JPS6193538A - Recording and regenerating device for electron microscope image - Google Patents

Abstract

PURPOSE:To record and regenerate an electron microscope image by storing an electron beam, which has passed through a specimen, in a two-dimensional sensor, and carrying out the irradiation of light to it to cause the stored energy to release as light, and photoelectrically reading it. CONSTITUTION:A storage type phosphor sheet 10 as a two-dimensional sensor is movably provided by means of rollers 101, 102 under the mirror body of an electron microscope 1 to belong to its vacuum system. And an enlarged scattering image 8b is stored and recorded by an electron beam 2, which has passed through a specimen 8, on the sheet 10 through an objective lens 6 and a projection lens 7. Further, the beam 11a from a laser light source 11 is irradiated on the sheet 10, and the luminous light with brightness is converted into an electrical signal by means of a photoelectric converter 15 through a light condensing body 14, and a visible image is given to an enlarging regeneration portion 1c through a picture processing circuit 16 to record it on a photosensitive film. Accordingly, it is possible to record and regenerate an electron microscope image with high sensitivity and high picture quality.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of the Invention) The present invention relates to an apparatus for recording and reproducing electron microscope images, and more particularly to an apparatus for recording and reproducing electron microscope images with high sensitivity, and for using electrical signals to enable various types of image processing. The present invention relates to a recording and reproducing apparatus for reproducing electronic rll mirror images.

(Technical Background of the Invention and Prior Art) Conventionally, electron microscopes have been known in which an electron beam transmitted through a sample is refracted by an electric field or a magnetic field, so that an enlarged image of the sample is reflected. As is well known, in this electron microscope, an electron beam transmitted through the sample forms a diffraction pattern of the sample on the plane of the objective lens, and the diffraction rays interfere again to form an enlarged image of the sample. It has become.

Therefore, if the magnified image is projected by the projection lens, an magnified image (scattered image) of the sample will be visualized, and if the device plane is projected, the diffraction pattern of the magnified sample will be observed. Note that if an intermediate lens is disposed between the objective lens and the projection lens, the above-mentioned magnified image (scattered image) or diffraction pattern can be obtained at will by adjusting the focal length of this intermediate lens.

In order to observe the enlarged image or diffraction pattern (hereinafter collectively referred to as a transmission electron beam image) formed as described above, conventionally, a photographic film is generally placed on the imaging surface of a projection lens and the transmission electron beam is The image was exposed to light, or an image intensifier was installed to amplify and project the transmitted electron beam image. However, photographic film has the disadvantage of low sensitivity to electron beams and requires troublesome image processing.On the other hand, when using an image intensifier, the sharpness of the image is low and distortion may occur in the image. There is a problem with the problem.

In addition, for the above-mentioned transmission electron $2 image, image processing such as purpose C gradation processing, frequency emphasis processing, density processing, reduction processing, correction processing, etc., such as rounding the image to make it easier to see, and Fourier analysis are performed. Image analysis for three-dimensional image reconstruction, image binarization, particle size measurement, etc., as well as diffraction pattern processing (
Analysis of crystal information, elucidation of lattice constants, dislocations, lattice defects, etc.)
However, in such cases, conventionally, microscopic processing obtained by developing photographic film was used. The complicated work involved reading the L image with a Microfto meter and converting it into an electrical signal, converting the electrical signal into, for example, A/D, and then processing it with a computer.

(Object of the Invention) The present invention has been made in view of the above circumstances, and is an object of the present invention to record and reproduce electron microscope images with high sensitivity and high image quality, and to facilitate various processing. It is an object of the present invention to provide an electron microscope image recording and reproducing device in which a supported electrical signal can be directly obtained.

(Structure of the Invention) Electron microscope 11f of the present invention! The iI recording and reproducing device has an electron microscope image capturing section (which accumulates and records the electron beam that has passed through the sample in a vacuum state on a two-dimensional sensor that accumulates electron beam energy).
(hereinafter referred to as an imaging section), a reading section that irradiates or heats the two-dimensional sensor with light to emit the accumulated energy as light, photoelectrically detects the emitted light and generates an electrical signal, and a reading section that converts the image signal into an electrical signal. The image of the sample based on the 2
It consists of a reproducing section that reproduces data in an area larger than the storage recording area of the dimensional sensor.

