JP3057891B2 - Plasma display panel and method of manufacturing the same - Google Patents

Plasma display panel and method of manufacturing the same

Info

Publication number
JP3057891B2
JP3057891B2 JP9906292A JP9906292A JP3057891B2 JP 3057891 B2 JP3057891 B2 JP 3057891B2 JP 9906292 A JP9906292 A JP 9906292A JP 9906292 A JP9906292 A JP 9906292A JP 3057891 B2 JP3057891 B2 JP 3057891B2
Authority
JP
Japan
Prior art keywords
electrode
phosphor
disposed
insulating substrates
display panel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP9906292A
Other languages
Japanese (ja)
Other versions
JPH0644911A (en
Inventor
重義 大槻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP9906292A priority Critical patent/JP3057891B2/en
Publication of JPH0644911A publication Critical patent/JPH0644911A/en
Application granted granted Critical
Publication of JP3057891B2 publication Critical patent/JP3057891B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、カラープラズマディス
プレイパネルに関し、特にその電極構造及び蛍光体膜の
配置構造とその製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a color plasma display panel, and more particularly to an electrode structure, a phosphor film arrangement structure, and a manufacturing method thereof.

【0002】[0002]

【従来の技術】従来、この種のカラープラズマディスプ
レイパネルは、図4に示すように前面基板1にX電極2
0と蛍光体膜21を配設し、バリアリブ22で所定の間
隔を保って対向する後面基板4にY電極24を配設しX
電極20とY電極24間の放電により発生する紫外線に
より蛍光体膜21を励起して発光させ、赤・緑・青各色
を発光する蛍光体を放電セルにより塗り分けて形成する
ことによりマルチカラー表示あるいはフルカラー表示す
る構造になっていた(例えば、実開平2−133855
号公報)。X電極20はITO,Al,Au等を蒸着し
た後フォトリソグラフィ法で形成する方法、あるいはS
b,F等をドープした酸化スズ膜をCVD法で形成する
方法などが採られている。Y電極24,バリアリブ22
は、厚膜スクリーン印刷法にて形成される。
2. Description of the Related Art Conventionally, this type of color plasma display panel has an X electrode 2 on a front substrate 1 as shown in FIG.
0 and a phosphor film 21, and a Y electrode 24 is disposed on a rear substrate 4 facing the rear substrate 4 at a predetermined interval by a barrier rib 22.
The phosphor film 21 is excited by ultraviolet rays generated by the discharge between the electrode 20 and the Y electrode 24 to emit light, and the phosphors emitting red, green, and blue colors are separately applied by discharge cells to form a multicolor display. Alternatively, a full-color display is used (for example, Japanese Utility Model Application Laid-Open No. 2-133855).
No.). The X electrode 20 is formed by depositing ITO, Al, Au, or the like and then forming the X electrode 20 by photolithography.
A method of forming a tin oxide film doped with b, F, or the like by a CVD method is employed. Y electrode 24, barrier rib 22
Is formed by a thick film screen printing method.

【0003】[0003]

【発明が解決しようとする課題】上述した従来のカラー
プラズマディスプレイパネルは、表示用の蛍光体が前面
基板にのみあるため輝度が低く、また放電の方向と垂直
な面に蛍光体膜が形成されているため、蛍光体が放電の
衝撃のために劣化し寿命が短いという欠点があった。
In the above-mentioned conventional color plasma display panel, since the display phosphor is provided only on the front substrate, the luminance is low, and the phosphor film is formed on a surface perpendicular to the discharge direction. Therefore, there is a disadvantage that the phosphor is deteriorated due to the impact of discharge and has a short life.

【0004】[0004]

【課題を解決するための手段】本発明によるプラズマデ
ィスプレイパネルは、ガス放電空間を挟んで対向する一
対の絶縁基板を有し、一方の絶縁基板に互いに平行なバ
リアリブを配設し、バリアリブの側面に維持電極を互い
に対向するように配設し、維持電極と立体交差するよう
に書き込み電極を配設し、一対の絶縁基板の維持電極の
放電セルに対応する位置に蛍光体膜を配設している。
A plasma display panel according to the present invention has a pair of insulating substrates opposed to each other with a gas discharge space therebetween, and barrier ribs parallel to each other are disposed on one of the insulating substrates. The sustain electrodes are disposed so as to face each other, the write electrodes are disposed so as to three-dimensionally intersect with the sustain electrodes, and the phosphor films are disposed at positions of the pair of insulating substrates corresponding to the discharge cells of the sustain electrodes. ing.

