JPS61240547A - Method for recording and reading electron-microscopic image - Google Patents

Abstract

PURPOSE:To facilitate handling of a device for recording and reading electron- microscopic images by providing an excitation means for emitting light produced from the energy accumulated in a secondary sensor with a deflecting element which can be moved to a position free from disturbing the irradiation of electron rays. CONSTITUTION:After a magnified scattered image of a sample 8 is recorded on an accumulation phosphor sheet 11 used as the secondary sensor, light produced from the accumulated energy is emitted from the sheet 11 to produce an image, thereby recording and reading an electron-microscopic image. After a magnified scattered image 8b is accumulated in the sheet 11, light from a light source 12 is scanned over the sheet 11 after a mirror 13d is moved to over the center of the sheet 11 and the light emitted from the sheet 11 is received by a photomultiplier 15 to produce an image 23. Next, after light from an erasing light source 16 is used to irase the afterimage, the mirror 13d is moved to a position free from disturbing the irradiation of electron rays in order to prepare for the next reading. Accordingly, it is possible to accurately read the electron-microscopic image by producing a homogeneous scanning beam.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of the Invention) The present invention relates to a recording/reading device for electron microscope images, and in particular to a device for recording and reading electron microscope images with high sensitivity and for processing various types of images using electrical signals. The present invention relates to an apparatus for recording and reading electron microscope images.

(Technical Blue Application of the Invention and Prior Art) Conventionally, an electron microscope has been known that obtains an enlarged image of sample F3+ by refracting an electron beam transmitted through Sample 1!31 by an electric field or a magnetic field. As is well known, in this electron microscope, a diffraction pattern of the sample is formed on the rear heating plane of the objective lens by an electron beam transmitted through the sample, and the diffraction rays interfere again to form an enlarged image of the sample. It has become. Therefore, if the enlarged image is projected by the projection lens, an enlarged FA (scattered image) of the sample will be observed, and if the thermal plane is projected and shifted, the enlarged diffraction pattern of the sample will be observed. Note that if an intermediate lens is placed between the objective lens and the projection lens, the focal point 1 of this intermediate lens
By the IIII adjustment, the above-mentioned magnified image (scattered image) or diffraction pattern is optionally enlarged by 1q.

Above) In order to observe the enlarged image or diffraction pattern (hereinafter collectively referred to as a transmitted electron beam image) formed as shown in E, a photographic film was generally placed on the imaging surface of the projection lens. to expose the transmitted electron beam image, or to amplify the transmitted electron beam image by arranging an image intensifier.
Q was trying to cover up. However, photographic film has the disadvantage that it has low sensitivity to electron beams and requires troublesome image processing.On the other hand, when using an image intensifier, the sharpness of the image is low and the image is distorted. The problem is that it is easy.

Furthermore, for the above-mentioned transmission electron beam images, gradation processing, frequency emphasis processing, density processing,
Image processing such as subtraction processing and addition processing, reconstruction of three-dimensional images using Fourier analysis, image analysis for image binarization and particle size measurement, and processing of diffraction patterns (
Analysis of crystal information, elucidation of lattice constants, dislocations, lattice defects, etc.)
In such cases, conventionally, a microscopic image obtained by developing a photographic film is read with a microphotometer and converted into an electrical signal, and this electrical signal is transmitted to, for example, an A/D. The complicated work involved converting and then processing on a computer.

(Object of the Invention) The present invention has been made in view of the above circumstances, and provides a method for carrying electron microscope images so that they can be recorded with high sensitivity and high image quality, and furthermore, various processing can be facilitated. The object of the present invention is to provide an electron microscope image recording/reading device that can directly obtain electrical signals.

