 21B) in such a relationship that their surfaces are located on the isosceles of an isosceles triangle, the first and second light-transmitting plates (21A, 21B) Are returned to the optical path which goes straight without passing through those light transmitting plates. That is, no displacement occurs in the x and y directions orthogonal to the laser beam output direction (y). As shown in FIG. 4, the reflections of PR1 and PR2 occur on the front and back surfaces of the first light transmitting plate (21A), resulting in losses. Similarly, reflections of PR3 and PR4 occur on the front and back surfaces of the second light transmitting plate (21B). Since this causes a loss, the laser output Pout is as follows: Pout = Pin- (PR1 + PR2 + PR3 + PR4) (1) Pin is the intensity of the output laser of the laser light source (10). When Pin is constant (fixed value), PR1, PR2, PR are set within a range where the incident angle θ1 is smaller than the total reflection angle.
3 and PR4 are values corresponding to the incident angle θ1, and as the incident angle θ1 is continuously increased within the range,
(PR1 + PR2 + PR3 + PR4) continuously increases, and Pout continuously decreases. Therefore, the output intensity Po
ut can be finely and continuously adjusted.

In the embodiment of the present invention, the rotating mechanism (23A, 23B) supports the first and second light transmitting plates (21A, 21B) with each table, and simultaneously rotates both tables in the opposite direction. By connecting to a mechanism that rotates at the same speed as the above, or assuming that both tables have the same diameter and their peripheral surfaces are in contact, a finger turning knob is connected and the operator turns it with his / her finger. It is a manual mechanism in which the first and second light transmitting plates (21A, 21B) rotate simultaneously by the same angle in opposite directions. However, in preferred first and second embodiments described later, the first and second light transmitting plates (21A, 21B) are driven by an electric mechanism so as to be automatically driven remotely. In the case where the two translucent plates are simultaneously driven in the opposite direction at the same speed and rotated by the same angle by using one electric mechanism and the coupling mechanism, the positions, postures or fine rotation angles of the two translucent plates are individually determined. Since it becomes difficult to make adjustments, in order to facilitate individual fine adjustments, each of the motors is individually driven to rotate, and the control means (8
0), the first and second light transmitting plates (21A, 21B) are automatically driven separately by the same angle in opposite directions.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (2) A beam splitter (90) interposed between a laser light source (10) and a first light transmitting plate (21A) to split a part of laser light. A third light-transmitting plate rotatable about a third axis perpendicular to the branching direction and having front and rear surfaces parallel to the third axis, and having substantially the same thickness as the third light-transmitting plate. A fourth light transmissive plate having front and back surfaces parallel to the fourth axis, rotatable about a fourth axis parallel to the third axis at a predetermined distance from the third axis in the branching direction, and (4) a second output adjusting device (20s) including a second rotation mechanism for setting the rotation angle of the four light-transmitting plates to a relationship where their surfaces are located on isosceles triangles. Laser output adjustment device.

FIG. 6 shows an example of this embodiment. The above (1)
The term output adjusting device (20) is used as a first output adjusting device (20f), and a part of the laser light is branched by interposing a beam splitter (90) between it and the laser light source (10). Then, the second output adjusting device (20s) is interposed in the branch path. By further interposing the second beam splitter and interposing the third output adjusting device in the branch path thereof, the number of branches is further increased, and each output adjusting apparatus is disposed in each branch path, thereby providing one output adjusting device. The laser beam output from the laser light source (1) can be branched into a plurality of beams, and the intensity of each of the branched laser beams can be individually, finely and continuously adjusted. (3) A first laser beam source (10) for projecting a laser beam onto the light receiving end of the light guide means (41), which is perpendicular to the laser output direction y toward the light receiving end. A first light-transmitting plate (21A) rotatable about an axis (the axis of 22A) and having front and rear surfaces parallel to the first axis;
The first light-transmitting plate (21A) has substantially the same thickness as the first light-transmitting plate (21A), and is separated from the first axis by a predetermined distance in the laser output direction y and centered on a second axis (the axis of 22B) parallel to the first axis. A rotatable second light-transmitting plate (21B) having a front and back surface parallel to a second axis; the first and second light-transmitting plates (21B);
A, 21B) to set the rotation angle of the rotation mechanism (23A, 23B) so that their surfaces are located on the isosceles of the isosceles triangle.
B); and supporting the light receiving end of the light guide means (41), driving the light receiving end to a position in the x and z directions orthogonal to the laser output direction y, where the laser light receiving level is maximized. A laser output adjusting device including a matching adjusting mechanism (30) for performing the adjustment.

