JPS6049888A - Laser cutting device - Google Patents

Laser cutting device

Info

Publication number
JPS6049888A
JPS6049888A JP58158585A JP15858583A JPS6049888A JP S6049888 A JPS6049888 A JP S6049888A JP 58158585 A JP58158585 A JP 58158585A JP 15858583 A JP15858583 A JP 15858583A JP S6049888 A JPS6049888 A JP S6049888A
Authority
JP
Japan
Prior art keywords
cut
hood
laser light
cutting
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58158585A
Other languages
Japanese (ja)
Other versions
JPH0551397B2 (en
Inventor
Tatsumi Takahashi
達見 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP58158585A priority Critical patent/JPS6049888A/en
Publication of JPS6049888A publication Critical patent/JPS6049888A/en
Publication of JPH0551397B2 publication Critical patent/JPH0551397B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/0042Devices for removing chips
    • B23Q11/0046Devices for removing chips by sucking
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To remove or capture effectively the cutting slag, melt, etc. generated by cutting by providing upper and lower discharge hoods to a laser cutting device and connecting the same to a discharge fan. CONSTITUTION:An upper discharge hood 10 is connected via a pipe 11 and a valve 12 to a discharge fan and a nozzle 13 is inserted into the hood 10 from the upper part thereof. Condensed laser light passes through the center of the nozzle 13 and is emitted from the lower part of the nozzle 13. An inert gas is introduced into the nozzle 13 and strikes a material 5 to be cut together with the exit light of the laser light. A groove 21 is provided on the surface of a lower discharge hood 20 and a discharge hole 23 is provided on the side face of the hood 20 from the groove 21 and is connected via a pipe 24 and a valve 25 to a discharge fan. The decomposing gas and cutting slag arriving at the inside of the groove 21 in the part cut by the laser light emitted from the nozzle 13 are discharged through the discharge hole 23.

Description

【発明の詳細な説明】 (技術分野) 本発明は炭酸ガス等のレーザー光乞用いたレーザー断裁
装置に関するものであり、断裁時に生じる被断裁物の破
片や溶融物により被断裁物が汚染もしくは損傷すること
なく、かつ、断裁時に発生したガスの捕集も効率的に行
なえる、改良されたレーザー断裁装置に関する。
[Detailed Description of the Invention] (Technical Field) The present invention relates to a laser cutting device that uses a laser beam such as carbon dioxide gas, and the present invention relates to a laser cutting device that uses a laser beam such as carbon dioxide gas. The present invention relates to an improved laser cutting device that can efficiently collect gas generated during cutting without causing any damage.

(従来技術) レーザー断裁装置は光学系乞通してレーザー光乞集光さ
せ、被断裁物の微小面積部分に高エネルギー乞与えろこ
とにより、被断裁物を溶融もしくは蒸発させて断裁する
ものである。
(Prior Art) A laser cutting device uses an optical system to focus a laser beam and apply high energy to a minute area of the object to melt or evaporate the object to cut it.

レーザー断裁装置は回転刃乞使用する断裁装置に(らべ
、使用時に発生する断裁滓が少TgL・利点があるが、
未だ次のよっな■、■の欠点を有している。
Laser cutting equipment has the advantage of having a lower TgL and less cutting residue generated during use (compared to cutting equipment that uses a rotating blade).
It still has the following drawbacks.

■断裁滓の除去が完全ではないので、断裁滓が被断裁物
に付着するの乞防止しきれず、荷に精密部品や光学部品
では支障があること。同様なことは溶融によって生じろ
溶融物につ℃・ても言える。
■Since the cutting residue is not completely removed, it is impossible to prevent the cutting residue from adhering to the object to be cut, which may cause problems when carrying precision parts or optical parts. The same thing can be said about the molten material produced by melting.

■被断裁物より発生する分解ガスの捕集は被断裁物の下
方に設置されたフードで排気する程度でしか行なわれて
いないので完全でないこと。
- Collection of decomposed gas generated from the material to be cut is not complete as the only way to collect it is to exhaust it through a hood installed below the material to be cut.

