JPS61279144A - Defect detecting apparatus for pin piece of electronic part - Google Patents

Defect detecting apparatus for pin piece of electronic part

Info

Publication number
JPS61279144A
JPS61279144A JP60121682A JP12168285A JPS61279144A JP S61279144 A JPS61279144 A JP S61279144A JP 60121682 A JP60121682 A JP 60121682A JP 12168285 A JP12168285 A JP 12168285A JP S61279144 A JPS61279144 A JP S61279144A
Authority
JP
Japan
Prior art keywords
leg
pin
light beams
images
piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60121682A
Other languages
Japanese (ja)
Inventor
Hirofumi Takase
高瀬 廣文
Takashi Matsumoto
隆 松本
Hiroaki Nishikuma
西隈 弘明
Hiroyuki Matsumoto
弘之 松本
Toshihiko Yamaguchi
山口 斗志彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NHK Spring Co Ltd
Original Assignee
NHK Spring Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NHK Spring Co Ltd filed Critical NHK Spring Co Ltd
Priority to JP60121682A priority Critical patent/JPS61279144A/en
Publication of JPS61279144A publication Critical patent/JPS61279144A/en
Pending legal-status Critical Current

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  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To detect the abnormality of pin pieces, by obliquely inputting light beams with respect to the aligning direction of the pin pieces, detecting the light beams, which are transmitted at the outside of the pin pieces as one- dimensional pictures, and judging whether the interval between images is within the allowable range or not. CONSTITUTION:The light beams from a light source 13 are inputted toward a part between both pin-piece lines from the oblique lower direction of an IC element 1. The light beams, which are transmitted through the pin-piece lines, go obliquely over the horizontal plane. The images of the light beams are formed on an image sensor 16. Since the light beams, which are transmitted through the pin-piece lines obliquely, are captured, the far and near pin pieces appear as the difference in the images, which are formed on a light receiving sensitive part.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は、IC素子等の電子部品の脚片の不良検出装置
に関し、特に基体とその両側に整列した複数の脚片とか
ら4iる電子部品の脚片の、主に整列方向に対して直交
する向きへの曲り或いは欠1(4を検出するための装置
に関する。
DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a device for detecting defects in legs of electronic components such as IC devices. The present invention relates to a device for detecting bends or chips 1 (4) in legs of parts mainly in a direction perpendicular to the alignment direction.

〈従来の技術〉 基体とその両側に連結された複数の脚片どからなる電子
部品を、予め回路板等の対応個所に毅りられた複数の細
孔に挿入して、前記電子部品を回路板上に固定するよう
にしているが、近年このような挿入作業を高速の自動挿
入装置により行うようにしている。この場合、回路板上
の複数の細孔の相nの位置関係は予め決められているた
め、電子部品の脚片の一部が曲がるなどしていると、電
子部品を回路板上に挿入することかできず、電子部品の
一部か欠損した最終製品か製造されたり、作業を中断し
て不良な製品をラインから除去しイ【ければイ【らない
等の不都合が牛Jる。
<Prior art> An electronic component consisting of a base body and a plurality of leg pieces connected to both sides of the base body is inserted into a plurality of holes made in advance at corresponding locations on a circuit board, etc., and the electronic component is connected to a circuit. In recent years, this type of insertion work has been performed using high-speed automatic insertion devices. In this case, the positional relationship of the phase n of the multiple pores on the circuit board is predetermined, so if some of the legs of the electronic component are bent, it will be difficult to insert the electronic component onto the circuit board. This can lead to inconveniences such as a final product being manufactured with some electronic parts missing or having to stop work and remove defective products from the line.

そこで、電子部品を回路板上、に固定ηる前に、その脚
片の連結状態をチェックし、ぞの脚片の曲がりが大きく
回路板1−の細孔に挿入てきないらのをラインから除去
づる必要がある。従来は、枚数の脚11のぞれぞれの而
に光線を当てC,(の艮6=1光を検出し、その画像と
正常イT電了部品の脚j1の位置関係を比較して、両者
が一致覆るもの及び誤差か僅かで電子部品を回路板上(
こ固定するのに支障が′f、Tい’t)のを合格品どし
、仙を不良品どしてラインから除去するようにしていた
Therefore, before fixing electronic components to the circuit board, check the connection state of the legs and check if the legs are too bent and cannot be inserted into the holes in the circuit board 1-. It is necessary to remove it. Conventionally, a light beam is applied to each of the legs 11 of the number of parts, C, ('s 6 = 1 light is detected, and the image is compared with the positional relationship of the leg j1 of the normal part. , the electronic components are placed on the circuit board (if the two match or there is a slight error)
Items that were difficult to fix were considered acceptable and items that were defective were removed from the line.