The laser which has passed through the first and second light transmitting plates (21A, 21B) returns to the optical path which goes straight without passing through those light transmitting plates in optical theory, but the first and second light transmitting plates (21A, 21B). Light board (21A, 21B)
In addition, there is a possibility that positional deviations in the x and z directions with respect to the straight optical path may occur due to dimensional accuracy and processing errors of those support mechanisms. In the present embodiment, the alignment adjustment mechanism (30)
Then, the light receiving end of the light guide means (41) can be driven in the x and z directions to adjust to the x, y position where the laser intensity incident on the light guide means (41) becomes maximum. As a result, laser output adjustment errors due to dimensional accuracy and processing errors can be reduced. (4) Input means (70) for the operator to input the output intensity instruction information; and a rotation angle corresponding to the output intensity instruction information input through the rotating mechanism (23A, 23B). The control means (8) for setting the first and second light transmitting plates (21A, 21B)
0);

According to this, the operator can set or adjust the laser output intensity by the information input operation. (5) It further includes a power meter (60 / 60f, 60s) for measuring the intensity of the laser transmitted through the first light transmitting plate (21A) and the second light transmitting plate (21B).

According to this, it is possible to monitor the laser output. When the angles of the first and second light transmitting plates (21A, 21B) are set or adjusted, the laser output intensity can be confirmed. In addition, matching adjustment mechanism (30) while checking laser output intensity
Thus, the light receiving end of the light guide means (41) can be set at the highest intensity position. (6) In response to the calibration instruction via the input means (70), the control means (80) sequentially changes the rotation angles of the first and second light-transmitting plates (21A, 21B) and changes the rotation angles at each angle. The measured intensity of the power meter (60 / 60f, 60s) is read and written to the memory.

According to this, just by the operator inputting a calibration instruction, a data group (calibration table) representing the rotation angle of the light-transmitting plate versus the laser output intensity is automatically generated and stored in the memory. It is memorized. (7) The control means (80) responds to the calibration information output instruction via the input means (70) and outputs the data of each angle versus the measured intensity in the memory.
Data is read and output.

According to this, the operator reads out a data group (calibration table) representing the rotation angle of the light-transmitting plate versus the laser output intensity from the memory, and reads out the target data from the data group. -Recognizing the rotation angle at which the laser intensity can be obtained, and providing this rotation angle to the control means (80) so that the desired laser intensity can be set or adjusted.

Other objects and features of the present invention will become apparent from the following description of embodiments with reference to the drawings.

[0016]

FIG. 1 shows a first embodiment of the present invention. The YAG laser oscillator 10 outputs a laser beam in the y direction. The laser output line of the laser oscillator 10 is indicated by LBP. Along the laser output line LBP, there are an output adjustment device 20, an alignment adjustment mechanism 30, an optical fiber cable 42, and a laser irradiation head 50, and a power meter 60 is mounted on the head 50. . The alignment adjusting mechanism 30 has a condenser lens 31 which is laid on the tip of a ferrule 32 supporting the tip of the quartz optical fiber 41, that is, a light receiving end.
Focus the light. The optical fiber 41 is an optical fiber cable 4
2 and is introduced into a laser irradiation head 50 to which the tip of the optical fiber cable 42 is connected.

