JPS6128287B2 - - Google Patents
Info
- Publication number
- JPS6128287B2 JPS6128287B2 JP4257180A JP4257180A JPS6128287B2 JP S6128287 B2 JPS6128287 B2 JP S6128287B2 JP 4257180 A JP4257180 A JP 4257180A JP 4257180 A JP4257180 A JP 4257180A JP S6128287 B2 JPS6128287 B2 JP S6128287B2
- Authority
- JP
- Japan
- Prior art keywords
- ultraviolet
- oxide film
- present
- detection element
- electrolyte
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000825 ultraviolet detection Methods 0.000 claims description 15
- 239000003792 electrolyte Substances 0.000 claims description 9
- 239000010407 anodic oxide Substances 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 230000004913 activation Effects 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 claims description 2
- 150000003839 salts Chemical class 0.000 claims description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 4
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- ROSDCCJGGBNDNL-UHFFFAOYSA-N [Ta].[Pb] Chemical compound [Ta].[Pb] ROSDCCJGGBNDNL-UHFFFAOYSA-N 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 2
- 229910001936 tantalum oxide Inorganic materials 0.000 description 2
- PASCVNXEVINGGG-UHFFFAOYSA-N Mollic acid Natural products CC(CCC=C(C)C)C1CCC2(C)C3CCC4C(C)(C(O)CC(O)C45CC35CCC12C)C(=O)O PASCVNXEVINGGG-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 239000011245 gel electrolyte Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- 229940099596 manganese sulfate Drugs 0.000 description 1
- 235000007079 manganese sulphate Nutrition 0.000 description 1
- 239000011702 manganese sulphate Substances 0.000 description 1
- SQQMAOCOWKFBNP-UHFFFAOYSA-L manganese(II) sulfate Chemical compound [Mn+2].[O-]S([O-])(=O)=O SQQMAOCOWKFBNP-UHFFFAOYSA-L 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910000480 nickel oxide Inorganic materials 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000002798 spectrophotometry method Methods 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/48—Photometry, e.g. photographic exposure meter using chemical effects
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Description
【発明の詳細な説明】
本発明は紫外線検知素子に関するものであり、
さらに詳細には、受光紫外線量の変化を比例的に
静電容量の変化に変換する紫外線検知素子に関す
るものである。以下、図面に従つて本発明による
紫外線検知素子の具体的な内容について説明す
る。[Detailed Description of the Invention] The present invention relates to an ultraviolet detection element,
More specifically, the present invention relates to an ultraviolet detection element that proportionally converts a change in the amount of received ultraviolet light into a change in capacitance. Hereinafter, specific details of the ultraviolet detection element according to the present invention will be explained with reference to the drawings.
第１図に本発明の一実施例による紫外線検知素
子を示しており、図において１はタンタル、アル
ミニウム、チタンのような弁金属からなる主電
極、２はこの主電極１上に形成された電気伝導の
活性化エネルギーが390mμ以下の波長の光に相
当する誘電体性陽極酸化皮膜、３は白金のような
不活性導電性金属からなる対向電極、４は導電性
で紫外線透過性の電解液で、例えば硫酸、リン酸
等の稀釈水溶液である。５は紫外線透過性のセル
で、例えば石英ガラスである。なお、ここで用い
る電解液は硫酸、リン酸などが適当である。例え
ばMn2＋イオンのような金属イオンを含む塩（例
えば硫酸マンガン）の水溶液を用いると、Mn2＋
が陽極酸化され誘電体性陽極酸化皮膜表面に
Mnox（1.5L×L2.0）の層が電解析出し素子の司
逆性が損なわれる。 FIG. 1 shows an ultraviolet detection element according to an embodiment of the present invention. In the figure, 1 is a main electrode made of a valve metal such as tantalum, aluminum, or titanium, and 2 is an electric current formed on this main electrode 1. A dielectric anodic oxide film whose conduction activation energy corresponds to light with a wavelength of 390 mμ or less, 3 a counter electrode made of an inert conductive metal such as platinum, and 4 a conductive electrolyte that is transparent to ultraviolet light. , for example, diluted aqueous solutions of sulfuric acid, phosphoric acid, etc. Reference numeral 5 denotes an ultraviolet-transparent cell, which is made of, for example, quartz glass. Note that sulfuric acid, phosphoric acid, or the like is suitable for the electrolytic solution used here. For example, when an aqueous solution of a salt (e.g. manganese sulfate) containing metal ions such as Mn 2 + ions is used, Mn 2 +
is anodized and the dielectric anodic oxide film surface
The layer of Mnox (1.5L×L2.0) impairs the reversibility of the electrolytic deposited element.
