JPS61274217A - Position-detecting device - Google Patents

Position-detecting device

Info

Publication number
JPS61274217A
JPS61274217A JP11691385A JP11691385A JPS61274217A JP S61274217 A JPS61274217 A JP S61274217A JP 11691385 A JP11691385 A JP 11691385A JP 11691385 A JP11691385 A JP 11691385A JP S61274217 A JPS61274217 A JP S61274217A
Authority
JP
Japan
Prior art keywords
light
slit
slit light
spot
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11691385A
Other languages
Japanese (ja)
Inventor
Tomohiro Maruo
丸尾 朋弘
Norio Okuya
奥谷 憲男
Tomiyasu Ueda
富康 上田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP11691385A priority Critical patent/JPS61274217A/en
Publication of JPS61274217A publication Critical patent/JPS61274217A/en
Pending legal-status Critical Current

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  • Optical Transform (AREA)

Abstract

PURPOSE:To make it possible to detect the specified position at higher accuracy and stability than the remaining position detecting part, by allowing a spot light to displace and only a slit light to pass the specified position containing a detecting range. CONSTITUTION:A beam of light emitted from the source 1 is limited into a slit light by a fixed plate 2 and further, it is limited into a beam of slit light different from spot light or slit light by a moving slitted plate 3, or projected onto a light-receiving surface of a detecting device 4 after transmission as the slit light. On the part excepting both ends of the moving slitted plate 3a, after travelling of the spot light over the light-receiving surface in corespondence with the movement of the travelling slitted plate 3, a position of the plate 3 is detected by a detecting means 5. The slit light is allowed to pass as a beam of slit light in a certain part and in the remaining part, it is limited to the spot light and at the same time, the spot light is given with displacement and by detection by a 1-dimensional type conductor position detector, higher and more stable position detection of the specified position becomes available.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、位置もしくは角度の変化を検出する検出装置
にかんするものである。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a detection device for detecting changes in position or angle.

従来の技術 従来位置あるいは角度の変化等の検出装置として、ポテ
ンショメータがある。これは、機械的変化量を抵抗値の
変化に変換するもので、構造が簡単で比較的大きな出力
が得られるという特徴を有し、巻線形、導電性プラスチ
ック形の接触式、磁気抵抗素子を用いた非接触式がある
2. Description of the Related Art A potentiometer is known as a device for detecting changes in position or angle. This converts the amount of mechanical change into a change in resistance value, and has the characteristics of a simple structure and a relatively large output. There is a non-contact method used.

発明が解決しようとする問題点 しかしながら従来の接触式ポテンシヨメータでは、抵抗
部と接点の摺動によシ、抵抗面が損傷され接触抵抗の変
化が生じ、長期的に安定した検出ができないという問題
点を有していた0また、磁気抵抗素子を用いた非接触式
ポテンショメータでは、摺動ノイズは皆無であるが、外
部雑音磁界が大きい場合には、安定した検出ができない
という問題点を有していた。
Problems to be Solved by the Invention However, with conventional contact potentiometers, the resistance surface is damaged due to sliding between the resistance part and the contact, causing changes in contact resistance, making it impossible to perform stable detection over a long period of time. In addition, non-contact potentiometers using magnetoresistive elements have no sliding noise, but they do have the problem of not being able to perform stable detection when external noise magnetic fields are large. Was.

本発明は上記問題点に鑑み、摺動ノイズがなく、外部磁
界にも影響を受けない、高安定の位置検出装置を提供す
るものである。
In view of the above problems, the present invention provides a highly stable position detection device that is free from sliding noise and unaffected by external magnetic fields.

問題点を解決するための手段 上記問題点を解決するために本発明の位置検出装置はス
リット光をある特定部はスリット光として通過させ、残
シの部分はスポット光に制限するとともに前記スポット
光を移動させて、これらの光を一次元型の位置検出器で
検出するという構成全備えたものである。
Means for Solving the Problems In order to solve the above problems, the position detection device of the present invention allows a certain part of the slit light to pass through as slit light, and the remaining part is limited to spot light, and the spot light is The device has a complete structure in which the light beams are detected by a one-dimensional position detector.

