JPS61280556A - ガス濃度測定装置 - Google Patents

ガス濃度測定装置

Info

Publication number
JPS61280556A
JPS61280556A JP12172585A JP12172585A JPS61280556A JP S61280556 A JPS61280556 A JP S61280556A JP 12172585 A JP12172585 A JP 12172585A JP 12172585 A JP12172585 A JP 12172585A JP S61280556 A JPS61280556 A JP S61280556A
Authority
JP
Japan
Prior art keywords
gas
flow path
flow passage
gas flow
concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12172585A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0518055B2 (cg-RX-API-DMAC7.html
Inventor
Sukeyuki Ito
祐之 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON TAIRAN KK
Original Assignee
NIPPON TAIRAN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON TAIRAN KK filed Critical NIPPON TAIRAN KK
Priority to JP12172585A priority Critical patent/JPS61280556A/ja
Publication of JPS61280556A publication Critical patent/JPS61280556A/ja
Publication of JPH0518055B2 publication Critical patent/JPH0518055B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Chemical Vapour Deposition (AREA)
JP12172585A 1985-06-05 1985-06-05 ガス濃度測定装置 Granted JPS61280556A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12172585A JPS61280556A (ja) 1985-06-05 1985-06-05 ガス濃度測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12172585A JPS61280556A (ja) 1985-06-05 1985-06-05 ガス濃度測定装置

Publications (2)

Publication Number Publication Date
JPS61280556A true JPS61280556A (ja) 1986-12-11
JPH0518055B2 JPH0518055B2 (cg-RX-API-DMAC7.html) 1993-03-10

Family

ID=14818333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12172585A Granted JPS61280556A (ja) 1985-06-05 1985-06-05 ガス濃度測定装置

Country Status (1)

Country Link
JP (1) JPS61280556A (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11970772B2 (en) 2014-08-22 2024-04-30 Lam Research Corporation Dynamic precursor dosing for atomic layer deposition
KR20250162583A (ko) * 2023-03-02 2025-11-18 램 리써치 코포레이션 증기-위-유동 전구체 전달

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50126293U (cg-RX-API-DMAC7.html) * 1974-03-30 1975-10-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50126293U (cg-RX-API-DMAC7.html) * 1974-03-30 1975-10-16

Also Published As

Publication number Publication date
JPH0518055B2 (cg-RX-API-DMAC7.html) 1993-03-10

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