JPH0666130B2 - Method for manufacturing gas discharge panel - Google Patents
Method for manufacturing gas discharge panelInfo
- Publication number
- JPH0666130B2 JPH0666130B2 JP60090373A JP9037385A JPH0666130B2 JP H0666130 B2 JPH0666130 B2 JP H0666130B2 JP 60090373 A JP60090373 A JP 60090373A JP 9037385 A JP9037385 A JP 9037385A JP H0666130 B2 JPH0666130 B2 JP H0666130B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- discharge
- cell layer
- gas discharge
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Gas-Filled Discharge Tubes (AREA)
Description
【発明の詳細な説明】 〔概要〕 ガス放電パネルの製造方法であって、ガス放電パネルの
うち、面放電パネルのようにセル層を有するガス放電パ
ネルの前記セル層を形成する際、ガラス粉末をペースト
に混合せる材料を基板に塗布後、エッチングによって所
定のセル層形状を得るようにし、簡単な方法で、精細な
厚いセル層が得られるようにしたガス放電パネルの製造
方法。DETAILED DESCRIPTION OF THE INVENTION [Outline] A method for manufacturing a gas discharge panel, which comprises a glass powder when forming the cell layer of a gas discharge panel having a cell layer such as a surface discharge panel. A method for manufacturing a gas discharge panel, which comprises applying a material that can be mixed with a paste to a substrate and then obtaining a predetermined cell layer shape by etching so that a fine thick cell layer can be obtained by a simple method.
本発明はガス放電パネル製造方法の改良に係り、簡単な
方法でセル層構造を得るようにしたパネルの製造方法に
関する。The present invention relates to an improvement in a gas discharge panel manufacturing method, and more particularly to a panel manufacturing method in which a cell layer structure is obtained by a simple method.
プラズマディスプレイパネルの名称で知られるガス放電
表示パネルの一種に面放電形の表示パネルがある。この
表示パネルは放電ガス封入空間を介して対向配置した一
対の基板の内の一方の基板上にのみ、誘導体層を介して
放電電極を配設した構造をとっている。そのため、放電
ガス封入空間の間隙精度に対する要求が著しく緩和され
る他、放電電極が形成されていない他方のカバー用基板
内面に紫外線励起型の螢光体膜を塗布することで多色螢
光化が容易にできる利点を有している。A type of gas discharge display panel known as a plasma display panel is a surface discharge type display panel. This display panel has a structure in which a discharge electrode is arranged via a dielectric layer only on one of a pair of substrates which are arranged to face each other with a discharge gas filled space therebetween. Therefore, the requirement for the gap accuracy of the discharge gas filled space is remarkably relaxed, and a multi-colored fluorescent film is formed by coating the inner surface of the cover substrate on which the discharge electrode is not formed with an ultraviolet excitation type phosphor film. Has the advantage that it can be easily done.
ところで、このカバー用基板の内面、あるいは放電電極
を形成したガラス基板の誘電体層上には放電電極の形状
によって放電点が判然と識別されるような厚いセル層を
精細に設ける必要が生じ、このセル層を簡単な方法で、
形成する方法が要望されている。By the way, on the inner surface of the cover substrate, or on the dielectric layer of the glass substrate on which the discharge electrode is formed, it is necessary to precisely provide a thick cell layer whose discharge point can be clearly identified by the shape of the discharge electrode. This cell layer can be easily
A method of forming is desired.
第３図はこのような面放電型のガス放電パネルの断面図
で、一方のガラス基板１上には紙面に垂直方向に延びる
所定パターンの放電電極２が形成され、その上には低融
点ガラスよりなる誘電体層３を介して前記放電電極２と
直交する所定パターンの放電電極４が形成され、その上
に酸化マグネシウム（ＭｇＯ）よりなる保護層５が形成
されている。FIG. 3 is a cross-sectional view of such a surface discharge type gas discharge panel, in which a discharge electrode 2 having a predetermined pattern extending in the direction perpendicular to the paper surface is formed on one glass substrate 1, and a low melting point glass is formed thereon. A discharge electrode 4 having a predetermined pattern orthogonal to the discharge electrode 2 is formed via a dielectric layer 3 made of, and a protective layer 5 made of magnesium oxide (MgO) is formed thereon.
また他方のガラス基板６の内面に、カラー表示を必要と
する場合には、紫外線で励起される蛍光体膜７が塗布さ
れ、このガラス基板１と６とは低融点ガラスよりなるス
ペーサ８を用いて所定の放電空間９を有するようにして
封止材にて封止された後、放電空間内を基板１または６
に設けた排気管（図示せず）より排気され、その内部に
ネオン(Ne)ガス等の放電ガスが封入されてパネルが形成
されている。そして放電電極２と４との間に放電電圧を
印加して電界を発生させ、この電界によって放電ガスを
プラズマ状態とし、このプラズマによって所定の放電点
を発光させている。When color display is required on the inner surface of the other glass substrate 6, a phosphor film 7 excited by ultraviolet rays is applied, and the glass substrates 1 and 6 use a spacer 8 made of low melting point glass. After being sealed with a sealing material so as to have a predetermined discharge space 9, the discharge space is filled with the substrate 1 or 6
A panel is formed by exhausting gas from an exhaust pipe (not shown) provided in the interior of the panel and filling discharge gas such as neon (Ne) gas into the interior thereof. Then, a discharge voltage is applied between the discharge electrodes 2 and 4 to generate an electric field, the discharge gas is brought into a plasma state by the electric field, and the plasma discharges a predetermined discharge point.