Specifically, as the above-mentioned two-dimensional sensor, for example, a special
No. 55-12429, No. 55-116340, No. 55-163472, No. 56-11395, No. 56
, -104645, etc. can be particularly preferably used.

Naturally, when a certain type of phosphor is irradiated with radiation such as an electron beam, part of the energy of this radiation is stored in the phosphor, and then the phosphor is irradiated with excitation light such as visible light. When exposed to water or heated, the phosphor emits fluorescence (stimulated or thermal fluorescence) depending on the stored energy. A phosphor exhibiting such properties is called a stimulable phosphor, and a stimulable phosphor sheet is a sheet-like recording medium made of the above-mentioned volumetric phosphor, and generally consists of a support and a stimulable phosphor. It consists of a stimulable phosphor layer laminated on a support. , the storage phosphor layer is N
It is formed by dispersing a stimulable phosphor in a suitable binder, and if the stimulable phosphor layer is self-supporting, it can become a stimulable phosphor sheet by itself.

In addition, as the above-mentioned two-dimensional sensor, for example,
47719, 55-47720, etc. can also be used. This thermal phosphor sheet is a sheet-like recording medium made of a phosphor (thermal phosphor) that emits radiation energy accumulated mainly through the action of heat as thermal fluorescence. It is similar to a fluorescent sheet.

In the photographing section of the apparatus of the present invention, the above-mentioned two-dimensional sensor is arranged on the imaging plane of the electron microscope, and an electron microscope image formed by a transmitted electron beam is accumulated and recorded on the sensor.

Next, in the reading section, this sheet is scanned with excitation light such as visible light or heated by agitation to generate fluorescence, and this fluorescence is read photoelectrically to generate an image signal (
electrical signal). When reproducing an electron microscope image in the reproducing section based on the electrical image signal obtained in this way, the reproduced image is enlarged to be larger than the storage area recorded on the two-dimensional sensor and output.

As mentioned above, the reproduced image is transferred to the two-dimensional sensor '? Since the output is made larger than the product recording area, a small-sized two-dimensional sensor can be used, and the entire device can be made compact.

Among the two-dimensional sensors used in the present invention, an example of an exhaustible phosphor used in a stimulable phosphor sheet is described in U.S. Pat. No. 3,859,527. SrS:Ce, Sm, SrS:Eu.

Sm, Th0z: Er, and La202S:
Fluorescent material represented by a compositional formula such as Eu, 3m, etc., ZnS:Cu described in Japanese Patent Application Laid-Open No. 55-12142
, Pb, Ba0-xAl2O3:Eu [however, 0.8
≦X≦10]1. # and M2+0−xSiO2:A[
However, M2+ is MCI, Ca, Sr, Zn, Cd, or Ba, and A is Ce, Tb, El, Tm5Pb1
T9J, B i.

or Mn, and X is 1 where 0.5≦X≦2.5
A phosphor expressed by the composition formula, JP-A-55-121
43 (Ba, MO, Ca
X) FX: aEu2+-X-7X However, X is at least one of C52 and Br, and X and y are Q<x+y≦0.6 and xy
≠0, and a is 10″6≦a≦5×10−2], JP-A-55-1214
LnOX described in Publication No. 4: XA [where l-n is at least one of La, Y, Gd, and lu; At least one of Tb,
and X is Q<x<Q', 1].
al-X, M"X] FX: VA [However, MX is at least one of Mg, Ca, Sr, Zn, and Cd (7), X is at least one of C9J, Br, and I, A is Eu, TbSCelTm, D
At least one of VSPr, HO, Nd, 'y'b, and the back of Er, and X is 0≦×≦0.6, and y is
A phosphor represented by the composition formula: 0≦y≦0.2, MI described in JP-A-55-160078
LFX-xA:yLn [However, MI is Ba, Ca%
At least one of Sr, MO, Zn, and cd, A is Bed, MgO, CaO1S rO, BaQ, z
'no, A9. z 03 , Y203, Laz 03
, In2O3, S foz , T9. Oz, ZrO2,
At least one of GeO2,5nOz, Nb2O5, Ta206, and ThO□, In is Eu, T
b, Ce, Tm, 'Dy, Pr.

