JPS61261012A - Manufacture of laminated sheet and device thereof - Google Patents

Manufacture of laminated sheet and device thereof

Info

Publication number
JPS61261012A
JPS61261012A JP60103213A JP10321385A JPS61261012A JP S61261012 A JPS61261012 A JP S61261012A JP 60103213 A JP60103213 A JP 60103213A JP 10321385 A JP10321385 A JP 10321385A JP S61261012 A JPS61261012 A JP S61261012A
Authority
JP
Japan
Prior art keywords
films
film
prepregs
prepreg
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60103213A
Other languages
Japanese (ja)
Other versions
JPH034017B2 (en
Inventor
Toshiyuki Akamatsu
資幸 赤松
Yasufumi Fukumoto
福本 恭文
Kenji Iwata
憲治 岩田
Koji Sato
光司 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP60103213A priority Critical patent/JPS61261012A/en
Publication of JPS61261012A publication Critical patent/JPS61261012A/en
Publication of JPH034017B2 publication Critical patent/JPH034017B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/022Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates

Landscapes

  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Reinforced Plastic Materials (AREA)
  • Laminated Bodies (AREA)

Abstract

PURPOSE:To improve the heat resistance of a laminate sheet, by reducing the dimension-change and the warpage thereof by a method in which a plurality of prepregs made by impregnating base material with resin and drying them, are lapped and enclosed hermetically with films and then after being kept in reduced pressure, they are formed under heating and pressurizing. CONSTITUTION:The circumference of prepregs 1 is enclosed with an enclosing jig 6, and in this state, the prepregs are inserted into a space between two films 2, 2. An exhausting pipe 4 is fitted to one position of said enclosing jig 6 under penetrating the inner and outer circumferences thereof. In the state where the prepregs and the enclosing jig 6 are inserted into the space between two films 2, 2 in such a manner, an adhering tape 7 is stuck between the whole peripheries of the films 2, 2, and the space between two films 2, 2 is tightly closed, whereby the bag tightly closed by the films 2, 2 is formed. Next, the air in the space between two films 2, 2 is extracted and removed from an exhausting pipe 4. The pressure in the space between the films 2, 2 is reduced and then the prepregs between the films 2, 2 are formed under heating and pressurizing by heating plates 3, 3.

Description

【発明の詳細な説明】 [技術分野] 本発明は、プリント配線板用の基板などとじて用いられ
る積層板の製造方法及びその装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a method and apparatus for manufacturing a laminate used as a substrate for a printed wiring board, etc.

[背景技術] プリント配線板用の基板として用いられる積層板は、フ
ェノール樹脂やエポキシ樹脂、ポリイミド樹脂など熱硬
化性樹脂のフェスを紙や〃ラス織布、がラス不維布など
基材に含浸させて加熱乾燥させることによって樹脂をB
ステージ状態にしたプリプレグ(レノンクロス)を作成
し、このプリプレグを複数枚重ね、さらにこの積載物の
両面あるいは片面に銅箔などの金属箔を重ね、これを加
熱加圧成形することによって製造される。多層のプリン
ト配線板用基板として用いる場合は、このように製造し
た片面または両面に金属箔を張った積層板にエツチング
などの処理を施して金属箔を蝕刻することによって内層
の回路パターンを作成し、これを内層回路板としてさら
にこの内層回路板の外面に複数枚のプリプレグを介して
金属箔を重ね、そしてこれを加熱加圧成形することによ
って製造がおこなわれる。
[Background technology] Laminated boards used as substrates for printed wiring boards are made by impregnating a base material such as paper, lath woven cloth, or lath non-woven cloth with a face of thermosetting resin such as phenol resin, epoxy resin, or polyimide resin. By heating and drying the resin,
It is manufactured by creating prepreg (Lennon cloth) in a stage state, stacking multiple sheets of this prepreg, then layering metal foil such as copper foil on both or one side of this stack, and then heating and press-forming this. . When used as a substrate for a multilayer printed wiring board, the circuit pattern on the inner layer is created by etching the laminate produced in this way with metal foil on one or both sides and etching the metal foil. This is used as an inner layer circuit board, and a metal foil is layered on the outer surface of this inner layer circuit board via a plurality of prepregs, and then this is heated and press-molded.