電子部品の脚片の整列方向に対して直交する向きへの曲
りを検出するためににl、脚片の後方から脚片とほぼ直
交づるように光線を照q・1シ、脚11の前/j或いは
後方から脚片の状態を二次元画像とし゛て検出し、この
画像と正常な脚片の画像とを比較覆ることにより脚片の
責常を検出することか考えられでいる。
In order to detect bending in a direction perpendicular to the alignment direction of the leg pieces of the electronic component, a light beam is irradiated from the rear of the leg piece so as to be almost perpendicular to the leg piece, and in front of the leg piece 11. Alternatively, it has been considered to detect the condition of the leg from behind as a two-dimensional image, and to compare and contrast this image with an image of a normal leg to detect whether the leg is at fault.

〈発明が解決しようどする問題点〉 しかしながら、この方法では、光源或いは検出部が脚H
の整列1)向に整合する位置になり、電子部品を搬送覆
る際の障害となり、光源、或い13I、検出部を可動と
じIこ場合には、多数の電子部品を検査するT程を高j
*化することが国φηとなる。
<Problems to be solved by the invention> However, in this method, the light source or the detection unit is
Alignment 1) This may become an obstacle when transporting and covering electronic components, and may cause the light source, 13I, and detection unit to be movable. j
*It becomes a country φη.

しかし1脚片の像を、脚片の整列方向から捕えようとす
るため、脚l−1列か奥行きをt1シ、ブ、物jJ)7
麻の大きい光学系、またはレーク9光線による厳密な平
行光線を必要とし、装置か複銘かつ高価どなる不都合が
ある。
However, in order to capture the image of one leg piece from the alignment direction of the leg pieces, the depth of the leg l-1 row is t1 shi, bu, object jJ)7
It requires a large optical system or strictly parallel light beams using a rake 9 rays, and has disadvantages such as the equipment is complicated and expensive.

〈問題点を解決するための手段〉 このような従来技術の欠点に鑑み、本発明の1−八日的
は、基体の両側に沿って整列した枚数の脚片を有Jる電
子部品の前記脚l(の不良を検出部る装置1こ於て、光
線を、前記基体の両側の脚片列の間から前記基体の底面
に対して略平行に、かつ脚片の整列方向に対して斜めに
入口・1させ、前記脚)−1の外側に透過して来る光線
を、前記脚片の長さ方向の異する2つ以上の部分の一次
元画像として検出し、該2つ以上の一次元画像を比較し
、かつ前記脚片の像の間隔が8![容範囲内であるか否
かを判別して、前配線片の責常を検出するようにしたこ
とを特徴とする電子部品の脚J)の不良検出装置を提供
することにある。
<Means for Solving the Problems> In view of the shortcomings of the prior art, an object of the present invention is to provide the electronic component having a number of leg pieces aligned along both sides of a base body. A device 1 for detecting a defect in the leg 1 is configured to emit a light beam from between the rows of leg pieces on both sides of the base body approximately parallel to the bottom surface of the base body and obliquely to the alignment direction of the leg pieces. The light rays transmitted to the outside of the leg (1) are detected as one-dimensional images of two or more parts having different longitudinal directions, and the two or more linear images are detected. Compare the original images and find that the interval between the images of the leg pieces is 8! [An object of the present invention is to provide a defect detection device for a leg J) of an electronic component, which is characterized in that the fault of the front wiring piece is detected by determining whether or not it is within the specified range.

〈作用〉 このように、入用光線が斜め方向から入用されるため、
光源或いIJ、検出部を電子部品の搬送方向から離れた
位置に設けることかでき、しかも検出部として一次元セ
ン1ノを用いるため横進が工t1純で演む。
<Effect> In this way, since the required light ray is applied from an oblique direction,
The light source or IJ and the detection section can be provided at a position away from the transport direction of the electronic component, and since a one-dimensional sensor is used as the detection section, lateral movement is simple.