FIG. 2 shows the output adjusting device 20 in an enlarged manner. Electric rotating devices 23A and 23B are mounted on the back surface of the support plate of the device 20. The electric rotator 23A has a rotary encoder 25A connected to an output shaft parallel to the z-axis,
This is a reduction gear in which an electric motor 24A is connected to an input shaft parallel to the z-axis, and an output shaft is connected to a first shaft 22A integrated with the first light transmitting plate 21A. When the motor 24A rotates forward, the shaft 22A (the first light transmitting plate 21A) rotates clockwise. The first light transmitting plate 21A is a parallel plane quartz plate, and its parallel plane (front and back) is parallel to the z-axis. As shown in FIG. 2A, when the parallel plane of the first light transmitting plate 21A is parallel to the y and z planes, the rotation angle of the first light transmitting plate 21A is equal to that of the first light transmitting plate 21A. The first light transmitting plate 21A is retracted from the laser output line LBP.

The electric rotator 23B has the same structure and the same dimensions as the electric rotator 23A.
B and a second shaft 22B integral therewith. Second
The light transmitting plate 21B and the second shaft 22B have the same material, the same structure, and the same dimensions as the first light transmitting plate 21A and the first shaft 22A, respectively. As shown in FIG. 2A, when the parallel plane of the second light transmitting plate 21B is parallel to the y, z plane, the rotation angle of the second light transmitting plate 21B is equal to that of the second light transmitting plate 21B. The second light transmitting plate 21B is connected to the laser output line L
Evacuated from BP.

When the first and second translucent plates 21A and 21B are positioned at the respective home positions as shown in FIG. 2A, lasers passing through the laser output line LBP are used. The beam passes through the plates 21A and 21B without touching them, and the laser beam is not attenuated in the output adjusting device 20.

A position at a rotation angle of 90 ° obtained by rotating the first translucent plate 21A clockwise from the home position by 90 ° is the starting point of the dimming adjustment range (dimming area). The parallel plane of the first light transmitting plate 21A is orthogonal to the line LBP, and the laser beam has a low attenuation and the first light transmitting plate 21A
Penetrate through. A position at a rotation angle of -90 degrees obtained by rotating the second light transmitting plate 21B 90 degrees counterclockwise from the home position is:
This is the starting point of the dimming adjustment range (dimming area).
The parallel plane of the second light transmitting plate 21B is orthogonal to the output line LBP, and the laser beam has a low attenuation and the second light transmitting plate 2B has a low attenuation.
1B. The angle (90-90 °) obtained by rotating the first light transmitting plate 21A by an angle a counterclockwise from the start point of the dimming area.
a), and the angle (−90+) obtained by rotating the second light transmitting plate 21B clockwise from the start point of the dimming region by the angle a.
a), the first light-transmitting plate 21A and the second light-transmitting plate 21B
Is inclined in the opposite direction, and a is gradually increased, so that the first light transmitting plate 21A and the second light transmitting plate 21B are positioned on the isosceles of the isosceles triangle as shown in FIG. In the laser beam LB, the reflection PR1 and PR2 on the front and back surfaces of the first light transmitting plate 21A are increased, so that the attenuation is increased. The reflections PR3 and PR4 on the back surface increase, and the amount of attenuation becomes (PR1 + PR2 + PR3 + PR4) in the equation (1).

FIG. 4 shows this relationship (1) in an enlarged manner.
By rotating the first light-transmitting plate 21A and the second light-transmitting plate 21B by the same amount (a), the laser beam transmitted through both light-transmitting plates becomes the home position ( Laser output line LB when going straight ahead in (a) of FIG.
Return to P. However, when viewed microscopically, the line LBP slightly deviates in the x and z directions due to processing accuracy and processing error.

The incident angle θ1 of the laser beam to the light transmitting plate
Is the total reflection angle, ao is the rotation angle (90-ao) ° in the first light transmitting plate 21A.
In 1B, the rotation angle (−90 + ao) ° is the end point of the dimming region. Even if the light transmitting plate is rotated beyond these rotation angles, an effective change in the attenuation due to the change in the rotation angle cannot be obtained.
The angle ranges for the attenuation adjustment of the first light transmitting plate 21A and the second light transmitting plate 21B are as follows: First light transmitting plate 21A: Rotation angle (°) 0 No attenuation 90 Attenuation adjustment range Start point 90-ao End point of attenuation adjustment range Second translucent plate 21B: Rotation angle (°) 0 No attenuation -90 Start point of attenuation adjustment range -90 + ao End point of attenuation adjustment range The sign "-" means a clockwise angle shift of the light plate, and the sign "-" means a counterclockwise angle shift.
The amount of rotation a from the home position is equal to the first light transmitting plate 21A.
And the second light transmitting plate 21B have the same value.

