JPS61271063A - Formation of thin film - Google Patents

Formation of thin film

Info

Publication number
JPS61271063A
JPS61271063A JP11374285A JP11374285A JPS61271063A JP S61271063 A JPS61271063 A JP S61271063A JP 11374285 A JP11374285 A JP 11374285A JP 11374285 A JP11374285 A JP 11374285A JP S61271063 A JPS61271063 A JP S61271063A
Authority
JP
Japan
Prior art keywords
thin film
plate
platy
platy material
liq
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11374285A
Other languages
Japanese (ja)
Inventor
Masakatsu Saigo
西郷 正勝
Takahisa Amano
天野 孝久
Kuniaki Mita
三田 邦明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP11374285A priority Critical patent/JPS61271063A/en
Publication of JPS61271063A publication Critical patent/JPS61271063A/en
Pending legal-status Critical Current

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  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

PURPOSE:To form the titled thin film having uniform thickness on a platy material at high speed and at low cost by applying a direct drying means only to the upper part of the platy material when the platy material provided with a liq. layer is set upright and dried. CONSTITUTION:When a thin film is formed on the surface of a platy material, the platy material 11 is set upright, a liq. from a liq. vessel 23 is run down under such conditions from the upper end part of the platy material 11 to the other end, then the platy material 11 except the upper end part is covered with a shielding plate 21 and infrared rays are irradiated from an infrared lamp 22 from both sides. When the platy material 11 is dried mainly from the upper end side in this way, the material can be dried without being greatly affected by the weight of the liq. and hence a thin film having uniform thickness can be formed on the whole surface of the material.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、板状物の表面に均一な厚さの薄膜を形成する
方法に係わる。
DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a method for forming a thin film of uniform thickness on the surface of a plate-like object.

(従来の技術) 従来の主な薄膜形成方法としては、ホワイラー法とかけ
流し法が主なものであった。
(Prior Art) The main conventional thin film forming methods are the Whirler method and the continuous flow method.

このうちホワイラー法は、板状物を横に倒して薄膜とな
るべき液体を載せ、高速度で板状物乞回転させる事によ
り均一に液体を分布させて、横に薄さを求める事が出来
る。
Among these methods, the Whyler method is able to obtain horizontal thinness by laying down a plate-shaped object, placing the liquid to form a thin film on it, and rotating the plate-shaped object at high speed to evenly distribute the liquid. .

一方、かけ流し法は、第3図に示した如く、板状物I1
1吊す事や横から支える事等の手段により立てかげて、
板状物(111の上端より液槽の等により液体を流し、
液体の自重と粘性と硬化の関係を用いて均一に液体を分
布させる。次に第5図で示した様に赤外線ランプ(22
1等の乾燥手段を用いていち早く液体を乾燥させて薄膜
を作る。この方法は、人手や設備が少くても生産でき、
また巻き取り法などにより連続製造に用いる事が出来る
On the other hand, in the continuous flow method, as shown in FIG.
1. Stand it up by hanging it or supporting it from the side,
Pour the liquid from the upper end of the plate-shaped object (111 into a liquid tank, etc.)
Uniformly distributes the liquid using the relationship between the liquid's own weight, viscosity, and hardening. Next, as shown in Figure 5, an infrared lamp (22
Dry the liquid as soon as possible using a first-class drying method to form a thin film. This method allows production with less manpower and equipment,
Moreover, it can be used for continuous production by winding method or the like.

(発明が解決しようとする問題点) λ 先ず、ホワイラー安に於いては、板状物を一枚一枚横倒
しにして回転を行なわなければならず、固定のたびの手
間や回転の場所等の問題により、大量生産や大きな板状
物に対して対応できなかった。
(Problems to be Solved by the Invention) λ First, in the case of wheeler cutting, the plate-like objects must be laid down one by one and rotated, which reduces the time and effort required each time they are fixed and the location of the rotation. Due to problems, it was not possible to handle mass production or large plate-shaped items.

また、かけ流し法に於いては、第4図に示した薄膜の厚
さの分布01)に示される様に液体の自重により板状物
の上端部に於いて薄膜が薄いものとなり、均一な厚さと
ならなかった。
In addition, in the continuous flow method, as shown in the thin film thickness distribution 01) shown in Figure 4, the thin film becomes thin at the upper end of the plate due to the weight of the liquid, making it uniform. It wasn't thick.