【0005】また、本発明のプラズマディスプレイパネ
ルの製造方法は、バリアリブを一方の絶縁基板に形成
し、ポジ型導電性フォトペーストを少なくともバリアリ
ブの側面を含む一方の絶縁基板に塗布してフォトリソグ
ラフィ法でバリアリブの側面に維持電極を形成する工程
と、ネガ型蛍光体フォトペーストを少なくともバリアリ
ブで挟まれた絶縁基板に塗布してフォトリソグラフィ法
で蛍光体膜を形成する工程とを備えている。
In a method of manufacturing a plasma display panel according to the present invention, a barrier rib is formed on one insulating substrate, and a positive-type conductive photo paste is applied to at least one insulating substrate including at least the side surface of the barrier rib. Forming a sustain electrode on the side surface of the barrier rib, and applying a negative phosphor photopaste to at least an insulating substrate sandwiched between the barrier ribs to form a phosphor film by a photolithography method.

【0006】[0006]

【実施例】次に本発明について図面を参照して説明す
る。図1は本発明の第1の実施例の一部切り欠き斜視図
である。書き込み電極2は前面基板1に設けられてい
る。後面基板4上に書き込み電極2と交差するようにバ
リアリブ5が形成され、バリアリブ5の両側面に維持電
極6が形成されている。維持電極6の放電セル7に対応
する前面基板1及び後面基板4には蛍光体膜3及び蛍光
体膜8が形成されている。書き込み電極2は酸化スズ膜
をCVD法により形成する。前面基板1に形成する蛍光
体膜3はフォトリソグラフィ法で形成する。バリアリブ
5は、厚膜印刷法で形成する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings. FIG. 1 is a partially cutaway perspective view of the first embodiment of the present invention. The write electrode 2 is provided on the front substrate 1. Barrier ribs 5 are formed on rear substrate 4 so as to cross write electrodes 2, and sustain electrodes 6 are formed on both side surfaces of barrier ribs 5. Phosphor films 3 and 8 are formed on front substrate 1 and rear substrate 4 corresponding to discharge cells 7 of sustain electrodes 6. The writing electrode 2 is formed of a tin oxide film by a CVD method. The phosphor film 3 formed on the front substrate 1 is formed by a photolithography method. The barrier rib 5 is formed by a thick film printing method.

【0007】維持電極6と蛍光体膜8の製造方法を図面
を参照して説明する。図2(a)〜(g)は本発明のプ
ラズマディスプレイパネルの製造方法の工程を示す断面
図である。図2(a)に示すように、ガラス板から成る
後面基板4にアルミナ,ジルコニア等のセラミックスの
微粒子と低軟化点ガラス微粉末とからなるバリアリブペ
ーストを厚膜スクリーン印刷法で印刷した後焼成し、バ
リアリブ5を形成した。次に図2(b)に示すように、
後面基板4及びバリアリブ5上にポジ型感光性銀ペース
ト6′をスプレー塗布する。次に図2(c)に示すよう
に、ポジ型感光性銀ペースト6′を乾燥させた後、後面
基板4に垂直な平行光9を照射して露光する。しかる
後、現像を行ない焼成し、図2(d)に示すように、バ
リアリブ5の上面及び後面基板4の上面のポジ型感光性
銀ペーストを除去してバリアリブ5の側面に維持電極6
を形成する。次に図2(e)に示すように、ネガ型感光
性バインダーを含む蛍光体スラリー8′をスプレー塗布
する。次に図2(f)に示すように、蛍光体スラリー
8′を乾燥させた後、マスク10を用いて露光する。し
かる後現像し熱処理をして図2(g)に示すようにバリ
アリブ5の間の後面基板4上に蛍光体膜8を形成した基
板を得る。
A method for manufacturing the sustain electrode 6 and the phosphor film 8 will be described with reference to the drawings. 2A to 2G are cross-sectional views illustrating steps of a method for manufacturing a plasma display panel according to the present invention. As shown in FIG. 2A, a rear rib 4 made of fine particles of ceramics such as alumina or zirconia and a glass powder having a low softening point is printed on a rear substrate 4 made of a glass plate by a thick film screen printing method and then fired. Thus, barrier ribs 5 were formed. Next, as shown in FIG.
A positive photosensitive silver paste 6 'is spray-coated on the rear substrate 4 and the barrier ribs 5. Next, as shown in FIG. 2 (c), after drying the positive photosensitive silver paste 6 ', the rear substrate 4 is exposed to parallel light 9 perpendicular thereto. Thereafter, development is performed and sintering is performed. As shown in FIG. 2D, the positive photosensitive silver paste on the upper surface of the barrier rib 5 and the upper surface of the rear substrate 4 is removed, and the sustain electrode 6 is provided on the side surface of the barrier rib 5.
To form Next, as shown in FIG. 2E, a phosphor slurry 8 'containing a negative photosensitive binder is applied by spraying. Next, as shown in FIG. 2F, the phosphor slurry 8 ′ is dried and then exposed using a mask 10. Thereafter, development and heat treatment are performed to obtain a substrate having the phosphor film 8 formed on the rear substrate 4 between the barrier ribs 5 as shown in FIG.