Referring again to FIG. Matching adjustment mechanism 30
Is a holder 33 for supporting the condenser lens 31 and the ferrule 32, a z adjustment mechanism 35 for supporting the holder 33 and driving in the z direction to perform z positioning, and a holder 33 for supporting the z adjustment mechanism 35 in the x direction. An x adjustment mechanism 34 for driving and performing x positioning;
Each of the mechanisms 34 and 35 is composed of a slider and a slide drive mechanism (including an electric motor and a rotary encoder). This alignment adjustment mechanism 30
The ferrule 32 is set at x, z at which the laser light receiving intensity is the highest.
Provided for positioning in position.

The power meter 60 is a laser beam within the head 50.
A mirror capable of moving back and forth with respect to the laser emission line, a solenoid for moving the mirror forward and backward, and a laser reflected by the mirror having advanced to the laser emission line and detecting the intensity of the reflected laser to generate an intensity signal. When the generated laser intensity detection circuit and a laser intensity measurement command from the outside (control panel 80) arrive,
The mirror is projected to the laser emission line, the laser intensity signal is converted into digital data (intensity data) and read, the mirror is returned to the retracted position, and the intensity data is externally (controlled). To the panel 80).

The motor and the rotary encoder of the output adjusting device 20 and the matching adjusting mechanism 30 are connected to the output adjusting control panel 80, and the measuring controller of the power meter 60 is also connected to the output adjusting control panel 80. Have been. An operation / display board 70 for operator input / output is also connected to the output control panel 80.

FIG. 3 shows the configuration of the output adjustment control panel 80. The control panel 80 is mainly composed of a micro computer including a RAM, a ROM, a CPU, a system controller, a non-volatile memory NRAM, an input / output port, and a communication controller.
(MPU) 81.

First speed reducer 23A and first light transmitting plate 21A
The motor 24A and the rotary encoder 25A of the first dimming mechanism 20A include the motor driver 8 of the control panel 80.
2 are connected. The rotary encoder 25A generates a low level L pulse (HP pulse) for one rotation (360 degrees) of the first light transmitting plate 21A when the first light transmitting plate 21A is at the home position. At the same time, one rotation synchronization pulse is generated for each 1/4 rotation of the first light transmitting plate 21A. The HP pulse and the rotation synchronizing pulse are supplied to the MPU 81 (the CPU therein) via the motor driver 82.

Second speed reducer 23B and second light transmitting plate 21B
The motor 24B and the rotary encoder 25B of the second dimming mechanism 20B including the motor driver 8 of the control panel 80
3 is connected. The rotary encoder 25B generates one pulse of a low level L (HP pulse) per one rotation (360 degrees) of the second light transmitting plate 21B when the second light transmitting plate 21B is at the home position. At the same time, one rotation synchronization pulse is generated for each 1/4 rotation of the second light transmitting plate 21B. The HP pulse and the rotation synchronization pulse are supplied to the MPU 81 via the motor driver 83.

The motor and the rotary encoder of the x adjustment mechanism 34 are connected to a motor driver 84 of the control panel 80, and the motor and the rotary encoder of the z adjustment mechanism 35 are connected to the motor driver of the control panel 80. 85. The operation / display board 70 has an input / output interface 8
6, the power meter 60 is connected to the MPU 81 via the communication interface 87.

The power supply circuit C has a power supply voltage (commercial AC voltage)
Is connected to the main power switch (not shown)
An operating voltage Vbc necessary for state monitoring, data processing, and data holding is supplied to the MPU 81. The power supply circuit B is
Connected to the main power switch via RLb,
An operating voltage Vc required for electric circuit operation such as electric control is applied to electric circuits of various parts of the system. The power supply circuit A is connected to a main power supply switch via a relay RLa and applies a drive voltage Vd required for motor energization to motor drivers 82 to 85. Relays RLa and RLb are relay drivers 8
It is turned on / off by 8,89. The MPU 81 gives an on / off instruction to the relay drivers 88 and 89.