上記■、■の欠点は、従来、被断裁物がレーザー光によ
って過度に昇温するの乞避けるため不活性ガス(例えば
窒素ガス)ンレーザー光に照射される部位に高圧で吹き
つけていることによって助長されているが、不活性ガス
の使用は被断裁物の非断裁部の溶融、劣化2防ぐ意義2
有しているので、省略する訳には行かない。
The disadvantages of (2) and (2) above are that conventionally, in order to prevent the object to be cut from becoming excessively heated by the laser beam, an inert gas (e.g. nitrogen gas) is blown at high pressure onto the area that will be irradiated with the laser beam. However, the use of inert gas has the significance of preventing melting and deterioration of the uncut portion of the cut material2.
Since we have it, we cannot afford to omit it.

しかしながら、上記■、■の欠点は従来、それほど問題
視されていない。それはレーザー断裁装置がまだ実験段
階のものであり、長時間の連続使用については検討され
ておらず、又、被断裁vlも合板、鉄板のごとく、表面
の汚染が問題にならないものが多かったためである。
However, the above drawbacks (1) and (2) have not been regarded as much of a problem in the past. This was because the laser cutting equipment was still in the experimental stage, and long-term continuous use had not been considered, and the materials to be cut were mostly plywood and iron plates, where surface contamination was not a problem. be.

しかし、近年、レーザー断裁装置が精密部品や光学部品
に利用されるようになり、上記の欠点が製品の性能に支
障を与えることが多くなり、改善が望まれろようになっ
ている。
However, in recent years, laser cutting devices have come to be used for precision parts and optical parts, and the above-mentioned drawbacks are increasingly affecting the performance of products, and improvements are desired.

(発明の目的) 従って、本発明は従来のレーザー断裁装置におけろ不活
性ガスの吹き付は乞その−1:ま行ないつつ、発生する
断裁滓、溶融物、および分解ガ裁装置を提供するもので
ある。
(Object of the Invention) Accordingly, the present invention provides a cutting device that eliminates the cutting residue, melt, and decomposition gas that are generated while eliminating the need for inert gas spraying in conventional laser cutting devices. It is something.

(発明の構成) 本発明のレーザー断裁装置は、レーザー光発振器・発振
器駆動電源・レーザー光集光用光学系とからなるレーザ
ー光源が被断裁物乞載置するための定盤上に配置され、
前記レーザー光源と前記定盤とは水平方向に相対的に移
動可能となっており、前記レーザー光源のレーザー光出
口から被断裁物の近傍は上部排気フードで覆われており
、前記定盤上には、表面に被断裁物の断裁線に漬って形
成された溝を有する下部排気フードが設置されており、
かつ、前記北部・下部排気フードには排気ファンが連結
されていることを特徴とするものである。
(Structure of the Invention) The laser cutting device of the present invention includes a laser light source including a laser light oscillator, an oscillator drive power source, and a laser light focusing optical system, which is arranged on a surface plate for placing a cut object, and
The laser light source and the surface plate are movable relative to each other in the horizontal direction, and the area from the laser light exit of the laser light source to the vicinity of the object to be cut is covered with an upper exhaust hood. is equipped with a lower exhaust hood that has a groove formed on the surface along the cutting line of the material to be cut.
Further, an exhaust fan is connected to the northern and lower exhaust hoods.

第1図はレーザー断裁装置の原理7示すための概要図で
あって、電源により駆動された発1辰器より発したレー
ザー光/はミラーコ、レンズ3馨通過して所定の方向に
反射及び集光され、X−Yテーブルを上の被断裁物Sに
照射される。
FIG. 1 is a schematic diagram showing the principle 7 of the laser cutting device, in which the laser beam emitted from the emitter driven by the power source passes through the mirror and lens 3, and is reflected and focused in a predetermined direction. The light is irradiated onto the object S to be cut on the X-Y table.

この例ではテーブル+!ン水平方向に移動させることに
より、被断裁物を所定の形状に断裁するが、逆にテーブ
ルダ乞固定して2ぎ、ミラーコ及ヒレンズ3ン移動させ
てもよい。
In this example, table+! By moving the table horizontally, the object to be cut is cut into a predetermined shape. However, it is also possible to fix the table and move the mirror and lens 3.