(問題を解決する為の手段) 弁板状物表面に液体層を設け、前記液体層へ乾燥手段を
施して乾燥させる事により前記板状物表面に薄膜を設げ
る薄膜形成方法に於いて、液体層を乾燥させるとき板状
物を立起させて板状物の上端部のみに直接乾燥手段を施
す事を特徴とする薄膜形成方法をとる。
(Means for solving the problem) A thin film forming method in which a liquid layer is provided on the surface of a valve plate-like object, and a thin film is provided on the surface of the plate-like object by applying a drying means to the liquid layer and drying it. , a thin film forming method is used, which is characterized in that when drying a liquid layer, a plate-like object is stood up and a drying means is directly applied only to the upper end of the plate-like object.

(作 用) 第4図に示した曲線のように、従来のかげ流し法による
薄膜の厚さの分布G2と本発明の形成方法による薄膜の
厚さの;分布(3D?比べると、端部の膜厚も中央部と
ほぼ均一の厚さを持った板状物となった。
(Function) As shown in the curve shown in FIG. The thickness of the film was almost the same as that of the central part, resulting in a plate-like material.

用いて詳細に説明する。This will be explained in detail using

先ず第3図で示される様に板状物(111を立てて、こ
の状態で板状物(111の上端部へ液槽のより液体を上
端部の一端より他端へ移動しながら流す。この液体を流
すのは、上端部に於いて均一に流される様行なわれる。
First, as shown in Fig. 3, the plate-shaped object (111) is stood up, and in this state, the liquid from the liquid tank is poured into the upper end of the plate-shaped object (111) while moving from one end of the upper end to the other end. The liquid is allowed to flow evenly at the upper end.

次に第1図に示した様に板状物(IBの上端部以外を遮
蔽板!2+1で履い、この両側より第2図で示した様に
赤外線ランプのより発生する赤外線を照射する。これに
より主に板状物旧1の上端部から乾燥する事になり、液
体の自重による影響が少ない形で乾燥されろ。これによ
り第4図に示される様な薄膜の厚さの分布Gυとなり、
全体に均一な膜厚の薄膜が板状物(111上に形成され
る。
Next, as shown in Fig. 1, a plate-shaped object (IB) is covered with shielding plates (2+1) except for the upper end, and infrared rays generated by an infrared lamp are irradiated from both sides of the plate as shown in Fig. 2. As a result, the plate-like object 1 is dried mainly from the upper end, and is dried in a manner that is less affected by the weight of the liquid.As a result, the thickness distribution of the thin film Gυ as shown in Fig. 4 is obtained.
A thin film having a uniform thickness throughout is formed on the plate-shaped object (111).

尚、本発明は上記の実施例に限らず、乾燥手段が赤外線
ならば液体の自重が重(、または粘性が低く、または乾
燥が遅いものの膜厚を均一にするのに適しており、まち
、乾燥手段が熱風の場合は、液体の自重が軽(、または
粘性が高く、または乾燥が早いものの膜厚を均一にする
のに適しており、乾燥手段が熱線の場合は、この中間性
の液体に適している。
Note that the present invention is not limited to the above-mentioned embodiments; if the drying means is infrared rays, it is suitable for making the thickness of the liquid uniform (or for materials with low viscosity or slow drying). When the drying means is hot air, it is suitable for making the film thickness uniform even though the liquid has a light self-weight (or has high viscosity or dries quickly), and when the drying means is hot wire, it is suitable for making the film thickness uniform. suitable for

また、本実施例の遮蔽板の場合、同厚の平板を用いたが
、遮蔽板の上端部をメツシュ状もしくは遮蔽板の厚さが
上端へ行く桿薄くなったものでもよい。また、乾燥手段
を遮蔽板を用いる事で板状物の上端に限定したが、乾燥
手段に指向性を持たせて板状物の上端部にのみ施す様に
してもよい。
Further, in the case of the shielding plate of this embodiment, a flat plate of the same thickness was used, but the upper end of the shielding plate may have a mesh shape or the thickness of the shielding plate may be thinner as it goes toward the upper end. Further, although the drying means is limited to the upper end of the plate-like object by using a shielding plate, the drying means may be given directionality and applied only to the upper end of the plate-like object.

また、本実施例は普通の大きさの板状物に一端より一端
へ向かって液体をかける場合に於いて説明したが、板状
物への液体のかけ流しを上端部で一斉に行なわれてもよ
い。
Furthermore, although this embodiment has been described in the case where liquid is applied to a plate-like object of a normal size from one end to the other, it is also possible to apply liquid to the plate-like object all at once from the upper end. Good too.

また、大型の板状物や巻物の板状物の場合、液体のかげ
流しと乾燥を一体の手順とし、液体のかけ流しを乾燥手
段が一定の間隔で後追いをする様板状物の上端部の一端
より他端へ向かって薄膜を形成してもよい事は当然であ
る。
In addition, in the case of a large plate-like object or a rolled plate-like object, the liquid overflow and drying are performed as an integrated procedure, and the drying means follows the liquid over the upper end of the plate-like object at regular intervals. Of course, the thin film may be formed from one end to the other end.

