JPS61294659A - Sliding member - Google Patents
Sliding memberInfo
- Publication number
- JPS61294659A JPS61294659A JP13518085A JP13518085A JPS61294659A JP S61294659 A JPS61294659 A JP S61294659A JP 13518085 A JP13518085 A JP 13518085A JP 13518085 A JP13518085 A JP 13518085A JP S61294659 A JPS61294659 A JP S61294659A
- Authority
- JP
- Japan
- Prior art keywords
- sliding member
- base material
- alloy
- film
- pvd method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
〔、産業上の利用分野〕
本発明はビデオチーブレコーダ等の磁気記録再生装置に
使用して好適な磁気テープの摺動部材に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic tape sliding member suitable for use in a magnetic recording/reproducing device such as a video recorder.
Ｍｇ合金より−ｅる摺動部材本体の表面に、ＴＩ 、Ｖ
。TI, V on the surface of the sliding member body made of Mg alloy
.
Ｎｉ ｅａｔ ｔＢｔＷ＊Ｔａ＊Ｚｒ５Ａ７＋ｃｒ元素
の窒化物、炭化物及び酸化物のうちの少くとも一種を主
成分とする被膜をＰＶＤ法によυ被着形成するととによ
シ、軽くて耐摩耗性のよい磁気テープに対する摺動部材
を得る。Nieat tBtW*Ta*Zr5A7+Cr It is especially advantageous to deposit a film containing at least one of the nitrides, carbides, and oxides of the Cr element by the PVD method, and it is light and has good wear resistance. A sliding member for magnetic tape is obtained.
ビデオチーブレコーダ等の磁気記録再生装置にあっては
、その磁気テープの摺動部材即ちテープガイド及びテー
プ案内ドラムとして、従来では耐°摩耗性及び耐腐蝕性
等の点からＡｔ合金が使用されている。In magnetic recording and reproducing devices such as video recorders, At alloys have conventionally been used for the sliding members of the magnetic tape, that is, tape guides and tape guide drums, due to their wear resistance and corrosion resistance. There is.
しかし乍ら重量の点から考えると実用金属で最も軽いＭ
ｇ合金がＡ４合金よシ有利であるので、テープレコーダ
の軽量化には好適である。ちなみにＭｇ合金とＡ４合金
の重量比は１．８／２．８である。However, in terms of weight, M is the lightest practical metal.
Since the g alloy is more advantageous than the A4 alloy, it is suitable for reducing the weight of tape recorders. Incidentally, the weight ratio of Mg alloy and A4 alloy is 1.8/2.8.
ところがＭｇ合金そのものは耐摩耗性及び耐腐蝕性に問
題がちゐために、無電解ニッケルメッキ処理又は陽極酸
化処理等によるいわゆる表面処理でその問題点を補って
いる。しかし乍らこれによっても更に以下に述べる問題
点がある。However, since the Mg alloy itself tends to have problems in wear resistance and corrosion resistance, these problems are compensated for by so-called surface treatments such as electroless nickel plating or anodic oxidation. However, even with this, there are still problems as described below.
即ち、メッキ処理をするための前処理工程で母材の表面
が荒れると共に、メッキ処理によって形成される薄膜の
厚味は２０μｍ程度となシ、表面精度のよい５μｍ以下
の膜厚に被着形成することが困難であるために、機械的
精度が悪くなる問題点がある。In other words, the surface of the base material is roughened in the pretreatment process for plating, and the thickness of the thin film formed by plating is approximately 20 μm, and the film is formed to a thickness of 5 μm or less with good surface precision. Since it is difficult to do so, there is a problem that mechanical precision deteriorates.
又陽極酸化処理では、母材を浸食し、平面度が悪くなる
問題点を有する。Further, anodizing treatment has the problem that the base material is eroded and the flatness deteriorates.