第２図にこの第１図に示す構造の素子におい
て、主電極１にタンタル、誘電体性陽極酸化皮膜
２に酸化タンタル、対向電極３に白金、電解液４
に0.1モル／のリン酸水溶液を用いた場合の特
性の一例、すなわち電極リード間の静電容量値の
変化の様子を示しており、このように本発明によ
る紫外線検知素子においては、静電容量が紫外線
の照射によつて急激に増加し、速かに飽和値に達
し、暗状態にすると、再び速かに初期の静電容量
値にまで戻る。 FIG. 2 shows an element having the structure shown in FIG. 1, in which the main electrode 1 is tantalum, the dielectric anodic oxide film 2 is tantalum oxide, the counter electrode 3 is platinum, and the electrolyte 4 is
It shows an example of the characteristics when a 0.1 mol/aqueous phosphoric acid solution is used, that is, the change in capacitance value between the electrode leads. When irradiated with ultraviolet light, the capacitance increases rapidly and quickly reaches a saturation value, and when the dark state is reached, the capacitance quickly returns to the initial capacitance value.
第３図に本発明の他の実施例を示しており、こ
の第３図に示す実施例では、絶縁基板１１上の主
電極となる弁金属膜１２と、この弁金属膜１２上
の誘電体性金属酸化皮膜１３と、この誘電体性陽
極酸化皮膜１３上の固体若しくはゲル状の電解質
１４と、この電解質１４上の対向電極１５とから
構成したものであり、電解質１４は紫外線透過性
物質、例えば酸化スズ膜を用いるか、若しくは紫
外線が透過する程度の厚さに形成したものであ
る。この電解質としては酸化鉛、酸化ニツケル、
酸化ルテニウム等があり、下地の誘電体性陽極酸
化皮膜への電子の注入を制御する作用を有し、熱
的、電気的劣化を最小限に抑える。 FIG. 3 shows another embodiment of the present invention. In the embodiment shown in FIG. The electrolyte 14 is composed of a dielectric metal oxide film 13, a solid or gel electrolyte 14 on the dielectric anodic oxide film 13, and a counter electrode 15 on the electrolyte 14. For example, a tin oxide film is used, or it is formed to a thickness that allows ultraviolet rays to pass through. This electrolyte includes lead oxide, nickel oxide,
It includes ruthenium oxide, etc., and has the effect of controlling the injection of electrons into the underlying dielectric anodic oxide film, minimizing thermal and electrical deterioration.
この第３図に示す素子も、第１図に示す素子と
同様に、紫外線に対する感応特性が第２図の特性
図のようになる。 The element shown in FIG. 3 also has sensitivity characteristics to ultraviolet rays as shown in the characteristic diagram of FIG. 2, similar to the element shown in FIG. 1.
第４図に本発明の素子の受光紫外線強度、すな
わち同一光源から素子までの距離と、静電容量値
の変化の割合を示しているが、この第４図から判
るように、紫外線により増加した容量値は、光源
と素子との距離に比例して変化することから、素
子の容量値の変化は紫外線強度に比例するのであ
る。 Figure 4 shows the received ultraviolet light intensity of the element of the present invention, that is, the distance from the same light source to the element, and the rate of change in capacitance value. Since the capacitance value changes in proportion to the distance between the light source and the element, the change in the element capacitance value is proportional to the ultraviolet light intensity.