ところで、このような面放電型のガス放電パネルでは、
放電電極の形状によって放電領域を画定するためのセル
層を設ける必要が生じる。By the way, in such a surface discharge type gas discharge panel,
Depending on the shape of the discharge electrode, it becomes necessary to provide a cell layer for defining the discharge region.
従来一般的に用いられているスクリーン印刷法を用いて
厚膜のセル層を形成する場合、一度に厚いセル層を形成
することが困難である。例えば厚さが100μｍ程度のセ
ル層を0.1mm幅で、0.4mmのピッチで形成する場合、４〜
５回の印刷と焼成を繰り返す必要がある。このため、積
層した各層のセル間の目合わせ等の作業を必要とし、こ
れによって工程数が増加し、精細な厚いセル層の形成が
困難であった。When a thick cell layer is formed by using a screen printing method which is generally used conventionally, it is difficult to form a thick cell layer at once. For example, when forming a cell layer having a thickness of about 100 μm with a width of 0.1 mm and a pitch of 0.4 mm,
It is necessary to repeat printing and firing 5 times. For this reason, it is necessary to perform an operation such as alignment between the cells of the stacked layers, which increases the number of steps and makes it difficult to form a fine thick cell layer.
従ってこの厚膜印刷法に代わって、簡単にセル層を形成
する方法が要望されている。Therefore, there is a demand for a method of easily forming a cell layer instead of the thick film printing method.
本発明は厚い精細セル層を簡単に得るための製造方法の
提供を目的とするもので、基板11上に耐エッチング層1
3、ガラス層14、所定パターンのレジスト膜15を形成
後、該レジスト膜15をマスクとしてガラス層14をエッチ
ングして所定形状のセル層とするものである。An object of the present invention is to provide a manufacturing method for easily obtaining a thick fine cell layer, in which an etching resistant layer 1 is formed on a substrate 11.
3. After forming the glass layer 14 and the resist film 15 having a predetermined pattern, the glass layer 14 is etched using the resist film 15 as a mask to form a cell layer having a predetermined shape.
本発明ではガラス被膜を高精度にパターンに形成された
レジスト膜をマスクとしてエッチングしてセル層を形成
するので、少ない工程数でもって、高精細なセル層が得
られる。In the present invention, since the cell layer is formed by etching the glass film with a highly precise patterned resist film as a mask, a highly precise cell layer can be obtained with a small number of steps.
またガラス被膜の下にはエッチング液に対して耐腐蝕性
の大きい被膜が形成されているので、エチング液によっ
て基板（または基板上の絶縁層）がエッチングされる恐
れがない。Further, since a film having a high corrosion resistance against the etching solution is formed under the glass film, there is no possibility that the substrate (or the insulating layer on the substrate) is etched by the etching solution.
以下、図面を用いて本発明の一実施例につき詳細に説明
する。An embodiment of the present invention will be described in detail below with reference to the drawings.
第１図、および第２図は本発明のガス放電パネルの製造
方法の工程を示す断面図で、図示するように基板11上に
形成されている絶縁体層12には前記した放電電極２、お
よび４とＭｇＯの保護層５が形成されているものとす
る。1 and 2 are cross-sectional views showing the steps of the method for manufacturing a gas discharge panel according to the present invention. As shown in the figure, the insulator layer 12 formed on the substrate 11 has the above-mentioned discharge electrode 2 And 4 and a protective layer 5 of MgO.
この絶縁体層12の上にエッチング液となる硝酸（ＮＨＯ
３）に対して耐腐蝕性の大きい例えば硼珪酸ガラスの粉
末とバインダとを混合した被膜13を塗布後、焼成する。
またこの層はバイコールガラス、或いは二酸化珪素（Ｓ
ｉＯ２）等を蒸着、あるいはスパッタ法を用いて形成す
ることもできる。On this insulator layer 12, nitric acid (NHO, which is an etching solution, is formed.
3 ) A coating 13 in which a powder of borosilicate glass having a high corrosion resistance is mixed with a binder is applied and then baked.
This layer is made of Vycor glass or silicon dioxide (S
iO 2) or the like may evaporation, or be formed by a sputtering method.
その後、この被膜13上にソーダ石灰ガラスの粉末とバイ
ンダとを混合した被膜14を塗布後、乾燥した後、焼成す
る。Then, a coating 14 obtained by mixing soda-lime glass powder and a binder is applied on the coating 13, dried and then fired.
更に被膜14上にレジスト膜パターン15に形成する。Further, a resist film pattern 15 is formed on the coating film 14.
