JPS61293745A - Precision location device - Google Patents

Precision location device

Info

Publication number
JPS61293745A
JPS61293745A JP13220385A JP13220385A JPS61293745A JP S61293745 A JPS61293745 A JP S61293745A JP 13220385 A JP13220385 A JP 13220385A JP 13220385 A JP13220385 A JP 13220385A JP S61293745 A JPS61293745 A JP S61293745A
Authority
JP
Japan
Prior art keywords
nut
table plate
feed screw
roller
slide table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13220385A
Other languages
Japanese (ja)
Inventor
Hiromi Okuzono
奥園　博美
Osamu Ikeda
修 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP13220385A priority Critical patent/JPS61293745A/en
Publication of JPS61293745A publication Critical patent/JPS61293745A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • B23Q5/38—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
    • B23Q5/40—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw
    • B23Q5/408—Nut bearings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
    • F16H2025/2445—Supports or other means for compensating misalignment or offset between screw and nut

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)

Abstract

PURPOSE:To provide drive of a slide table which is free from influence of pitching or yawing by furnishing a roller rotatable in contact with a table plate and a nut retaining part. CONSTITUTION:A linear motion bearing 12 is fixed under a feed screw 5 of a nut retaining part 11 in such a way as parallel to the feed screw 5 to that it can slide freely on a guide bar 13. This guide bar 13 is fixed at both ends to bearing brackets 8, 9. A roller 14 is held by a roller retainer 15 rotatably and is in contact with a table plate 16 installed on a slide table 18. Said roller retainer 15 is installed at a nut retaining part 11 arranged so as to face this table plate 16. A magnet 17 is installed at this nut retaining part 11 in a plane wit said roller retainer 15 to attract the table plate 16 for fixation.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、ＸＹテーブル等に利用される精密位置決め装
置の駆動方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method for driving a precision positioning device used in an XY table or the like.

従来の技術 従来のこの種の精密位置決め装置は、例えば特開昭５９
−７１８１２号公報に示されているように、第３図のよ
うな構造となっていた。2. Description of the Related Art A conventional precision positioning device of this type is disclosed in, for example, Japanese Patent Application Laid-open No. 59
As shown in Japanese Patent No. 71812, the structure was as shown in FIG.

すなわち１９は動力源であるモータで、ブラケット２ｏ
に固定されている。２１はモータシャフトで、継手２２
によって送りネジ２３と一端で連結され回転可能となっ
ている。２４．２５は軸受であり、軸受ブラケット２８
．２７に固定され、前記送シネジ２３を回転可能として
いる。又、前記送りネジ２３のナツト２８は、ナツト保
持部２９により固定されている。前記ナツト保持部２９
の送りネジ２３の下側には送りネジ２３と平行にすニア
モーシコンベアリング３ｏを固定していて、ガイドバー
３１土を摺動自在の構造としている。That is, 19 is a motor which is a power source, and bracket 2o
Fixed. 21 is the motor shaft, and the joint 22
It is connected to the feed screw 23 at one end and is rotatable. 24.25 is a bearing, and the bearing bracket 28
．． 27, making the feed screw 23 rotatable. Further, the nut 28 of the feed screw 23 is fixed by a nut holding portion 29. The nut holding part 29
A near motor bearing 3o parallel to the feed screw 23 is fixed to the lower side of the feed screw 23, and the guide bar 31 is structured to be slidable.

前記ガイドバー３１の両端は、軸受ブラケット２６．２
７に固定されている。第４図は前記ナンド保持部２９と
スライドテーブル３２に固定されたテーブルプレー）３
３．３４の拡大斜視図であシ、スライドテーブル３２か
らの・圧力気体が前記テーブルプレー）３３．３４へ導
入され、更にはテーブルプレー）３３．３４のノズル３
５．３６からナツト保持部２９へ噴出され気体軸受とし
て込る。これによって、前記ナツト２８、ナツト保持部
２９、チルプルブレー）３３．３４およびスライドテー
ブル３２は一体となシモータ１９からの動力を送りネジ
２３を介して駆動することになる。Both ends of the guide bar 31 are fitted with bearing brackets 26.2.
It is fixed at 7. Fig. 4 shows a table plate fixed to the Nando holding part 29 and the slide table 32)3
3.34 is an enlarged perspective view, in which pressurized gas from the slide table 32 is introduced into the table plate 33.34 and further into the nozzle 3 of the table plate 33.34.
5.36, it is ejected to the nut holding part 29 and enters as a gas bearing. As a result, the nut 28, the nut holder 29, the tilt pull brake (33, 34), and the slide table 32 are driven by the power from the integral shimotor 19 via the feed screw 23.