At least one of HOINd, Yb, Er, Sm, and Gd, X is at least one of C, Br1, and I, and X and y are each 5×10″5
≦X≦0.5, and o<y≦0.2] A phosphor represented by the composition formula, (Bal-X, MxX)F2, described in JP-A-56-116777.
aBaXz: yEu, zA [where M is beryllium, magnesium, calcium, strontium,
At least one of zinc and cadmium, X is at least one of chlorine, bromine, and iodine, A is at least one of zirconium and scandium, and a, x, y, and 2 are each 0.5 ≦a
≦1.25, O≦X≦1.104≦y≦2×10−1,
and 0<z≦10-2], which is described in JP-A-57-23673 (Ba
t-x, M”x) F2・aBaXz: y
Eu, ZB [However, MAL is at least one of beryllium, magnesium, calcium, strontium, zinc, and cadmium, X is at least one of chlorine, bromine, and iodine, and alx, y, and 2 are each 0.5≦a≦1.25, O≦X≦1.10
A phosphor represented by the composition formula (≦y≦2×10°1 and 0<z≦10−1), which is described in JP-A-57-23675 (Ba
t-X, M”x) F2・aBaXz: y
Eu, zA [However, Ml is beryllium, magnesium.

Calcium, strontium,! ! 1! at least one of lead and cadmium lining, X is at least uniform of chlorine, bromine, and iodine lining, A is at least one of arsenic J5 and silicon lining, a, X, y, and Z are each 0 .5≦a≦1.25.0≦X≦1.10
娨≦y≦2X10-1. and 0〈Z≦5X10-1'', a Ba phosphor described in JP-A No. 58-206678
+-x MX/A LX/2FX: yEu2+C However, M is L! , Na, Rb, 73 and C3
represents at least one alkali metal selected from the group consisting of: L is Sc, Y, La, Ce, Pr.

Nd, Pm, Sm, Gd, Tb, Dy1Ho, Er, T
m, Yb, LU, A9J1Ga, In1 and T9J; X represents at least one halogen selected from the group consisting of C9, 3r, and I; and , X is 10″2≦X≦0.5, y is 0 (y≦0.1) A phosphor represented by the composition formula BaF described in JP-A No. 59-27980
X-xA: ')7ELJ'' [where X is at least one halogen selected from the group consisting of C, 3r, and I; A is a fired product of a tetrafluoroboric acid compound; X is 10″6≦X≦0.1
, y is O<y≦0.1″c, a phosphor represented by the composition formula 1, BaF described in JP-A-59-47289.
X-xA: VEu2+ [However, X is C, 13r,
and 1; A is from the hexafluoro compound group consisting of monovalent or divalent metal salts of hexafluorosilicic acid, hexafluorotitanic acid, and hexafluorozylcholamic acid; is a fired product of at least one selected compound; and X is 10-'≦×≦0.1, and V is O<y≦0
．． A phosphor represented by the composition formula 1], JP-A-59
-3aFX-XNaX described in Publication No. 56479
':aEu2+ [where X and Xo are each C! A phosphor that is at least one of Q, Br, and ■, and xl> and a are respectively 0x≦2 and Oxa≦0.2]; MXF described in Publication No. 59-56480
X-xNaX': yEu":z A [where M is at least one alkaline earth metal selected from the group consisting of [3a, 3r, and Ca; X and Xo are C9, 3r, respectively.

and at least one type of AD selected from the group consisting of I
A contains at least one transition metal C selected from V, Cr, Mn, Fe, COI and Ni;
and X is Q<x≦2, y is 0<y≦0.2, and Z is 0<2≦10″2. M"FX-afvlLX'-b described in Publication No. 59-75200
M”X”2, Cr, F X1ll3-xA:y
Eu'' [However, M is at least one alkaline earth metal selected from the group consisting of [3a, 3r, and Ca, and Ml is Li, Na, Rb,
5, M°'II is at least one divalent metal selected from the group consisting of Be and Mg; MW
is A9. , Qa,in, and T9. is at least one trivalent metal selected from the group consisting of: 8 is a metal oxide; X is at least one halogen selected from the group consisting of c9J, sr, i and ■;
, X I+, and X″′ are at least one kind of halogen selected from the group consisting of F, C!Q, , 3r, and I; ≦1
0-2, c is O≦C≦10-”, and a −1-b +
c≧104, X is Q<x≦0.5, y is 0<y
≦0.2] A phosphor represented by the composition formula: 1 π M X2 ・aM
U 2+ [where Mll is [3a, 3r and C
at least one alkaline earth metal selected from the group consisting of a; X and X' are at least one halogen selected from the group consisting of C9, Br and I, and X≠X'; Then ra is 0゜1≦a≦10
．． Examples include a phosphor represented by the following compositional formula, where x is a numerical value in the range of 0, and x is a numerical value in the range of O<X≦0.2.