ユニで、成形における加熱加圧は熱源として蒸気や電気
、オイルを用いた油圧プレスなどの熱盤によっておこな
われることになるが、この成形における加圧は通常40
 K g/ c+a”以上の高圧でおこなわれる。すな
わち、プリプレグ内やプリプレグの眉間、内層回路板を
用いるときには内層回路間などに空気が残存しているた
めに、成形の際に高圧で加圧してこの残存空気を追い出
すようにしないと積層板にボイドやカスレなどの不良が
することになるのである。
At Uni, heating and pressure during molding is performed using a hot platen such as a hydraulic press that uses steam, electricity, or oil as a heat source, but the pressure during this molding is usually 40°C.
This is done at a high pressure of K g/c+a" or higher. In other words, since air remains inside the prepreg, between the eyebrows of the prepreg, and between the inner layer circuits when using an inner layer circuit board, high pressure is applied during molding. If this residual air is not removed, defects such as voids and scratches will occur in the laminate.

しかしこのように高圧で加圧をおこなうと、成形時の樹
脂の流れが大きくなり、また積層板の内部残留歪みが大
軽く残り、この結集積層板の板厚のバラツキや寸法変化
、反り、ネジレが大きく発生するという問題や、樹脂の
多量の流出で積層板内の樹脂量が実質的に不足して耐熱
性が低下するという問題が生じるものであった。
However, when pressurized at such high pressure, the flow of resin increases during molding, and a large amount of residual strain remains in the laminate, resulting in variations in thickness, dimensional changes, warping, and twisting of the assembled laminate. Problems arise in that a large amount of resin is generated, and that the amount of resin in the laminate is substantially insufficient due to a large amount of resin flowing out, resulting in a decrease in heat resistance.

[発明の目的] 本発明は、上記の点に鑑みて為されたものであり、低圧
で成形をおこなうことかでか、板厚のバラツキや寸法変
化、反りなどを低減できると共に耐熱性を向上させるこ
とができる積層板の製造方法及びその装置を提供するこ
とを目的とするものである。
[Object of the Invention] The present invention has been made in view of the above points, and by performing molding at low pressure, it is possible to reduce variations in plate thickness, dimensional changes, warping, etc., and improve heat resistance. It is an object of the present invention to provide a method for manufacturing a laminate and an apparatus therefor that can perform the following steps.

[発明の開示] しかして本発明に係る積層板の製造方法は、基材に樹脂
を含浸乾燥して作成されるプリプレグ1を複数枚重ね、
これをフィルム2で気密的に包んで熱盤3間にセットし
、フィルム2内を減圧状態にしたのちに熱盤3によって
プリプレグ1を加熱加圧して成形をおこなうことを特徴
とし、また本発明に係る積層板の製造装置は、基材に樹
脂を含浸乾燥して作成されるプリプレグ1を複数枚重ね
て気密的に密封するフィルム2と、フィルム2内の空気
を排気するための排気管4と、このフィルム2に密封さ
れたプリプレグ1を加熱加圧するための一対の熱盤3と
を具備して成ることを特徴とするものであって、以下本
発明を実施例により詳述する。
[Disclosure of the Invention] The method for manufacturing a laminate according to the present invention includes stacking a plurality of prepregs 1 created by impregnating and drying a base material with a resin,
The prepreg 1 is airtightly wrapped with a film 2 and set between heating plates 3, and after the inside of the film 2 is reduced in pressure, the prepreg 1 is heated and pressurized by the heating plate 3 to perform molding. The laminate manufacturing apparatus according to the above includes a film 2 for airtightly sealing a plurality of prepregs 1 made by impregnating and drying a base material with a resin, and an exhaust pipe 4 for exhausting air inside the film 2. and a pair of heating plates 3 for heating and pressurizing the prepreg 1 sealed in the film 2.The present invention will be described in detail below with reference to Examples.

