JPH0552626B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of the Invention) The present invention relates to a recording/reading device for electron microscope images, and in particular to a device for recording and reading electron microscope images with high sensitivity and for processing various types of images using electrical signals. The present invention relates to an apparatus for recording and reading electron microscope images.

(Technical Background of the Invention and Prior Art) Electron microscopes have been known that obtain an enlarged image of a sample by refracting an electron beam transmitted through a sample using an electric or magnetic field. As is well known, in this electron microscope, an electron beam transmitted through the sample forms a diffraction pattern of the sample on the back focal plane of the objective lens, and the diffraction rays interfere again to form an enlarged image of the sample. It's summery. Therefore, if the enlarged image is projected by the projection lens, an enlarged image (scattered image) of the sample will be observed, and if the back focal plane is projected, the enlarged diffraction pattern of the sample will be observed. Note that if an intermediate lens is disposed between the objective lens and the projection lens, the above-mentioned magnified image (scattered image) or diffraction pattern can be obtained at will by adjusting the focal length of this intermediate lens.

In order to observe the enlarged image or diffraction pattern (hereinafter collectively referred to as a transmission electron beam image) formed as described above, conventionally, a photographic film is placed on the imaging surface of a projection lens and a transmission electron beam is observed. The image was exposed to light, or an image intensifier was installed to amplify and project the transmitted electron beam image. However, photographic film has the drawbacks of low sensitivity to electron beams and cumbersome development processing.On the other hand, when using image intensifiers, the problem is that the sharpness of the image is low and the image is easily distorted. There is.

In addition, for the above-mentioned transmission electron beam image, image processing such as gradation processing, frequency emphasis processing, density processing, subtraction processing, addition processing, etc., and 3D processing using Fourier analysis are performed to make the image easier to see. Processing such as image reconstruction, image binarization, and image analysis for particle size measurement, as well as diffraction pattern processing (analysis of crystal information, lattice constant, dislocation, clarification of lattice defects, etc.) is performed. In such cases, the conventional method is to read the microscopic image obtained by developing the photographic film with a microphotometer and convert it into an electrical signal.
The complicated work of converting this electrical signal into, for example, A/D and then processing it with a computer has been performed.

(Object of the Invention) The present invention has been made in view of the above circumstances, and provides a method for carrying electron microscope images so that they can be recorded with high sensitivity and high image quality, and furthermore, various processing can be facilitated. The object of the present invention is to provide an electron microscope image recording/reading device that can directly obtain electrical signals.

(Structure of the Invention) The electron microscope image recording and reading device of the present invention includes a two-dimensional sensor that is fixed to the imaging surface of the electron microscope and stores the energy of the electron beam that has passed through the sample, and a two-dimensional sensor that is connected to the optical beam or an excitation means for scanning with a heat ray and emitting the electron beam energy accumulated in the sensor as light; a photodetector for photoelectrically detecting the emitted light from the two-dimensional sensor; and a photodetector for photoelectrically detecting the emitted light from the two-dimensional sensor; and an erasing means that then irradiates or heats the two-dimensional sensor to release the energy remaining in the sensor, and the excitation means is arranged opposite to substantially the center of the two-dimensional sensor. It has a deflection element that is movable from a position where the light beam or heat ray is reflected toward the sensor, and a retracted position that does not interfere with electron beam irradiation to the two-dimensional sensor when the scanning is not performed. It is characterized by this.

The two-dimensional sensor described above temporarily accumulates at least a portion of the energy when exposed to an electron beam, and when external stimulation is applied later, at least a portion of the accumulated energy is transferred to light, electricity, etc. It consists of a material that has the ability to emit radiation in a detectable form, such as sound.

