JPS6126237Y2 - - Google Patents

Info

Publication number
JPS6126237Y2
JPS6126237Y2 JP16246282U JP16246282U JPS6126237Y2 JP S6126237 Y2 JPS6126237 Y2 JP S6126237Y2 JP 16246282 U JP16246282 U JP 16246282U JP 16246282 U JP16246282 U JP 16246282U JP S6126237 Y2 JPS6126237 Y2 JP S6126237Y2
Authority
JP
Japan
Prior art keywords
supply hole
rotating body
gas supply
disk
sealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16246282U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5966794U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16246282U priority Critical patent/JPS5966794U/ja
Publication of JPS5966794U publication Critical patent/JPS5966794U/ja
Application granted granted Critical
Publication of JPS6126237Y2 publication Critical patent/JPS6126237Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Vacuum Packaging (AREA)
  • Sealing Of Jars (AREA)
JP16246282U 1982-10-28 1982-10-28 流体受け渡し分配装置 Granted JPS5966794U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16246282U JPS5966794U (ja) 1982-10-28 1982-10-28 流体受け渡し分配装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16246282U JPS5966794U (ja) 1982-10-28 1982-10-28 流体受け渡し分配装置

Publications (2)

Publication Number Publication Date
JPS5966794U JPS5966794U (ja) 1984-05-04
JPS6126237Y2 true JPS6126237Y2 (cs) 1986-08-06

Family

ID=30356752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16246282U Granted JPS5966794U (ja) 1982-10-28 1982-10-28 流体受け渡し分配装置

Country Status (1)

Country Link
JP (1) JPS5966794U (cs)

Also Published As

Publication number Publication date
JPS5966794U (ja) 1984-05-04

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