JPS6131417B2 - - Google Patents
Info
- Publication number
- JPS6131417B2 JPS6131417B2 JP56017911A JP1791181A JPS6131417B2 JP S6131417 B2 JPS6131417 B2 JP S6131417B2 JP 56017911 A JP56017911 A JP 56017911A JP 1791181 A JP1791181 A JP 1791181A JP S6131417 B2 JPS6131417 B2 JP S6131417B2
- Authority
- JP
- Japan
- Prior art keywords
- humidity
- moisture
- sensing
- sensitive
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 150000002902 organometallic compounds Chemical group 0.000 claims description 12
- 229920000642 polymer Polymers 0.000 claims description 12
- 239000000203 mixture Substances 0.000 claims description 6
- 238000000354 decomposition reaction Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 2
- 238000010304 firing Methods 0.000 description 18
- 239000000919 ceramic Substances 0.000 description 11
- 229910004298 SiO 2 Inorganic materials 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229910044991 metal oxide Inorganic materials 0.000 description 5
- 150000004706 metal oxides Chemical class 0.000 description 5
- 125000000962 organic group Chemical group 0.000 description 5
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 229910010413 TiO 2 Inorganic materials 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- UXVMQQNJUSDDNG-UHFFFAOYSA-L Calcium chloride Chemical compound [Cl-].[Cl-].[Ca+2] UXVMQQNJUSDDNG-UHFFFAOYSA-L 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- FPCJKVGGYOAWIZ-UHFFFAOYSA-N butan-1-ol;titanium Chemical compound [Ti].CCCCO.CCCCO.CCCCO.CCCCO FPCJKVGGYOAWIZ-UHFFFAOYSA-N 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 239000001110 calcium chloride Substances 0.000 description 1
- 229910001628 calcium chloride Inorganic materials 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- -1 dimethylsiloxane Chemical class 0.000 description 1
- 150000002009 diols Chemical class 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 125000001183 hydrocarbyl group Chemical group 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910052752 metalloid Inorganic materials 0.000 description 1
- 150000002738 metalloids Chemical group 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56017911A JPS57132050A (en) | 1981-02-09 | 1981-02-09 | Humidity-sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56017911A JPS57132050A (en) | 1981-02-09 | 1981-02-09 | Humidity-sensitive element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57132050A JPS57132050A (en) | 1982-08-16 |
| JPS6131417B2 true JPS6131417B2 (enrdf_load_stackoverflow) | 1986-07-19 |
Family
ID=11956927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56017911A Granted JPS57132050A (en) | 1981-02-09 | 1981-02-09 | Humidity-sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57132050A (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5990038A (ja) * | 1982-11-16 | 1984-05-24 | Mitsubishi Electric Corp | 感湿材料 |
| JPS5990037A (ja) * | 1982-11-16 | 1984-05-24 | Mitsubishi Electric Corp | 感湿材料 |
| JPS59102149A (ja) * | 1982-12-06 | 1984-06-13 | Mitsubishi Electric Corp | 感湿材料 |
| JPS59114449A (ja) * | 1982-12-21 | 1984-07-02 | Murata Mfg Co Ltd | 感湿抵抗体 |
| JP2536064B2 (ja) * | 1988-05-31 | 1996-09-18 | エヌオーケー株式会社 | 薄膜感湿素子 |
| CN106383149B (zh) * | 2016-08-31 | 2020-04-07 | 中国科学院半导体研究所 | 基于钙钛矿纳米片阵列的湿度传感器件及其制备方法 |
-
1981
- 1981-02-09 JP JP56017911A patent/JPS57132050A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57132050A (en) | 1982-08-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0090048B1 (en) | Humidity sensor | |
| CA1044915A (en) | Humidity sensor with negative coefficient of resistivity for relative humidity | |
| JPS6131417B2 (enrdf_load_stackoverflow) | ||
| JPS6156945B2 (enrdf_load_stackoverflow) | ||
| JPS6154175B2 (enrdf_load_stackoverflow) | ||
| JPH0244390B2 (ja) | Kanshitsuzairyo | |
| JPS58216945A (ja) | 湿度センサ | |
| JPH0161175B2 (enrdf_load_stackoverflow) | ||
| JPS5990037A (ja) | 感湿材料 | |
| JPH0246099B2 (enrdf_load_stackoverflow) | ||
| JPH02252202A (ja) | 湿度センサ素子 | |
| JP2677991B2 (ja) | 感湿素子 | |
| JPS617602A (ja) | 紫外光・湿度複合検知材料 | |
| JPS5990039A (ja) | 感湿材料 | |
| JPS6131418B2 (enrdf_load_stackoverflow) | ||
| JPS59142448A (ja) | 湿度センサ | |
| JPH0231843B2 (ja) | Kanon*kanshitsusoshinoseizohoho | |
| KR840000260B1 (ko) | 감습소자 | |
| JPS632464B2 (enrdf_load_stackoverflow) | ||
| JPS6122282Y2 (enrdf_load_stackoverflow) | ||
| JPH02296140A (ja) | 湿度センサー | |
| JPS61147137A (ja) | 感湿材料の製造方法 | |
| JPS6210380B2 (enrdf_load_stackoverflow) | ||
| JPH0114536B2 (enrdf_load_stackoverflow) | ||
| JPS587041B2 (ja) | 相対湿度用感湿抵抗素子 |