ここで、本発明の紫外線検知素子の具体例と使
用例とについて説明する。 Here, specific examples and usage examples of the ultraviolet detection element of the present invention will be explained.
まず、具体例について説明すると、５mm×５
mm、厚さ0.5mmのタンタル板上に0.5モル／の蓚
酸水溶液で酸化タンタル膜を形成し、またタンタ
ル板にタンタルリード等をスポツト溶接してリー
ド付けし、石英ガラス管中に0.1モル／のリン
酸水溶液とともに封入して完成品する。この時、
対向電極として白金リードを封入する。 First, to explain a specific example, 5mm x 5
A tantalum oxide film was formed on a tantalum plate with a thickness of 0.5 mm with a 0.5 mol/oxalic acid aqueous solution, and a tantalum lead etc. was spot welded to the tantalum plate, and a tantalum lead of 0.1 mol// It is sealed together with a phosphoric acid aqueous solution to form a completed product. At this time,
A platinum lead is enclosed as a counter electrode.
このようにして製作した本発明の素子は、第２
図、第４図に示すような特性を示すのであるが、
紫外線検知素子としての実際の使用例を化下に述
べる。 The device of the present invention manufactured in this way has a second
It exhibits the characteristics as shown in Fig. 4.
An example of actual use as an ultraviolet detection element is described below.
本発明の素子は、第２図に示すように静電容量
値の温度依存性を有する。そこで、実使用にあた
つては、雰囲気温度を考慮する必要がある。 The device of the present invention has temperature dependence of capacitance value as shown in FIG. Therefore, in actual use, it is necessary to consider the ambient temperature.
第１の使用例は、第５図に示すような温度補償
回路を用いる方法である。すなわち、本発明の紫
外線検知素子２１と静電容量検出回路２２とで紫
外線量を静電容量に変換するとともに、サーミス
タのような温度検出素子２３と温度検出回路２４
とによつて雰囲気温度を検出し、演算回路２５で
温度補償し、このように温度補償した出力を表示
部２６で紫外線量として表示するのである。 A first usage example is a method using a temperature compensation circuit as shown in FIG. That is, the ultraviolet detection element 21 and the capacitance detection circuit 22 of the present invention convert the amount of ultraviolet rays into capacitance, and the temperature detection element 23 such as a thermistor and the temperature detection circuit 24
The ambient temperature is detected by the above, the temperature is compensated for by the arithmetic circuit 25, and the thus temperature compensated output is displayed as the amount of ultraviolet rays on the display section 26.
第２の使用例は、第６図に示すように常に紫外
線検知素子２１を恒温に保つて使用するもので、
すなわち本発明の紫外線検知素子２１を紫外線透
過窓２７を有するセル２８の中に置くものであ
り、このセル２８は常に一定温度に保たれてお
り、紫外線検知素子２１も常に恒温である。そし
て、この紫外線検知素子２１で検知した紫外線の
容量変換出力を静電容量検出回路２２で検出し、
表示部２６で受光紫外線量として表示するのであ
る。 In the second usage example, as shown in FIG. 6, the ultraviolet detection element 21 is always kept at a constant temperature.
That is, the ultraviolet detecting element 21 of the present invention is placed in a cell 28 having an ultraviolet transmitting window 27, and this cell 28 is always kept at a constant temperature, and the ultraviolet detecting element 21 is also always kept at a constant temperature. Then, the capacitance conversion output of the ultraviolet light detected by this ultraviolet detection element 21 is detected by the capacitance detection circuit 22,
The amount of ultraviolet light received is displayed on the display unit 26.
このように、温度補償回路を伴うか、紫外線検
知素子を恒温に保つかによつて外部温度に影響さ
れることなく、紫外線量を正確に検知することが
できる。 In this way, the amount of ultraviolet rays can be accurately detected without being affected by external temperature by using a temperature compensation circuit or by keeping the ultraviolet detection element at a constant temperature.