発明が解決しようとする問題点 しかしながら、上記のような構造では、駆動時に送りネ
ジ２３の軸受部とネジ部との同軸度の狂騒や送シネジ２
３のそシによる振れ回シによってナツト保持部２９のラ
ジアル方向の変位、変動が生じることになる。前記ナツ
ト保持部２９とテーブルプレー）３３．３４とで気体軸
受を構成していても圧力気体を介して、ナンド保持部２
９とテーブルプレート３３．３４とは面接触である為、
前記のナツト２８のラジアル方向の変位、変動は容易に
スライドテーブル３２に作用してテーブル面のヨーイン
グ（横揺れ）を生じさせる。このことは気体軸受の性質
上、ナツト保持部２９が変位してテーブルプレー）３３
．３４との間隙、つまりクリアランスが変われば、この
クリアランスの変位を元に戻して釣り合いを保とうとす
るためにテーブルプレート３３．３４が変位しスライド
テーブル３２に作用するものである。このことは、スラ
イドテーブル３２のスライド方向の送りｎ度に誤差を生
じ、位置決め精度を低下させる。又、一般に気体軸受は
単位面積あたりの剛性が低いため、スライドテーブルに
用いる場合、大形化してしまいあまシ実用的でない等の
問題点を有していた。Problems to be Solved by the Invention However, with the above structure, during driving, the coaxiality between the bearing part and the threaded part of the feed screw 23 may fluctuate, and the feed screw 2
Due to the swinging movement caused by the movement of No. 3, the nut holding portion 29 is displaced and fluctuated in the radial direction. Even if the nut holding part 29 and the table plate 33, 34 constitute a gas bearing, the nut holding part 2
9 and table plate 33, 34 are in surface contact,
The displacement and fluctuation of the nut 28 in the radial direction easily acts on the slide table 32, causing yawing (sideways shaking) of the table surface. Due to the nature of the gas bearing, this causes the nut holding part 29 to be displaced and the table play) 33
．． 34, the table plates 33, 34 are displaced and act on the slide table 32 in order to restore the displacement of the clearance and maintain balance. This causes an error in the n-degree feed of the slide table 32 in the sliding direction, reducing positioning accuracy. In addition, since gas bearings generally have low rigidity per unit area, when used in a slide table, they have problems such as being too large and not practical.

そこで、本発明は上記問題点に鑑み、駆動系からの外力
がスラスト方向以外には伝達されずにテーブルのスライ
ド方向の送シ精度を向上させる位置決め装置の駆動方法
を提供するものである。SUMMARY OF THE INVENTION In view of the above-mentioned problems, the present invention provides a method for driving a positioning device that improves the accuracy of table sliding in the sliding direction without transmitting external force from the drive system in directions other than the thrust direction.

問題点を解決するための手段 上記問題点を解決するために本発明の位置決め装置は、
往復動可能なスライドテーブルとこのスライドテーブル
の摺動方向に軸中心を有する送りネジとこの送シネジと
螺合可能なナツトを保持したナツト保持部と前記送シネ
ジの軸方向と平行に設けられかつ前記ナツト保持部を軸
方向に摺動可能に取付けたガイドバーと前記ナツト保持
部とスライドテーブルに取付けられたテーブルプレート
との間に設けられ、このテーブルプレート及ヒ前記ナツ
ト保持部に当接して回転可能に設けられたローラとを備
えた位置決め装置である。Means for Solving the Problems In order to solve the above problems, the positioning device of the present invention includes:
A reciprocating slide table, a feed screw having an axial center in the sliding direction of the slide table, a nut holding portion holding a nut that can be screwed into the feed screw, and a nut holding portion provided parallel to the axial direction of the feed screw. A guide bar is provided between a guide bar to which the nut holder is slidably attached in the axial direction, and a table plate is attached to the nut holder and a slide table, and the table plate and the nut holder are in contact with each other. This positioning device includes a rotatably provided roller.

作　　用 本発明は上記構成によシ、駆動時に送りネジの振れ回シ
によりナツトのラジアル方向の変位、変動があっても、
ナツト保持部に固定されテーブルプレートに接触したロ
ーラが回転するだけで、上記の変位、変動はスライドテ
ーブルに伝達されない。つまり、テーブル面のピッチン
グ（縦揺れ）およびヨーイング（横揺れ）がなく、テー
ブルの位置決め精度向上にきわめて有利である。Operation The present invention has the above-mentioned structure, so that even if the nut is displaced or fluctuated in the radial direction due to swinging of the feed screw during driving,
The roller fixed to the nut holder and in contact with the table plate only rotates, and the above displacements and fluctuations are not transmitted to the slide table. In other words, there is no pitching (vertical shaking) or yawing (lateral shaking) of the table surface, which is extremely advantageous in improving table positioning accuracy.