作  用 本発明は上記した構成によって、移動制限手段でスポッ
ト光を移動させると共に検出範囲のある特定位置に限−
〕てスリット光を通過させることにより位置検出の非接
触化を計ると共に、特定の位置を残りの位置検出部分よ
り高精度、高安定に位置検出するようにしたものである
Effect of the present invention With the above-described configuration, the movement limiting means moves the spotlight and limits the detection range to a certain specific position.
] By passing the slit light, non-contact position detection is achieved, and a specific position is detected with higher accuracy and stability than the remaining position detection parts.

実施例 以下本発明の一実施例の位置検出装置について、図面を
参照しながら説明する。
Embodiment Hereinafter, a position detection device according to an embodiment of the present invention will be described with reference to the drawings.

第1図は本発明による位置検出装置の一実施例の構成を
示すものである。第1図において、1は光源、2は固定
スリット板であり、両者によってスリット光を得ている
。3は前記スリット光をスポット光に制限すると共にこ
のスポット光を移動させる移動制限手段を構成する移動
スリット板、4は一次元型の半導体製の位置検出器(以
下、検出器という)、5はこの検出器4の出力信号を処
理する検出手段である。第2図に前記移動スリット板の
構造図、第3図に検出手段5のブロック図を示す。第2
図には前記移動スリットの形状として、斜めに一直線状
に切っであるだけでなく特定ではスリット光がそのまま
検出器4へ供給される6以上のように構成された位置検
出装置について、以下その動作を説明する。
FIG. 1 shows the configuration of an embodiment of a position detection device according to the present invention. In FIG. 1, 1 is a light source, 2 is a fixed slit plate, and slit light is obtained by both. 3 is a movable slit plate constituting a movement limiting means for restricting the slit light to a spot light and moving this spot light; 4 is a one-dimensional semiconductor position detector (hereinafter referred to as a detector); 5 is a This is a detection means for processing the output signal of this detector 4. FIG. 2 shows a structural diagram of the movable slit plate, and FIG. 3 shows a block diagram of the detection means 5. Second
In the figure, the shape of the moving slit is not only cut diagonally in a straight line, but also the slit light is supplied directly to the detector 4.The operation of the position detection device is shown below. Explain.

まず前記光源1から出た光は、前記固定スリット板2で
スリット光に制限され、さらに前記移動スリット板3に
よりスポット光または該スリット光とは異なるスリット
光に制限されるが、該スリット光のまま透過して前記検
出器4の受光面上に投影されている。ここで前記移動ス
リット板3が第2図aで示しだスリット板2δである場
合、前記移動スリット板3aのスリットは、両端部が、
前記固定スリット板2のスリットと重なった場合、前記
固定スリット板2を通過したスリット光が制限されるこ
となく前記移動スリット板3aを透過して前記検出器4
の受光面上に投影されるような形状、大きさで切られて
おり、その他の部分はスポット光が前記検出器4の受光
面上に投影されるように、前記移動スリット板3aの移
動方向に対して傾斜した直線形状に切られている。前記
移動スリット板3aの両端部以外の部分においては、前
記移動スリット板3aの動きにともなって該スポット光
が前記検出器4の受光面上を動いてから前記移動スリッ
ト板3aの位置が検出手段5によって検出される。
First, the light emitted from the light source 1 is limited to slit light by the fixed slit plate 2, and further limited to spot light or slit light different from the slit light by the movable slit plate 3. The light passes through as it is and is projected onto the light receiving surface of the detector 4. Here, when the movable slit plate 3 is the slit plate 2δ shown in FIG. 2a, the slits of the movable slit plate 3a have both ends
When the slits overlap with the slits of the fixed slit plate 2, the slit light that has passed through the fixed slit plate 2 is transmitted through the movable slit plate 3a without being restricted and sent to the detector 4.
The slit plate 3a is cut in a shape and size such that the spot light is projected onto the light receiving surface of the detector 4, and the other portions are cut in the moving direction of the movable slit plate 3a so that the spot light is projected onto the light receiving surface of the detector 4. It is cut in a straight line shape at an angle to the surface. In a portion other than both ends of the movable slit plate 3a, the spot light moves on the light receiving surface of the detector 4 as the movable slit plate 3a moves, and then the position of the movable slit plate 3a is determined by the detection means. Detected by 5.

次に検出手段5の構成及び動作について説明する。Next, the configuration and operation of the detection means 5 will be explained.

