JPS61292950A - Laser trimming device - Google Patents
Laser trimming deviceInfo
- Publication number
- JPS61292950A JPS61292950A JP60134843A JP13484385A JPS61292950A JP S61292950 A JPS61292950 A JP S61292950A JP 60134843 A JP60134843 A JP 60134843A JP 13484385 A JP13484385 A JP 13484385A JP S61292950 A JPS61292950 A JP S61292950A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- optical system
- blow
- dust
- suction nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はレーザトリミング装置に関し、特にトリミング
中に発生する粉塵を効率よく収集することができる集塵
ノズルを含むレーザトリミング装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a laser trimming device, and more particularly to a laser trimming device including a dust collection nozzle that can efficiently collect dust generated during trimming.
レーザトリミング中に発生する粉塵を収集するための従
来の技術としては、集塵ノズルを用い９気を吸引する方
法がとられていた。A conventional technique for collecting dust generated during laser trimming has been to use a dust collection nozzle to suck in 9 qi.
上述し九従来の集塵ノズルによる方法では、空気を吸引
することのみによって粉塵を収集していたため、トリミ
ング中に発生する粉塵を完全に除去することができない
という問題点がある。そのため長時間の使用ではレーザ
トリミング装置において光学系部品（ミラーなど）の劣
化や損傷などの原因ともなっていた。In the nine conventional dust collection nozzle methods described above, dust is collected only by suctioning air, so there is a problem in that the dust generated during trimming cannot be completely removed. Therefore, when used for a long time, optical system components (mirrors, etc.) in the laser trimming device may deteriorate or be damaged.
本発明は上記問題点を解決したものであシ、レーザ光を
集光光学系を介して加工テーブル上の被加工物に照射し
てトリミング加工を行なうレーザトリミング装置におい
て、前記集光光学系と前記加工テーブルとの間に吹出し
ノズル及び吸引ノズルを対向して配した構成としてなる
ものである。The present invention solves the above problems, and provides a laser trimming apparatus that performs trimming by irradiating a workpiece on a processing table with a laser beam through a condensing optical system. A blow nozzle and a suction nozzle are arranged to face each other between the processing table and the processing table.
次に、その実施例を第１図、第２図と共に説明する。 Next, the embodiment will be explained with reference to FIGS. 1 and 2.
第１図及び第２図は夫々本発明に係るレーザトリミング
装置の一実施例の側面図、及びその粉塵収集装置の斜視
図である。1 and 2 are a side view of an embodiment of a laser trimming device according to the present invention and a perspective view of its dust collection device, respectively.
第１図中、レーザトリミング装置の集光光学系３を通っ
たレーザ光３ａは、トリミング基板５の抵抗体６（第２
図参照）Ｋ照射されトリミングを行う、その際発生する
粉塵６ａは、集光光学系３と加工テーブル４との間の対
向した一対の吹出しノズル１と、吸引ノズル２との間の
空気の流れによって収集される。In FIG. 1, the laser beam 3a that has passed through the condensing optical system 3 of the laser trimming device is transmitted to the resistor 6 (second
(See figure) The dust 6a generated during trimming with K irradiation is caused by the air flow between a pair of opposing blow-off nozzles 1 and suction nozzles 2 between the condensing optical system 3 and the processing table 4. collected by.
上記の構造を第２図によシ詳述する。同図中、吹出しノ
ズル１から吹出された空気は吸引ノズル２へ吸い込まれ
る。したがって、吹出しノズル１と、吸引ノズル２との
間には図中点線で囲まれたような空気の流れ７が出来る
。この空気の流れ７によってトリミング中に発生する粉
塵６！を収集する。The above structure will be explained in detail with reference to FIG. In the figure, air blown out from a blowing nozzle 1 is sucked into a suction nozzle 2. Therefore, an air flow 7 is created between the blow-off nozzle 1 and the suction nozzle 2 as shown by the dotted line in the figure. Dust 6 generated during trimming due to this air flow 7! Collect.
以上説明したように１本発明は、レーザトリミング中に
発生する粉塵を、集光光学系と加工テーブルとの間の対
向した一対の吹出しノズルと吸引ノズルとの間の空気の
流れによって収集するようにしているため、動電よ〈粉
塵の除去を行うことができ、これによシ光学部品等の長
寿命化・信頼性向上が達成され、よシ信頼性の高い安定
なレーザトリミング装置の提供が可能となるという効果
がある。As explained above, one aspect of the present invention is to collect dust generated during laser trimming by an air flow between a pair of opposing blow-off nozzles and a suction nozzle between a condensing optical system and a processing table. This makes it possible to remove dust using electrodynamics, which extends the life of optical components and improves their reliability, providing a highly reliable and stable laser trimming device. This has the effect of making it possible.
第１＠及び第２図は夫々本発ｆＩＡＩｌｃｇｋるレーザ
トリミング装置の一実施例の側面図、及びその粉塵収集
装置の斜視図である。
１・・・吹出しノズル ２・・・吸引ノズル３・・
・集光光学系 ３ａ・・・レーザ光４・・・加工
テーブル ５・・・トリミング基板６・・・抵抗体
６ａ・・・粉塵７・・・空気流れFigures 1 and 2 are a side view of an embodiment of the laser trimming device of the present invention and a perspective view of its dust collection device, respectively. 1...Blowout nozzle 2...Suction nozzle 3...
- Focusing optical system 3a...Laser beam 4...Processing table 5...Trimming board 6...Resistor 6a...Dust 7...Air flow
Claims (1)
工物に照射してトリミング加工を行なうレーザトリミン
グ装置において、前記集光光学系と前記加工テーブルと
の間に吹出しノズル及び吸引ノズルを対向して配した構
成としてなることを特徴とするレーザトリミング装置。In a laser trimming device that performs trimming by irradiating a workpiece on a processing table with a laser beam through a condensing optical system, a blowing nozzle and a suction nozzle are arranged opposite to each other between the condensing optical system and the processing table. A laser trimming device characterized in that it has a configuration in which
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60134843A JPS61292950A (en) | 1985-06-20 | 1985-06-20 | Laser trimming device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60134843A JPS61292950A (en) | 1985-06-20 | 1985-06-20 | Laser trimming device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61292950A true JPS61292950A (en) | 1986-12-23 |
Family
ID=15137762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60134843A Pending JPS61292950A (en) | 1985-06-20 | 1985-06-20 | Laser trimming device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61292950A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0499508U (en) * | 1991-01-23 | 1992-08-27 | ||
| JP2008297046A (en) * | 2007-05-30 | 2008-12-11 | Hitachi Plant Technologies Ltd | Air flow controlling method, and storage warehouse facility |
-
1985
- 1985-06-20 JP JP60134843A patent/JPS61292950A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0499508U (en) * | 1991-01-23 | 1992-08-27 | ||
| JP2008297046A (en) * | 2007-05-30 | 2008-12-11 | Hitachi Plant Technologies Ltd | Air flow controlling method, and storage warehouse facility |
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