JPS61249198A - センサ−装置 - Google Patents
センサ−装置Info
- Publication number
- JPS61249198A JPS61249198A JP60091589A JP9158985A JPS61249198A JP S61249198 A JPS61249198 A JP S61249198A JP 60091589 A JP60091589 A JP 60091589A JP 9158985 A JP9158985 A JP 9158985A JP S61249198 A JPS61249198 A JP S61249198A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- wavelength
- light
- microwave
- infrared
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 9
- 230000035945 sensitivity Effects 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 26
- 238000001514 detection method Methods 0.000 description 18
- 238000005259 measurement Methods 0.000 description 18
- 229910002092 carbon dioxide Inorganic materials 0.000 description 13
- 239000001569 carbon dioxide Substances 0.000 description 13
- 238000002834 transmittance Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000000411 transmission spectrum Methods 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910005543 GaSe Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Geophysics And Detection Of Objects (AREA)
- Burglar Alarm Systems (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60091589A JPS61249198A (ja) | 1985-04-27 | 1985-04-27 | センサ−装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60091589A JPS61249198A (ja) | 1985-04-27 | 1985-04-27 | センサ−装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61249198A true JPS61249198A (ja) | 1986-11-06 |
| JPH0412879B2 JPH0412879B2 (enrdf_load_stackoverflow) | 1992-03-05 |
Family
ID=14030734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60091589A Granted JPS61249198A (ja) | 1985-04-27 | 1985-04-27 | センサ−装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61249198A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008241439A (ja) * | 2007-03-27 | 2008-10-09 | Nec Corp | ボロメータ型ＴＨｚ波検出器 |
| JP2010008093A (ja) * | 2008-06-24 | 2010-01-14 | Toshiba Corp | 赤外線撮像装置および赤外線撮像方法 |
| JP2010008092A (ja) * | 2008-06-24 | 2010-01-14 | Toshiba Corp | 赤外線撮像装置および赤外線撮像方法 |
| JPWO2022044430A1 (enrdf_load_stackoverflow) * | 2020-08-26 | 2022-03-03 |
-
1985
- 1985-04-27 JP JP60091589A patent/JPS61249198A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008241439A (ja) * | 2007-03-27 | 2008-10-09 | Nec Corp | ボロメータ型ＴＨｚ波検出器 |
| JP2010008093A (ja) * | 2008-06-24 | 2010-01-14 | Toshiba Corp | 赤外線撮像装置および赤外線撮像方法 |
| JP2010008092A (ja) * | 2008-06-24 | 2010-01-14 | Toshiba Corp | 赤外線撮像装置および赤外線撮像方法 |
| JPWO2022044430A1 (enrdf_load_stackoverflow) * | 2020-08-26 | 2022-03-03 | ||
| US12276623B2 (en) | 2020-08-26 | 2025-04-15 | Hamamatsu Photonics K.K. | Foreign matter inspection device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0412879B2 (enrdf_load_stackoverflow) | 1992-03-05 |
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