【0008】一方、前面基板1にCVD法によりSbを
ドープした酸化スズから成る書き込み電極2を形成し、
書き込み電極の近傍にフォトリソグラフィ法で所定のパ
ターンにパターニングした蛍光体膜3を形成する。上記
前面基板1と図2(g)に示される後面基板4とを蛍光
体膜3,8が内側となるように対向して組み合わせ、周
囲を気密封止した後、内部に放電可能な希ガス、例えば
He−XeガスあるいはNe−Xeを封入してプラズマ
ディスプレイパネルができあがる。
On the other hand, a write electrode 2 made of tin oxide doped with Sb is formed on a front substrate 1 by a CVD method.
A phosphor film 3 patterned into a predetermined pattern by a photolithography method is formed near the write electrode. The front substrate 1 and the rear substrate 4 shown in FIG. 2 (g) are opposed to each other so that the phosphor films 3 and 8 are inside, and the surroundings are hermetically sealed, and then a rare gas that can be discharged inside. For example, a plasma display panel is completed by enclosing, for example, He-Xe gas or Ne-Xe.

【0009】さて上述のようにして製作したプラズマデ
ィスプレイパネルの2本の維持電極6間に互いに位相が
逆転した両維持電極間の放電開始電圧よりやや低い矩形
状の電圧VS を印加する。この状態では放電は生じない
が、書き込み電極2に維持電極6の一方の電極に印加し
てある電圧と位相の反転した矩形状の電圧VW を書き込
み電極2と維持電極6との電位差が放電開始電圧より高
くなるように印加すると、書き込み電極2と維持電極6
との交差部で放電が生ずる。するとこの放電をトリガー
として2本の維持電極6間で放電が生ずる。この時、V
S を維持電極6間の放電維持電圧より高い電圧に設定し
ておくとVW がゼロになってからも放電が維持されセル
は選択状態となる。選択されたセルでは放電による紫外
線が発生し前面基板1上の蛍光体膜3と後面基板4上の
蛍光体膜8が紫外線で励起され発光する。
[0009] Now apply a slightly lower rectangular voltage V S from the discharge start voltage between both sustain electrodes whose phases are reversed to each other between the two sustain electrodes 6 of PDP fabricated in the manner described above. Although no discharge in this state, the potential difference between one and applied to the electrodes write a rectangular voltage V W obtained by inverting the voltage and phase are electrodes 2 and sustain electrodes 6 of the sustain electrode 6 to the write electrode 2 is discharged When applied so as to be higher than the starting voltage, the write electrode 2 and the sustain electrode 6
Discharge occurs at the intersection with. Then, a discharge is generated between the two sustain electrodes 6 using the discharge as a trigger. At this time, V
If S is set to a voltage higher than the sustaining voltage between the sustaining electrodes 6, the discharge is maintained even after VW becomes zero, and the cell is in the selected state. In the selected cell, ultraviolet light is generated by the discharge, and the phosphor film 3 on the front substrate 1 and the phosphor film 8 on the rear substrate 4 are excited by the ultraviolet light to emit light.

