JPS5844845U - adsorption stage - Google Patents

adsorption stage

Info

Publication number
JPS5844845U
JPS5844845U JP14028481U JP14028481U JPS5844845U JP S5844845 U JPS5844845 U JP S5844845U JP 14028481 U JP14028481 U JP 14028481U JP 14028481 U JP14028481 U JP 14028481U JP S5844845 U JPS5844845 U JP S5844845U
Authority
JP
Japan
Prior art keywords
stage
shaft
outer periphery
center
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14028481U
Other languages
Japanese (ja)
Other versions
JPS6138189Y2 (en
Inventor
永田　兼俊
Original Assignee
株式会社東京精密
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社東京精密 filed Critical 株式会社東京精密
Priority to JP14028481U priority Critical patent/JPS5844845U/en
Publication of JPS5844845U publication Critical patent/JPS5844845U/en
Application granted granted Critical
Publication of JPS6138189Y2 publication Critical patent/JPS6138189Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の吸着ステージの断面図、第２図は第１
図のｎ−ｎ断面図。 １・・・・・・ウェハー、２・・・・・・ステージ、３
・・・・・・外周突出部、４・・・・・・中央突出部、
６・・・・・・ヒータ板もしくは冷却板、７・・・・・
・円板、１１・・・・・・垂直軸、１４・・・・・・中
央孔、１５・・・・・・溝、１６．１７・・・・・・エ
アーニップル。Figure 1 is a cross-sectional view of the suction stage of the present invention, and Figure 2 is a cross-sectional view of the suction stage of the present invention.
nn sectional view of the figure. 1... Wafer, 2... Stage, 3
......Outer peripheral protrusion, 4...Central protrusion,
6...Heater plate or cooling plate, 7...
- Disc, 11... Vertical shaft, 14... Center hole, 15... Groove, 16.17... Air nipple.

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）上面に吸着用孔を有するステージの中央及び外周
の下方に突出部を設け、下部底円板を中央においてステ
ージのブロックに固定して、外周突出部との間を気密に
し、かつステージの下面にヒート板もしくは冷却板を取
付け、軸上部の中央孔と外周との間に複数条の溝を設け
、底円板と軸とを固定した吸着ステージ。(1) Protrusions are provided at the center and below the outer periphery of a stage that has suction holes on the upper surface, and the lower bottom disk is fixed to the block of the stage at the center to create an airtight space between the stage and the outer periphery protrusions, and the stage A suction stage with a heating plate or cooling plate attached to the bottom surface of the shaft, and multiple grooves between the center hole at the top of the shaft and the outer periphery to secure the bottom disc and shaft. （２）請求の範囲第１項において軸上部の中央孔に空気
を導入し溝を通し、て流出させる吸着ステージ。(2) The suction stage according to claim 1, in which air is introduced into the central hole in the upper part of the shaft, passes through a groove, and then flows out.
JP14028481U 1981-09-21 1981-09-21 adsorption stage Granted JPS5844845U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14028481U JPS5844845U (en) 1981-09-21 1981-09-21 adsorption stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14028481U JPS5844845U (en) 1981-09-21 1981-09-21 adsorption stage

Publications (2)

Publication Number Publication Date
JPS5844845U true JPS5844845U (en) 1983-03-25
JPS6138189Y2 JPS6138189Y2 (en) 1986-11-05

Family

ID=29933448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14028481U Granted JPS5844845U (en) 1981-09-21 1981-09-21 adsorption stage

Country Status (1)

Country Link
JP (1) JPS5844845U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02116950U (en) * 1989-03-07 1990-09-19
JPH08162508A (en) * 1994-12-01 1996-06-21 Nec Corp Measuring device of silicon tester

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101408728B1 (en) * 2007-12-18 2014-07-02 세메스 주식회사 Unit for fixing a board and apparatus for bonding dies including the same
KR101324711B1 (en) * 2013-03-15 2013-11-05 쿠어스텍아시아 유한회사 Wafer chuck having alternating suction hall

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02116950U (en) * 1989-03-07 1990-09-19
JPH08162508A (en) * 1994-12-01 1996-06-21 Nec Corp Measuring device of silicon tester

Also Published As

Publication number Publication date
JPS6138189Y2 (en) 1986-11-05

Similar Documents

Publication Publication Date Title
JPS5844845U (en) adsorption stage
JPS59146022U (en) air purifier
JPS59123340U (en) Chuck stage for cutting
JPS5846988U (en) radiator
JPS58166270U (en) Rotating electric machine spider
JPS60161547U (en) disc sander
JPS59174828U (en) Moxibustion device
JPS5940519U (en) Cooling device for radiator
JPS60142320U (en) Thrust bearing device
JPS5847026U (en) Air conditioner drainage device
JPS59118832U (en) Brake disc structure
JPS58131361U (en) solar collector
JPS6119695U (en) Fan
JPS59193175U (en) cake case
JPS5878593U (en) Blower type constant temperature heating element
JPS5932121U (en) Cooling device for radiator
JPS59181990U (en) Heat exchanger in heating furnace
JPS58111442U (en) disk rotor
JPS58195608U (en) Laminated liquid precision filter
JPS59180186U (en) ceiling-mounted cooler
JPS60148515U (en) Trivet with energy saving guard
JPS6119687U (en) Air compressor support structure
JPS60161224U (en) Sprinkler for snow melting
JPS59190443U (en) Heating/cooling type
JPS5889708U (en) built-in electric stove