(発明の効果) 本発明により、大型板状物や巻物板状物等の連続板状物
でも人手や装置があまりかからず、しかも均一な膜厚の
薄膜をかけ流し法であっても板状物上に形成する事が出
来る。これにより高速度でしかも安価に板状物を製造す
ることができる。
(Effects of the Invention) According to the present invention, even continuous plate-like objects such as large-scale plate-like objects and rolled plate-like objects do not require much manpower or equipment, and even when a thin film with a uniform thickness is applied by the pouring method, it is possible to It can be formed on shaped objects. As a result, plate-like products can be manufactured at high speed and at low cost.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本発明の一実施例の乾燥状態を表わす斜視図
であり、第2図は同側面図であり、第3図は、本発明の
液体層?形成するときの斜視図であり、第4図は完成し
た板状物上の薄膜の厚さの分布曲線であり、第5図は、
従来のかけ流し法の乾燥状態を表わす側面図である。 (111・・・板状物     Gl+・・・遮蔽板(
221・・・赤外線ランプ  c23i・・・液 槽の
り・・・本発明による分布曲線 O3・・・従来のかげ流し法による分布曲線時  許 
 出  願  人 第3図     第1図 8脚の上部部からの距離 第2図 第5r!!J
FIG. 1 is a perspective view showing an embodiment of the present invention in a dry state, FIG. 2 is a side view of the same, and FIG. 3 is a perspective view of an embodiment of the present invention in a dry state. FIG. 4 is a perspective view of the thin film during formation, FIG. 4 is a distribution curve of the thickness of the thin film on the completed plate-like object, and FIG.
It is a side view showing the drying state of the conventional continuous flow method. (111... plate-like object Gl+... shielding plate (
221...Infrared lamp c23i...Liquid tank glue...Distribution curve according to the present invention O3...Distribution curve according to the conventional shading method
Applicant Figure 3 Figure 1 Figure 8 Distance from the top of the leg Figure 2 Figure 5r! ! J

Claims (1)

【特許請求の範囲】 1)板状物表面に液体層を設け、前記液体層へ乾燥手段
を施して乾燥させる事により前記板状物表面に薄膜を設
ける薄膜形成方法に於いて、液体層を乾燥させるとき板
状物を立起させて板状物の上端部のみに直接乾燥手段を
施す事を特徴とする薄膜形成方法。 2)液体層を乾燥させるとき板状物を立起させて板状物
の上端部以外に遮蔽を施した板状物に対して乾燥手段を
施した事を特徴とする特許請求の範囲第一項記載の薄膜
形成方法。 3)乾燥手段が熱線の照射である事を特徴とする特許請
求の範囲第一項記載の薄膜形成方法。 4)乾燥手段が赤外線の照射である事を特徴とする特許
請求の範囲第一項記載の薄膜形成方法。 5)乾燥手段が熱風の照射である事を特徴とする特許請
求の範囲第一項記載の薄膜形成方法。
[Claims] 1) A thin film forming method in which a liquid layer is provided on the surface of a plate-like object, and a thin film is formed on the surface of the plate-like object by applying a drying means to the liquid layer and drying the liquid layer. A method for forming a thin film, characterized in that during drying, the plate-like object is stood up and a drying means is directly applied only to the upper end of the plate-like object. 2) Claim 1, characterized in that when drying the liquid layer, the drying means is applied to the plate-like object in which the plate-like object is stood up and shielded except for the upper end of the plate-like object. Thin film forming method described in section. 3) The thin film forming method according to claim 1, wherein the drying means is irradiation with heat rays. 4) The method for forming a thin film according to claim 1, wherein the drying means is irradiation with infrared rays. 5) The thin film forming method according to claim 1, wherein the drying means is irradiation with hot air.
JP11374285A 1985-05-27 1985-05-27 Formation of thin film Pending JPS61271063A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11374285A JPS61271063A (en) 1985-05-27 1985-05-27 Formation of thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11374285A JPS61271063A (en) 1985-05-27 1985-05-27 Formation of thin film

Publications (1)

Publication Number Publication Date
JPS61271063A true JPS61271063A (en) 1986-12-01

Family

ID=14619974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11374285A Pending JPS61271063A (en) 1985-05-27 1985-05-27 Formation of thin film

Country Status (1)

Country Link
JP (1) JPS61271063A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016041421A (en) * 2010-06-14 2016-03-31 サン−ゴバン グラス フランス Method for flow-coating high polymer material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016041421A (en) * 2010-06-14 2016-03-31 サン−ゴバン グラス フランス Method for flow-coating high polymer material

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