FIG. 5 shows an outline of the control operation of the MPU 81. When the main power switch is turned on, the power supply circuit C generates the operating voltage Vbc and applies it to the MPU 81.
A power-on reset circuit (not shown) generates a reset pulse. In response to this, the CPU in the MPU 81 reads an initialization program from the ROM and writes it in the RAM, and initializes the MPU 81 in accordance with the initialization program (step 1). Hereinafter, the word “step” is omitted in parentheses, and step No. Write only numbers. When the initialization is completed, the MPU 81 operates the operation / display board 70.
The menu is displayed on the display (2). The contents of the menu are: Preparation of calibration table, 2. 2. Calibration table display, 3. output intensity setting; Output intensity measurement. The operator is 1. When the user clicks on “Create Calibration Table” (Steps 3 and 4), MPU 81 “Creates Calibration Table”
Proceed to (5).

When the procedure proceeds to “prepare calibration table” (5), MPU 81
Sets the first and second translucent plates 21A and 21B to the home positions, and sets the power meter 60 to
Instruct the measurement and move the holder 33
In the meantime, the output intensity is measured by the power meter 60 and the holder 33 is moved to the output intensity peak point during the linear driving.
Is determined, and then the holder 33 is linearly driven in the z direction. During this time, the output intensity is measured by the power meter 60, and the z position of the holder 33 is determined at the output intensity peak point during the linear drive. . The above-described peak point search in the x direction and the above-described peak point search in the z direction are repeated until there is no change in the x and z positions of the peak points. When there is no change in the x and z positions of the peak point, the measurement data (intensity data) given by the meter 60 at that time.
Data) (alignment adjustment). The read intensity data is read from the NVRAM at the angle base point 0 °, and the measurement data (intensity data) given by the meter 60 is read, and written at the angle base point 0 ° into the NVRAM. Then, the first and second translucent plates 21A and 21B are set at the start points of the attenuation adjustment ranges, respectively, and the matching adjustment is performed, and the intensity data is written to the NVRAM at the start point of the adjustment range. And one step Δa
(For example, 2 °), the first and second light transmitting plates 21A, 21A
1B is rotated toward the end point of the attenuation adjustment range, and the above-described matching adjustment is performed for each rotation of one step, and the intensity data is written to the NVRAM to the step integrated value a = ΣΔa.
When this is performed up to the end point of the attenuation adjustment range, the end of the preparation of the calibration table is displayed on the display.

The operator is 2. When the calibration table display is clicked (steps 3 and 4-6), the MPU 81 proceeds to “calibration table display” (7). Go to “Calibration table display” (7) and MP
U81 uses NVRAM in the above-mentioned "Creation of calibration table" (5).
Of the intensity data group corresponding to the rotation angle, that is, the first to n-th calibration tables, corresponding to the rotation angle, are displayed on the display of the operation / display board 70, and in response to the up / down scroll instruction. Update the display data. This scroll allows the operator to check all data in the calibration table.

The operator is 3. When the output intensity setting is clicked (steps 3, 4-6-8), the MPU 81 displays a pop-up indicating the output intensity designation / rotation angle designation, and the operation
When the operator clicks the output intensity designation, the numerical value input by the operator thereafter is read as the output intensity designation value. Clicking the rotation angle designation reads the numerical value input by the operator thereafter as the rotation angle designation value. When the specified output intensity value is input, the MPU 81 reads from the calibration table in the NVRAM, the closest intensity data AL below the specified output intensity value.
And the rotation angle aL to which it is addressed, the closest intensity data AH exceeding the specified output intensity value and the rotation angle aH to which it is addressed are read out, and the rotation angle corresponding to the specified output intensity value is interpolated. Ao is calculated (8, 9, 10). Then, the first and second light transmitting plates 21A and 21B are connected to the (90-A
o), set to the rotation angle of (-90 + Ao) ° (1
1). When the rotation angle designation value is input and the rotation angle designation value is Ao, the first and second light transmitting plates 21A and 21A
1B is set to the rotation angles of (90−Ao) ° and (−90 + Ao) ° (8, 9, 13, 11).

The laser beam transmitted through the first and second light transmitting plates 21A and 21B may be shifted in the x and z directions from the laser output line LBP due to the rotational driving of the first and second light transmitting plates 21A and 21B. Matching adjustment "(12). In this “alignment adjustment” (12), the MPU 81 makes the alignment adjustment mechanism 3
0, the holder 33 is linearly driven in the x direction, and the power is
The output intensity is measured by the meter 60, and the x position of the holder 33 is determined at the output intensity peak point during linear driving.
Is linearly driven in the z direction, and the output intensity is measured by the power meter 60 during that time, and the z position of the holder 33 is determined at the output intensity peak point during the linear driving. The above-described peak point search in the x direction and the above-described peak point search in the z direction are repeated until there is no change in the x and z positions of the peak points. When there is no change in the x and z positions of the peak point, the intensity data of the peak point and the completion of the alignment adjustment are displayed on the display.

The operator is 4. When the output intensity measurement is clicked (step 3, 4-6-8-14), the MPU 81
Measures the output intensity with the power meter 60 (15), and displays the measured intensity data on the display (16).

As described above, the operators are: Preparation of calibration table, 2. 2. Calibration table display, Output intensity setting, and
4. The output intensity measurement can be instructed to the MPU 81 to automatically execute them. As described above, the configuration for adjusting the laser beam output intensity is simple, and the maintainability is good. The laser output is stable within the adjustment range, there is no change in the beam mode, and there is essentially no deviation of the optical axis. -Second Embodiment-Fig. 6 shows a second embodiment of the present invention. F of the second embodiment
1 correspond to the elements of the first embodiment shown in FIG. 1 which are denoted by reference numerals with the f removed, and reference numeral 20f denotes a first output adjusting device, and FIG. Is the same as the output adjustment device 20 of FIG. In the second embodiment,
First output adjusting device 20f, first matching adjusting mechanism 30f, first optical fiber cable 42f, first laser irradiation head 5
The beam splitter 90 and the second elements are added to 0f and the first power meter 60f.
The second components are a second output adjustment device 20s, a second alignment adjustment mechanism 30s, a second optical fiber cable 42s, a second laser irradiation head 50s, and a second power meter 60s.

Conventionally, a beam splitter (partially transmitting mirror, translucent mirror) has been used to divide the laser beam. The beam splitter 90 is also provided in the second embodiment. . By the way, only the beam splitter cannot individually set or adjust the intensity of each divided laser beam. Therefore, in the second embodiment, each divided laser
The intensity of the beam can be individually set and adjusted by the first output adjusting device 20f and the second output adjusting device 20s.

It is not necessary to drive the first and second output adjusting devices 20f and 20s at the same time, and it is not necessary to operate the first and second matching adjusting mechanisms 30f and 30s at the same time.
In the second embodiment, a changeover switch 100 is provided, and the operation / display board 70 includes a first head 50f and a second head 50f.
The key for selecting and specifying s is provided.
When the operator selects and designates the first head 50f, the PU 81 operates the MPU 8 by the changeover switch 100.
1, a first output adjustment device 20f and a first matching adjustment mechanism 30
f and the first power meter 60f are connected to the MPU 81, and the read / write area of the NVRAM is defined as an area (first calibration table area) for the first head 50f. Operation
When the driver selects and specifies the second head 50s, the changeover switch 100 connects the MPU 81 to the second output adjustment device 20s, the first matching adjustment mechanism 30s, and the second power meter 60s to the MPU 81. And NVRAM
Is defined as an area (second calibration table area) for the second head 50s. Regardless of the selection, the contents of the laser output setting control of the MPU 81 responding to the operator input are the same as those shown in FIG.

