JPS61273841A - Stackedtype two-dimensional faint motion mounting table having no structural freedom - Google Patents

Abstract

PURPOSE:To enable highly accurate positioning by providing thin and wide springboards in parallel then coupling faint motion tables incorporating such mechanism as has no variation of attitude and hysteresis of motion while stacking perpendicularly and assembling to perform faint motion independently. CONSTITUTION:Two-dimensional faint motion mounting table to be employed when observing a sample through electron microscope is formed as follows. At first, upper and lower rectangular blocks 1 and an intermediate rectangular block 2 are fixed through stopping parts 5, 7, 8, 10 to thin and wide springboard 3 at respective sideface. Then the central functioning face 16 of block 2 is pushed by the driving section 13 to cause displacement to the right and left. Similarly formed unit is stacked and coupled then displaced vertically while ring springs 17, 35 are provided and previously pressurized to double the movable range. Consequently, the positional resolution in the order of (nm) for the range of several dozen (mum) to several hundred (mum) can be achieved.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention can improve the line width, pitch, etc. of fine patterns such as LSI.
Under an electron microscope, the width and length (depth) of -
Mechanistically white, used when measuring in two directions, etc.
This is about a stacked two-dimensional micro-moving stage without a mountain surface.

Conventional fine movement platforms have a movable range of several tens of mm to several hundred mm.
Although the mechanism is wide, the accuracy of one positioning is 0.01 μm at most due to the considerable change in posture. In addition, since we are not conscious of processing or observing patterns of LSIs or the like under an electron microscope, the structure uses lubricating oil, gas-generating materials, etc., and the overall size of the device is free. There were not many restrictions on production. When observing fine patterns at high magnification ÷'' under an electron microscope, as in recent years, it is possible to observe conditions that are quite restrictive, such as the absence of equipment in a vacuum chamber and the absence of frictional parts on the mechanism. High precision positioning and movement functions are required.

The basic structure of the two-dimensional fine movement platform of the present invention is to construct a fine movement table using the deformation and slight elongation of leaf springs arranged in parallel, and to stack two of these at right angles to each other and connect them. In the two directions perpendicular to it, the range is from several tens of μm to several hundred μm (1 μm = 1/1000th of a mm), on the order of nm (1 nm = 1/1,000,000 mm).
The aim is to achieve a positional resolution of 1 mm).

1, □, In order to achieve these objectives, the secondary fine movement stage of the present invention has a parallel arrangement with a thin width for transmitting deformation and poles (slight elongation). 54″IC0′″＆＠A″・°6°“1′″″
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Microscopic movement with a mechanism that has no history of thickness, posture changes, or movement: 4゛ Moving tables are stacked and connected at right angles, and assembled so that they can move independently in two directions at right angles to each other. It is characterized by:

The details of the present invention will be explained below in comparison with the drawings of FIGS. 1 to 4.

In Figures 1 and 2, the fine movement platform mechanism that moves left and right is first a rectangular block 1 arranged vertically and long horizontally.
．． A rectangular block in the middle 2. Long leaf springs with a thin thickness and width placed on the left and right sides of each block 3. It consists of a holding plate 10 for fixing the leaf spring 3 to the block 1 with screws 9. Block 2 is several millimeters taller than the blower.
Therefore, block 1 is placed below it and block 11 is placed below it.
When fixing and connecting block 2 with four screws 12,
Press to the left or right.

The block 2 is displaced by the deformation and slight elongation of the leaf spring 3.

In this state, when the elongation of the actuator 14 of the drive unit 13 that moves slightly is transmitted to the push rod 15 and the central action surface 16 of the block 2 is further pushed, the block 2 is displaced from left to right in FIGS. 1 and 2. do. According to the calculation, the thickness is 0.
In the case of a steel plate spring with a length of 24 mm, a length of 1Q mm, and a width of 20 mm, the flock 2 is elongated by only 0.12 μm.
is displaced by 50 μm. This displacement is the amount of displacement of the leaf spring 3 from the neutral position. For example, a ring-shaped spring 17 is inserted between the holding plate 10 and the C-shaped part 8, and the adjustment screw 18 is used to adjust the displacement from the right to the left to the block 2 in advance. By applying a certain preload and displacing the block 2, the movable range of the block 2 can be expanded approximately twice.

7% Ujin that supports the drive unit 13 and actuator 14;
・Gug 19 is firmly fixed to U-shaped part 5.

, 2. A block 11 (which has the same role as the block 2, but which has the same role as the block 2)
Unlike Block 2, this is a platform that allows slight vertical movement of 9 degrees.

That is, another set of fine movement platform mechanisms including block 2 that move left and right are assembled under block 1, and are displaced up and down in FIG.

, , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , In FIG. Rectangular blocks placed on the left and right and long up and down 20. Long leaf springs 21 with a thin thickness and width placed above and below each block. A U-shaped part 23 for fixing the leaf spring 21 to the block 20 with screws 22; a holding plate 25 for fixing the leaf spring 21 to the block 11 with screws 24; C-shaped part 26 for fixing the leaf spring 21 at the upper end of the block 20. It consists of a holding plate 28 for fixing the leaf spring 21 at the upper end of the block 11 with a screw 27. The rectangular block 2o is firmly fixed to the base 30 with eight screws 29. The block 11 is a rectangular block 2 arranged on the left and right through a plate spring 21.
It is several millimeters higher than block 0, and its function is the same as block 2.

In such an arrangement, block 20 is naturally not in contact with block I and block 2.

The fine movement platform mechanism that moves left and right and the fine movement platform mechanism that moves up and down in FIG.

In FIG. 1, the slightly moving drive section 31 transmits the extension of the actuator 32 to the push rod 33, and when the central working surface 34 of the block 11 is further pushed, the block 11 is displaced from the bottom to the top. This displacement is the amount of displacement of the leaf spring 21 from the neutral position, but the pressure plate 28 of the leaf spring 21 and the C-shaped part 26
For example, insert a ring-shaped spring 35 between them.

By applying an appropriate preload to the block 11 from top to bottom using the adjusting screw 36 and displacing it, the -I adjustment is performed when the screw 12 is tightened so that 1i and 1i are perpendicular to each other.

°j1 Figure 3 is a side view of the top view of Figure 1, viewed from the right side, and Figure 4 is a side view of the fine movement stage seen from the left side of the top view of Figure 1. FIG.

1′・

[Brief explanation of drawings]

Fig. 1 is a top plan view of the stacked fine movement mount according to the present invention, Fig. 2 is a side view of the lower side of Fig. 1, and Fig. 3). The figure is a side view of the right side of FIG. 1, and FIG. 4 is a side view of the left side of FIG.

Claims (1)

[Claims] Equipped with thin, wide, parallel-arranged leaf springs to transmit deformation and extremely slight extension, the range of motion is expanded by preloading the springs, and the micro-movement mechanism has no history of posture changes or movement. A stacked two-dimensional fine-movement platform having no mechanical freedom, characterized in that the platforms are stacked and connected at right angles and assembled so as to be able to move finely independently in two directions perpendicular to each other.