Ｍｇ合金よシなる摺動部材本体即ち母材の摺動表面に対
し、Ｔｉ ｔＶｅＮｉ ＋Ｓｉ 、ＢｔＷ、ＴａｔＺｒ
＋Ａｊ＋Ｃｒ元素の窒化物、炭化物及び酸化物のうち
の少くとも一種を主成分とする被膜をＰＶＤ法により被
着形成した。Ti tVeNi + Si , BtW, TatZr
A film containing at least one of nitride, carbide, and oxide of the +Aj+Cr element as a main component was deposited by PVD.
耐摩耗性が従来のＡｔ合金に比して２倍以上得られる。 The wear resistance is more than twice that of conventional At alloys.
以下、本発明による摺動部材を、その製造類を追って説
明する。Hereinafter, the sliding member according to the present invention will be explained along with its manufacture.
先ず第２図に示す如き摺動部材本体即ち母材（１）を形
成する。この母材（１）としてはＭｇ−Ａｔ−Ｚｎ等よ
シなるＭｇ合金のうち、’Ａｚ３１又はＡｚ ８０を使
用するを可とし、かかる合金を押出し材としてこれよシ
所定形状例えばテープ案内ドラ°ムを形成し、これを母
材（１）とする。このときの母材（１）の各寸法は所定
の値に決められている。First, a sliding member body, that is, a base material (1) as shown in FIG. 2 is formed. As this base material (1), it is possible to use 'Az31 or Az80 among other Mg alloys such as Mg-At-Zn, and such an alloy can be extruded into a predetermined shape, for example, a tape guide driver. This is used as the base material (1). Each dimension of the base material (1) at this time is determined to a predetermined value.
次に、この表面に対し、ＰＶＤ法で表面処理をなす。Next, this surface is subjected to surface treatment using a PVD method.
第３図はこのＰＶＤ法による表面処理に使用する装置の
一例を示すもので、いわゆるイオングレーティング法と
称されるものである。FIG. 3 shows an example of an apparatus used for surface treatment by this PVD method, which is called the ion grating method.
図において（１）は上述したＭ「合金よシなる母材であ
る。（２）はイオンブレーティング槽であって、その内
部には加熱手段としての電熱ヒータ（３）が配置され、
これが槽（２）外に設けられた電源（４）によシ加熱さ
れるようになされている。（５）は加熱すべき金属を入
れる容器である。かかる槽（２）内において、容器（５
）の上方には治具（６）が設けられている。この治Ａ（
６）は回転軸（７）と２枚の挟着板（８）とよシ構成さ
れておシ、回転軸（７）の表面にはねじ溝（９）が形成
され、挟着板（８）の中央透孔の内面には、ねじ溝（９
）と噛合する雌ねじαＱが形成され、かかる治具（６）
と上述したヒータ（３）との間には、直流電源α）よシ
直流電圧（治具（６）側が負）が印加される。（２）及
び（至）はそれぞれ電源（４）及びα力に対するスイッ
チである。In the figure, (1) is a base material such as the above-mentioned M alloy. (2) is an ion blating tank, inside which an electric heater (3) as a heating means is arranged.
This is heated by a power source (4) provided outside the tank (2). (5) is a container containing the metal to be heated. In this tank (2), a container (5
) is provided with a jig (6). This treatment A (
6) is composed of a rotating shaft (7) and two clamping plates (8), and a thread groove (9) is formed on the surface of the rotating shaft (7), and the clamping plates (8) ) has a threaded groove (9) on the inner surface of the central through-hole.
) is formed with a female thread αQ that meshes with the jig (6).
A DC voltage (negative on the jig (6) side) is applied between the heater (3) and the heater (3) described above from the DC power supply α). (2) and (to) are switches for the power source (4) and alpha power, respectively.
回転軸（７）上には上述した母材（１）が配置され、こ
れが２枚の挟着板（８）によって挾まれることによシ母
材（１）が治具（６）に取付けられ、回転軸（７）の回
転によシ、母材（１）が回転するようになされている。The above-mentioned base material (1) is placed on the rotating shaft (7), and the base material (1) is attached to the jig (6) by being sandwiched between two clamping plates (8). The base material (1) is rotated by the rotation of the rotating shaft (7).