第コ図は、第1図に示したレーザー断裁装置ルンズ3か
ら被断裁@Sに至る間の排気に関与する上部排気フード
の断面を示す説明図である。上部排気フードIOは水平
断面が正方形の角柱状の箱の形状とするか、もしくは水
平断面が円形の円柱状の形状とするとよ(、フードIO
は管//、パルプ/2を介して排気ファンに連結されて
いると共にノズル/3がフードの上部より挿入されてい
る。ノズル10は集光すれたレーザー光がその中心ビ通
り、ノズル10下部より出射し、又、ノズル10内には
不活性ガス(例えば望素ガス)の高圧ガスが導入され、
レーザー光の出射光と共に被断裁′!/J5に当たるよ
うに構成されている。上部フード10の直径は排気の効
率、取り扱い作業の容易さ等の観点から20 cTL−
50の、より好ましくは2!;(1〜tt、。
FIG. 1 is an explanatory diagram showing a cross section of an upper exhaust hood that is involved in exhausting air between the laser cutting device Luns 3 and the cutting target @S shown in FIG. 1. The upper exhaust hood IO may have the shape of a prismatic box with a square horizontal cross section or a cylindrical shape with a circular horizontal cross section.
is connected to an exhaust fan via pipe// and pulp/2, and a nozzle/3 is inserted from the top of the hood. A focused laser beam passes through the nozzle 10 and is emitted from the bottom of the nozzle 10, and a high-pressure gas such as an inert gas (for example, a desired gas) is introduced into the nozzle 10.
It will be cut along with the emitted laser light! /J5. The diameter of the upper hood 10 is set at 20 cTL- from the viewpoint of exhaust efficiency, ease of handling, etc.
50, more preferably 2! ;(1~tt,.

儂である。又、フード10の下端と被断裁物との距離は
O13〜30龍、好ましくは9〜13mmであり、排気
の効率の点を除けば被断裁物Sがら離した方が使いや丁
い。
It's me. Further, the distance between the lower end of the hood 10 and the object to be cut is 013 to 30 mm, preferably 9 to 13 mm, and it is more convenient to keep the distance from the object to be cut S apart from the point of exhaust efficiency.

第3図!本下部排気フードの平面図、第y図は下部排気
フードの使用状態の断面を説明する図である。
Figure 3! A plan view of the present lower exhaust hood, FIG.

第3図の下部排気フード2oはx−yテーブルダ上に設
置するため、たとえば平板の表面に溝、2/が設けであ
る。ここでは溝、2/は被断裁物を長方形に断裁するよ
うフードコθの周囲に溢って長方形に設けである。溝λ
lがら7−ドコ0の側面ツーにかけては排気孔23が設
けてありパイプユq1パルブユ5ン介して排気ファンに
連結しである。従ってノズル13より出たレーザー光に
よって断裁された箇所に8いて溝2/中に到達した分解
ガスや断裁滓は排気孔コ3乞経由して排気される。
In order to install the lower exhaust hood 2o in FIG. 3 on an x-y table, for example, a groove, 2/, is provided on the surface of a flat plate. Here, the groove 2/ is provided in a rectangular shape so as to extend around the foodco θ so that the object to be cut is cut into a rectangular shape. Groove λ
Exhaust holes 23 are provided from side 2 of 7 to 0, and are connected to an exhaust fan via pipes q1 and 5. Therefore, the decomposed gas and cutting slag that reach the groove 2/in the cut portion by the laser beam emitted from the nozzle 13 are exhausted through the exhaust hole 3.

ここで排気速度は6〜9 m / sec 、好ましく
は9〜/ 37+1 / seeであり、又、溝の巾は
レーザーの断裁中がレーザー出力soowの場合、0.
7− /、0龍であることがら3〜/θmmとするのが
よい。
Here, the pumping speed is 6-9 m/sec, preferably 9-/37+1/see, and the width of the groove is 0.0 m/sec when the laser output is soow during laser cutting.
Since it is 7-/, 0 dragon, it is preferable to set it to 3~/θmm.