(Structure of the Invention) The electron microscope image recording and reading device of the present invention includes a two-dimensional sensor that is fixed to the imaging surface of the electron microscope and stores the energy of an electron beam that has passed through a sample, and a two-dimensional sensor that is an excitation means for scanning with a heat ray and emitting the electron beam energy accumulated in the sensor as light; a photodetector for photoelectrically detecting the emitted light from the two-dimensional sensor; and a photodetector for photoelectrically detecting the emitted light from the two-dimensional sensor; and an erasing means for irradiating or heating the two-dimensional sensor with light to release energy remaining in the sensor, and the excitation means is opposed to the substantially medium heat of the two-dimensional sensor. It has a deflection element that is movable from a use position, that is, a position where the light beam or heat ray is reflected toward the sensor, and a retracted position that does not interfere with electron beam irradiation to the two-dimensional sensor when the scanning is not performed. It is characterized by the presence of

The two-dimensional sensor described above temporarily accumulates at least a portion of the energy when exposed to an electron beam, and when external stimulation is applied later, at least a portion of the accumulated energy is transferred to light, electricity, etc. It is made of a material r1 that has the ability to emit in a detectable form such as sound.

Specifically, as the above-mentioned two-dimensional sensor, for example, JP-A-55
-12429, 55-116340, 55-1
No. 63472, No. 56-11395, No. 56-104
The stimulable phosphor sheet disclosed in Japanese Patent No. 645 and the like can be particularly preferably used.

In other words, when a certain type of phosphor is irradiated with radiation such as an electron beam, part of the energy of this radiation is accumulated in the phosphor, and then when the phosphor is irradiated with excitation light such as visible light, The phosphor emits fluorescence (stimulated luminescence) depending on the accumulated energy. A phosphor exhibiting such properties is called a stimulable phosphor, and the stimulable phosphor sheet 1~ refers to a sheet-like recording medium made of the above-mentioned stimulable phosphor, and is generally attached to a support. and a phosphor layer with a VI layer formed on the support. The stimulable phosphor layer is formed by dispersing the stimulable phosphor in a suitable binder, and if the stimulable phosphor layer is self-supporting, it will itself contain the stimulable phosphor. It can be used as a light sheet. Incidentally, an example of the stimulable phosphor for forming this stimulable phosphor sheet is disclosed in the above-mentioned Japanese Patent Application No. 1983-
It is described in detail in the specification of No. 214680.

In addition, as the above-mentioned two-dimensional sensor, for example,
47719, 55-47720, etc. can also be used. The thermal phosphor sheet 1 is a sheet-like recording body made of a phosphor (thermal phosphor) that emits accumulated radiation energy as thermal fluorescence mainly through the action of heat.

Examples of the excitation means include an excitation light source such as a He-Ne laser or a semiconductor laser, a heat ray source such as a GO2 laser, a galvanometer mirror, a polygon mirror (rotating polygon mirror), a 4:1 hologram, and an acousto-optic optical device (AOD). An X-Y bidirectional deflection means is used, which is a combination of a deflector (deflector), etc.

Further, the movable deflection means-C is
- Of the Y-direction deflection means, it may be the X-direction deflection means, the Y-direction deflection means, or both, and the light beam radiated from these X-Y direction deflection means. It may also be a deflection means such as a reflector that deflects and guides the light to the two-dimensional sensor.

(Function) If an electron microscope image created by a transmitted electron beam is stored and recorded on a two-dimensional sensor placed on the imaging plane of an electron microscope, these two
Fluorescence is generated by scanning the dimensional sensor in both the X and Y directions with excitation light such as visible light or heat rays. This fluorescent light is brought into close contact with the two-dimensional sensor via an optical noiler that cuts out light or infrared rays at the excitation light wavelength, and an optical shutter that opens during reading, on the side opposite to the scanning side of the two-dimensional sensor. Alternatively, an electric signal corresponding to the transmitted electron beam image can be obtained by photoelectrically reading by a photodetecting means such as a photomultiplier or COD installed nearby. It is preferable to hold it against the body.If the electrical image signal obtained in this way is used, C
The electron microscope image can be displayed on a display such as RT, or it can be permanently recorded as a hard copy, or the image signal can be stored on a -H magnetic tape, magnetic disk, optical disk, magneto-optical disk, etc. It can also be stored in a medium.