実施例 以下本発明の一実施例について図面を参照しながら説明
する。３ 第１図において、１は動力源であるモータで、ブラケッ
ト２に固定されている。３はモータシャフトで、継手４
によって送りネジ５と一端を連結され回転可能となって
いる。６，７は軸受であシ、軸受ブラケット８．９に固
定され、前記送りネジ６を回転可能としている。又、前
記送りネジ５のナツト１０は、ナツト保持部１１により
固定されている。EXAMPLE An example of the present invention will be described below with reference to the drawings. 3 In FIG. 1, reference numeral 1 denotes a motor as a power source, which is fixed to a bracket 2. 3 is the motor shaft, and joint 4
One end is connected to the feed screw 5 by a screw, so that it can rotate. 6 and 7 are bearings, which are fixed to a bearing bracket 8.9 to enable the feed screw 6 to rotate. Further, the nut 10 of the feed screw 5 is fixed by a nut holding portion 11.

前記ナツト保持部１１の送シネジ５の下側には、送りネ
ジ６と平行にリニアモーションベアリング１２を固定し
ていて、ガイドバー１３上を摺動自在の構造としている
。前記ガイドバー１３の両端は軸受ブラケット８，９に
固定されている。第２図（ａ）は、第１図のＡ矢視拡大
図であり、第２図（ｂ）は、第１図のＢ矢視拡大図であ
る。１４はローラでローラ保持具１５に回転可能に保持
され、かつスライドテーブル１８に設けられたテーブル
プレート１６に接触している。前記ローラ保持具１６は
、前記テーブルプレート１６に相対する前記ナツト保持
部１１に取付けられている。１７は磁石であり、前−記
ローラ保持具１５と同一面上の前記ナツト保持部１１に
取付けられ、前記テーブルプレート１６を吸引固定して
いる。A linear motion bearing 12 is fixed to the lower side of the feed screw 5 of the nut holding portion 11 in parallel with the feed screw 6, and is configured to be slidable on a guide bar 13. Both ends of the guide bar 13 are fixed to bearing brackets 8 and 9. 2(a) is an enlarged view in the direction of arrow A in FIG. 1, and FIG. 2(b) is an enlarged view in direction of arrow B in FIG. 14 is rotatably held by a roller holder 15 and is in contact with a table plate 16 provided on a slide table 18. The roller holder 16 is attached to the nut holder 11 facing the table plate 16. A magnet 17 is attached to the nut holder 11 on the same surface as the roller holder 15, and fixes the table plate 16 by suction.

以上のように構成された位置決め装置について、その動
作を説明する。The operation of the positioning device configured as above will be explained.

モータ１を駆動させることによって継手４、軸受６，７
および送りネジ５が回転する。これによりナラ）１０．
ナツト保持部１１およびスライドテーブル１７が送シ駆
動される。この送シの際、ナツト保持部１１に固定され
たリニアモーションベアリング１２が、ガイドバー１３
上を摺動する。By driving the motor 1, the joint 4, bearings 6, 7
and the feed screw 5 rotates. This will result in oak) 10.
The nut holder 11 and the slide table 17 are driven to feed. During this feeding, the linear motion bearing 12 fixed to the nut holding part 11 moves against the guide bar 13.
slide on top.

本発明の構成の駆動方法であれば、駆動時に送りネジ５
が振れ回ってナツト１ｏがラジアル方向へ変位、変動し
てもローラ１４が回転するだけでスライドテーブル１８
へは縦揺れ、横揺れとなって影響しない。In the driving method configured according to the present invention, the feed screw 5 is
Even if the nut 1o is displaced and fluctuated in the radial direction by swinging around, the slide table 18 only rotates the roller 14.
There will be no effect on the area as it will cause vertical and horizontal shaking.