Specifically, examples of the above-mentioned two-dimensional sensor include, for example, JP-A-55-12429, JP-A-55-116340, JP-A-55-
The stimulable phosphor sheets disclosed in Japanese Patent No. 163472, No. 56-11395, No. 56-104645, etc. can be particularly preferably used. In other words, when a certain kind of phosphor is irradiated with radiation such as an electron beam, part of the energy of this radiation is accumulated in the phosphor, and when the phosphor is subsequently irradiated with excitation light such as visible light, the energy of this radiation is accumulated. The phosphor fluoresces depending on the energy (stimulated luminescence)
shows. A phosphor that exhibits these properties is called a stimulable phosphor, and a stimulable phosphor sheet is a sheet-like recording material made of the above-mentioned stimulable phosphor. It consists of stacked stimulable phosphor layers. A stimulable phosphor layer is formed by dispersing a stimulable phosphor in a suitable binder, but if this stimulable phosphor layer is self-supporting, it can become a stimulable phosphor sheet by itself. sell. Incidentally, an example of the stimulable phosphor for forming this stimulable phosphor sheet is disclosed in the above-mentioned Japanese Patent Application No. 1983-
It is described in detail in the specification of No. 214680.

Further, as the above-mentioned two-dimensional sensor, it is also possible to use, for example, a thermophosphor sheet described in Japanese Patent Publication No. 55-47719, Japanese Patent Publication No. 55-47720, and the like. This thermophosphor sheet is a sheet-like recording material made of a phosphor (thermophosphor) that emits accumulated radiation energy as thermofluorescence mainly due to the action of heat.

The excitation means include an excitation light source such as a He-Ne laser or a semiconductor laser, or a heat ray source such as a CO ₂ laser, a galvanometer mirror, a polygon mirror (rotating polygon mirror), a hologram scanner, and an acousto-optic optical deflector (AOD). ), etc. are used.

Further, the movable deflection means may be an X-direction deflection means of the above-mentioned X-Y direction deflection means, a Y-direction deflection means, or both, Further, it may be a deflection means such as a reflecting mirror that reflects and guides the light beam emitted from these X-Y direction deflection means to a two-dimensional sensor.

(Function) Once an electron microscope image is accumulated and recorded by a transmitted electron beam on a two-dimensional sensor placed on the imaging plane of an electron microscope, this two-dimensional sensor is exposed to excitation light such as visible light or heat rays in both X and Y directions. to generate fluorescence. This fluorescence is transmitted to the two-dimensional sensor through an optical filter that preferably cuts out light at the excitation light wavelength or infrared rays, and a light shutter that opens when reading, on the side opposite to the scanning side of the two-dimensional sensor. Photoprints and CCDs placed in close contact or close together
It is photoelectrically read by a photodetecting means such as, and an electrical signal corresponding to the transmitted electron beam image is obtained. Note that it is preferable that the support of the two-dimensional sensor has the function of the optical filter described above. By using the electrical image signal obtained in this way, it is possible to display an electron microscope image on a display such as a CRT, or it can be permanently recorded as a hard copy. It is also possible to record on a recording medium such as a magnetic disk, an optical disk, or a magneto-optical disk.

In the electron microscope image recording/reading device of the present invention, since electron microscope images are stored and recorded on a two-dimensional sensor such as a stimulable phosphor sheet, it is possible to record electron microscope images with high sensitivity. Therefore, the amount of electron beam exposure from the electron microscope can be reduced,
Damage to the sample can be reduced. Furthermore, according to the device of the present invention, since an electron microscope image is directly read as an electric signal, it is extremely easy to perform image processing such as gradation processing and frequency emphasis processing on the electron microscope image. Image analysis such as pattern processing, three-dimensional image reconstruction, and image binarization can also be performed much more easily and quickly than in the past by inputting the electrical signals to a computer.

The light beam or heat ray is irradiated onto the two-dimensional sensor from a position facing approximately the center of the sensor using the aforementioned deflection element.
The scanning spot diameter of the light beam or heat ray does not differ greatly between the center and the ends of the sensor.
An ordinary two-dimensional fθ lens can provide a sufficiently uniform scanning beam spot diameter, making it possible to extremely accurately read the electron microscope image stored in the sensor. Note that the above deflection element is
As mentioned above, a mirror that reflects the light beam or heat rays deflected in the X-Y direction can be used, or the deflection means in the X direction or Y direction, such as the galvanometer mirror mentioned above, can be used as it is as this deflection element. It's okay.

(Embodiments) Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 schematically shows an electron microscope image recording and reading apparatus according to a first embodiment of the present invention. The mirror body 1a of the electron microscope 1 emits an electron beam 2 at a uniform speed.
an electron gun 3 that emits the electron beam 2, at least one focusing lens 4 consisting of a magnetic lens, an electrostatic lens, etc. that focuses the electron beam 2 onto the sample surface, a sample stage 5, and an objective lens 6 similar to the focusing lens 4 described above. , projection lens 7
It has the following. Sample 8 placed on sample stage 5
The electron beam 2 that has passed through is refracted by the objective lens 6 to form an enlarged scattered image 8a of the sample 8.
This enlarged scattered image 8a is projected onto the imaging plane 9 by the projection lens 7 (8b in the figure).