〈実施例〉 以下に添ト1の図面を参照して本を明を特定の実施例に
ついて詳細に説明する。
<Example> A specific example will be described in detail below with reference to the drawings in Attachment 1.

第1図は、正常な脚片を有するIC索子1から。Figure 1 is from IC cord 1 with normal leg pieces.

なる電子部品を示しでおり、モールド成形して<【る基
体2の両側面にぞれぞれ複数の脚片3.4が設けられて
いる。基体2の前端には方向識別用のノツチ5が設Cプ
られている。従来は、矢印Xにより示すように、脚片3
.4の整列方向から脚片3の、矢印YにJ:り示ず左右
方向への曲りを検出していたが、IC素子の搬送の都合
、或いは焦点深度の大きい光学系を必要とJる等の問題
があった。
The electronic component shown in FIG. A notch 5 for direction identification is provided at the front end of the base body 2. Conventionally, as shown by the arrow X, the leg piece 3
.. The bending of the leg piece 3 in the left and right direction in the direction of the arrow Y from the alignment direction of 4 was detected, but due to the convenience of transporting the IC element, or the need for an optical system with a large depth of focus, etc. There was a problem.

第2図は、本発明装置の第1実施例を示す概略図である
FIG. 2 is a schematic diagram showing a first embodiment of the device of the present invention.

偏平四角形状の断面を有する基体2の左右両端からは複
数の脚片3.4が突出し、それぞれ基端近傍にて下向ぎ
に折曲されている。IC素子1にl、搬送路10上に跨
ぐにうにして載賄され、左右両側の脚J13.4の列の
間に位置ηる搬送路10の下部に水平り向に対して約4
5°の角度をなずJ、うに陵側鏡11が配設されている
A plurality of leg pieces 3.4 protrude from both left and right ends of the base body 2 having a flat rectangular cross section, and each leg piece 3.4 is bent downward near the base end. The IC element 1 is mounted so as to straddle the transport path 10, and is located between the rows of legs J13.4 on both the left and right sides at the bottom of the transport path 10, approximately
A sea urchin crest side mirror 11 is arranged at an angle of 5°.

反側鏡11の斜め下方には別の反側鏡12が設置され、
光源13からの光線は、反則鏡12.11により向きを
変更され、第2図に於c)る右方向を向く一つの光線群
とされる。
Another opposite mirror 12 is installed diagonally below the opposite mirror 11,
The direction of the light rays from the light source 13 is changed by the refracting mirror 12.11, and the light rays are turned into one group of light rays pointing to the right in FIG. 2 (c).

この光線群は、その一部が脚片4の部分(1)に当って
遮蔽され、残りが脚片4の右方へ直進し、反射1711
4 Gこより第2図に於ける下向きに進路を変えられ、
レンズ15により、イメージセン13−16上に作を結
ぶ。この像は、脚片4が存在する部分のみが暗いシルエ
ツト像となる。セン1ノ16の受感部16aは線状をな
すもので、脚片4が成る水平面と交差する部分(I>の
二次元画像をとらえる。
A part of this group of light rays hits the part (1) of the leg piece 4 and is blocked, and the rest goes straight to the right of the leg piece 4 and is reflected 1711
4 From G, the course was changed downward in Figure 2,
The lens 15 connects the image onto the image sensors 13-16. This image becomes a silhouette image in which only the portion where the leg piece 4 is present is dark. The sensing part 16a of the sensor 1-16 is linear and captures a two-dimensional image of the part (I>) that intersects with the horizontal plane formed by the leg piece 4.

セン1)16には、ボールスクリューを内蔵するパルス
モータ17が連結され、このパルスモータ171JJ、
す17ンリ1(注目第2図に想像線で示J通り)「石に
移動し、同+1.’lに受感部16 a ’b位置が変
わることl、ニアニー<ろ1.移動しlJ受感部168
にに1、移動前と1、i、巽イj・)!、7経路の光線
か入側して像を結/S’1ことどイする。この像(,1
2、第2図に於にる脚片4の安イする水平線ど交差−り
る部分(TI)の一次元像て。
A pulse motor 17 having a built-in ball screw is connected to the sensor 1) 16, and the pulse motor 171JJ,
17 (as shown by the imaginary line in Figure 2) ``Move to the stone, change the position of the sensing part 16 a 'b in +1.'l, Near Knee < 1. Move lJ Sensing section 168
Nini 1, before moving and 1, i, Tatsumi j・)! , 7 paths of light enter and form an image /S'1. This image (,1
2. A one-dimensional image of the intersection (TI) of the horizontal line of the leg piece 4 in Figure 2.

ある。be.

第33図及び/−Js−4図CI2、第2図の実施例の
側面図び平面図である1、第一のrQ [JI鋭12は
水平向に対し−C約5ε31食を41してd3す、第一
、のfシ側鏡11の縦口=1 )S’、は水平ノ“1向
を向いている。
FIG. 33 and/-Js-4 FIG. CI2, a side view and a plan view of the embodiment of FIG. d3, first, f side mirror 11 vertical opening = 1) S' faces in the horizontal direction.

従ツーC1uQ=Jル1.−1光源13J: リノ光I
J1、IC索子1の前方の斜め下方から両脚j1の列の
間に向()て入口4され、脚J’7列を通過した光源は
、水平面トを斜め方向に進行覆ることとく2る。
Sub-to C1uQ=Jru1. -1 light source 13J: Reno Hikari I
J1, the light source that enters from diagonally below the front of the IC cord 1 between the rows of both legs j1 and passes through the row of legs J'7 travels diagonally across the horizontal plane and covers it. .

このように、本発明にJ−れば、脚11列を斜め方向(
こ透過して来る)111線を捕えるため、受感部に結ば
れlこ像には脚j1の遠近が像の人きざの3tUいどし
て現われる。叩ら、第5図に示したように、各脚片は、
レンズの4:t irYを表ね1P点から対応する脚片
の張る角度に比例する大きさの像として受感部16aに
結像される。従って、脚片を遠いものから順に41〜4
4とし点Pから名脚片の張る角度を81〜a4とすれば
、al <a2 <a3 <a4となる。各脚片間の間
隔[)1〜[)3についても同様の関係が成立する。
In this way, according to the present invention, the 11th row of legs is arranged in the diagonal direction (
In order to capture the 111 line (which passes through this line), it is connected to the sensing part, and the distance of leg j1 appears in the image as 3tU of the human leg of the image. As shown in Figure 5, each leg piece is
4:tirY of the lens is formed from point 1P on the sensing portion 16a as an image with a size proportional to the angle of the corresponding leg. Therefore, the leg pieces are 41 to 4 in order from the farthest one.
4, and if the angle of the famous leg piece from point P is 81 to a4, then al < a2 < a3 < a4. A similar relationship holds true for the intervals [)1 to [)3 between the respective leg pieces.

従って、イメージセンサを111間的に走査すると、第
6図に示されたような2つの波形がjqられ、各脚片4
1〜44に対応するパルス幅A1〜A4は、対応する角
度81〜a4に比例している。ぞこで、このJ−うな遠
近差の影響を、幾何学的関係に基づいて補正することに
より、脚片の曲りの判定精度を高めることができる。
Therefore, when the image sensor is scanned 111 times, two waveforms as shown in FIG.
The pulse widths A1-A4 corresponding to 1-44 are proportional to the corresponding angles 81-a4. By correcting the influence of this J-shaped perspective difference based on the geometric relationship, it is possible to improve the accuracy of determining the bending of the leg.

第6図に示された波形図は、正常な脚片から得られたも
ので、上下方向に間隔をおいて設定された脚片4の2つ
の位置(T)(TI>について得られたパルスタイミン
グが一致しており、しかもパルス間隔が所定の許容範囲
内にある。
The waveform diagram shown in FIG. 6 was obtained from a normal leg, and the pulses obtained at two positions (T) (TI>) of the leg 4 set at intervals in the vertical direction. The timings are consistent and the pulse intervals are within a predetermined tolerance.

第7図に於て(ま、脚片41が、内向きに曲り、(−行
余白) 脚片43が外向きに曲っていることか、2つの位置から
1iVられたパルスのタイミングの不一致として検出さ
れる。第8図に示された波形に於いては、各脚J”+”
11〜44に対応する全てのパルスのり、イミングが−
・致しているか、隣接覆るパルス間の間隔が適切でイT
いものがあり、脚片43か上下方向には真直であってb
、他の脚jキJ、リム外側に張り出し−Cいることが解
る。
In Fig. 7, the leg piece 41 is bent inward, and the leg piece 43 is bent outward. In the waveform shown in FIG. 8, each leg J"+"
All pulse glue and timing corresponding to 11 to 44 are -
・Is the interval between adjacent overlapping pulses appropriate?
The leg piece 43 is straight in the vertical direction and b
It can be seen that the other leg is protruding from the outside of the rim.