以上説明した装置を使用しての表面処理法を説明する。A surface treatment method using the apparatus described above will be explained.
先ず容器（５）内にで１を収納して置き、槽（２）内を
１０ 〜１０ Ｔｏｒｒ程度に減圧し、この内部にＡ
ｒ２ガスを導入する。この状態でスイッチ（２）を投入
して槽（２）内にグロー放電を発生させ、陰極側即ち母
材（１）をスノ臂ツタし、この表面の不純物をたたき出
すことによυ、母材（１）の表面のクリーニングをなす
。First, A is placed in a container (5), the pressure inside the tank (2) is reduced to about 10 to 10 Torr, and A is placed inside the tank (2).
Introduce r2 gas. In this state, the switch (2) is turned on to generate a glow discharge in the tank (2), and the cathode side, that is, the base material (1), is scorched and the impurities on this surface are knocked out. (1) Clean the surface.
必要なりリーニングが終了した後、檜（２）内にＮ２ガ
スを導入して母材（１）のまわシにグロー放電を生じさ
せ、更にスイッチ（イ）を投入して電熱ヒータ（３）に
電流を流してＴ１を加熱し、これを蒸発−させる。After the necessary cleaning is completed, N2 gas is introduced into the cypress (2) to generate a glow discharge in the base material (1), and the switch (a) is turned on to turn on the electric heater (3). A current is applied to heat T1 and evaporate it.
これＫよシ、蒸発され九Ｔ１はＮ２ガスのグロー放電の
グラダマ中を通過する際にイオン化され、陰極である母
材（１）に突き尚たる。この場合、母材（１）できる（
第４図参照）。第１図はこのようにして得られた本発明
による摺動部材の一例を示す。これら第１図及び第４図
においては被膜α◆は誇張して示されている。The evaporated T1 is ionized as it passes through the N2 gas glow discharge gradama, and penetrates into the base material (1), which is the cathode. In this case, the base material (1) can be made (
(See Figure 4). FIG. 1 shows an example of the sliding member according to the present invention obtained in this manner. In these FIGS. 1 and 4, the coating α♦ is shown in an exaggerated manner.
賞、図示するように２枚の挟着板（８）によシ母材（１
）を、その左右よシ挾んでいるので、上述した被膜α◆
は母材（１）の内面には耐着せず、よって挟着板（８）
は母材（１）に対するマスキング材となる。As shown in the figure, two clamping plates (8) are attached to the base material (1
) on its left and right sides, the above-mentioned film α◆
is not resistant to adhesion to the inner surface of the base material (1), so the clamping plate (8)
serves as a masking material for the base material (1).
上述においては、容器（５）内にＴＩを収納させてこれ
を蒸発させ、母材（１）の表面にＴｉＮの被膜を形成さ
せた場合であるが、ＴｉＯ他に、Ｖ、Ｎｉ、８１．Ｂ、
Ｗ。In the above description, TI is stored in the container (5) and evaporated to form a TiN film on the surface of the base material (1), but in addition to TiO, V, Ni, 81. B,
W.
Ｔａ＋Ｚｒ＋Ａｔ＋Ｃｒ等を使用することができる。勿
論、とれらを主成分とする合金を使用することもできる
。Ta+Zr+At+Cr etc. can be used. Of course, alloys containing these as main components can also be used.
又、上述においては、窒素ガスを使用していわゆる窒化
物の被膜α４を形成した場合であるが、この他、上記し
た各金属を使用し、それぞれ、炭化物又は酸化物とした
被膜α◆を形成することもできる。Furthermore, in the above description, a so-called nitride coating α4 is formed using nitrogen gas, but in addition to this, each of the above-mentioned metals may be used to form a carbide or oxide coating α◆. You can also.