An electron microscope image recording/reading device 10 according to the present invention is arranged below the mirror body 1a. This electron microscope image recording/reading device 10 has a mirror body 1a.
A two-dimensional sensor (hereinafter referred to as a stimulable phosphor sheet 1) consisting of a stimulable phosphor fixed to the imaging surface 9 in
1), an excitation light source 12 and an optical scanning system 13
an excitation means consisting of; and a photoprint 1 disposed so as to face the stimulable phosphor sheet 11 through a light-transmitting window 14 provided on the peripheral wall of the mirror body 1a.
5 and an erasing light source 16.

The stimulable phosphor sheet 11 is formed by layering the stimulable phosphor described above on a transparent support. In addition, the excitation light source 12 is, for example, He-Ne.
Consists of laser, semiconductor laser, focusing lens, etc.
The optical scanning section 13 includes first and second optical deflectors 13
a, 13b, and a mirror 13d. The first and second optical deflectors 13a and 13b are galvanometer mirrors, polygon mirrors,
A known optical deflector such as a hologram scanner or AOD may be used.

Further, the mirror 13d is movable in the left and right directions along the guide bar 25, and can be moved manually or by a drive means (not shown) to either a use position shown by a solid line in FIG. 1 or a retracted position shown by a broken line. They are now being placed selectively. The use position is a position where the mirror 13d faces the center of the stimulable phosphor sheet 11, and the retracted position is a position where electron beam irradiation to the stimulable phosphor sheet light 11 is not obstructed.

Excitation light beam 12 emitted from excitation light source 12
a is deflected by the first optical deflector 13a, and is also deflected by the second optical deflector 13b in a direction perpendicular to the direction of the above deflection (direction of arrow A in the figure), and is fitted with, for example, lead glass. It passes through the transparent window 21 and enters the mirror body 1a, and if the mirror 13d is set at the use position, this mirror 13d
, the stimulable phosphor sheet 11
incident on the top. In this way, the stimulable phosphor sheet is scanned by the light beam in both the X and Y directions.

Although not shown, the excitation light beam 12a emitted from the excitation light source 12 passes through a filter that cuts out the wavelength range of stimulated luminescence light, and after adjusting the beam diameter with a beam expander, it is transmitted with optical deflectors 13a and 13b. deflected, then fθ lens 1
It is preferable that the beam be made to have a uniform diameter by passing through 3c and then be incident on the stimulable phosphor sheet. Further, the erasing light source 16 generates light included in the excitation wavelength range of the stimulable phosphor sheet 11. Then, the second optical deflector 13b and the mirror 13d
A mirror 17 is disposed between the excitation light beam 12a and the mirror 17, which can be positioned in the optical path of the excitation light beam 12a or out of the optical path. Erasing light 16a emitted by the erasing light source 16 is focused by a lens 18, and if the mirror 17 is set at a position where it enters the optical path of the excitation light beam 12a, the mirror 17
The light is then reflected by the mirror 13d to illuminate the entire stimulable phosphor sheet 11. Further, a shutter 19 capable of blocking the electron beam 2 is provided in the mirror body 1a between the objective lens 7 and the stimulable phosphor sheet 11, and a shutter 19 capable of blocking the electron beam 2 is provided between the stimulable phosphor sheet 11 and the stimulable phosphor sheet 15. A shutter 24 is provided. The light transmitting window 14 transmits only the stimulated luminescence light (described in detail later) emitted by the stimulable phosphor sheet 11, and the excitation light beam 12a is transmitted through the light transmitting window 14.
A glass 20 is fitted with an optical filter for removing. In addition, the interior of the mirror body 1a, including the part where the stimulable phosphor sheet 11 is placed, is kept under vacuum by known means such as a vacuum pump during operation of the electron microscope, as in a normal electron microscope. will be maintained.