8.7.8は増幅器であり、9は増幅器6,7の各出力
を加算する加算器、1oは増幅器6,7の各出力間の減
算を行なう減算器、jlは加算器9の出力と減算器10
の出力との割算を行なう割算器である。
8.7.8 is an amplifier, 9 is an adder that adds the outputs of amplifiers 6 and 7, 1o is a subtracter that subtracts between the outputs of amplifiers 6 and 7, and jl is the output of adder 9. Subtractor 10
This is a divider that performs division with the output of .

以上の構成により、検出器4の2つの出力4a。With the above configuration, the two outputs 4a of the detector 4.

4bの和と差の比を求め、前記スポット光の位置検出器
4上の位置を位置検出Aとに出力するものである。
4b is calculated, and the position of the spot light on the position detector 4 is output to the position detector A.

前記移動スリット板3aの両端部においては、前記固定
スリット板2を通過したスリット光はそのまま前記検出
器4の受光面上に到達するが、前記固定スリット板2の
スリットの方向と、前記検出器4の受光面の方向とが同
じになるように各々を設置しであるため、前記スリット
光は該受光面上に、前記スポット光よりも広い面積で到
達し、該受光面上に当たる光量もそれだけ増大する。こ
こで前記検出器4は、光量に比例した電気信号を出力す
るという性質も持っており、前記スポット光の位置検出
だけでなく、光景変化の検出も同時にできるため、前記
移動スリット板3aの位置が両端部にさしかかった時、
前記検出器4は前記スポット光から前記スリット光に移
る際の急激な光量変化を電気信号として前記検出手段5
に出力し、前記検出手段5は該出力を光量検出Bとして
検出することによって、前記移動スリット板3aの各位
置の出力である位置検出Aと並列に出力を得ることがで
きる。すなわち位置検出Aと光量検出Bは同時に得られ
るので、常に両者を見ていることにより、前記移動スリ
ット板3aの両端の位置は区別して検出できる。
At both ends of the movable slit plate 3a, the slit light that has passed through the fixed slit plate 2 reaches the light receiving surface of the detector 4 as it is, but the direction of the slit of the fixed slit plate 2 and the detector 4 are installed so that the direction of the light-receiving surface is the same, the slit light reaches the light-receiving surface in a wider area than the spot light, and the amount of light hitting the light-receiving surface is also the same. increase Here, the detector 4 also has the property of outputting an electrical signal proportional to the amount of light, and can detect not only the position of the spot light but also changes in the scene at the same time, so that the position of the movable slit plate 3a can be detected at the same time. When it reaches both ends,
The detector 4 converts the sudden change in light amount when changing from the spot light to the slit light into an electric signal and sends it to the detection means 5.
By detecting this output as light amount detection B, the detection means 5 can obtain an output in parallel with position detection A, which is an output at each position of the movable slit plate 3a. That is, since position detection A and light amount detection B are obtained at the same time, by constantly looking at both, the positions of both ends of the movable slit plate 3a can be detected separately.

次に、前記移動スリット板3が第2図すに示すような移
動スリット板3bである場合には、上述と同様の原理に
より、前記移動スリット板3bの移動範囲中の2中間位
置を、他の検出位置と区別して確実に位置検出できるが
、この除用いるスリットは第2図で示すように前記固定
スリット板2のスリットと同じ大きさでなくても良く、
また該移動範囲中の適描な位置に数箇所設けても良いこ
とは言うまでもない。
Next, when the movable slit plate 3 is a movable slit plate 3b as shown in FIG. Although the position can be reliably detected by distinguishing it from the detection position of
It goes without saying that it may be provided at several suitable positions within the movement range.

以上のように本実施例によれば、位置検出装置において
、光源から出た光をスリット光に変換し、該スリット光
をある特定部はスリット光として通過させ、残りの部分
はスポット光に制限するとともに該スポット光を移動さ
せて、−次元型半導体装置検出器で検出することにより
、該特定部において、残りの位置検出部分より高精度、
高安定な位置検出を行うことができる。
As described above, according to this embodiment, in the position detection device, the light emitted from the light source is converted into slit light, the slit light is passed through a certain part as slit light, and the remaining part is restricted to spot light. At the same time, by moving the spot light and detecting it with a -dimensional semiconductor device detector, the specific part can achieve higher precision than the remaining position detection parts.
Highly stable position detection can be performed.