次いで第２図に示すように、15重量％の硝酸の水溶液を
用いてレジスト膜パターン15をマスクとして基板をエッ
チングし、レジスト膜15の下の被膜14をエッチングす
る。このように硝酸の水溶液をエッチング液として用い
るのは、弗化水素酸のようなガラスに対して腐食性の大
きいエッチング液を用いると、基板11までがエッチング
されるおそれがあるためである。Then, as shown in FIG. 2, the substrate is etched using a 15% by weight aqueous solution of nitric acid with the resist film pattern 15 as a mask, and the film 14 under the resist film 15 is etched. The reason why the aqueous solution of nitric acid is used as the etching solution is that even if the etching solution having a high corrosiveness with respect to glass such as hydrofluoric acid is used, even the substrate 11 may be etched.
その後、レジスト膜15をレジスト膜除去液にて除去して
所定パターンの被膜14よりなるセル層を形成する。Then, the resist film 15 is removed with a resist film removing liquid to form a cell layer made of the coating film 14 having a predetermined pattern.
以上の実施例では放電電極を形成した基板側に形成した
が、このセル層はカバーガラス側に形成しても良い。In the above embodiments, the discharge electrodes are formed on the substrate side, but this cell layer may be formed on the cover glass side.
また本実施例の方法は、面放電型のガス放電パネルのみ
ならず、セル層を有する他のガス放電パネルにも適用可
能である。Further, the method of this embodiment can be applied not only to the surface discharge type gas discharge panel but also to another gas discharge panel having a cell layer.
また耐エッチング液の被膜としてはアルミナを用いても
良い。Alumina may be used as the coating of the etching resistant liquid.
以上述べたように本発明の方法によれば、簡単な方法で
所定パターンの厚いセル層が形成できるので、ガス放電
パネルが簡単な方法で形成できる。As described above, according to the method of the present invention, since a thick cell layer having a predetermined pattern can be formed by a simple method, a gas discharge panel can be formed by a simple method.
第１図および第２図は本発明のガス放電パネルの製造方
法の工程を説明するための断面図、 第３図は面放電パネルの断面図である。 図に於いて、 11はガラス基板、12は絶縁層、13は被膜、14はガラス
膜、15はレジスト膜を示す。1 and 2 are sectional views for explaining the steps of the method for manufacturing a gas discharge panel of the present invention, and FIG. 3 is a sectional view of a surface discharge panel. In the figure, 11 is a glass substrate, 12 is an insulating layer, 13 is a coating, 14 is a glass film, and 15 is a resist film.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 南都 利之 神奈川県川崎市中原区上小田中1015番地 富士通株式会社内 (56)参考文献 特開 昭48−79972（ＪＰ，Ａ) 特開 昭55−78440（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Toshiyuki Nanto 1015 Kamiodanaka, Nakahara-ku, Kawasaki City, Kanagawa Prefecture, Fujitsu Limited (56) References JP-A-48-79972 (JP, A) JP-A-55-78440 (JP, A)
Claims (1)
電パネルの製造において、 基板(11)上エッチング液に対して耐腐蝕性の被膜(13)を
形成し、該被膜(13)上にガラス被膜(14)と所定パターン
のレジスト膜(15)をこの順で積層形成し、該レジスト膜
(15)をマスクとして前記ガラス被膜(14)をエッチングし
てセル層を形成する工程を含むことを特徴とするガス放
電パネルの製造方法。1. A method of manufacturing a gas discharge panel comprising a cell layer defining a discharge region, wherein a film (13) which is corrosion resistant to an etching solution is formed on a substrate (11), and the film (13) is formed on the film (13). A glass film (14) and a resist film (15) having a predetermined pattern are laminated in this order on the resist film.
A method of manufacturing a gas discharge panel, comprising the step of etching the glass film (14) using the (15) as a mask to form a cell layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60090373A JPH0666130B2 (en) | 1985-04-25 | 1985-04-25 | Method for manufacturing gas discharge panel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60090373A JPH0666130B2 (en) | 1985-04-25 | 1985-04-25 | Method for manufacturing gas discharge panel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61248338A JPS61248338A (en) | 1986-11-05 |
| JPH0666130B2 true JPH0666130B2 (en) | 1994-08-24 |
Family
ID=13996758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60090373A Expired - Lifetime JPH0666130B2 (en) | 1985-04-25 | 1985-04-25 | Method for manufacturing gas discharge panel |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0666130B2 (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT971736B (en) * | 1971-12-30 | 1974-05-10 | Ibm | PROCEDURE FOR MANUFACTURING A GAS DISPLAY PANEL AND RELATED PRODUCT OBTAINED |
| DE2844512C2 (en) * | 1978-10-12 | 1980-11-20 | Siemens Ag | Control plate for matrix control of individual pixels according to row and column on a screen in flat plasma display devices |
-
1985
- 1985-04-25 JP JP60090373A patent/JPH0666130B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61248338A (en) | 1986-11-05 |
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