又、フード20の排気孔23とは反対の位置に吸気孔x
by設けてお(とよ(、このようにすると、溝ユ/内の
威圧効果が上がるだけで空気の移動が少な(なる点が解
消されるので、排気の効率が向上する。
In addition, an intake hole x is provided at a position opposite to the exhaust hole 23 of the hood 20.
If you do this, the coercive effect within the groove will only increase, and the problem of less air movement will be solved, improving the efficiency of exhaust air.

なお、被断裁物Sと排気フードユOの密着はクッション
材コア乞介し、かつ、排気フード表面にエアチャックな
どの吸盤乞用いて行なうとよく、エアチャックの作動は
減圧電磁弁乞用いて行なえばよい◇ 排気フード−〇は適宜な材料乞用いて作製することがで
きるが、溝ユ/の底部は断裁時にレーザー光が直接に当
たるため、レーザー光照射に耐えろと共にレーザー光の
反射乞防止しうろものであることが望ましく、鉄、アル
ミニウムなどンサンドブラスト法等により粗面化したも
のやセラミックとすることがよい。金属の鏡面、特に銅
を用いろとレーザー光が反射し、作業者にとって危険で
あるばかりでなく、被断裁物りに裏面から再度作用する
恐れがある。
The material to be cut S and the exhaust hood O should be brought into close contact with each other by using a cushioning core and a suction cup such as an air chuck on the surface of the exhaust hood, and the air chuck can be operated by using a pressure reducing solenoid valve. Good ◇ Exhaust hood - ○ can be made using appropriate materials, but since the bottom of the groove hood will be directly hit by the laser beam during cutting, it must be able to withstand the laser beam irradiation and also be made with a material that will prevent the reflection of the laser beam. It is preferable to use iron, aluminum, etc. whose surface has been roughened by sandblasting, or ceramic. If a mirror surface of metal, especially copper, is used, the laser beam will be reflected, which is not only dangerous for the worker, but also may cause the object to be cut to be re-irradiated from the back side.

上記した下部排気フード20はX−Yテーブル上に固定
して使用すればよいが、勿論、光源側が可動でテーブル
が動かない装置に取り付けてもよ(、従ってビーム固定
式、ビーム移動式のいずれのレーザー断裁装置にも使用
できろ。
The above-mentioned lower exhaust hood 20 may be used by being fixed on an X-Y table, but of course it may also be attached to a device where the light source side is movable and the table does not move (therefore, either a fixed beam type or a moving beam type) may be used. It can also be used for laser cutting equipment.

上部排気フードについても両方式に使用できるので、結
局、本発明は両方式のいずれにも適用できる。
Since the upper exhaust hood can also be used in both types, the present invention can be applied to both types.

又1以上の説明では省略したが、排気された空気中の粉
塵などの固型物は予めフィルターを用いて取り除き、更
に被断裁物より発生した分解ガスは、例えばポリ塩化ビ
ニル樹脂であれば塩化水素ガスを処理するスクラバーな
用い、アクリル板等を切断するときに発生するモノマー
の臭気は触媒型燃焼脱臭装置乞用いて除去するとよい。
In addition, although omitted in the above explanation, solid substances such as dust in the exhausted air are removed using a filter in advance, and decomposition gas generated from the material to be cut is chlorinated, for example, if it is polyvinyl chloride resin. It is recommended to use a catalytic combustion deodorizing device to remove the odor of monomers generated when cutting acrylic plates or the like using a scrubber that processes hydrogen gas.

(発明の効果) 以上の本発明によれば、従来のレーザー断裁装置の断裁
方式そのものは維持しつつも、発生する断裁滓、溶融物
、および分解ガスの除去、捕集が有効に行なえるので、
精密部品や光学部品の断裁に最適である。
(Effects of the Invention) According to the present invention, while maintaining the cutting method of the conventional laser cutting device, the generated cutting residue, melt, and decomposed gas can be effectively removed and collected. ,
Ideal for cutting precision parts and optical parts.

