JPS5844845U - 吸着ステ−ジ - Google Patents

吸着ステ−ジ

Info

Publication number
JPS5844845U
JPS5844845U JP14028481U JP14028481U JPS5844845U JP S5844845 U JPS5844845 U JP S5844845U JP 14028481 U JP14028481 U JP 14028481U JP 14028481 U JP14028481 U JP 14028481U JP S5844845 U JPS5844845 U JP S5844845U
Authority
JP
Japan
Prior art keywords
stage
shaft
outer periphery
center
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14028481U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6138189Y2 (enrdf_load_stackoverflow
Inventor
永田　兼俊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP14028481U priority Critical patent/JPS5844845U/ja
Publication of JPS5844845U publication Critical patent/JPS5844845U/ja
Application granted granted Critical
Publication of JPS6138189Y2 publication Critical patent/JPS6138189Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP14028481U 1981-09-21 1981-09-21 吸着ステ−ジ Granted JPS5844845U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14028481U JPS5844845U (ja) 1981-09-21 1981-09-21 吸着ステ−ジ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14028481U JPS5844845U (ja) 1981-09-21 1981-09-21 吸着ステ−ジ

Publications (2)

Publication Number Publication Date
JPS5844845U true JPS5844845U (ja) 1983-03-25
JPS6138189Y2 JPS6138189Y2 (enrdf_load_stackoverflow) 1986-11-05

Family

ID=29933448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14028481U Granted JPS5844845U (ja) 1981-09-21 1981-09-21 吸着ステ−ジ

Country Status (1)

Country Link
JP (1) JPS5844845U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02116950U (enrdf_load_stackoverflow) * 1989-03-07 1990-09-19
JPH08162508A (ja) * 1994-12-01 1996-06-21 Nec Corp シリコン・テスタの測定装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101408728B1 (ko) * 2007-12-18 2014-07-02 세메스 주식회사 기판 고정 유닛 및 이를 포함하는 다이 본딩 장치
KR101324711B1 (ko) * 2013-03-15 2013-11-05 쿠어스텍아시아 유한회사 반경 방향으로 순차적으로 배치되는 진공 공간에 진공 흡입홀이 교번하여 형성되는 웨이퍼 척 장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02116950U (enrdf_load_stackoverflow) * 1989-03-07 1990-09-19
JPH08162508A (ja) * 1994-12-01 1996-06-21 Nec Corp シリコン・テスタの測定装置

Also Published As

Publication number Publication date
JPS6138189Y2 (enrdf_load_stackoverflow) 1986-11-05

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