本発明によれば、このにうにして脚片の内外方向、即ら
左右方向の曲り或いは欠損を判別できるが、脚片が前後
方向即ち脚Hの整列方向に向【ノて曲っていた場合には
その影響も受(−Jることとなる。
According to the present invention, it is possible to determine whether the leg is bent or missing in the medial-lateral direction, that is, in the left-right direction, but if the leg is bent in the front-back direction, that is, in the alignment direction of the legs H. will also be affected by this.

ぞこで、脚片の前後方向の曲りを別途検出しておいて、
前後方向の曲りかに’l容範囲外の:bのを無茶fl不
合格どしで除去し、或いは幾何学的関係に基づいて前後
方向の曲りの影響を考慮して本発明を実施覆るとQい。
Detect the bending of the leg in the front and back direction separately,
If the bending in the front and rear direction is outside the range of curvature, it may be removed by recklessly rejecting it, or the present invention may be carried out by considering the influence of the bend in the front and rear direction based on the geometrical relationship. Q.

第9図L−11本発明に基づく装置の第2の実施例を示
す概略図で、第1実施例と同一部材には同一符号を61
して詳しい説明を省略覆る。
Figure 9 L-11 is a schematic diagram showing a second embodiment of the device based on the present invention, in which the same members as in the first embodiment are designated by the same reference numerals 61 and 9.
The detailed explanation will be omitted.

−〇 − 反口・1鏡11により右方向に進路を変えられた光線群
は、前記実施例と同様に反射鏡18にJ、りぞの進路を
下向きに変えられ、レンズ15により、センサ−16の
受感部16aに脚j114の土部(’I)に対応する像
を結ぶ。次に、想像線にJ−リ示されるように、反射鏡
18を傾斜さt!るど、第1実施例と同じように脚片4
の下部(IT)に対レト4、ηる像がセンサ16の受感
部16a上に結ばれる。従って、名作に於ける脚片の間
隔を判別し、二つの像を比較することにより、合格品と
不良品とを識別することができる。
-〇- The group of light beams whose course was changed to the right by the mirror 11 on the opposite side is changed to the downward direction by the reflecting mirror 18, and the path is changed downward by the lens 15 to the sensor. An image corresponding to the soil part ('I) of the leg j114 is formed on the sensitive part 16a of the leg j114. Next, the reflector 18 is tilted t! as shown by the imaginary line J-. However, as in the first embodiment, the leg piece 4
An image corresponding to the lower part (IT) of 4 and η is formed on the sensitive part 16a of the sensor 16. Therefore, by determining the distance between the legs in a masterpiece and comparing the two images, it is possible to distinguish between acceptable products and defective products.

本実施例に於【プる反q1鏡18は、例えば」−下に一
対の帯線を連結し、hつ両側に空間をあ(プて磁極端を
設置し、かつ帯線に電流を通ずことにJ−り傾動可能な
、所謂ガルバミラーと呼ばれる構造からなるものであっ
て良い。また、十記実施例に於いては、八日ゲンランプ
等の白熱灯を光源としているが、任意形式の光源を用い
ることかでき、必要に応じてレーザ光を用いて−b良い
In this embodiment, the anti-q1 mirror 18 is constructed by, for example, connecting a pair of strip wires below, leaving space on both sides to install the pole tips, and passing current through the strip wires. It may be of a structure called a so-called galvanic mirror, which can be tilted in any direction.Also, in the tenth embodiment, an incandescent lamp such as a Yokagen lamp is used as the light source, but any type of light source may be used. A light source can be used, and if necessary, a laser beam can be used.