プリプレグ1はフェノール樹脂やエポキシ樹脂、ポリイ
ミド樹脂など熱硬化性樹脂のフェスを紙や〃ラス織布、
〃ラス不織布など基材に含浸させて加熱乾燥させること
によって樹脂をBステージ状態にし、レジンクロスとし
て調製されるもので、これを複数枚重ねると共にこの片
面あるいは両面に銅箔などの金属箔を重ね、このビ載物
を一段として金型プレートを介して多数段積載し、加熱
加圧による積層成形に供するものである。そして本発明
においてはこの成形を第1図に示すような装置を用いて
おこなう。
Prepreg 1 is a fabric made of thermosetting resin such as phenolic resin, epoxy resin, or polyimide resin, and is made of paper, lath woven cloth,
〃Resin is made into a B-stage state by impregnating it into a base material such as a lath nonwoven fabric and heating and drying it, and then it is prepared as a resin cloth.Multiple sheets of this are layered together, and metal foil such as copper foil is layered on one or both sides of the resin cloth. This plastic material is stacked in multiple stages via mold plates, and subjected to lamination molding by heating and pressing. In the present invention, this molding is performed using an apparatus as shown in FIG.

第1図の装置は、上下一対の熱盤3,3を具備して形成
され、この熱盤3,3は熱源として蒸気、電気、オイル
などを用いて加熱され、また油圧プレス機構などを用い
て加圧をおこなうことができるように形成しである。ま
たフィルム2は300℃程度の温度に耐える耐熱性と5
Torr程度以上の真空状態を維持できる気密性を有す
るもの、例えばトリアセテートフィルム、ポリエチレン
テレフタレートフィルム、ポリプロピレンフィルム、ポ
リアミドフィルムなどを用いることができる。
The apparatus shown in FIG. 1 is formed by a pair of upper and lower heating plates 3, 3, which are heated using steam, electricity, oil, etc. as a heat source, and are heated using a hydraulic press mechanism or the like. It is formed so that it can be pressurized. In addition, film 2 has heat resistance that can withstand temperatures of about 300°C.
A material having airtightness capable of maintaining a vacuum state of approximately Torr or higher, such as a triacetate film, a polyethylene terephthalate film, a polypropylene film, a polyamide film, etc., can be used.

そして、上記積載したプリプレグ1の回りを第2図のよ
うに囲い治具6で囲み、この状態でこれを2枚のフィル
ム2,2間に挟む。囲い治具6はプリプレグ1を囲むこ
とができる環状であれば、その形状や大きさまた材質は
特に問われるものではないが、容易に形がくずれたワせ
ず300 ”(:程度の温度に耐えるものである必要が
ある。またこの囲い治Jil−6の一箇所には内周と外
周とに貫通させて排気管4が取り付けである。
Then, the loaded prepreg 1 is surrounded by a surrounding jig 6 as shown in FIG. 2, and in this state it is sandwiched between two films 2, 2. There are no particular restrictions on the shape, size or material of the surrounding jig 6 as long as it is annular enough to surround the prepreg 1; It must be durable.Also, an exhaust pipe 4 is attached to one part of the enclosure Jil-6, penetrating the inner and outer peripheries.

しかしてこのように2枚のフィルム2,2間にプリプレ
グと囲い治具6とをはさんだ状態でフィルム2,2の全
周縁間に粘着テープ7を貼り付けて両フィルム2,2間
を密閉状態にし、フィルム2.2によって密閉袋が形成
されるようにする。
However, with the prepreg and the enclosure jig 6 sandwiched between the two films 2, 2 like a lever, adhesive tape 7 is pasted between the entire periphery of the films 2, 2 to seal the space between both films 2, 2. condition so that a sealed bag is formed by the film 2.2.