以下に本発明のレーザー断裁装置ン実際に使用した場合
の例乞述べろ。
Below, please give an example of the actual use of the laser cutting apparatus of the present invention.

く使用例〉 被断裁物としては厚み3 mmのアクリル樹脂板を用い
、9g0X/300’mmの原板を?6g×7230 
mmになるよう四方乞断裁した。
Usage example: Use a 3 mm thick acrylic resin board as the material to be cut, and use a 9g0X/300'mm original board. 6g x 7230
It was cut on all sides to a length of mm.

光源として炭酸ガスレーザー7用い、出カン5oovt
K調整し、f = / 00 mmのレンズによりアク
リル板上に焦点2結ばせて使用した。
Using carbon dioxide laser 7 as a light source, output 5oovt
It was used by adjusting K and focusing two focal points on the acrylic plate using a lens of f = /00 mm.

断裁速度はg m 7分とし、上部排気フードの排気速
度はt、2m/分、下部排気フードは9JmZ分とし、
上下合計した排気量は527分とした。
The cutting speed is g m 7 minutes, the exhaust speed of the upper exhaust hood is t, 2 m/min, the lower exhaust hood is 9 JmZ minutes,
The total displacement of the upper and lower sections was 527 minutes.

この結果、作業環境の臭気に関しては、三点比較式実装
法テストでの評価結果がIOであり、捕集装置で、? 
000 、脱臭後はダ7であって、この程度の処理風量
でも安全・公害防止の基準ケ満たしていることがわかっ
た。
As a result, regarding the odor in the work environment, the evaluation result in the three-point comparison mounting method test is IO, and the collection device is ?
000, and Da7 after deodorization, indicating that even with this level of processing air volume, safety and pollution prevention standards were met.

又、このとき、被断裁物の表面には粉塵の付着や汚れが
発生せず、100枚断裁後、排気ファンのフィルター面
に粉塵が付着していることが確認された。
Furthermore, at this time, no dust or dirt was observed on the surface of the object to be cut, and after cutting 100 sheets, it was confirmed that dust was adhering to the filter surface of the exhaust fan.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はレーザー断裁装置の原理を示すだめの説明図、
第2図は上部排気フードの説明図、第3図は下部排気フ
ードの説明図、第弘図は下部排気フードの使用状態の説
明図である。 /−@争・e・・・・11Φレーザー光ユ・・・・・・
・11@拳・ミラー 3・・・・・・・・・・・光 学 系 グ・・・・・・・・・・・被断裁物 S ・自■」・・1」・X−Yテーブル/ 0 ・・・
・・・・・・・・上部排気フード/1IIIIII・・
・・・@す・管 / +2 −―・・・・・・・・・ バ ル プ/ 3
 ・・11参〇・・・・・・ ノス ルユθ ・・・・
・・・・・・・下部排気フード2/・―・・・・・噛り
・溝 22−”−−−−−・@11側面 ユ3・・・・・・・・・・・排 気 孔、21I・・・
・・・・・・1・パ イ プ2S・!・・・・・−・・
・バ ル ブ、24 ・・・・・・・・・・・吸 気 
孔27Φ・嗜・・■・・−・クッション拐特許出願人 
大日本印刷株式会社 才1図 コ 才2図
Figure 1 is an explanatory diagram showing the principle of the laser cutting device;
Fig. 2 is an explanatory diagram of the upper exhaust hood, Fig. 3 is an explanatory diagram of the lower exhaust hood, and Fig. 3 is an explanatory diagram of the usage state of the lower exhaust hood. /-@war・e・・・・11Φlaser light Yu・・・・・・
・11@Fist・Mirror 3・・・Optical system・・・・・・・・・・・・・Object to be cut S ・Self■”・・1”・X-Y table / 0...
......Top exhaust hood/1IIIIII...
...@su・tube/+2 ---・・・・・・・・・ Valp/3
・・・11 〇・・・・・・ Nos Ruyu θ ・・・・
・・・・・・Lower exhaust hood 2/・・・・Bug/groove 22−”−−−−・@11 Side hood 3・・・・・・・・・・Exhaust Hole, 21I...
・・・・・・1・Pipe 2S・!・・・・・・-・・
・Valve, 24...Intake
Hole 27Φ・・・■・・・・Cushion kidnapping patent applicant
Dai Nippon Printing Co., Ltd. Sai 1 Diagram Ko Sai 2 Diagram