【0010】本実施例の各部寸法は、書き込み電極2の
電極幅0.1mm,維持電極6の電極幅0.1mm,バ
リアリブ5の高さ0.15mm,幅0.1mm,間隔ピ
ッチ0.2mmとした。なお、これら数値に限定される
ものではない。
The dimensions of each part in this embodiment are as follows: the electrode width of the write electrode 2 is 0.1 mm, the electrode width of the sustain electrode 6 is 0.1 mm, the height of the barrier rib 5 is 0.15 mm, the width is 0.1 mm, and the pitch is 0.2 mm. And In addition, it is not limited to these numerical values.

【0011】図3は本発明の第2の実施例の一部切り欠
き斜視図である。第2の実施例は、第1の実施例と異な
りAC放電型である。書き込み電極2は厚膜スクリーン
印刷法により硼珪酸系鉛ガラスからなる透明な誘電体膜
11で被覆する。後面基板4の維持電極6は第1の実施
例と同様にポジ型感光性銀ペーストをスプレー塗布し、
後面基板4に垂直な平行光を照射して露光し、現像と焼
成を行なってバリアリブ5の側面に形成する。しかる
後、厚膜スクリーン印刷法又はスプレー法で硼珪酸系鉛
ガラスペーストを塗布して焼成し、維持電極6を誘電体
膜12で被覆する。以下、第1の実施例と同様の方法に
より蛍光体膜8を対向する維持電極の放電セルに対応す
る後面基板4の上に誘電体膜12を介して形成する。第
2の実施例では電極が誘電体膜に被覆されているため放
電による電極劣化が起きない、及び壁電荷を利用した安
定したメモリー駆動ができるという利点がある。
FIG. 3 is a partially cutaway perspective view of a second embodiment of the present invention. The second embodiment is of an AC discharge type unlike the first embodiment. The write electrode 2 is covered with a transparent dielectric film 11 made of borosilicate lead glass by a thick film screen printing method. The sustain electrode 6 of the rear substrate 4 is spray-coated with a positive photosensitive silver paste as in the first embodiment,
The rear substrate 4 is exposed by irradiating with parallel light perpendicular thereto, and is developed and fired to form on the side surface of the barrier rib 5. Thereafter, a borosilicate lead glass paste is applied by a thick film screen printing method or a spraying method and baked, and the sustain electrode 6 is covered with the dielectric film 12. Thereafter, the phosphor film 8 is formed on the rear substrate 4 corresponding to the discharge cell of the opposed sustain electrode via the dielectric film 12 in the same manner as in the first embodiment. The second embodiment has the advantages that the electrodes are covered with the dielectric film, so that the electrodes do not deteriorate due to the discharge, and that a stable memory drive utilizing wall charges can be performed.

【0012】[0012]

【発明の効果】以上説明したように本発明は、維持電極
をバリアリブの側面に配設したので前面基板及び後面基
板に配設した蛍光体膜に体して放電が平行な方向に生
じ、蛍光体が放電の衝撃を受けないので劣化せず長寿命
なパネルを提供できる。また、前面及び後面両基板に蛍
光体を配設できるため、反射型と透過型の両方の蛍光を
同時に使い高輝度表示ができる。
As described above, according to the present invention, since the sustain electrodes are disposed on the side surfaces of the barrier ribs, discharge occurs in parallel directions with the phosphor films disposed on the front substrate and the rear substrate. Since the body is not subjected to the impact of electric discharge, it is possible to provide a panel which does not deteriorate and has a long life. In addition, since the phosphor can be provided on both the front and rear substrates, high-luminance display can be performed by simultaneously using both the reflection type and the transmission type fluorescent light.

【0013】更に本発明の製造方法は、バリアリブの側
面のポジ型導電性フォトペーストは、基板に垂直な平行
光に感光しないため特別なマスクを用いずにバリアリブ
の側面に電極を形成できるという利点がある。又、バリ
アリブで挟まれた基板上にはネガ型蛍光体フォトペース
トとマスクを使い蛍光体膜を形成できるという効果を有
する。
Further, the manufacturing method of the present invention has an advantage that the positive type conductive photo paste on the side surface of the barrier rib is not exposed to parallel light perpendicular to the substrate, so that an electrode can be formed on the side surface of the barrier rib without using a special mask. There is. Further, there is an effect that a phosphor film can be formed on the substrate sandwiched between the barrier ribs by using a negative phosphor photo paste and a mask.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1の実施例の一部切り欠き断面図で
ある。
FIG. 1 is a partially cutaway sectional view of a first embodiment of the present invention.