In the electron microscope image recording/reading device of the present invention, since electron microscope images are accumulated and recorded on a two-dimensional sensor such as a stimulable phosphor sheet, it is possible to record electron microscope images with high sensitivity. , Therefore, the electron beam exposure ω of the electron microscope can be reduced, and the loss 1u of the sample can be reduced. Furthermore, according to the device of the present invention, since an electron microscope image is directly read as an electric signal, it is extremely easy to perform image processing such as gradation processing and frequency emphasis processing on the electron microscope image. Pattern processing, 3
Image analysis such as dimensional image reconstruction and image binarization can also be performed much more easily and quickly than before by inputting the above-mentioned electrical signals to a computer.

The light beam or heat ray is irradiated onto the two-dimensional sensor by the aforementioned deflection element from a position opposite to and covering the middle heat of the two-dimensional sensor, so that the optical path from the excitation light source such as the laser to the two-dimensional sensor is The length does not differ significantly between the sensor center and the ends. Therefore, the scanning spot diameter of the light beam or heat ray does not differ greatly between the central part and the end part of the sensor, and the scanning beam spot diameter can be made sufficiently uniform with a normal two-dimensional fθ lens.
It becomes possible to read the electron microscope image stored and recorded in the sensor with great accuracy. As the deflection element, a mirror that reflects a light beam or heat ray deflected in the X-Y direction as described above can be used, or the deflection means in the X or Y direction such as the galvanometer mirror described above can be used as is. It may also be used as this deflection element.

(Embodiments) Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 schematically shows an electron microscope image recording and reading apparatus according to a first embodiment of the present invention. The mirror body 1a of the electron microscope 1 includes an electron gun 3 that emits an electron beam 2 at a uniform velocity, and at least one focusing lens 4 consisting of a magnetic lens, an electrostatic lens, etc. that focuses the electron beam 2 onto the sample surface. and sample stage 5
, an objective lens 6 similar to the focusing lens 4, and a projection lens 7. The electron beam 2 transmitted through the sample 8 placed on the test stand 5 is refracted by the objective lens 6 to form an enlarged scattered image 8a of the sample 8.

This enlarged scattered image 8a is projected onto the imaging plane 9 by the projection lens 7 (8b in the figure).

An electron microscope image recording/reading device 10 according to the present invention is arranged below the mirror body 1a. This electron microscope image recording/reading device 10 includes a two-dimensional sensor (hereinafter referred to as a stimulable phosphor sheet 11) made of a stimulable phosphor fixed to the image forming surface 9 in a mirror body 1a, and an excitation Excitation means consisting of a light source 12 and a light scanning system 13, and a photomultiplier 15 arranged to face the stimulable phosphor sheet 11 through a light-transmitting window 14 provided on the peripheral wall of the mirror body 1a. and,
It has an erasing light source 16.

The above-mentioned stimulable phosphor sheets 1 to 11 are formed by layering the stimulable phosphor as described above on a transparent support. The excitation light source 12 includes, for example, an l-1e-Ne laser, a semiconductor laser, a focusing lens, etc., and the optical scanning system 13 includes first and second optical deflectors 13a, 13b, and a mirror 13.
It consists of d. First and second optical deflectors 13a, 13
As b, a known optical deflector such as a galvanometer mirror, a polygon mirror, a hologram scanner, or an AOD can be used.

The mirror 13d is movable in the left and right directions along the guide bar 25, and can be moved either manually or by a drive means (not shown) between a use position shown by a solid line in FIG. 1 and a retracted position shown by a broken line. It is arranged selectively. The use position is a position where the mirror 13d faces the center of the stimulable phosphor sheet 11, and the retracted position is
This is a position that does not interfere with electron beam irradiation to the stimulable phosphor sheet 11.

The excitation light beam 12a emitted from the excitation light source 12 is the first
The light-transmitting window 21 is deflected by the second light deflector 13a, and is deflected by the second light deflector 13b in a direction perpendicular to the direction of the above-mentioned deflection (in the six directions of arrows in the figure), and in which, for example, lead glass or the like is fitted. If the mirror 13d is set at the front -12 position, the light is reflected on the mirror 13d and onto the stimulable phosphor sheet 11. incident. In this manner, the stimulable phosphor sheet is scanned by the light beam in both the X and Y directions.