以上のように本発明の紫外線検知素子は、紫外
線受光量の変化を静電容量の変化に変換するもの
であり、今迄に開発されている種々の紫外線検知
方式、すなわち分光光度法等に比べ、紫外線量を
直接電気信号に変換するので、非常に装置が小型
簡易に構成することができ、また静電容量変化値
として検出するため、微少変化に対しても電気的
ノイズの影響も非常に小さくて済むという今迄に
無い画期的な特徴を有するものであり、その工業
的価値は非常に大なるものである。 As described above, the ultraviolet detection element of the present invention converts changes in the amount of ultraviolet light received into changes in capacitance, and is superior to various ultraviolet detection methods that have been developed up to now, such as spectrophotometry. , since the amount of ultraviolet rays is directly converted into an electrical signal, the device can be very small and simple to configure, and since it is detected as a capacitance change value, the influence of electrical noise is extremely small even for minute changes. It has the revolutionary feature of being small, which has never been seen before, and its industrial value is extremely large.
第１図は本発明の一実施例による紫外線検知素
子を示す断面図、第２図は同素子の電気的特性の
一例を示す図、第３図は本発明の他の実施例によ
る紫外線検知素子を示す断面図、第４図は本発明
の紫外線検知素子の紫外線強度に対する電気的特
性の一例を示す図、第５図および第６図は本発明
の紫外線検知素子の具体的使用例を示すブロツク
回路図である。
１……主電極、２，１３……誘電体性陽極酸化
皮膜、３，１６……対向電極、４……電解液、１
２……弁金属膜、１４……電解質。
FIG. 1 is a sectional view showing an ultraviolet sensing element according to one embodiment of the present invention, FIG. 2 is a diagram showing an example of the electrical characteristics of the same element, and FIG. 3 is a cross-sectional view showing an ultraviolet sensing element according to another embodiment of the present invention. FIG. 4 is a diagram showing an example of the electrical characteristics of the ultraviolet detection element of the present invention with respect to ultraviolet intensity, and FIGS. 5 and 6 are blocks showing specific usage examples of the ultraviolet detection element of the present invention. It is a circuit diagram. 1... Main electrode, 2, 13... Dielectric anodic oxide film, 3, 16... Counter electrode, 4... Electrolyte, 1
2... Valve metal membrane, 14... Electrolyte.
Claims (1)
気伝導の活性化エネルギーが紫外線領域の波長の
光に相当する誘電体性陽極酸化皮膜と、この誘電
体性陽極酸化皮膜上のMn2＋イオンを含まない塩
の紫外線透過性電解質と、この電解質に接する対
向電極とで構成したことを特徴とする紫外線検知
素子。1. A main electrode made of valve metal, a dielectric anodic oxide film on which the activation energy of electrical conduction corresponds to light with a wavelength in the ultraviolet region, and Mn 2 + on this dielectric anodic oxide film. An ultraviolet detection element comprising an ultraviolet-transparent salt electrolyte that does not contain ions and a counter electrode in contact with the electrolyte.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4257180A JPS56138221A (en) | 1980-03-31 | 1980-03-31 | Ultraviolet ray detecting element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4257180A JPS56138221A (en) | 1980-03-31 | 1980-03-31 | Ultraviolet ray detecting element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56138221A JPS56138221A (en) | 1981-10-28 |
| JPS6128287B2 true JPS6128287B2 (en) | 1986-06-30 |
Family
ID=12639744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4257180A Granted JPS56138221A (en) | 1980-03-31 | 1980-03-31 | Ultraviolet ray detecting element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56138221A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4434557C2 (en) * | 1994-09-28 | 2000-03-09 | Becromal Spa | Use an aluminum foil |
-
1980
- 1980-03-31 JP JP4257180A patent/JPS56138221A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56138221A (en) | 1981-10-28 |
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