〈発明の効果〉 本発明によれば、透過光を利用するため、脚)1の表面
状態にノ’r右されることなく、脚片の左右方向の41
′/置を一次元の像として確実に検出することかできる
。しか−b1検出される像が一次元であり、しか−ら焦
点深度の大きな光学系或いは1ノーリ”光線を用いなく
とbmいため、装置が復雑化することがなく、高速動作
が可能であるため操作上或いは経演−1−の効果が大ぎ
い。
<Effects of the Invention> According to the present invention, since transmitted light is used, 41 points in the left and right direction of the leg piece 1 are not affected by the surface condition of the leg piece 1.
' / position can be reliably detected as a one-dimensional image. However, since the detected image is one-dimensional and does not require the use of an optical system with a large depth of focus or a 1" beam, the device does not become complicated and high-speed operation is possible. Therefore, the effect in terms of operation and performance-1- is great.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は脚片の曲りを想像線により示乃電子部品の斜視
・図である。 第2図は本発明に基づく装置の第1の実施例を示J概略
正面図である 第3図及び第4図は、ぞれぞれ第2図に示した実施例の
の要部゛の側面図及び平面図である。 第5図k1.脚片の遠近差により対応脚片像の大小関係
を示す説明図である。 第6〜8図はイメージレンリから1qられる信号の波形
図である。 第9図は本発明に基づく装置の第2の実施例を示′13
慨略正而図である。 1・・・IC素子    2・・・基体3.4・・・脚
14    h・・・ノツチ10・刊般送路    1
1.12・・・反0−1鏡13・・・光源     1
4・・・反射鏡15・・・レンズ    16・・・1
=ンリ16a・・・受感部   17・・・パルスモー
タ18・・・反射鏡
FIG. 1 is a perspective view of the electronic component showing the bending of the leg piece using imaginary lines. FIG. 2 shows a first embodiment of the apparatus according to the present invention, and FIGS. 3 and 4 are schematic front views showing the main parts of the embodiment shown in FIG. 2, respectively. They are a side view and a top view. Figure 5 k1. FIG. 7 is an explanatory diagram showing the size relationship of corresponding leg images depending on the distance difference between the legs. 6 to 8 are waveform diagrams of signals 1q received from the image controller. FIG. 9 shows a second embodiment of the device according to the invention.
This is a schematic diagram. 1...IC element 2...Base 3.4...Leg 14 h...Notch 10/publication path 1
1.12...Anti-0-1 mirror 13...Light source 1
4...Reflector 15...Lens 16...1
=Nri 16a...Sensing section 17...Pulse motor 18...Reflector

Claims (1)

【特許請求の範囲】 基体の両側に沿って整列した複数の脚片を有する電子部
品の前記脚片の不良を検出する装置に於て、 光線を、前記基体の両側の脚片列の間から前記基体の底
面に対して略平行に、かつ脚片の整列方向に対して斜め
に入射させ、前記脚片の外側に透過して来る光線を、前
記脚片の長さ方向の異なる2つ以上の部分の一次元画像
として検出し、該2つ以上の一次元画像を比較し、かつ
前記脚片の像の間隔が許容範囲内であるか否かを判別し
て、前記脚片の異常を検出するようにしたことを特徴と
する電子部品の脚片の不良検出装置。
[Claims] In an apparatus for detecting a defect in a leg of an electronic component having a plurality of legs arranged along both sides of a base, a light beam is emitted from between rows of legs on both sides of the base. The light rays are incident approximately parallel to the bottom surface of the base body and obliquely to the alignment direction of the leg pieces, and transmitted to the outside of the leg pieces, at two or more different length directions of the leg pieces. detect the part as a one-dimensional image, compare the two or more one-dimensional images, and determine whether the interval between the images of the leg piece is within an allowable range to detect an abnormality of the leg piece. A defect detection device for a leg piece of an electronic component.
JP60121682A 1985-06-05 1985-06-05 Defect detecting apparatus for pin piece of electronic part Pending JPS61279144A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60121682A JPS61279144A (en) 1985-06-05 1985-06-05 Defect detecting apparatus for pin piece of electronic part

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60121682A JPS61279144A (en) 1985-06-05 1985-06-05 Defect detecting apparatus for pin piece of electronic part

Publications (1)

Publication Number Publication Date
JPS61279144A true JPS61279144A (en) 1986-12-09

Family

ID=14817265

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60121682A Pending JPS61279144A (en) 1985-06-05 1985-06-05 Defect detecting apparatus for pin piece of electronic part

Country Status (1)

Country Link
JP (1) JPS61279144A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57122557A (en) * 1981-01-23 1982-07-30 Nec Kyushu Ltd Inspecting device for lead bent of semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57122557A (en) * 1981-01-23 1982-07-30 Nec Kyushu Ltd Inspecting device for lead bent of semiconductor device

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