Although not shown, the excitation light beam 12a emitted from the excitation light source 12 passes through a filter that cuts the wavelength region of stimulated luminescence light, and after adjusting the beam diameter with a beam expander, it is passed through optical deflectors 13a and 13b. It is preferable that the beam be deflected by a stimulable phosphor sheet, then passed through an fθ lens 13C to form a beam with a uniform diameter, and then be incident on a stimulable phosphor sheet. The erasing light source 16 generates light within the excitation wavelength range of the stimulable phosphor sheet 11.

and a position where the excitation light beam 12a enters the optical path between the second optical deflector 13b and the mirror 13d;
A mirror 17 is provided that can be moved away from the optical path. Erasing light 16a emitted by the erasing light source 16 is collected by a lens 18, and if the mirror 17 is set in a position where it enters the optical path of the excitation light beam 12a, it is reflected by the mirror 17 and the mirror 13d, and is accumulated. The entire surface of the phosphor sheet 11 is irradiated. Also, between the objective lens 7 and the stimulable phosphor sheet 11, the mirror body 1
A is provided with a shutter 19 capable of blocking the electron beam 2, and a light shutter 24 is provided between the stimulable phosphor sheet 11 and the photomultiple 15. A glass 20 equipped with an optical filter that transmits only stimulated luminescence light (described in detail later) emitted by the stimulable phosphor sheet 11 and removes the excitation light beam 12a is fitted into the light-transmitting window 14. has been done. Furthermore, the interior of the mirror body 1a is similar to that in a normal electron microscope, and the stimulable phosphor sheet 11 is
During operation of the electron microscope, the area including the area where the electron microscope is placed is maintained in a vacuum state by known means such as a vacuum pump.

Next, recording and reading of electron microscope images by the electron microscope image recording and reading apparatus 10 having the above configuration will be explained in detail. When the shutter 19 mentioned above is opened (the state shown in FIG.
The energy of the electron beam 2 carrying the enlarged scattered image 8b is accumulated. At this time, the mirror 13C is set at the above-mentioned retracted position and does not interfere with the irradiation of the electron beam 2 onto the stimulable phosphor sheet 1-11. Also, during this electron beam exposure,
Preferably, the optical shutter 24 is closed. Next, the shutter 19 is closed and the light shutter 24 is opened, and at the same time, the mirror 13 is set to the above-mentioned use position, and then the excitation light beam 12a deflected in both the X and Y directions is incident on the sheet 11 as described above. I am forced to do it. The stimulable phosphor sheets 1 to 11 are two-dimensionally scanned by the excitation light beam 12a deflected in this way, and the sheet 11 emits stimulated luminescence light with an intensity corresponding to the level of the electron beam energy. . This stimulated luminescence light is
from the back side of the photo frame 1 to 15 through a glass 20 equipped with an optical filter that removes the excitation light beam 12a.
The amount of stimulated luminescence is read out photoelectrically.

The electric signal obtained by reading the stimulated luminescence light by the photomultiplier 15 is transmitted to the image processing circuit 22, subjected to necessary image processing, and then sent to the image reproduction device 23.

This image reproducing device 23 may be a display such as a CRT, or a recording device that performs optical scanning recording on a photosensitive film. By outputting an image using an electric signal corresponding to the amount of stimulated luminescence light in this manner, the enlarged scattered image 8b carried by the stimulated luminescence light is reproduced.

Here, the excitation light beam 12a is applied to the stimulable phosphor sheet 11.
The irradiation is performed via the mirror 13d placed at the use position facing the center of the sheet 11 as described above, so that the optical path length from the excitation light source 12 to the stimulable phosphor sheet 11 is There is no large difference between the center part and the end part of 11.

Therefore, it is possible to obtain a sufficiently uniform scanning beam spot diameter using an ordinary two-dimensional fθ lens, and the image information stored and recorded on the stimulable phosphor sheet 11 can be read extremely accurately, causing distortion. Correct enlarged scattering image without
b will now be played.

Note that in this embodiment, the optical filter, the optical shear 16 = the tube 24, and the frames A1 to F15 are arranged in this order outside the vacuum system in close proximity to the side opposite to the scanning side of the two-dimensional sensor. However, it may be placed in a vacuum system in close contact with the two-dimensional sensor.