However, the stimulable phosphor used in the present invention is not limited to the above-mentioned phosphor, but is a phosphor that exhibits stimulable luminescence when irradiated with radiation and then irradiated with excitation light. It can be anything.

Further, as a thermal phosphor that can be preferably used, Na5Oa
, Mn5Oa, Ca5Oa, 5rSOa, B a
Examples include compounds in which a trace amount of at least one additive such as Mu, Dy, or Tm is added to a sulfuric acid compound such as SOa.

These two-dimensional sensors may have a protective layer and a light-reflecting or light-absorbing subbing layer, and the phosphor layer may be a phosphor layer as disclosed in Japanese Patent Application Laid-open No. 163500/1983. It may be colored with pigments or dyes.

(Embodiments) Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 schematically shows an embodiment of an electron microscope image recording and reproducing apparatus according to the present invention.

This electron microscope image recording and reproducing device 1 has a stimulable phosphor sheet 1-'10 as a two-dimensional sensor at the bottom of the mirror body of an ordinary electron microscope, at least during exposure of an electron 1N image (during imaging). is an imaging section 1a arranged so as to belong to the same vacuum system as the imaging plane of the electron beam image; the sheet 10 is scanned with excitation light while being placed in a vacuum state, and the photosensitivity emitted from the sheet 10 is detected; A reading section 1b that photoelectrically detects emitted light and obtains an image signal, and a reproducing section 1C that reproduces an image of the sample by enlarging the image of the sample based on the image signal in a manner larger than the accumulated recording area of the two-dimensional sensor. It is something. This photographing section 1a and n
- The inside of the reading section 1b (inside the hatched frame in the figure) is maintained in a vacuum state by well-known means during operation of the electron microscope.

The imaging unit 1a includes an electron gun 3 that emits an electron beam 2 at a uniform speed, at least one focusing lens 4 consisting of a magnetic lens, an electrostatic lens, etc. that focuses the electron beam 2 onto a sample surface, and a sample stage 5. , an objective lens 6 similar to the focusing lens 4, and a projection lens 7. The electron beam 2 transmitted through the sample 8 placed on the sample stage 5 is refracted by the objective lens 6, and forms an expanded scattering of the sample 8 of 1 m88. This enlarged scattered image 8a is formed and projected onto an imaging plane 9 by a projection lens 7, and the electron beam energy carrying an enlarged scattered image 8b of the sample is stored and recorded on the stimulable phosphor sheet 10 located on the spot. be done.

On the other hand, the reading unit 1b uses a cylindrical driven roller 102 similar to the cylindrical driving roller 101! ! ) (Pulled endless belt-like stimulable phosphor sheet 10.1-Ie-
Excitation light from Ne laser, semiconductor laser, etc. it! 11 and an optical deflector 12 such as a galvanometer mirror that deflects the excitation light beam 11a emitted from the excitation light source 11 in the width direction of the sheet 10, and the excitation light beam 1.
1a is provided at the exit end surface of a light collector 14 that collects the stimulated luminescent light emitted from the sheet 10, receives the stimulated luminescent light through a filter that removes excitation light, charges it and converts it into an image signal. Photoelectric converter 1 such as Photomaru that can be changed to
It has five detection means. (Storative fluorophore)
-10 is formed by laminating the above-mentioned stimulable phosphor layer on the surface of a highly flexible endless bell-shaped support. This sheet 10 is driven by a driving roller 101
and a driven roller 102, and is rotatable in the direction of the arrow by a drive roller 101 rotated by a drive device (not shown).

In the wood embodiment, an endless belt-like stimulable phosphor sheet 10, a driving roller 101 for moving it, a driven roller 102, a light collector 14, and a photoelectric converter 15 are arranged in a vacuum system. If the light body 14 is arranged so that its end passes through the vessel wall and exits from the vacuum system, the photoelectric converter 1
5 can be installed outside the vacuum system.

When a shutter (not shown) provided between the mirror body and the stimulable phosphor 10 is opened, the recording area, that is, the imaging plane 9
), the electron beam energy carrying the enlarged scattered image 8b of the sample is accumulated in the portion of the stimulable phosphor sheet 10 located at . This portion of the sheet 10 is then moved by rotation of the drive roller 101 to the reading location. In this embodiment, outside the vacuum system.