Claims (1)

【特許請求の範囲】[Claims] (1)レーザー光発振器・発振器駆動電源・レーザー光
集光用光学系とからなるレーザー光源が被断裁物を載置
するための定盤上に配置され、前記レーザー光源と前記
定盤とは水平方向に相対的に移動可能となってFす、前
記レーザー光源のレーザー光出口から被断裁物の近傍は
上部排気フードで覆われており、前記定盤上には、表面
に被断裁物の断裁線に漬って形成された溝ン有する下部
排気フードが設置されており、かつ、前記上部・下部排
気フードには排気ファンが連結されていること乞特徴と
するレーザー断裁装置。
(1) A laser light source consisting of a laser light oscillator, an oscillator driving power source, and an optical system for concentrating laser light is placed on a surface plate on which the object to be cut is placed, and the laser light source and the surface plate are horizontal. The area from the laser light exit of the laser light source to the vicinity of the object to be cut is covered with an upper exhaust hood, and the surface plate is provided with a surface plate for cutting the object to be cut. A laser cutting device characterized in that a lower exhaust hood having a groove formed in a line is installed, and an exhaust fan is connected to the upper and lower exhaust hoods.
JP58158585A 1983-08-30 1983-08-30 Laser cutting device Granted JPS6049888A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58158585A JPS6049888A (en) 1983-08-30 1983-08-30 Laser cutting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58158585A JPS6049888A (en) 1983-08-30 1983-08-30 Laser cutting device

Publications (2)

Publication Number Publication Date
JPS6049888A true JPS6049888A (en) 1985-03-19
JPH0551397B2 JPH0551397B2 (en) 1993-08-02

Family

ID=15674901

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58158585A Granted JPS6049888A (en) 1983-08-30 1983-08-30 Laser cutting device

Country Status (1)

Country Link
JP (1) JPS6049888A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6362285U (en) * 1986-10-09 1988-04-25
CN104816100A (en) * 2014-02-05 2015-08-05 株式会社迪思科 Holding table
CN108453393A (en) * 2018-03-27 2018-08-28 武汉华星光电半导体显示技术有限公司 Cutting platform and diced system
CN108581233A (en) * 2018-07-03 2018-09-28 武汉华星光电半导体显示技术有限公司 A kind of laser cutting device
CN110153575A (en) * 2019-07-03 2019-08-23 京东方科技集团股份有限公司 Cutting platform and cutting equipment

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56100286U (en) * 1979-12-26 1981-08-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56100286U (en) * 1979-12-26 1981-08-07

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6362285U (en) * 1986-10-09 1988-04-25
JPH0337821Y2 (en) * 1986-10-09 1991-08-09
CN104816100A (en) * 2014-02-05 2015-08-05 株式会社迪思科 Holding table
KR20150092705A (en) * 2014-02-05 2015-08-13 가부시기가이샤 디스코 Support table
JP2015147231A (en) * 2014-02-05 2015-08-20 株式会社ディスコ holding table
DE102015201833B4 (en) * 2014-02-05 2020-10-29 Disco Corporation Holding table and using the holding table
CN108453393A (en) * 2018-03-27 2018-08-28 武汉华星光电半导体显示技术有限公司 Cutting platform and diced system
CN108581233A (en) * 2018-07-03 2018-09-28 武汉华星光电半导体显示技术有限公司 A kind of laser cutting device
CN110153575A (en) * 2019-07-03 2019-08-23 京东方科技集团股份有限公司 Cutting platform and cutting equipment
CN110153575B (en) * 2019-07-03 2021-08-17 京东方科技集团股份有限公司 Cutting platform and cutting equipment

Also Published As

Publication number Publication date
JPH0551397B2 (en) 1993-08-02

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