After the above-mentioned image reading is completed, the optical shutter 2 installed between the photomultiplier 15 and the optical filter glass 20
4 is closed, the mirror 17 is placed in the optical path of the excitation light beam 12a, and the erase light source 16 is turned on. As a result, the surface of the sheet i-11 is irradiated with erasing light 16a emitted from the erasing light source 16. Even when the stimulable phosphor sheet 11 is irradiated with the excitation light beam 12a as described above, not all of the electron beam energy stored in the sheet 11 is released, and a residue may remain. However, here, as mentioned above,
If the erasing light 16a is irradiated onto 1, the afterimage will be erased,
The phosphor sheets 1 to 11 with storage can be reused. In addition, by this erasing light irradiation, a noise component due to a radioactive element such as 228 Ra contained as an impurity in the phosphor of the sheet 11 is also emitted. As the erasing light source 16,
For example, the tungsten lamp, halogen lamp, infrared lamp, etc. shown in Japanese Patent Application Laid-Open No. 56-11392,
A xenon flashlight lamp, a laser light source, or the like can be arbitrarily selected and used. Further, the excitation light source 12 for reading may also be used for erasing.

After the afterimage and noise erasing operation described above is completed, the mirror 13d prepares for recording the next electron microscope image.
It is returned to the retracted position.

As described above, the enlarged scattered image 8b is transferred to the stimulable phosphor sheet 11.
When storing and recording the image, it is necessary to focus the enlarged scattered image 8b correctly. This focusing is done in a conventional electron microscope (just like the shutter 1
A fluorescent screen is arranged near 9, and the enlarged scattered image 8b by the electron beam 2 is displayed on this fluorescent screen, and the mirror body 1
This can be done by operating the focusing knob (not shown) of the electron microscope while looking at this displayed image through the observation window provided on the peripheral wall of a. Further, the enlarged scattered image 8b recorded on the stimulable phosphor sheet 11 as described above is reproduced on the image 10 generation device 23 using a focusing image dot, and the status of the bins 1 to 1 is determined by observing this reproduced image. Then, based on the judgment result, operate the focus knob above to focus on bins 1-
You may modify j:. In this case, after deleting the above-mentioned focusing image as described above,
If the correctly focused enlarged scattering image 8b is recorded again on the stimulable phosphor sheet 11 as an image for sample observation and read, then J: YES. Note that when the image for focusing on bin 1 is recorded on the stimulable phosphor sheet 11 and reproduced on the image reproducing device 23 as described above, the image for focusing does not need to be output to the same size as the final output image. Alternatively, excitation light irradiation and stimulated emission light detection may be performed on a portion of the image area of the final output image, and an image of only that portion may be output. By doing so, the time required to reproduce this focusing image is shortened, and the efficiency of the focusing work is improved. In addition, the same effect as described above can be obtained even if the image is read in larger pixel units than when reproducing the final output image when reproducing the focusing image.

Further, the image for alignment to the bin 1 is simply the enlarged scattering image 8b.
It can be used not only for focusing, but also for determining the field of view of the final output image.

Note that damage to the sample 8 can be further prevented by providing a shutter between the sample 8 of the mirror body 1a and the electron gun 3 to block the electron beam 2 except during imaging.

Next, a second embodiment of the present invention will be described with reference to FIG. Note that in FIG. 2, elements that are equivalent to those in FIG. In the electron microscope image recording/reading device 50 of FIG. 2, the excitation light beam 12a
first and second optical deflectors 13a, 13b that deflect
Among them, the second optical deflector 13b and the fθ lens 13G, which are closer to the stimulable phosphor sheet 11, are connected to the guide bar 25.
It is said that it can be moved freely along the This second optical deflector 1
3b and f.theta. lens 13C are arranged in the use position shown by the solid line in FIG. The sheet 11 is then scanned. Therefore, in this case as well, the scanning beam spot diameter does not differ greatly between the center part and the edge of the sheet as described above, and the fθ lens 13G has a normal two-dimensional f
A θ lens can be used, and the image information stored on the sheet 11 can be read very accurately. In the second embodiment, the erasing light 16a is also scanned by the optical deflectors 13a and 13b so that the entire surface of the stimulable phosphor sheet 11 is irradiated.

