JPS613545B2 - - Google Patents

Info

Publication number
JPS613545B2
JPS613545B2 JP21022881A JP21022881A JPS613545B2 JP S613545 B2 JPS613545 B2 JP S613545B2 JP 21022881 A JP21022881 A JP 21022881A JP 21022881 A JP21022881 A JP 21022881A JP S613545 B2 JPS613545 B2 JP S613545B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP21022881A
Other languages
Japanese (ja)
Other versions
JPS58114763A (ja
Inventor
Yoshuki Kagoki
Katsuo Uta
Hidekazu Takasago
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP21022881A priority Critical patent/JPS58114763A/ja
Publication of JPS58114763A publication Critical patent/JPS58114763A/ja
Publication of JPS613545B2 publication Critical patent/JPS613545B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP21022881A 1981-12-29 1981-12-29 薄膜形成方法 Granted JPS58114763A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21022881A JPS58114763A (ja) 1981-12-29 1981-12-29 薄膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21022881A JPS58114763A (ja) 1981-12-29 1981-12-29 薄膜形成方法

Publications (2)

Publication Number Publication Date
JPS58114763A JPS58114763A (ja) 1983-07-08
JPS613545B2 true JPS613545B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-02-03

Family

ID=16585900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21022881A Granted JPS58114763A (ja) 1981-12-29 1981-12-29 薄膜形成方法

Country Status (1)

Country Link
JP (1) JPS58114763A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6238558A (ja) * 1985-08-12 1987-02-19 Konishiroku Photo Ind Co Ltd 磁気シ−トジヤケツト装着装置

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60193339A (ja) * 1984-03-14 1985-10-01 Fujitsu Ltd レジスト膜塗布方法
JPS61161174A (ja) * 1984-12-29 1986-07-21 Nordson Kk 回転中の被塗体に対する液体スプレイ塗布方法
JPS62114683A (ja) * 1985-11-15 1987-05-26 Hitachi Tokyo Electron Co Ltd 塗布方法および装置
JPH05234074A (ja) * 1992-02-21 1993-09-10 Tdk Corp 磁気ディスクの製造方法および磁気ディスク
KR100324645B1 (ko) * 1999-01-15 2002-02-27 박호군 용액의 점도 변화를 이용한 박막의 두께 조절 방법
JP6465000B2 (ja) * 2015-11-16 2019-02-06 東京エレクトロン株式会社 塗布膜形成方法、塗布膜形成装置及び記憶媒体
TWI666684B (zh) * 2015-11-16 2019-07-21 日商東京威力科創股份有限公司 塗佈膜形成方法、塗佈膜形成裝置及記憶媒體

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6238558A (ja) * 1985-08-12 1987-02-19 Konishiroku Photo Ind Co Ltd 磁気シ−トジヤケツト装着装置

Also Published As

Publication number Publication date
JPS58114763A (ja) 1983-07-08

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