この場合粘着テープ7を用いず、熱圧着などの方法で密
閉状態にすることができればこのようにしてもよい。そ
して排気管4を真空ポンプなど減圧装置に接続し、これ
を第1図のように上下一対のクッション材8.8間には
さんでキャリアプレート9上に載置し、さらにこれを一
対の熱g13.3問にセットする。次いで、排気管4か
らフィルム2.2間の空気を抜き出して除去し、フィル
ム2゜2間を減圧状態にして熱盤3,3によってフィル
ム2,2間のプリプレグ1を加熱加圧成形する。
In this case, the adhesive tape 7 may not be used, as long as it can be made into a sealed state by a method such as thermocompression bonding. Then, the exhaust pipe 4 is connected to a pressure reducing device such as a vacuum pump, and as shown in Fig. 1, this is placed on a carrier plate 9 between a pair of upper and lower cushioning materials 8. g13. Set to 3 questions. Next, the air between the films 2 and 2 is extracted and removed from the exhaust pipe 4, the pressure between the films 2 and 2 is reduced, and the prepreg 1 between the films 2 and 2 is heated and press-molded using the hot platens 3 and 3.

この場合、フィルム2,2間の空気の除去はこのように
加熱加圧成形の前におこなうようにしても、あるいは加
熱加圧成形の途中でおこなうようにしても、プリプレグ
1の樹脂が溶融される前におこなわれるようにすればい
ずれでもよい。
In this case, even if the air between the films 2 and 2 is removed before the heat-pressing molding or during the heat-pressing molding, the resin of the prepreg 1 will not be melted. Either is fine as long as it is done before the

このようにしてプリプレグ1を積層した積層板を得るこ
とができるものであるが、この成形をおこなうにあたっ
て、フィルム2,2闇は減圧状態にあるためにフィルム
2,2間の空気が除去され、プリプレグ1内やプリプレ
グ1の眉間などに残留する空気が除去された状態で成形
がおこなわれることになり、従って高圧で加圧して成形
をおこなって空気の除去をおこなうような必要がなく、
低圧の加圧でもボイドやカスレなどの不良の発生のおそ
れな(成形をおこなうことができることになるものであ
る。例えば、従来40Kg/c+m2以上の圧力で成形
をおこなう必要のあったものが、20Kg/cu2以下
の圧力による成形が可能になるものである。
In this way, it is possible to obtain a laminate in which the prepregs 1 are laminated, but when performing this molding, the films 2, 2 are under reduced pressure, so the air between the films 2, 2 is removed, Molding is performed after the air remaining in the prepreg 1 or between the eyebrows of the prepreg 1 is removed, so there is no need to perform molding under high pressure to remove air.
Even with low pressure, there is a risk of defects such as voids and smearing (this means that molding can be performed. For example, conventionally, molding must be performed at a pressure of 40 kg/c + m2 or more, but with a pressure of 20 kg/c + m2 or more, This allows molding at a pressure of /cu2 or less.

次に本発明の評価について説明すると、FR−4クラス
のエポキシ樹脂を用いた4層のプリント配線板用の積層
板(サイズ510X340mm、成形後厚み1 、6 
mm)を作成するにあたって、従来の減圧を伴わないで
圧力40Kg/am2の高圧で成形をおこなった場合(
従来例)、減圧を伴わないで圧力20Kg/am2の低
圧で成形をおこなった場合(比較例)、第1,2図の装
置を用いて減圧をおこないつつ20Kg/am”の低圧
で成形をおニなっh場合(実施例〕のそれぞれについて
特性を測定した結果、前表の結果、実施例のものではボ
イドの発生なく成形おこなうことができ、また板厚のパ
フツキや反り、寸法変化が小さく、さらに耐熱性につい
ても優れていることが確認される。
Next, to explain the evaluation of the present invention, a 4-layer printed wiring board laminate using FR-4 class epoxy resin (size 510 x 340 mm, thickness after molding 1, 6
mm), when molding was carried out at a high pressure of 40 kg/am2 without the conventional depressurization (
Conventional example), when molding was performed at a low pressure of 20 kg/am2 without depressurization (comparative example), molding was performed at a low pressure of 20 kg/am'' while depressurizing using the equipment shown in Figures 1 and 2. As a result of measuring the characteristics for each case (Example), the results shown in the table above show that the example can be molded without generating voids, and there is little puffiness, warpage, or dimensional change in the plate thickness. Furthermore, it is confirmed that the heat resistance is also excellent.