Although the embodiment of recording and reproducing an enlarged scattering image of the sample 8 by a transmitted electron beam has been described above, the present invention can also be applied to recording and reproducing the diffraction pattern of the sample described above. FIG. 3 shows how the diffraction pattern 8C of the sample 8 is recorded. In this embodiment, the electron microscope 40 is equipped with an intermediate lens 41 between the objective lens 6 and the projection lens 7, and the diffraction pattern 8G of the sample 8 formed on the back focal plane of the objective lens 7 is The image is enlarged and projected onto the imaging plane 9 by the intermediate lens 41 and the projection lens 7 that focus on the post-thermal plane. In this case as well, if a stimulable phosphor sheet 11 is placed as a two-dimensional sensor on the image forming surface 9, an enlarged image of the diffraction pattern 8C by the transmitted electron beam 2 is stored and recorded on the sheet 11. This accumulated and recorded diffraction pattern 8C can be read in exactly the same manner as explained in the first embodiment, and the read image can be displayed on a CRT or reproduced as a hard copy. .

Furthermore, in order to eliminate the influence of fluctuations in recording conditions or to obtain an electron microscope image with excellent observability, it is necessary to record a transmission electron beam image (enlarged scattering image or enlarged diffraction pattern) accumulated and recorded on the stimulable phosphor sheet 11. The recording pattern determined by the state, properties of the sample, recording method, etc. is grasped prior to outputting a visible image for specimen observation, and the reading gain of the photomultiplier 15 is appropriately adjusted based on this grasped accumulated record information. It is preferable to adjust the signal to a suitable value or to perform appropriate signal processing. Furthermore, in order to obtain a reproduced image with excellent observability, it is required to determine the recording scale factor so that the resolution is optimized according to the contrast of the recorded pattern.

In this manner, as a method for ascertaining the accumulated recorded information of the stimulable phosphor sheet 11 prior to outputting a visible image, it is possible to use, for example, the method J shown in Japanese Patent Laid-Open No. 5E189245. In other words, prior to the actual reading, the accumulative fluorescence is preliminarily emitted using excitation light with an energy lower than that of the excitation light that should be irradiated during the reading operation (main reading) of 1q of visible images for observation of the sample 8. A reading operation (pre-reading) is performed to grasp the accumulated record information accumulated and recorded on the body sheet 11, and the accumulated record information of the sheet 11 is grasped.After that, the main reading is performed, and the reading gain is determined based on the pre-read information. can be adjusted appropriately, the recording scale factor can be determined, or appropriate signal processing can be performed.

In addition, in order to appropriately adjust the reading gain or recording scale factor or perform appropriate signal processing as described above, in addition to performing pre-reading as described above, the above-mentioned focusing image must be reproduced on a display such as a CRT. death,
While looking at this display, you can interactively determine an appropriate reading gain, recording scale factor, or signal processing condition, and when playing the final output image, the predetermined reading gain, recording scale factor, or signal Image reading and signal processing may be performed based on processing conditions.

In addition, when a thermal phosphor sheet is used in place of the stimulable phosphor sheet 11 described above, in order to release the stored energy from this sheet by heating, a heating source that emits heat rays, such as a CO2 laser, is used. The thermal phosphor sheet may be scanned with this hot wire, and for this purpose, for example, the description in Japanese Patent Publication No. 55-47720 may be referred to.

(Effects of the Invention) As explained in detail above, according to the apparatus of the present invention, since electron microscope images are accumulated and recorded on a two-dimensional sensor such as a stimulable phosphor sheet, electron microscope images can be recorded with high sensitivity. Therefore, the exposure to the electron beam of the electron microscope can be reduced, and damage to Sample 11 can be reduced. In addition, since it becomes possible to immediately display a reproduced image of a recorded image on a CRT, etc. with high sensitivity, if this reproduced image is used as a monitor image for focusing an electron microscope, a clear monitor image can be obtained, and compared to conventional methods. It becomes possible to adjust the bin i at a low electron beam exposure amount, which was previously impossible.