発明の効果 以上のように本発明は、ナンド保持部とテーブルプレー
トの間にローラを保持するため、送シネジの振れ回りに
よるナツトのラジアル方向の変位、変動があってもロー
ラが回転するだけで、スライドテーブルには前記の変位
、変動が伝達されず、ピッチング、ヨーイングの影響を
受けないスライドテーブルの駆動ができる。よって、ス
ライドテーブルの位置決め精度が向上し、その実用的効
果は大なるものがある。Effects of the Invention As described above, in the present invention, since the roller is held between the NAND holding part and the table plate, even if the nut is displaced or fluctuated in the radial direction due to whirling of the feed screw, the roller simply rotates. The displacement and fluctuation described above are not transmitted to the slide table, and the slide table can be driven without being affected by pitching or yawing. Therefore, the positioning accuracy of the slide table is improved, which has great practical effects.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本発明の一実施例における精密位置決め装置の
スライドテーブル駆動装置の斜視図、第２図（、）は第
１図におけるＡ矢視拡大図、第２図Φ）は第１図におけ
るＢ矢視拡大図、第３図は従来のスライドテーブル駆動
装置の斜視図、第４図は同部分拡大斜視図である。 ６．２３・・・・・送シネジ、１０．２８・・・−・−
ナツト、１１．２９・・・・・ナツト保持部、１４−・
・・ローラ、１５・・−・−ローラ保持具、１６，３３
．３４・・・・・・テーブルプレート、１７・・・・・
・磁石、１８．３２・・・・・・スライドテーブル、３
５．３６・・・・・・ノズル。 代理人の氏名　弁理士　中　尾　敏　男　ほか１名５−
４ｖ冬ジ 第１図　　　　　１．５−１晒英 ＋ｆ−−テーフ゛ルフ０しＹ ｆＴ−−−１墓石FIG. 1 is a perspective view of a slide table driving device of a precision positioning device according to an embodiment of the present invention, FIG. FIG. 3 is a perspective view of a conventional slide table driving device, and FIG. 4 is an enlarged perspective view of the same portion. 6.23...Feeding screw, 10.28...--
Nut, 11.29... Nut holding part, 14-...
...Roller, 15...-Roller holder, 16, 33
．． 34...Table plate, 17...
・Magnet, 18.32...Slide table, 3
5.36...Nozzle. Name of agent: Patent attorney Toshio Nakao and 1 other person5-
4v Winter Figure 1 1.5-1 Bleaching + f--Teflon 0 Y fT--1 Gravestone

Claims (3)

【特許請求の範囲】[Claims] （１）往復動可能なスライドテーブルと、このスライド
テーブルの摺動方向に軸中心を有する送りネジと、この
送りネジと螺合可能なナットを保持したナット保持部と
、前記送りネジの軸方向と平行に設けられ、かつ前記ナ
ット保持部を軸方向に摺動可能に取付けたガイドバーと
、前記ナット保持部と前記スライドテーブルに取付けら
れたテーブルプレートとの間に設けられ、このテーブル
プレート及び前記ナット保持部に当接して回転可能に設
けられたローラとを備えた精密位置決め装置。(1) A reciprocating slide table, a feed screw whose axial center is in the sliding direction of the slide table, a nut holder holding a nut that can be screwed onto the feed screw, and an axial direction of the feed screw A guide bar is provided between the nut holding part and the table plate attached to the slide table, and the table plate and A precision positioning device comprising: a roller rotatably provided in contact with the nut holding portion. （２）ローラを前記テーブルプレートに接触させる手段
として、テーブルプレートに相対するナット保持部の面
上、あるいは、ナット保持部に相対するテーブルプレー
トの面上に磁石を設置した特許請求の範囲第１項記載の
精密位置決め装置。(2) As a means for bringing the roller into contact with the table plate, a magnet is installed on the surface of the nut holder facing the table plate or on the surface of the table plate facing the nut holder. Precision positioning device as described in section. （３）ローラを前記テーブルプレートに接触させる手段
として、テーブルプレートとナット保持部の間にバネを
設置した特許請求の範囲第１項記載の精密位置決め装置
。(3) The precision positioning device according to claim 1, wherein a spring is installed between the table plate and the nut holding portion as means for bringing the roller into contact with the table plate.
JP13220385A 1985-06-18 1985-06-18 Precision location device Pending JPS61293745A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13220385A JPS61293745A (en) 1985-06-18 1985-06-18 Precision location device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13220385A JPS61293745A (en) 1985-06-18 1985-06-18 Precision location device

Publications (1)

Publication Number Publication Date
JPS61293745A true JPS61293745A (en) 1986-12-24

Family

ID=15075802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13220385A Pending JPS61293745A (en) 1985-06-18 1985-06-18 Precision location device

Country Status (1)

Country Link
JP (1) JPS61293745A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02254398A (en) * 1989-03-28 1990-10-15 Matsushita Electric Ind Co Ltd Slide guide apparatus
JP2014100781A (en) * 2012-11-22 2014-06-05 Yamaha Fine Technologies Co Ltd Direct advance movement mechanism

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02254398A (en) * 1989-03-28 1990-10-15 Matsushita Electric Ind Co Ltd Slide guide apparatus
JP2014100781A (en) * 2012-11-22 2014-06-05 Yamaha Fine Technologies Co Ltd Direct advance movement mechanism

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