C発明の効果] 上述のように本発明に係る積層板の製造方法は、基材に
樹脂を含浸乾燥して作成されるプリプレグを複数枚重ね
、これをフィルムで気密的に包んで熱盤間にセットし、
フィルム内を減圧状態にしたのちに熱盤によってプリプ
レグを加熱加圧して成形をおこなうようにしたので、プ
リプレグ内やプリプレグの層間などに残留する空気が除
去された状態で成形がおこなわれることになり、低圧の
加圧でもボイド“やカスレなどの不良の発生のおそれな
く成形をおこなうことができることになるものであって
、積層板の板厚のバラツキや寸法変化、反りなどを低減
でさると共に耐熱性を向上させることができるものであ
る。また本発明の積層板の製造装置は、基材に樹“脂を
含浸乾燥して作成されるプリプレグを複数枚重ねて気密
的に密封するフイルムと、フィルム内の空気を排気する
ためにフィルムに取り付けられた排気管と、このフィル
ムに密封されたプリプレグを加熱加圧するための一対の
熱盤と゛を具備したものであるから、減圧はプリプレグ
を密封したフィルム内でおこなうことができ、積層板成
形用の既存の熱盤をそのまま用いることができて、成形
設備の大幅の変更の必要がないものである。
C Effect of the invention] As described above, the method for manufacturing a laminate according to the present invention involves stacking a plurality of prepregs created by impregnating and drying a base material with a resin, airtightly wrapping the prepregs with a film, and placing them between hot platens. Set it to
After reducing the pressure inside the film, the prepreg is heated and pressurized using a hot platen to form the film, so the air remaining inside the prepreg and between the layers of the prepreg is removed before forming. , it is possible to perform molding even under low pressure without the risk of defects such as voids and scratches, and it reduces variations in the thickness of the laminate, dimensional changes, warping, etc., and also improves heat resistance. The laminate manufacturing apparatus of the present invention also includes a film in which a plurality of prepregs made by impregnating and drying a base material with a resin are stacked and airtightly sealed; The device is equipped with an exhaust pipe attached to the film to exhaust the air inside the film, and a pair of heating plates to heat and pressurize the prepreg sealed in the film, so the pressure reduction can be done by sealing the prepreg. It can be carried out within a film, the existing hot platen for laminate forming can be used as is, and there is no need to make major changes to the forming equipment.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例の分解断面図、第2図は同上
の一部の平面図である。 1はプリプレグ、2はフィルム、3は熱盤、4は排気管
である。
FIG. 1 is an exploded sectional view of one embodiment of the present invention, and FIG. 2 is a plan view of a portion of the same. 1 is a prepreg, 2 is a film, 3 is a heating plate, and 4 is an exhaust pipe.

Claims (2)

【特許請求の範囲】[Claims] (1)基材に樹脂を含浸乾燥して作成されるプリプレグ
を複数枚重ね、これをフィルムで気密的に包んで熱盤間
にセットし、フィルム内を減圧状態にしたのちに熱盤に
よってプリプレグを加熱加圧して成形をおこなうことを
特徴とする積層板の製造方法。
(1) Layer multiple sheets of prepreg created by impregnating and drying a resin on the base material, wrap it airtight with a film, set it between hot plates, reduce the pressure inside the film, and then use the hot plate to form the prepreg. A method for manufacturing a laminate, characterized by forming the laminate by heating and pressurizing it.
(2)基材に樹脂を含浸乾燥して作成されるプリプレグ
を複数枚重ねて気密的に密封するフィルムと、フィルム
内の空気を排気するための排気管と、このフィルムに密
封されたプリプレグを加熱加圧するための一対の熱盤と
を具備して成ることを特徴とする積層板の製造装置。
(2) A film that airtightly seals multiple sheets of prepreg made by impregnating a base material with resin and drying it, an exhaust pipe for exhausting the air inside the film, and a prepreg sealed in this film. A laminate manufacturing apparatus characterized by comprising a pair of heating plates for heating and pressurizing.
JP60103213A 1985-05-15 1985-05-15 Manufacture of laminated sheet and device thereof Granted JPS61261012A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60103213A JPS61261012A (en) 1985-05-15 1985-05-15 Manufacture of laminated sheet and device thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60103213A JPS61261012A (en) 1985-05-15 1985-05-15 Manufacture of laminated sheet and device thereof