Moreover, since the device of the present invention reads an electron microscope image as an electrical signal, it is extremely easy to perform image processing such as gradation processing and frequency emphasis processing on the electron microscope image. Image analysis such as pattern processing, three-dimensional image reconstruction, and image binarization can also be performed much more easily and quickly than in the past by inputting the electrical signals to a computer.

Furthermore, the two-dimensional sensor that accumulates and records electronic GL mirror images can be reused by applying treatments such as light irradiation and heating. In comparison, electron microscope images can be reproduced more economically.

In addition, since the two-dimensional sensor is fixed in the vacuum system and scanned in the X-Y direction with a light beam or heat ray, there is no need to break the vacuum system every time a reading operation is performed, and the two-dimensional sensor can be scanned in the sub-scanning direction. Since there is no need for a means to move the sensor in the same direction, the device can be made compact, and the photodetector can be placed in close contact with or close to the side opposite to the scanning surface of the two-dimensional sensor via an optical filter or optical shutter. As a result, the solid angle of light reception can be increased, and the S/N ratio can be increased.

Furthermore, in the device of the present invention, a movable deflection element is used to irradiate the sensor with a light beam or a heat ray from a position substantially opposite to the center of the two-dimensional sensor. The scanning spot diameter of the heating rays does not change significantly between the center and the edges of the sensor, so a sufficiently uniform scanning beam spot diameter can be obtained using a normal two-dimensional fθ lens, and the amount of energy accumulated in the two-dimensional sensor is Recorded electron microscope images can now be read very accurately.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram showing a first embodiment of the device of the present invention, FIG. 2 is a schematic diagram showing a second embodiment of the device of the present invention, and FIG. 3 is a schematic diagram of an electron microscope that can be combined with the device of the present invention. It is a schematic diagram showing an example. 1.40...Electron microscope 2...Electron beam 8...Sample 9...Imaging plane of electron microscope 10.5
0...Electron microscope image recording/reading device 11...Storage phosphor sheet 12...Excitation light 8Jii 12a...Excitation light beam 13...Light scanning system 1'3a, 13b.
...Light deflector 13c...fθ lens 13d...
Mirror 15...Photomaru 16...Erase light source 25...Guide bar Figure 2 1. Tatamori Yamamoto Procedural Amendments Commissioner of the Patent Office June 19, 1985 1. Patent application for indication of case No. 60-81799 2, Name of the invention Electron microscope image recording/reading device 3, Relationship with the case of the person making the amendment Patent applicant Location 210 Nakanuma, Minamiashigara City, Kanagawa Prefecture Name Name
Fuji Photo Film Co., Ltd. 4, Agent: 7th Floor, Uraiya Building, 5-2-1 Roppongi, Minato-ku, Tokyo (7318), Patent Attorney: Masashi Yanagi (1 idiot) 5
, Date of amendment order None 6, Number of inventions increased by amendment None 7, Subject of amendment ``Detailed description of the invention'' column 8 of the specification,
Contents of correction 1) Page 10, lines 17 to 19 of the specification [The above laser, etc.... There is no difference. Therefore, delete ". 2) Delete "the light beam...therefore" on page 27, lines 15-17.

Claims (3)

[Claims] (1) A two-dimensional sensor that is fixed to the imaging plane of an electron microscope and accumulates the energy of the electron beam that has passed through the sample; and a two-dimensional sensor that is scanned in the X-Y direction with a light beam or heat ray to an excitation unit that emits the accumulated electron beam energy as light; a photodetector that photoelectrically detects the emitted light from the two-dimensional sensor; and after the emitted light is detected, the emitted light is transmitted to the two-dimensional sensor. an erasing means for emitting energy remaining in the sensor by irradiation or heating; 1. An electron microscope image recording/reading device comprising a deflection element movable to a retracted position where it does not interfere with irradiation. (2) The electron microscope image recording/reading device according to claim 1, wherein the two-dimensional sensor is made of a stimulable phosphor. (3) The photodetector is connected to a surface opposite to the surface receiving the scanning of the two-dimensional sensor via an optical filter that cuts light at the excitation light wavelength or infrared rays, and a shutter that opens when reading and closes when erasing. The electron microscope image recording/reading device according to claim 1 or 2, wherein the electron microscope image recording/reading device is arranged in close contact with or close to a surface.