Excitation light beam 11a deflected as described above at
is incident on the sheet 10 through a transparent wall member 1'9a made of lead glass, and the beam 11a main scans the sheet 10 in its width direction.
0 in a direction perpendicular to the width direction (
By moving the sheet 10 in the six directions of the arrow
Perform sub-scanning.

The stimulated luminescent light generated from the stimulable phosphor sheet 10 by this excitation light irradiation is transmitted to the incident end surface of the light collector 14 (sheet 1
The light enters the light condenser 14 from the end face facing 0 (c), travels through it by total reflection, is received by the photoelectric converter 15 connected to the exit end face of the light collector 14, and becomes stimulated light. The light suspension is read photoelectrically.

The above-mentioned stimulated luminescence light is read by a photoelectric converter 15 and
Both images No. 15 are transmitted to the image processing circuit 16, subjected to necessary image processing, and then sent to the reproduction section 1G.

FIG. 2 shows an image scanning and recording device as an example of the reproducing section 1G. The photosensitive film 30 is moved in the sub-scanning direction of arrow Y, and the laser beam 31 is main-scanned on the photosensitive film 30 in the X direction, and the laser beam 31 is modulated by the image signal from the image processing circuit 36 by the A10 modulator 32. By doing so, the photosensitive film 3
A visible image is formed on 0.

Here, the screen size of the visible image formed on the photosensitive film 30 is set larger than the size of the image forming surface 9 (that is, the area of accumulation and recording on the two-dimensional sensor), and the enlarged scattered image 8b is The image is reproduced in a larger size than on the image plane 9. If the stimulable phosphor sheet 10 is used, the enlarged scattered image 8b can be reproduced with high sharpness, so even when enlarged in this way, a reproduced image of sufficiently good image quality can be obtained. Therefore, a small-sized volumetric phosphor sheet 10 can be used, and a small-sized photoelectric converter 15 can also be used, and the device as a whole can be made compact.

In order to output an enlarged image using an image scanning recording device as shown in FIG.
The density may be made coarser than the reading scanning line density when obtaining image information from 0. In order to obtain sufficient image information from a small-sized stimulable phosphor sheet as in the present invention, the reading scanning line density must be at least 10 vixels/mm, particularly 15 vixels/llll.
It is preferable to set the scanning line density in the range of 11 to 100 hixels 7mm, but the scanning line density for recording the reproduced image is coarser than this, preferably in the range of 5 pixels/11m to 20 pixels/mm. By selecting a scanning line density coarser than the scanning line density, an enlarged reproduced image can be reproduced up to 17 times without deteriorating the image quality.

After the reading is completed, the image-recorded portion of the stimulable phosphor sheet 10 is sent to the erasure zone 20. This erasure zone 20
Now, the erasing light source 21, such as a fluorescent lamp, provided outside the vacuum system.
The sheet 10 is irradiated with erasing light emitted from the sheet 10 through the translucent wall member 19b. This erasing light source 21 irradiates the stimulable phosphor sheet 10 with light included in the excitation wavelength range of the phosphor, thereby causing the stimulable phosphor sheet 10 to be stored in the phosphor layer of the stimulable phosphor sheet 10. Afterimage or sheet 1
This is a device that emits noise due to radioactive elements contained in the raw materials of 0, such as tungsten lamps, halogen lamps, infrared lamps, Kihinon flash lamps, or lasers as shown in JP-A-56-11392. Light sources etc. can be selectively used at will.

In the above description, an endless belt-shaped stimulable phosphor sheet has been described, but this is just an example.

It goes without saying that various other methods, such as one in which a reliable phosphor sheet is fixed, can be adopted.

Although the embodiment of recording and reproducing the enlarged scattering image of the sample 8 by the transmitted electron beam has been described above, the present invention can also be applied to recording and reproducing the diffraction pattern of the sample described above. FIG. 3 shows how the diffraction pattern 8G of the sample 8 is recorded. In this embodiment, the electron microscope 40 is equipped with an intermediate lens 41 between the objective lens 6 and the projection lens 7, and the diffraction pattern 8C of the sample 8 formed on the plane of the objective lens 7 is The image is enlarged and projected onto the imaging plane 9 by the intermediate lens 41 and the projection lens 7 that are focused on the device plane. In this case as well, if a stimulable phosphor sheet 10 as a two-dimensional sensor is placed on the image forming surface 9, an enlarged image of the diffraction pattern 8C by the transmitted electron beam 2 will be stored and recorded on the sheet 10. This accumulated and recorded diffraction pattern 8C can be read in exactly the same manner as explained with reference to FIG. 1, and the read image can be displayed on a CRT or reproduced as a hard copy.

Furthermore, in order to eliminate the influence of fluctuations in recording conditions or to obtain an electron microscope image with excellent observability, it is necessary to record a transmission electron beam image (enlarged scattering image or enlarged diffraction pattern) accumulated and recorded on the stimulable phosphor sheet 10. The recording pattern determined by the condition, properties of the sample, recording method, etc. is grasped before outputting a visible image for specimen observation, and the reading gain is adjusted to an appropriate value based on the grasped accumulated record information. It is preferable to perform appropriate signal processing.

Furthermore, in order to obtain a reproduced image with excellent observability, it is required to determine the recording scale factor so that the resolution is optimized according to the contrast of the recorded pattern.

As a method for ascertaining the accumulated recorded information of the stimulable phosphor sheet 10 prior to outputting a visible image, a method such as that disclosed in Japanese Patent Laid-Open No. 58-89245 can be used, for example. In other words, prior to the actual reading, the stimulable fluorophore is preliminarily exposed to the stimulable fluorophore using excitation light with an energy lower than that of the excitation light that should be irradiated during the reading operation (main reading) to obtain a visible image for observation of the sample 8. Reading operation (
Pre-read), grasp the accumulated recording information of sheet 10, and then perform actual reading, appropriately adjust the reading gain based on the pre-read information, determine the recording scale factor, or perform appropriate No. 16 processing. can be administered.

Further, as a photoelectric reading means for photoelectrically reading the stimulated luminescence light emitted from the stimulable phosphor sheet 10, in addition to using the photomultiplier described above, a solid-state photoelectric conversion element such as a photoconductor or a photodiode may be used. It is also possible to use
No., Japanese Patent Application No. 58-219313 and Japanese Patent Application No. 58-2
Specifications of No. 19314 and JP-A-58-1218
(See Publication No. 74). In this case, a large number of solid-state photoelectric conversion elements may be configured to cover the entire surface of sheets 1 to 10 and may be integrated with sheet 10, or may be integrated with sheet 10.
It may be arranged in a state close to 0. Further, the photoelectric reading means may be a line sensor in which a plurality of photoelectric conversion elements are connected in a linear manner, or one solid-state photoelectric conversion element corresponding to one pixel may be used to read the entire stimulable phosphor sheet 10. It may be configured to be scanned across the surface.

As the excitation light source for reading in the above case, in addition to a point light source such as a laser, a line light source such as an array formed by arranging light emitting diodes (LEDs), semiconductor lasers, etc. in a row may be used. By performing reading using such a device, it is possible to prevent loss of stimulated luminescence light emitted from the stimulable phosphor sheet 10, and at the same time, increase the solid angle of light reception and increase the S/N. . Furthermore, since the obtained electrical signals are converted into time series by electrical processing of the photodetector rather than by time series irradiation of excitation light, it is possible to increase the reading speed.

In addition, instead of the excitation light described above, in order to release the stored energy from the stimulable phosphor sheet 10 by heating, a heating source that emits heat rays, such as a 002 laser, is used, and the heat rays are used to emit 2 It is sufficient to scan the dimensional sheet, and for that purpose, for example, the description in Japanese Patent Publication No. 17720/1983 may be referred to.

Furthermore, it is not always necessary to read images with a two-dimensional sensor such as the stimulable phosphor C-J-10 placed in a vacuum state; The two-dimensional sensor may be taken out and the image may be read using a reading device provided separately from the electron microscope. However, as in the embodiment described above, if the two-dimensional sensor is circulated in a vacuum system that is common to the electron beam imaging surface, it is not necessary to break the vacuum and change the film as in the conventional film method. This makes it possible to perform a large number of Nine Shadows in succession.

(Effects of the Invention) As explained in detail above, according to the apparatus of the present invention, since electron microscope images can be stored and recorded on a two-dimensional sensor such as a stimulable phosphor sheet, electron microscope images can be recorded with high sensitivity. Therefore, the amount of electron beam exposure of the electron microscope can be reduced, and damage to the sample can be reduced.

In addition, since the recorded image can be displayed instantly with high sensitivity on a CRT, etc., if this reproduced image is used as a 72-bit image for focus adjustment of an electron microscope, a clear monitor image can be obtained, unlike conventional methods. Focus adjustment becomes possible with low electron beam exposure, which was previously possible.

Moreover, in the device of the present invention, since electron microscope images are read as electrical signals, it is extremely easy to perform image processing such as gradation processing and frequency emphasis processing on electron microscope images. By inputting the above-mentioned electrical signals to a computer, image analysis such as processing, three-dimensional image reconstruction, and image binarization can be performed much more easily and quickly than in the past.

Furthermore, since the two-dimensional sensor 1 that stores (^ records) electron microscopic images can be reused by undergoing treatments such as light irradiation and heating, according to the present invention, the conventional silver halide photographic system can be reused. Electron microscope images can be reproduced more cost-effectively than in the case of adopting .

Further, in the apparatus of the present invention, since the electron microscope image is enlarged and reproduced, a small-sized two-dimensional sensor and photoelectric conversion means can be used, and the apparatus can be made compact. If a small two-dimensional sensor is used as described above, an electron microscope t! When reading Ii, the influence of the reading light and flare is reduced, and the quality of the reproduced image is improved. F'ru.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram showing an apparatus according to a first embodiment of the present invention, FIG. 2 is a schematic diagram showing an embodiment of a reproduction section of an apparatus according to the present invention, and FIG. 3 is a schematic diagram showing an apparatus according to a second embodiment of the present invention. 1 is a schematic diagram showing a part of an applied electronics WIM. 1.40... Electron microscope 2... Electron beam 9...
Imaging surface 10 of the electron microscope...Storage phosphor sheet 11...Excitation light source 11a...Excitation light beam 12...Light deflector 14
...Concentrator ・75...Photoelectric transformer Ig! Vessel 1
7...Display Figures 1 and 1b Figure 3 (Voluntary) Procedural amendment (method) % formula % 2. Name of the invention Electron microscope image recording and reproducing device 3. Case of the person making the amendment Relationship with Patent applicant Location 210 Nakanuma, Minamiashigara City, Kanagawa Prefecture Name Name
Fuji Photo Film Co., Ltd. 4, Agent 5-2-1-5 Roppongi, Minato-ku, Tokyo Date of amendment order January 9, 1985 (Date of dispatch January 29, 1985) Increased by 6° amendment Number of inventions None 8-
Contents of amendment Mr. Commissioner of the Patent Office August 1985
February 6th, 2, Name of the invention: Electron microscope image recording and reproducing device 3, Relationship to the case of the person making the amendment Person of the patent applicant Location: 210 Nakanuma, Minamiashigara City, Kanagawa Prefecture Name:
Fuji Photo Film Co., Ltd. 4, Agent: 7th floor, Uraya Building, 5-2-1 Roppongi, Minato-ku, Tokyo (7318) Patent attorney: Yanagi 1) Seishi (and 1 other person) 5.
Date of amendment order None 6, Number of inventions increased by amendment None 7, Subject of amendment “Detailed description of the invention” column of the specification -
・1) In the specification, page 5, line 13, "When irradiated with excitation light or heated" is corrected to "When irradiated with excitation light ≦". 2) On page 12, line 20, ``is done'' is corrected to ``is done''. 3) Page 15, 14I (Correct child rNaj to rNazJ. 4) Correct rMuJ to rMnJ, line 16 of the same page. 5) Delete "1" on page 16, line 9. 6> In lines 9 and 10 of the same page, "electron microscope" is corrected to "electron microscope 1." A ζ Letter of amendment to cap procedure Dear Commissioner of the Patent Office, September 19, 1985, Japanese Patent Application No. 59-214679 2 Title of invention Electron microscope image recording and reproducing device 3 Relationship with the case of the person making the amendment Patent applicant Address: 210 Nakanuma, Minamiashigara City, Kanagawa Prefecture Name:
Fuji Photo Film Co., Ltd. 4, Agent

Claims (1)

[Scope of Claims] At least a two-dimensional sensor that accumulates electron beam energy; an electron microscope image capturing section that accumulates and records the electron beam that has passed through the sample in a vacuum state; a reading unit that emits the emitted energy as light and photoelectrically detects the emitted light to obtain an image signal; An electron microscope image recording and reproducing device comprising a reproducing section for reproducing images.