なお実施例において、直線移動型位置検出装置について
説明を行ったが、回転移動型位置検出装置に用いても良
いことは言うまでもない。
In the embodiments, a linear movement type position detection device has been described, but it goes without saying that the present invention may also be used for a rotational movement type position detection device.

発明の効果 以上のように本発明は、スリット光をある特定部はスリ
ット光として通過させ、残りの部分はスポット光に制限
するとともに該スポット光を移動させて、1次元型の導
体位置検出器で検出することによシ、従来の位置検出装
置が持つ外部ノイズに対する安定性や位置検出精度をそ
こなうことなく、ある特定位置の、よシ高精度、高安定
な位置検出を行うことができるという効果を得ることが
できる優れた位置検出装置を実現できるものである0
Effects of the Invention As described above, the present invention allows a certain part of the slit light to pass through as a slit light, and the remaining part is restricted to a spot light, and the spot light is moved, thereby producing a one-dimensional conductor position detector. By detecting the position, it is possible to perform highly accurate and highly stable position detection of a specific position without compromising the stability against external noise or the position detection accuracy of conventional position detection devices. It is possible to realize an excellent position detection device that can obtain effects.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例の構成説明図、第2図a、b
は本発明の一実施例の移動スリット板の構造説明図′、
第3図は本発明の一実施例の検出手段のブロック図であ
る。 1・・・・・・光源、2・・・・−・固定スリット板、
3・・・・・・移動スリット板、4・・・・・・1次元
型半導体装置検出器、5・・・・・・動作回路、6,7
.8・・・・・・増幅器、9・・・・・・加算器、1o
・・・・・・減算器、11・・・・・・割算器。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名/−
’に源 6−請1+杖 区 へ      d               −綜
Fig. 1 is an explanatory diagram of the configuration of an embodiment of the present invention, Fig. 2 a, b
are structural explanatory diagrams of a movable slit plate according to an embodiment of the present invention';
FIG. 3 is a block diagram of a detection means according to an embodiment of the present invention. 1...Light source, 2...-Fixed slit plate,
3... Moving slit plate, 4... One-dimensional semiconductor device detector, 5... Operating circuit, 6, 7
.. 8...Amplifier, 9...Adder, 1o
・・・・・・Subtractor, 11・・・・・・Divider. Name of agent: Patent attorney Toshio Nakao and 1 other person/-
' to Gen 6-uke 1 + Tsue Ward d - 綜

Claims (1)

【特許請求の範囲】[Claims] スリット光と前記スリット光を一部はスリット光として
通過させ、残りの部分はスポット光に制限するとともに
前記スポット光を移動させる移動制限手段と、前記スポ
ット光の位置を検出すると共に、前記スリット光の光量
を検出する一次元型の位置検出器と、前記位置検出器の
出力信号を処理する検出手段とを備えたことを特徴とす
る位置検出装置。
a slit light and a movement restriction means that allows a part of the slit light to pass through as a slit light and limits the remaining part to a spot light and moves the spot light; 1. A position detection device comprising: a one-dimensional position detector that detects the amount of light; and a detection means that processes an output signal of the position detector.
JP11691385A 1985-05-30 1985-05-30 Position-detecting device Pending JPS61274217A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11691385A JPS61274217A (en) 1985-05-30 1985-05-30 Position-detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11691385A JPS61274217A (en) 1985-05-30 1985-05-30 Position-detecting device

Publications (1)

Publication Number Publication Date
JPS61274217A true JPS61274217A (en) 1986-12-04

Family

ID=14698753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11691385A Pending JPS61274217A (en) 1985-05-30 1985-05-30 Position-detecting device

Country Status (1)

Country Link
JP (1) JPS61274217A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015118219A (en) * 2013-12-18 2015-06-25 株式会社Screenホールディングス Light intensity distribution measuring device, drawing device, and light intensity distribution measuring method
JP2016188952A (en) * 2015-03-30 2016-11-04 株式会社オーク製作所 Exposure apparatus, photometric device for exposure apparatus, and exposure method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015118219A (en) * 2013-12-18 2015-06-25 株式会社Screenホールディングス Light intensity distribution measuring device, drawing device, and light intensity distribution measuring method
JP2016188952A (en) * 2015-03-30 2016-11-04 株式会社オーク製作所 Exposure apparatus, photometric device for exposure apparatus, and exposure method

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