According to the second embodiment, the two laser outputs can be individually adjusted. When the divided laser beams are used for separate processing or the like, the output can be individually set to be suitable for each workpiece. Laser
The structure for adjusting the output intensity of the system is simple, and the maintainability is good. The laser output is stable within the adjustment range, there is no change in the beam mode, and there is essentially no deviation of the optical axis.

[Brief description of the drawings]

FIG. 1 is a block diagram showing an outline of a configuration of a first embodiment of the present invention.

FIGS. 2A and 2B are enlarged plan views of the output adjusting device 20 shown in FIG. 1, wherein FIG. 2A shows a state in which light transmitting plates 21A and 21B are placed at home positions, and FIG. This shows the state in which it is performed.

FIG. 3 is a block diagram showing a schematic configuration of an output adjustment control panel 80 shown in FIG.

FIG. 4 is a light transmitting plate 21A of the output adjusting device 20 shown in FIG.
21B is an enlarged plan view showing the path of the laser beam LB by further enlarging 21B.

FIG. 5 is a flowchart showing an outline of output adjustment control of the MPU 81 shown in FIG. 3;

FIG. 6 is a block diagram showing an outline of a configuration of a second exemplary embodiment of the present invention.

[Explanation of symbols]

 20, 20f, 20s: output adjusting device 21A: first light transmission plate 22A: shaft 23A: first reduction gear 24A: electric motor 25A: rotary encoder 21B: second light transmission plate 22B: shaft 23B: second reduction 24B: Electric motor 25B: Rotary encoder θ1: Incident angles 30, 30f, 30s: Matching adjustment mechanism 31: Condensing lens 32: Ferrule 33: Holder 41: Optical fiber 42: Optical fiber cable 50: Le -The irradiation head 88, 89: Relay driver RLa, RLb: Relay

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Kenji Okuyama 7-6-1, Higashi Narashino, Narashino City, Chiba Prefecture F-term in the Nippon Steel Welding Industry Co., Ltd. Equipment Division 2H041 AA02 AB08 AC01 AZ03 AZ06 4E068 CA02 CB05 CD05 CD08 CE08

Claims (3)

[Claims] A first light-transmitting plate rotatable about a first axis perpendicular to a laser output direction of a laser light source and having front and rear surfaces parallel to the first axis; It has substantially the same thickness as the plate and has a front and back surface parallel to the second axis, rotatable about a second axis parallel to the first axis at a predetermined distance from the first axis in the laser output direction. A second light transmitting plate; and a rotation mechanism for setting the rotation angles of the first and second light transmitting plates so that their surfaces are located on an isosceles triangle of an isosceles triangle. The output adjustment device. 2. A beam splitter interposed between a laser light source and a first light transmitting plate to split a part of laser light; and a third axis perpendicular to the splitting direction. A third light-transmitting plate having front and back surfaces parallel to the third axis, rotatable about the third axis, substantially the same thickness as the third light-transmitting plate, and a predetermined distance from the third axis in the branching direction; The fourth light transmissive plate having front and back surfaces parallel to the fourth axis rotatable about the fourth axis parallel to the axis, and the rotation angles of the third and fourth light transmissive plates are set to 2 A second output adjusting device including: a second rotating mechanism for setting the relationship to be positioned on an isosceles triangle. 3. A laser output direction y of a laser light source for projecting a laser beam onto a light receiving end of a light guide means, toward the light receiving end.
A first light-transmitting plate having front and rear surfaces parallel to the first axis and rotatable about a first axis perpendicular to the first light-transmitting plate; having substantially the same thickness as the first light-transmitting plate, and having a laser output A second light-transmitting plate having front and rear surfaces parallel to the second axis, rotatable about a second axis parallel to the first axis at a predetermined distance from the first axis in the direction y; first and second light-transmitting plates A rotation mechanism for setting a rotation angle of the light guide so that their surfaces are positioned on an isosceles triangle of an isosceles triangle; and a light receiving end of the light guide means, which is used to receive laser light. X at which the level is maximum, which is orthogonal to the laser output direction y
And a matching adjustment mechanism for driving to a position in the z direction.