JPS61279042A - 液体金属イオン源構造体 - Google Patents
液体金属イオン源構造体Info
- Publication number
- JPS61279042A JPS61279042A JP60119777A JP11977785A JPS61279042A JP S61279042 A JPS61279042 A JP S61279042A JP 60119777 A JP60119777 A JP 60119777A JP 11977785 A JP11977785 A JP 11977785A JP S61279042 A JPS61279042 A JP S61279042A
- Authority
- JP
- Japan
- Prior art keywords
- ionized
- ion source
- electrode
- storage
- needle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 title 1
- 150000001455 metallic ions Chemical class 0.000 title 1
- 238000003860 storage Methods 0.000 claims abstract description 36
- 238000005192 partition Methods 0.000 claims abstract description 21
- 150000002500 ions Chemical class 0.000 claims description 30
- 239000000126 substance Substances 0.000 claims description 20
- 229910001338 liquidmetal Inorganic materials 0.000 claims description 18
- 238000000605 extraction Methods 0.000 claims description 5
- 230000005684 electric field Effects 0.000 claims description 4
- 230000005611 electricity Effects 0.000 claims 1
- 239000000284 extract Substances 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 abstract description 9
- 238000009736 wetting Methods 0.000 abstract description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 5
- 229910002804 graphite Inorganic materials 0.000 abstract description 5
- 239000010439 graphite Substances 0.000 abstract description 5
- 238000010438 heat treatment Methods 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 5
- 229910021397 glassy carbon Inorganic materials 0.000 abstract description 4
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 239000000155 melt Substances 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 238000003892 spreading Methods 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000003575 carbonaceous material Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012768 molten material Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229920001651 Cyanoacrylate Polymers 0.000 description 1
- MWCLLHOVUTZFKS-UHFFFAOYSA-N Methyl cyanoacrylate Chemical compound COC(=O)C(=C)C#N MWCLLHOVUTZFKS-UHFFFAOYSA-N 0.000 description 1
- 229910001295 No alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000009194 climbing Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000001404 mediated effect Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60119777A JPS61279042A (ja) | 1985-06-04 | 1985-06-04 | 液体金属イオン源構造体 |
| EP86107442A EP0204297B1 (en) | 1985-06-04 | 1986-06-02 | Charged particle emission source structure |
| DE8686107442T DE3677062D1 (de) | 1985-06-04 | 1986-06-02 | Quelle geladener teilchen. |
| US06/870,530 US4721878A (en) | 1985-06-04 | 1986-06-04 | Charged particle emission source structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60119777A JPS61279042A (ja) | 1985-06-04 | 1985-06-04 | 液体金属イオン源構造体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61279042A true JPS61279042A (ja) | 1986-12-09 |
| JPH0364978B2 JPH0364978B2 (enExample) | 1991-10-09 |
Family
ID=14769958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60119777A Granted JPS61279042A (ja) | 1985-06-04 | 1985-06-04 | 液体金属イオン源構造体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61279042A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02234330A (ja) * | 1989-03-06 | 1990-09-17 | Denki Kagaku Kogyo Kk | 液体金属イオン源構造体 |
-
1985
- 1985-06-04 JP JP60119777A patent/JPS61279042A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02234330A (ja) * | 1989-03-06 | 1990-09-17 | Denki Kagaku Kogyo Kk | 液体金属イオン源構造体 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0364978B2 (enExample) | 1991-10-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |