JPS6138189Y2 - - Google Patents

Info

Publication number
JPS6138189Y2
JPS6138189Y2 JP14028481U JP14028481U JPS6138189Y2 JP S6138189 Y2 JPS6138189 Y2 JP S6138189Y2 JP 14028481 U JP14028481 U JP 14028481U JP 14028481 U JP14028481 U JP 14028481U JP S6138189 Y2 JPS6138189 Y2 JP S6138189Y2
Authority
JP
Japan
Prior art keywords
stage
shaft
center
plate
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14028481U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5844845U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14028481U priority Critical patent/JPS5844845U/ja
Publication of JPS5844845U publication Critical patent/JPS5844845U/ja
Application granted granted Critical
Publication of JPS6138189Y2 publication Critical patent/JPS6138189Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP14028481U 1981-09-21 1981-09-21 吸着ステ−ジ Granted JPS5844845U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14028481U JPS5844845U (ja) 1981-09-21 1981-09-21 吸着ステ−ジ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14028481U JPS5844845U (ja) 1981-09-21 1981-09-21 吸着ステ−ジ

Publications (2)

Publication Number Publication Date
JPS5844845U JPS5844845U (ja) 1983-03-25
JPS6138189Y2 true JPS6138189Y2 (enrdf_load_stackoverflow) 1986-11-05

Family

ID=29933448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14028481U Granted JPS5844845U (ja) 1981-09-21 1981-09-21 吸着ステ−ジ

Country Status (1)

Country Link
JP (1) JPS5844845U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101324711B1 (ko) * 2013-03-15 2013-11-05 쿠어스텍아시아 유한회사 반경 방향으로 순차적으로 배치되는 진공 공간에 진공 흡입홀이 교번하여 형성되는 웨이퍼 척 장치
KR101408728B1 (ko) * 2007-12-18 2014-07-02 세메스 주식회사 기판 고정 유닛 및 이를 포함하는 다이 본딩 장치

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02116950U (enrdf_load_stackoverflow) * 1989-03-07 1990-09-19
JP2830757B2 (ja) * 1994-12-01 1998-12-02 日本電気株式会社 シリコン・テスタの測定治具

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101408728B1 (ko) * 2007-12-18 2014-07-02 세메스 주식회사 기판 고정 유닛 및 이를 포함하는 다이 본딩 장치
KR101324711B1 (ko) * 2013-03-15 2013-11-05 쿠어스텍아시아 유한회사 반경 방향으로 순차적으로 배치되는 진공 공간에 진공 흡입홀이 교번하여 형성되는 웨이퍼 척 장치

Also Published As

Publication number Publication date
JPS5844845U (ja) 1983-03-25

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