JPS61268325A - 濾過材 - Google Patents
濾過材Info
- Publication number
- JPS61268325A JPS61268325A JP11076185A JP11076185A JPS61268325A JP S61268325 A JPS61268325 A JP S61268325A JP 11076185 A JP11076185 A JP 11076185A JP 11076185 A JP11076185 A JP 11076185A JP S61268325 A JPS61268325 A JP S61268325A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- density layer
- filter material
- dust
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Filtering Materials (AREA)
- Paper (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11076185A JPS61268325A (ja) | 1985-05-23 | 1985-05-23 | 濾過材 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11076185A JPS61268325A (ja) | 1985-05-23 | 1985-05-23 | 濾過材 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61268325A true JPS61268325A (ja) | 1986-11-27 |
JPH0154085B2 JPH0154085B2 (enrdf_load_stackoverflow) | 1989-11-16 |
Family
ID=14543894
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11076185A Granted JPS61268325A (ja) | 1985-05-23 | 1985-05-23 | 濾過材 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61268325A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5288402A (en) * | 1991-04-12 | 1994-02-22 | Mitsubishi Paper Mills Limited | Liquid filter medium including a fibrillated filtering layer and an organic fiber support |
WO2007119648A1 (ja) * | 2006-04-07 | 2007-10-25 | Tokyo Electron Limited | 気体清浄装置および半導体製造装置 |
JP2009279554A (ja) * | 2008-05-26 | 2009-12-03 | Kao Corp | 積層フィルタ |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5013972A (enrdf_load_stackoverflow) * | 1973-06-08 | 1975-02-13 | ||
JPS5440778A (en) * | 1977-02-10 | 1979-03-30 | Createchnic Patent Ag | Plastic seal for container of fixed or variable form* and method of operating container seal |
-
1985
- 1985-05-23 JP JP11076185A patent/JPS61268325A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5013972A (enrdf_load_stackoverflow) * | 1973-06-08 | 1975-02-13 | ||
JPS5440778A (en) * | 1977-02-10 | 1979-03-30 | Createchnic Patent Ag | Plastic seal for container of fixed or variable form* and method of operating container seal |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5288402A (en) * | 1991-04-12 | 1994-02-22 | Mitsubishi Paper Mills Limited | Liquid filter medium including a fibrillated filtering layer and an organic fiber support |
WO2007119648A1 (ja) * | 2006-04-07 | 2007-10-25 | Tokyo Electron Limited | 気体清浄装置および半導体製造装置 |
JPWO2007119648A1 (ja) * | 2006-04-07 | 2009-08-27 | 東京エレクトロン株式会社 | 気体清浄装置および半導体製造装置 |
JP2009279554A (ja) * | 2008-05-26 | 2009-12-03 | Kao Corp | 積層フィルタ |
Also Published As
Publication number | Publication date |
---|---|
JPH0154085B2 (enrdf_load_stackoverflow) | 1989-11-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |