JPS61260934A - Device for filtering machining liquid for electric discharge machining - Google Patents

Device for filtering machining liquid for electric discharge machining

Info

Publication number
JPS61260934A
JPS61260934A JP10139985A JP10139985A JPS61260934A JP S61260934 A JPS61260934 A JP S61260934A JP 10139985 A JP10139985 A JP 10139985A JP 10139985 A JP10139985 A JP 10139985A JP S61260934 A JPS61260934 A JP S61260934A
Authority
JP
Japan
Prior art keywords
machining
tank
filter
finishing
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10139985A
Other languages
Japanese (ja)
Inventor
Tetsuhiro Asamoto
朝本 哲博
Shoji Ishihara
石原 紹治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10139985A priority Critical patent/JPS61260934A/en
Publication of JPS61260934A publication Critical patent/JPS61260934A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To increase the life of a filter while obtain a stable electric discharge machining operation by dividing the filtering of said machining liquid into one for rough machining operation and one for finishing operation and using a filter suited for each operation. CONSTITUTION:When a rough machining is carried out, a dirty liquid discharging solenoid valve 38 and a clean liquid feeding solenoid solenoid valve 42 are opened while operating a clean liquid feed pump 41 and a filter pump 45. A paper filter with an open mesh of 10-20 micron is used for a filter 46, to carry out a favorable operation, while also increase the life of the filter. When a finishing is carried out, a dirty liquid discharging solenoid valve 48 and a clean liquid feeding solenoid valve 52 are opened while operating a clean liquid feed pump 51 and a filter pump 55. A paper filter with a highly fine mesh of 3-5 micron is used for a filter 56, obtaining a stable finishing operation. Thus, by using separate filters each suited for rough machining and finishing, a stable operation can be obtained.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、放電加工機用加工液濾過装置に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a machining fluid filtration device for an electric discharge machine.

〔従来の技術〕[Conventional technology]

第6図に図例した従来の加工液濾過装置20を付設させ
てなる放電加工機21の構成は、加工液3を貯留し穴加
工槽4の内底に被加工物1を載置させてその上方にサー
ボヘッド5によってサーボ送りされる電極2を配設して
なる該加工機、前記加工槽の内部と前記加工液濾過装置
の清gWi22および汚液槽26に仕切っである加工液
タンタロの該汚液槽とを汚液抜取管24で連通して汚g
25を抜くとともに、前記清液槽から加工液供給ポンプ
9を介して濾過した清液26を清液送給管27で該加工
槽に供給し、さらに前記汚液槽内汚液をフィルタポンプ
8および加工液フィルタ7を介設しである加工液濾過配
管28によって濾過して清g、26として前記清液槽に
送給する従来濾過装置20からなっているものがある。
The configuration of an electric discharge machine 21 equipped with a conventional machining fluid filtration device 20 illustrated in FIG. The processing machine has an electrode 2 that is servo-fed by a servo head 5 above the processing machine, and a processing liquid tantalum that is a partition between the inside of the processing tank and the clean gWi 22 and dirty liquid tank 26 of the processing liquid filtration device. The sewage tank is communicated with the sewage tank through a sewage extraction pipe 24 to drain the sewage g.
25, the filtered clean liquid 26 is supplied from the clean liquid tank via the processing liquid supply pump 9 to the processing tank through the clean liquid supply pipe 27, and the waste liquid in the dirty liquid tank is further transferred to the filter pump 8. There is also a conventional filtration device 20 which filters the machining fluid through a machining fluid filtration pipe 28 with a machining fluid filter 7 interposed therein and supplies the fluid as fresh liquid 26 to the fresh fluid tank.

その放電加工作業中には、加工′WI4内にカーボン粒
子、被加工物1の微小粒子および電極2の微小粒子が発
生して加工液3を汚染させるので、これを汚液4W23
内に汚液25として排出させるが、該汚液は槽内で重い
粒子が槽底に沈み、浮遊する軽い粒子は液分とともに加
工液フィルタフにフィルタポンプ8によって加圧送給さ
れて濾過され、清液26となつて清液槽22に送給され
てから、加工液供給ポンプ9によって前記加ニーに供給
されて放電加工作業に循環使用される。なお、前記加工
液フィルタには通常濾過精度6〜5ミクロンの紙フィル
タが利用されている。
During the electrical discharge machining operation, carbon particles, microparticles from the workpiece 1 and microparticles from the electrode 2 are generated in the machining process WI4 and contaminate the machining fluid 3.
The heavy particles settle to the bottom of the tank, and the floating light particles are fed under pressure to the processing fluid filter 25 along with the liquid by the filter pump 8 and filtered. The liquid 26 is supplied to the clean liquid tank 22, and then supplied to the machining machine by the machining liquid supply pump 9 and used for circulation in the electric discharge machining operation. Note that a paper filter with a filtration accuracy of 6 to 5 microns is usually used as the processing liquid filter.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかるに、最近、加工速度の増大の目的で加工電源容量
を増して加工電流を大きくすることが、特に鍛造型加工
において行なわれているが、この場合、スラッチ発生量
が大幅に増して前述した従来加工液濾過装置ではフィル
タ寿命が短かくなるとともに、充分な濾過機能を行なえ
なくなるなどの問題が起こっている。そのために、保守
整備作業に手間がかかる上に、経常原価が上昇し、さら
に濾過が充分に行なわれなくなって仕上加工時に電極間
が不安定になるために加工が実施で寝なくなるなどの事
態を招いている。
However, recently, in order to increase the machining speed, the machining power supply capacity has been increased to increase the machining current, especially in forging die machining, but in this case, the amount of scratches generated has increased significantly, and compared to the conventional method described above. Processing fluid filtration devices have problems such as a shortened filter life and an inability to perform a sufficient filtration function. As a result, maintenance work is time-consuming, ordinary costs increase, and filtration is not performed sufficiently, resulting in instability between the electrodes during finishing machining, which causes problems such as the machining process being delayed. I'm inviting you.

この発明は、大加工電流を使用した放電加工時における
スラッチ発生の大幅増量に際しても、フィルタ寿命の短
命化を防止するとともに、仕上加工時にも、安定した加
工を行なえるようにすることにある。
The purpose of this invention is to prevent the filter life from being shortened even when the occurrence of slatch increases significantly during electric discharge machining using a large machining current, and to enable stable machining even during finishing machining.

〔問題点を解決する念めの手段〕[A precautionary measure to resolve the problem]

この発明は、加工液タンクを夫々清液槽および汚g、4
Wからなる仕上加工用槽および荒加工用槽の二加工用槽
に分けるとともに、前者仕上加工用槽の濾過フィルタに
は濾過精度の高いものを、後者荒加工用槽には濾過精度
の低いものを夫々使用し、荒加工時には前記荒加工用槽
による濾過加工液を、仕上加工時には前記仕上加工用槽
による濾過加工液を夫々循環使用させるようにしてなる
ものである。
In this invention, the machining liquid tank is divided into a clean liquid tank and a dirty liquid tank.
The processing tank is divided into two processing tanks: a finishing processing tank and a rough processing tank, and the former finishing processing tank has a filter with high filtration accuracy, and the latter rough processing tank has a filter with low filtration accuracy. During rough machining, the filtered machining liquid from the rough machining tank is used, and during finishing machining, the filtered machining fluid from the finishing machining tank is circulated.

〔作用〕[Effect]

したがって、この発明の構成によれば、荒加工時に循環
使用される濾過精度の低い濾過フィルタによって濾過さ
れた加工液に多少のスラッチを含有していても加工自体
に影響を及ぼすことがなく、多少の汚れが荒加工速度の
増大にむしろ好結果を与え、一方、仕上加工時に循環使
用される濾過精度の高い濾過フィルタで濾過された力6
工液にはほとんどスラッチが含有されていないから、常
、に安定した仕上加工を施工できる。
Therefore, according to the configuration of the present invention, even if the machining fluid filtered by the filter with low filtration accuracy that is used for circulation during rough machining contains some slatch, it will not affect the machining itself, and will not affect the machining itself. On the other hand, the amount of dirt that has been filtered by the high-precision filtration filter that is circulated during finishing machining has a positive effect on increasing the rough machining speed.
Since the working fluid contains almost no slatch, stable finishing can always be carried out.

〔実施例〕〔Example〕

つぎに、この発明の実施例を図面によって説明すれば、
第1図において、加工液3を貯留した加工槽4の内底に
被加工物1を載置させてその上方にサーボヘッド5によ
ってサーボ送りされる電極2を配設しである放電加工機
21にこの発明に係る加工液濾過装置301に付設させ
てなるもので、該濾過装置の加工液タンク31は、仕上
清液槽32および仕上汚液槽33からなる仕上加工用槽
34ならびに荒加工清液槽35および荒加工汚液槽36
からなる荒加工用槽37の二加工用槽に仕切るとともに
、前記荒加工用槽の荒加工汚液槽36と前記放電加工機
の加工槽4とを荒加工汚液排出電磁弁38を介装しであ
る汚液抜取管39で接続させて荒加工汚液401に抜取
シ自在にし、ま九荒加工清液槽65と前記加工槽を荒加
工清液供給ポンプ41および荒加工清液供給電磁弁42
を介設しである荒加工清液供給管46で接続させて荒加
工清液44を供給自在にし、さらに前記荒加工汚液槽お
よび同清液槽とを荒加工フィルタポンプ45および濾過
精度の低い粗らい荒加工濾過フィルタ46を介設しであ
る荒加工液濾過配管47で接続して該荒加工汚液を荒加
工清液44に濾過させて貯留させる。また、前記仕上加
工用槽の仕上汚g槽66と前記放電加工機の加工槽4と
を仕上汚液排出電磁弁48を介装しである汚液抜取管4
9で接続させて仕上汚液50を抜取り自在、にし、また
仕上清液槽32と前記加工槽を仕上清液供給ポンプ51
および仕上清液供給電磁弁52を夫々介設しである仕上
清液供給管53で接続させて仕上清液54を供給自在に
する。さらに、前記仕上汚液槽および同清液槽とを仕上
加工フィルタポンプ55および濾過精度の高い細かい仕
上加工濾過フィルタ56を介設しである仕上加工液濾過
配管57で接続して該仕上汚液を仕上清液54に濾過さ
せて貯留させるようにしてあり、前記荒加工汚液の汚液
抜取管39および前記仕上汚液の汚液抜取管49とを加
工槽4に別途接続させてもよく、該加工槽の前で結合さ
せてから接続させても(第1図に図示)よく、また前記
荒加工消液の清液供給管46および前記仕上清液の清液
供給管53とを該加工槽に別途接続させてもよく、前記
加工槽の前で結合してから接続でぜても(第1図に図示
)よい。
Next, an embodiment of the present invention will be described with reference to the drawings.
In FIG. 1, an electric discharge machine 21 has a workpiece 1 placed on the inner bottom of a machining tank 4 in which a machining fluid 3 is stored, and an electrode 2 servo-fed by a servo head 5 arranged above the workpiece 1. The processing liquid filtration device 301 according to the present invention is attached to the processing liquid filtration device 301, and the processing liquid tank 31 of the filtration device includes a finishing tank 34 consisting of a finishing clear liquid tank 32 and a finishing dirty liquid tank 33, and a rough processing clearing tank 34. Liquid tank 35 and rough processing sewage tank 36
The rough machining tank 37 is divided into two machining tanks, and a rough machining sewage discharge solenoid valve 38 is interposed between the rough machining sewage tank 36 of the rough machining tank and the machining tank 4 of the electric discharge machine. The rough machining fluid tank 65 and the processing tank are connected by a rough machining fluid drain pipe 39 connected to the rough machining fluid drain pipe 39, and the rough machining fluid tank 65 is connected to the rough machining fluid drain pipe 39 and the rough machining fluid supply pump 41 and the rough machining fluid supply electromagnetic fluid. valve 42
The rough machining clean liquid supply pipe 46 is provided to connect the rough machining clean liquid supply pipe 46, so that the rough machining clean liquid 44 can be freely supplied. A low coarse rough machining filter 46 is interposed and connected by a rough machining liquid filtration pipe 47, and the rough machining waste liquid is filtered into a rough machining clear liquid 44 and stored. Further, the finishing sewage tank 66 of the finishing tank and the machining tank 4 of the electrical discharge machine are connected to a sewage extraction pipe 4 which is equipped with a finishing sewage discharge solenoid valve 48.
9 so that the finishing waste liquid 50 can be freely extracted, and the finishing liquid tank 32 and the processing tank are connected to the finishing liquid supply pump 51.
The finishing liquid supply electromagnetic valves 52 are connected to each other by interposed finishing liquid supply pipes 53, so that the finishing liquid 54 can be freely supplied. Further, the finishing sewage tank and the clear liquid tank are connected by a finishing processing liquid filtration pipe 57 which has a finishing processing filter pump 55 and a fine finishing processing filtration filter 56 with high filtration accuracy interposed therein. The finishing liquid 54 is filtered and stored, and the rough processing waste liquid removal pipe 39 and the finishing waste liquid removal pipe 49 may be separately connected to the processing tank 4. , may be connected after being combined in front of the processing tank (as shown in FIG. 1), and the clear liquid supply pipe 46 for the rough processing liquid and the clear liquid supply pipe 53 for the finishing clear liquid may be connected together. They may be connected to the processing tank separately, or they may be connected after being connected in front of the processing tank (as shown in FIG. 1).

したがって、前述したこの実施例において、平均加工電
流が120〜500Aとなるような非常に荒い加工を行
なう場合には、スラップが大量に発生する几めに、荒加
工用槽67内の加工液を循環使用賂せるが、その際には
荒加工汚液排出電磁弁68、清液供給電磁弁42を夫々
開状態にするとともに、荒加工清液供給ポンプ41およ
びフィルタポンプ451に夫々作動させ、濾過フィルタ
46には濾過精度の低い10〜20ミクロン程度の目の
粗らい紙フィルタを使用することによって行なえば、良
好な荒加工作業を施工できる上に、フィルタ寿命が格段
に延命される。なお、この際には、仕上加工用槽34の
使用は行なわないようにすることはいうまでもない。さ
らに、前記荒加工濾過フィルタに代えて遠心分離機等を
利用できる。ついで、加工電流の比較的少ない仕上加工
を行なう場合には、荒加工用槽67の使用を行なわずに
、仕上加工用槽64内の加工液の循環使用によるが、そ
の際には仕上汚液排出電磁弁48.仕上清液供給電磁弁
52、同供給ポンプ51および同フィルタポング55を
夫々開状態および作動状態に機能させ、濾過フィルタ5
6KVi濾過精度の高い6〜5ミクロンの紙フィルタを
使用することによって行なえば、安定し几仕上加工を実
現できる。
Therefore, in this embodiment described above, when performing very rough machining where the average machining current is 120 to 500 A, the machining fluid in the rough machining tank 67 should be used to prevent a large amount of slap from occurring. In this case, the rough machining liquid discharge solenoid valve 68 and the fresh liquid supply solenoid valve 42 are respectively opened, and the rough machining fresh liquid supply pump 41 and filter pump 451 are respectively activated to perform filtration. If a coarse paper filter of about 10 to 20 microns, which has low filtration accuracy, is used for the filter 46, good rough machining work can be performed and the life of the filter can be greatly extended. It goes without saying that at this time, the finishing tank 34 is not used. Furthermore, a centrifugal separator or the like can be used in place of the rough processing filter. Next, when performing finishing machining with a relatively low machining current, the rough machining tank 67 is not used and the machining fluid in the finishing machining tank 64 is circulated. Discharge solenoid valve 48. The finishing fluid supply solenoid valve 52, the supply pump 51, and the filter pump 55 are respectively opened and activated, and the filtration filter 5
By using a 6 to 5 micron paper filter with high 6KVi filtration accuracy, a stable and fine finishing process can be achieved.

ついで、仁の発明の他の実施例を第2図によって説明す
る。前述しt実施例の加工液濾過装置130に代えて、
放電加工機21に加工液濾過装置60を付設させたもの
で、該濾過装置の加工液タンク61を仕上加工用槽62
および荒加工用4W66の二加工用槽に仕切るだけで、
前記各加工用槽と前記加工装置の加工槽4とは夫々仕上
汚液排出電磁弁48および荒加工汚液排出電磁弁68を
介装させた汚液抜取管49および汚液抜取管69で接続
させて各々の仕上汚N50および荒加工汚液40を抜取
シ目在にするとともに、前記汚液の夫々な仕上加工フィ
ルタポンプ55、複数個の仕上加工濾過フィルタ56お
よび仕上清液供給電磁弁52を介装しである仕上清液供
給管56.ならびに荒加工フィルタポンプ45、複数個
の荒加工濾過フィルタ46および荒加工清液供給電磁弁
42を介装しである荒加工清液供給管43の各々によっ
て管内で濾過した仕上清液54および荒加工清液44を
前記加工槽内に供給自在にしてなる。前記夫々の加工時
にその加工系統における加工液の循環使用を行なうこと
は、前述実施例と全く同様であって、その効果において
も変わることがないが、前記夫々の濾過フィルタを複数
個装置して濾過面積を充分に与えているから、長時間加
工によってもフィルタ目詰まりが生じて極間流量および
圧力変動が起こって加工作業が不安定になることがない
Next, another embodiment of Jin's invention will be described with reference to FIG. In place of the processing liquid filtration device 130 of the above-mentioned embodiment t,
A machining fluid filtration device 60 is attached to an electrical discharge machine 21, and a machining fluid tank 61 of the filtration device is connected to a finishing machining tank 62.
Just divide it into two processing tanks: 4W66 for rough processing and 4W66 for rough processing.
Each of the processing tanks and the processing tank 4 of the processing device are connected by a sewage extraction pipe 49 and a sewage extraction pipe 69 in which a finishing sewage discharge solenoid valve 48 and a rough processing sewage discharge solenoid valve 68 are interposed, respectively. The finished dirt N50 and the rough processing waste liquid 40 are drawn out, and each finishing filter pump 55, a plurality of finishing filter filters 56, and a finishing liquid supply solenoid valve 52 are installed. A finishing liquid supply pipe 56 is inserted. The finishing liquid 54 and the roughing liquid filtered in the respective roughing liquid supply pipes 43 are provided with a roughing filter pump 45, a plurality of roughing filters 46, and a roughing liquid supply solenoid valve 42. Processing liquid 44 can be freely supplied into the processing tank. Circulating the machining fluid in the machining system during each of the aforementioned machining operations is exactly the same as in the previous embodiment, and the effect remains unchanged. Since a sufficient filtration area is provided, the filter will not become clogged even during long-term machining, resulting in fluctuations in the flow rate and pressure between the poles and destabilizing the machining operation.

〔発明の効果〕〔Effect of the invention〕

上述したように、この発明は、加工液の濾過を荒加工お
よび仕上加工作業に夫々分別して行ない、しかも前記各
作業に適した濾過フィルタを使用しているので、フィル
タ寿、命が延びるとともに、安定した放電加工作業を容
易に実現できるなど、実益の多大な発明ということがで
きる。
As described above, the present invention separates the filtration of machining fluid into rough machining and finishing machining operations, and uses filtration filters suitable for each of the aforementioned operations, thereby extending the life of the filter, and This invention can be said to have many practical benefits, such as the ability to easily achieve stable electrical discharge machining operations.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、この発明の実施例を示す回路系統の説明図、
第2図は、同じく他の実施例の回路系統の説明図、第3
図は、従来放電加工機用加工液濾過装置例の回路系統の
説明図である。 21・・・放電加工機、30・・・この発明の実施例の
加工液濾過装置、31・・・加工液タンク、32・・・
仕上清液槽、33・・・仕上汚液槽、34・−・仕上加
工用槽、65・・・荒加工清液槽、66・・・荒加工汚
液槽。 37・・・荒加工用槽、46・・・荒加工濾過フィルタ
。 56・・・仕上加工濾過フィルタ、6o・・・この発明
の他の実施例の加工液濾過装置、61・・・加工液タン
ク、62・・・仕上加工用槽、66・・・荒加工用槽。 なお1図中同一符号は同−又は相当部を示すものとする
FIG. 1 is an explanatory diagram of a circuit system showing an embodiment of the present invention;
FIG. 2 is an explanatory diagram of the circuit system of another embodiment, and FIG.
The figure is an explanatory diagram of a circuit system of an example of a conventional machining fluid filtration device for an electric discharge machine. DESCRIPTION OF SYMBOLS 21... Electrical discharge machine, 30... Machining fluid filtration device of the embodiment of this invention, 31... Machining fluid tank, 32...
Finishing liquid tank, 33... Finishing sewage tank, 34... Finishing tank, 65... Rough processing clear liquid tank, 66... Rough processing sewage tank. 37... Rough processing tank, 46... Rough processing filter. 56...Finishing filtration filter, 6o...Machining liquid filtration device of another embodiment of the present invention, 61...Machining liquid tank, 62...Tank for finishing process, 66...For rough machining Tank. Note that the same reference numerals in each figure indicate the same or equivalent parts.

Claims (1)

【特許請求の範囲】[Claims] 加工液タンクを夫々清液槽および汚液槽からなる仕上加
工用槽および荒加工用槽の二加工用槽に分けるとともに
、前者仕上加工用槽の濾過フィルタには濾過精度の高い
ものを、後者荒加工用槽の濾過フィルタには濾過精度の
低いものを夫々使用し、荒加工時には前記荒加工用槽に
よる濾過加工液を、仕上加工時には前記仕上加工用槽に
よる濾過加工液を夫々循環使用させることを特徴とする
放電加工機用加工液濾過装置。
The processing liquid tank is divided into two processing tanks, a finishing processing tank and a rough processing tank, each consisting of a clear liquid tank and a dirty liquid tank, and a filter with high filtration accuracy is used for the former finishing processing tank, and a filter with high filtration accuracy is used for the latter. Filters with low filtration accuracy are used for the filtration filters in the rough machining tank, and the filtration liquid from the rough machining tank is used during rough machining, and the filtration liquid from the finishing tank is used for finishing. A machining fluid filtration device for an electrical discharge machine, characterized by:
JP10139985A 1985-05-15 1985-05-15 Device for filtering machining liquid for electric discharge machining Pending JPS61260934A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10139985A JPS61260934A (en) 1985-05-15 1985-05-15 Device for filtering machining liquid for electric discharge machining

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10139985A JPS61260934A (en) 1985-05-15 1985-05-15 Device for filtering machining liquid for electric discharge machining

Publications (1)

Publication Number Publication Date
JPS61260934A true JPS61260934A (en) 1986-11-19

Family

ID=14299654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10139985A Pending JPS61260934A (en) 1985-05-15 1985-05-15 Device for filtering machining liquid for electric discharge machining

Country Status (1)

Country Link
JP (1) JPS61260934A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6464725A (en) * 1987-08-13 1989-03-10 Charmilles Technologies Processing liquid feeder and processisng liquid supply method
JPH0230423A (en) * 1988-07-15 1990-01-31 Mitsubishi Electric Corp Machining liquid processing equipment for electric discharge machine
US5386094A (en) * 1992-01-10 1995-01-31 Mitsubishi Denki Kabushiki Kaisha Electrical discharge machine with automatic filtering
KR102426127B1 (en) * 2022-03-14 2022-07-27 (주)코마테크놀로지 Regenerative top electrode processing method for etching having a curved surface and variable thickness using electrode for discharge processing
KR102426136B1 (en) * 2022-03-14 2022-07-27 (주)코마테크놀로지 Upper electrode processing method for etching having a curved surface and variable thickness using electrode for discharge processing

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6464725A (en) * 1987-08-13 1989-03-10 Charmilles Technologies Processing liquid feeder and processisng liquid supply method
JPH0230423A (en) * 1988-07-15 1990-01-31 Mitsubishi Electric Corp Machining liquid processing equipment for electric discharge machine
US5386094A (en) * 1992-01-10 1995-01-31 Mitsubishi Denki Kabushiki Kaisha Electrical discharge machine with automatic filtering
KR102426127B1 (en) * 2022-03-14 2022-07-27 (주)코마테크놀로지 Regenerative top electrode processing method for etching having a curved surface and variable thickness using electrode for discharge processing
KR102426136B1 (en) * 2022-03-14 2022-07-27 (주)코마테크놀로지 Upper electrode processing method for etching having a curved surface and variable thickness using electrode for discharge processing

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