JPS6127043A - イオンビ−ム発生装置 - Google Patents

イオンビ−ム発生装置

Info

Publication number
JPS6127043A
JPS6127043A JP59149935A JP14993584A JPS6127043A JP S6127043 A JPS6127043 A JP S6127043A JP 59149935 A JP59149935 A JP 59149935A JP 14993584 A JP14993584 A JP 14993584A JP S6127043 A JPS6127043 A JP S6127043A
Authority
JP
Japan
Prior art keywords
substance
ion beam
synchrotron radiation
state
electric field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59149935A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0518220B2 (enrdf_load_stackoverflow
Inventor
Yoshihiro Ueda
植田　至宏
Koichi Ono
高一 斧
Tatsuo Omori
達夫 大森
Shigeto Fujita
重人 藤田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59149935A priority Critical patent/JPS6127043A/ja
Publication of JPS6127043A publication Critical patent/JPS6127043A/ja
Publication of JPH0518220B2 publication Critical patent/JPH0518220B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/24—Ion sources; Ion guns using photo-ionisation, e.g. using laser beam

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP59149935A 1984-07-17 1984-07-17 イオンビ−ム発生装置 Granted JPS6127043A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59149935A JPS6127043A (ja) 1984-07-17 1984-07-17 イオンビ−ム発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59149935A JPS6127043A (ja) 1984-07-17 1984-07-17 イオンビ−ム発生装置

Publications (2)

Publication Number Publication Date
JPS6127043A true JPS6127043A (ja) 1986-02-06
JPH0518220B2 JPH0518220B2 (enrdf_load_stackoverflow) 1993-03-11

Family

ID=15485780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59149935A Granted JPS6127043A (ja) 1984-07-17 1984-07-17 イオンビ−ム発生装置

Country Status (1)

Country Link
JP (1) JPS6127043A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01154805U (enrdf_load_stackoverflow) * 1987-12-29 1989-10-25

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5022999A (enrdf_load_stackoverflow) * 1973-06-28 1975-03-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5022999A (enrdf_load_stackoverflow) * 1973-06-28 1975-03-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01154805U (enrdf_load_stackoverflow) * 1987-12-29 1989-10-25

Also Published As

Publication number Publication date
JPH0518220B2 (enrdf_load_stackoverflow) 1993-03-11

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