【図2】(a)〜(g)は本発明の製造工程を示す図で
ある。
FIGS. 2 (a) to 2 (g) are views showing a manufacturing process of the present invention.

【図3】本発明の第2の実施例の一部切り欠き断面図で
ある。
FIG. 3 is a partially cutaway sectional view of a second embodiment of the present invention.

【図4】従来のプラズマディスプレイパネルの断面図で
ある。
FIG. 4 is a cross-sectional view of a conventional plasma display panel.

【符号の説明】[Explanation of symbols]

1 前面基板 2 書き込み電極 3,8,21 蛍光体膜 4 後面基板 5,22 バリアリブ 6 維持電極 6′ ポジ型感光性銀ペースト 7 放電セル 8′ 蛍光体スラリー 9 平行光 10 マスク 11,12 誘電体膜 20 X電極 24 Y電極 Reference Signs List 1 front substrate 2 writing electrode 3, 8, 21 phosphor film 4 rear substrate 5, 22 barrier rib 6 sustaining electrode 6 'positive photosensitive silver paste 7 discharge cell 8' phosphor slurry 9 parallel light 10 mask 11, 12 dielectric Film 20 X electrode 24 Y electrode

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) H01J 17/49 H01J 9/02 H01J 9/227 ──────────────────────────────────────────────────続 き Continued on the front page (58) Fields surveyed (Int.Cl. 7 , DB name) H01J 17/49 H01J 9/02 H01J 9/227

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 ガス放電空間を挟んで対向する一対の絶
縁基板を有し、一方の絶縁基板に互いに平行なバリアリ
ブを配設し、前記バリアリブの側面に維持電極を互いに
対向するように配設し、前記維持電極と立体交差するよ
うに書き込み電極を配設し、前記一対の絶縁基板の前記
維持電極の放電セルに対応する位置に蛍光体膜を配設し
たことを特徴とするプラズマディスプレイパネル。
1. A semiconductor device comprising: a pair of insulating substrates facing each other across a gas discharge space; barrier ribs parallel to each other disposed on one of the insulating substrates; and sustain electrodes disposed on side surfaces of the barrier ribs so as to face each other. A plasma display panel, wherein a write electrode is disposed so as to three-dimensionally intersect with the sustain electrode, and a phosphor film is disposed on the pair of insulating substrates at positions corresponding to the discharge cells of the sustain electrode. .
【請求項2】 前記バリアリブを一方の絶縁基板に形成
し、ポジ型導電性フォトペーストを少なくとも前記バリ
アリブの側面を含む前記一方の絶縁基板に塗布してフォ
トリソグラフィ法で前記バリアリブの側面に維持電極を
形成する工程と、ネガ型蛍光体フォトペーストを少なく
とも前記バリアリブで挟まれた前記絶縁基板に塗布して
フォトリソグラフィ法で蛍光体膜を形成する工程とを有
するプラズマディスプレイパネルの製造方法。
2. The barrier rib is formed on one of the insulating substrates, a positive conductive photo paste is applied to the one of the insulating substrates including at least the side surface of the barrier rib, and a sustain electrode is formed on the side surface of the barrier rib by photolithography. And a step of applying a negative phosphor photopaste to at least the insulating substrate sandwiched between the barrier ribs to form a phosphor film by a photolithography method.
JP9906292A 1992-04-20 1992-04-20 Plasma display panel and method of manufacturing the same Expired - Fee Related JP3057891B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9906292A JP3057891B2 (en) 1992-04-20 1992-04-20 Plasma display panel and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9906292A JP3057891B2 (en) 1992-04-20 1992-04-20 Plasma display panel and method of manufacturing the same

Publications (2)

Publication Number Publication Date
JPH0644911A JPH0644911A (en) 1994-02-18
JP3057891B2 true JP3057891B2 (en) 2000-07-04

Family

ID=14237264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9906292A Expired - Fee Related JP3057891B2 (en) 1992-04-20 1992-04-20 Plasma display panel and method of manufacturing the same

Country Status (1)

Country Link
JP (1) JP3057891B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2786607B1 (en) * 1998-11-30 2001-01-05 Thomson Plasma IMPROVEMENT IN COPLANAR TYPE PLASMA PANELS
KR20010002338A (en) * 1999-06-14 2001-01-15 구자홍 Plasma Display Panel Drived with Radio Frequency Signal

Also Published As

Publication number Publication date
JPH0644911A (en) 1994-02-18

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