更に、上述においては被膜α→を一層丈は形成した場合
であるが、二層又はそれ以上の層を有するように形成す
ることも可能である。Further, in the above description, the coating α→ is formed with one layer, but it is also possible to form it with two or more layers.
更に、上述においては、母材（１）の円筒面の全面に対
して被膜へ→を被着形成した場合であるが、磁気テープ
が摺動する部分のみに被着形成することもできる。Further, in the above description, the → is applied to the entire surface of the cylindrical surface of the base material (1), but it can also be applied only to the portion on which the magnetic tape slides.
又上述では母材（１）を押出形成した場合であるが、鋳
造形成でも可能である。In addition, although the above description deals with the case where the base material (1) is formed by extrusion, it is also possible to form it by casting.
以上説明した本発明によれば、従来のＡｔ合金によシ形
成された摺動部材に比して、同一形状（大きさ）に関し
て重量が約２／３となシ、それ丈は場景化することがで
きると共に、耐摩耗性及び耐食性のそれぞれについて従
来のＡｔ合金のものに比して２倍以上の効果があること
も確められた。According to the present invention described above, compared to a sliding member formed of a conventional At alloy, the weight is about 2/3 for the same shape (size), and the length is reduced. It was also confirmed that it was more than twice as effective in terms of wear resistance and corrosion resistance as compared to conventional At alloys.
更に、母材それ自体は、その表面が何ら荒されることも
ないので、最初の成°形時のままの寸法が維持され、よ
って高精度のものが得られ、しかも後加工の必要性がな
い等の特徴を有する。Furthermore, since the surface of the base material itself is not roughened in any way, the dimensions as originally formed are maintained, resulting in high precision and no need for post-processing. It has the following characteristics.
第１図は本発明による摺動部材の一例を示す断面図、第
２図は摺動部材本体を示す断面図、第３図は本発明に使
用できる装置の一例を示す路線的断面図、第４図はその
一部分の拡大断面図である。
（１）は摺動部材本体（母材）、αゆは被膜である。
實北側１輸口
第１図
Ｉｔ材ｍｌ断ｌｌｌｌ２Ｎ
第２図
第３図
第４図FIG. 1 is a cross-sectional view showing an example of a sliding member according to the present invention, FIG. 2 is a cross-sectional view showing the main body of the sliding member, and FIG. FIG. 4 is an enlarged sectional view of a portion thereof. (1) is the sliding member main body (base material), and α is the coating. North side 1 import port Fig. 1 It material ml cut lllll 2N Fig. 2 Fig. 3 Fig. 4
Claims (1)
面に対し、Ｔｉ、Ｖ、Ｎｉ、Ｓｉ、Ｂ、Ｗ、Ｔａ、Ｚｒ
、Ａｌ、Ｃｒ元素の窒化物、炭化物及び酸化物のうちの
少くとも一種を主成分とする被膜をＰＶＤ法により被着
形成したことを特徴とする摺動部材。Ti, V, Ni, Si, B, W, Ta, Zr are applied to the sliding surface of the sliding member body made of preformed Mg alloy.
1. A sliding member characterized in that a coating film containing at least one of nitrides, carbides, and oxides of the elements Al, Al, and Cr as a main component is deposited by a PVD method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13518085A JPS61294659A (en) | 1985-06-20 | 1985-06-20 | Sliding member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13518085A JPS61294659A (en) | 1985-06-20 | 1985-06-20 | Sliding member |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61294659A true JPS61294659A (en) | 1986-12-25 |
Family
ID=15145704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13518085A Pending JPS61294659A (en) | 1985-06-20 | 1985-06-20 | Sliding member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61294659A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5981049A (en) * | 1996-12-04 | 1999-11-09 | Sumitomo Electric Industries, Ltd. | Coated tool and method of manufacturing the same |
-
1985
- 1985-06-20 JP JP13518085A patent/JPS61294659A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5981049A (en) * | 1996-12-04 | 1999-11-09 | Sumitomo Electric Industries, Ltd. | Coated tool and method of manufacturing the same |
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