JPS61248338A - Manufacture of gas discharge panel - Google Patents

Abstract

PURPOSE:To acquire a thick and precise cell layer simply, by etching a glass layer with a mask of a resistant film, after forming an etching-resistant layer, a glass layer, and a resistant film of a specific pattern, on a panel. CONSTITUTION:In an insulator layer 12 formed on a panel 11 are formed discharge electrodes 2 and 4 and a protection layer 5 of MgO. On the insulator layer 12, a membrane 13 mixed with borosilicic acid glass powder and a binder, for example, with a high anticorrosion property against nitric acid to be an etching solution, is spread and dried up. on the membrane 13, a membrane 14 mixed with soda-lime glass powder and a binder is spread, dried, and baked up. Furthermore, over the membrane 14, a resistant film pattern 15 is formed. After that, the membrane 14 under the film 15 is etched by etching the panel with the resistant pattern 15 as a mask, by using a solution of nitric acid of 15wt%. Then, the resistant film 15 is removed with a film removing solution, to form a cell layer consisting of the membrane 14 with a specific pattern.

Description

DETAILED DESCRIPTION OF THE INVENTION [Summary] A method for manufacturing a gas discharge panel, in which a cell layer of a gas discharge panel having a cell layer, such as a surface discharge panel, is formed by using glass powder. A method for manufacturing a gas discharge panel, in which a predetermined cell layer shape is obtained by etching after coating a substrate with a material that is mixed into a paste, thereby obtaining a fine and thick cell layer by a simple method.

[Industrial application field]

The present invention relates to an improvement in a method for manufacturing a gas discharge panel, and more particularly, to a method for manufacturing a panel in which a cell layer structure is obtained by a simple method.

A type of gas discharge display panel known as a plasma display panel is a surface discharge type display panel. This display panel has a structure in which a discharge electrode is disposed with a dielectric layer interposed on only one of a pair of substrates that are arranged facing each other with a discharge gas filled space interposed therebetween. Therefore, the requirements for gap accuracy in the discharge gas-filled space are significantly relaxed, and multicolor fluorescence can be achieved by coating an ultraviolet-excited phosphor film on the inner surface of the other cover substrate on which the discharge electrode is not formed. It has the advantage that it can be done easily.

By the way, it has become necessary to precisely provide a thick cell layer on the inner surface of this cover substrate or on the dielectric layer of the glass substrate on which the discharge electrode is formed so that the discharge point can be clearly identified depending on the shape of the discharge electrode. This cell layer can be easily
There is a need for a method for forming such a structure.

[Conventional technology]

FIG. 3 is a cross-sectional view of such a surface discharge type gas discharge panel. On one glass substrate 1, a predetermined pattern of discharge electrodes 2 extending perpendicularly to the plane of the paper is formed, and on top of that is a low melting point glass. A discharge electrode 4 having a predetermined pattern orthogonal to the discharge electrode 2 is formed through a dielectric layer 3 made of the above dielectric material, and a protective layer 5 made of magnesium oxide (MgO) is formed thereon.

In addition, if a color display is required on the inner surface of the other glass substrate 6, a phosphor film 7 excited by ultraviolet rays is coated on the inner surface of the other glass substrate 6, and a spacer 8 made of low melting point glass is provided between the glass substrates 1 and 6. After the discharge space is sealed with a sealing material to have a predetermined discharge space 9, the inside of the discharge space is sealed with f! The gas is exhausted from an exhaust pipe (not shown) provided at f or 6, and a discharge gas such as neon (Ne) gas is sealed inside to form a panel. Then, a discharge voltage is applied between the discharge electrodes 2 and 4 to generate an electric field, the electric field turns the discharge gas into a plasma state, and the plasma causes a predetermined discharge point to emit light.

[Problem that the invention seeks to solve]

By the way, in such a surface discharge type gas discharge panel,
Depending on the shape of the discharge electrode, it becomes necessary to provide a cell layer for defining the discharge area.

When forming a thick cell layer using a conventionally commonly used screen printing method, it is difficult to form a thick cell layer at one time. For example, when forming a cell layer with a thickness of about 100 μm at a pitch of 0.1 mm@0.4 tm, it is necessary to repeat printing and firing 4 to 5 times. For this reason, work such as alignment between cells in each stacked layer is required, which increases the number of steps and makes it difficult to form fine, thick cell layers.

Therefore, instead of this thick film printing method, there is a need for a method for easily forming cell layers.

[Means for solving problems]

The purpose of the present invention is to provide a manufacturing method for easily obtaining a thick fine cell layer. Using 1115 as a mask, the glass layer 14 is etched to form a cell layer in a predetermined shape.

[Effect]

The method for manufacturing a gas discharge panel of the present invention includes applying an etching-resistant layer on a substrate 11 on which a cell layer is to be formed and an insulating layer 12.
A thick cell layer is formed in a simple manner by forming a glass layer 14 and a resist film 15 with a predetermined pattern through the if 13, and etching the glass layer 14 using the resist film 15 as a mask. be.

〔Example〕

Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.

1 and 2 are cross-sectional views showing the steps of the method for manufacturing a gas discharge panel of the present invention. As shown in the figure, the above-mentioned discharge electrode 2
, and 4, and a protective layer 5 of MgO is formed.

On this insulating layer 12, nitric acid (HN) is applied as an etching solution.
After applying a coating 13 made of a mixture of a binder and powder of borosilicate glass, which has high corrosion resistance against O3), it is fired. Further, this layer can also be formed by vapor deposition of Vycor glass, silicon dioxide (SiO2), or the like, or by using the Yuvafta method.

Thereafter, a coating 14 made of a mixture of soda-lime glass powder and a binder is applied onto the coating 13, dried, and then fired.

Furthermore, a resist film pattern 15 is formed on the film 14.

Next, as shown in FIG. 2, the resist film pattern 15 is masked using an aqueous solution of 15 M% nitric acid to etch the substrate, and the film 14 below the resist film 15 is etched. The reason why an aqueous nitric acid solution is used as the etching solution is that if an etching solution such as hydrofluoric acid, which is highly corrosive to glass, is used, there is a risk that even the substrate 11 will be etched.

Thereafter, the resist film 15 is removed using a resist film removal solution to form a cell layer made of H*14 in a predetermined pattern.

In the above embodiments, the cell layer was formed on the substrate side on which the discharge electrodes were formed, but this cell layer may be formed on the cover glass side.

Further, the method of this embodiment is applicable not only to a surface discharge type gas discharge panel but also to other gas discharge panels having a cell layer.

Furthermore, alumina may be used as the etching-resistant coating.

〔Effect of the invention〕

As described above, according to the method of the present invention, a thick cell layer with a predetermined pattern can be formed in a simple manner, so that a gas discharge panel can be formed in a simple manner.

[Brief explanation of drawings]

1 and 2 are cross-sectional views for explaining the steps of the method for manufacturing a gas discharge panel of the present invention, and FIG. 3 is a cross-sectional view of a surface discharge panel. In the figure, 11 is a glass substrate, 12 is an insulating layer, 13 is a coating, 14 is a glass film, and 15 is a resist film.

Claims (1)

[Claims] A coating (13) that is resistant to corrosion by an etching solution is formed on the substrate (11), and a glass coating (13) is formed on the coating (13).
4) A gas discharge panel comprising the step of forming a resist film (15) in a predetermined pattern and then etching the glass coating (14) using the resist film (15) as a mask to form a cell layer. manufacturing method.