Publications (2)

Publication Number Publication Date
JPS61261012A true JPS61261012A (en) 1986-11-19
JPH034017B2 JPH034017B2 (en) 1991-01-22

Family

ID=14348224

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60103213A Granted JPS61261012A (en) 1985-05-15 1985-05-15 Manufacture of laminated sheet and device thereof

Country Status (1)

Country Link
JP (1) JPS61261012A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2676780A1 (en) * 2012-06-18 2013-12-25 Technische Universität Dresden Layered semi-finished product and method for its manufacture
EP3513958A3 (en) * 2014-06-16 2019-10-23 SABIC Global Technologies B.V. Method of making a laminate and a forming tool
US11008050B2 (en) 2016-12-30 2021-05-18 Sabic Global Technologies B.V. Hybrid structures and methods of making the same
JP2022080156A (en) * 2020-11-17 2022-05-27 プライムプラネットエナジー&ソリューションズ株式会社 Manufacturing method of electrode plate

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JPS5312964A (en) * 1976-07-22 1978-02-06 Mitsubishi Rayon Co Method of formation of composite material and formed product thereof
JPS55146710A (en) * 1979-03-30 1980-11-15 Storey Brothers & Co Method of molding molding structure
JPS5651325A (en) * 1979-10-02 1981-05-08 Mitsubishi Rayon Co Ltd Formation of fiber-reinforced plastic

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Publication number Priority date Publication date Assignee Title
JPS5312964A (en) * 1976-07-22 1978-02-06 Mitsubishi Rayon Co Method of formation of composite material and formed product thereof
JPS55146710A (en) * 1979-03-30 1980-11-15 Storey Brothers & Co Method of molding molding structure
JPS5651325A (en) * 1979-10-02 1981-05-08 Mitsubishi Rayon Co Ltd Formation of fiber-reinforced plastic

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2676780A1 (en) * 2012-06-18 2013-12-25 Technische Universität Dresden Layered semi-finished product and method for its manufacture
WO2013189886A1 (en) * 2012-06-18 2013-12-27 Technische Universität Dresden Layer-shaped semifinished product and method for the production thereof
CN104540654A (en) * 2012-06-18 2015-04-22 德累斯顿工业技术大学 Layer-shaped semifinished product and method for the production thereof
JP2015525156A (en) * 2012-06-18 2015-09-03 ティッセンクルップ スチール ヨーロッパ アーゲーThyssenkrupp Steel Europe Ag Layered semi-finished product and method for its production
US9701094B2 (en) 2012-06-18 2017-07-11 Technische Universität Dresden Layered semi-finished product and method for producing it
EP3513958A3 (en) * 2014-06-16 2019-10-23 SABIC Global Technologies B.V. Method of making a laminate and a forming tool
US11603142B2 (en) 2014-06-16 2023-03-14 Sabic Global Technologies B.V. Structural body of a vehicle having an energy absorbing device and a method of forming the energy absorbing device
US11008050B2 (en) 2016-12-30 2021-05-18 Sabic Global Technologies B.V. Hybrid structures and methods of making the same
JP2022080156A (en) * 2020-11-17 2022-05-27 プライムプラネットエナジー&ソリューションズ株式会社 Manufacturing method of electrode plate

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