Next, the electron microscope image recording/reading device 10 having the above configuration
The recording and reading of electron microscope images will be explained in detail. When the shutter 19 mentioned above is opened (the state shown in FIG. 1), the energy of the electron beam 2 carrying the enlarged scattered image 8b of the sample 8 is accumulated in the stimulable phosphor sheet 11 disposed on the imaging surface 9. Ru. At this time, the mirror 13c is set to the above-mentioned retracted position, and the electron beam 2 is directed toward the stimulable phosphor sheet 11.
does not interfere with irradiation. Furthermore, during this electron beam exposure, the optical shutter 24 is preferably closed. The shutter 19 is then closed and the optical shutter 24 is opened, with the mirror 3
is set at the above-described use position, and then the excitation light beam 12 is deflected in both the X and Y directions as described above.
a is made incident on the sheet 11. The stimulable phosphor sheet 11 is two-dimensionally scanned by the excitation light beam 12a deflected in this way, and the sheet 11 emits stimulated luminescence light whose intensity corresponds to the level of the electron beam energy. This stimulated luminescence light is received from the back side of the sheet 11 by a photomal 15 through a glass 20 equipped with an optical filter that removes the excitation light beam 12a, and the amount of stimulated luminescence light is read photoelectrically.

The electric signal obtained by reading the stimulated luminescence light by the photoprinter 15 is transmitted to the image processing circuit 22, subjected to necessary image processing, and then sent to the image reproducing device 23. This image reproduction device 23 is
It may be a display such as a CRT, or a recording device that performs optical scanning recording on a photosensitive film. By outputting an image using an electric signal corresponding to the amount of stimulated luminescence light in this manner, the enlarged scattered image 8b carried by the stimulated luminescence light is reproduced.

Here, the stimulable phosphor sheet 11 is irradiated with the excitation light beam 12a by the mirror 13d disposed at the use position facing the center of the sheet 11 as described above.
Since the optical path length from the excitation light source 12 to the stimulable phosphor sheet 11 is
There is no large difference between the center part and the end part of 1.
Therefore, a sufficiently uniform scanning beam spot diameter can be obtained using an ordinary two-dimensional fθ lens, and the image information stored and recorded on the stimulable phosphor sheet 11 can be read extremely accurately. A correct enlarged scattering image 8b without distortion is now reproduced.

In this embodiment, the optical filter, the optical shutter 24, and the photoprinter 15 are arranged in this order outside the vacuum system in close proximity to the side opposite to the scanning side of the two-dimensional sensor. It may also be placed in a vacuum system.

After the aforementioned image signal reading is completed, the optical shutter 24 provided between the photo frame 15 and the optical filter glass 20 is closed, the mirror 17 is placed in the optical path of the excitation light beam 12a, and the erasing light source is 16 is lit. As a result, the surface of the sheet 11 is irradiated with erasing light 16a emitted from the erasing light source 16. Even when the stimulable phosphor sheet 11 is irradiated with the excitation light beam 12a as described above, not all of the electron beam energy stored in the sheet 11 is released, and an afterimage may remain. However, if the stimulable phosphor sheet 11 is irradiated with the erasing light 16a as described above, the afterimage will be erased, and the stimulable phosphor sheet 11 will be erased.
1 can be reused. Further, by this erasing light irradiation, noise components due to radioactive elements such as ²²⁶ Ra contained as impurities in the phosphor of the sheet 11 are also emitted. As the erasing light source 16, a tungsten lamp, a halogen lamp, an infrared lamp, a xenon flash lamp, a laser light source, or the like as shown in JP-A-56-11392 may be used. Further, the excitation light source 12 for reading may also be used for erasing.

After the afterimage and noise erasing operation described above is completed, the mirror 13d is returned to the retracted position in preparation for recording the next electron microscope image.

When storing and recording the enlarged scattered image 8b on the stimulable phosphor sheet 11 as described above, it is necessary to focus the enlarged scattered image 8b correctly. This focusing is carried out by disposing a fluorescent screen near the shutter 19 and displaying an enlarged scattered image 8b by the electron beam 2 on the fluorescent screen, as in a conventional electron microscope, and by using an observation window provided on the peripheral wall of the mirror body 1a. This can be done by operating the focusing knob (not shown) of the electron microscope while viewing this displayed image. Further, the image reproducing device 2 uses the enlarged scattered image 8b recorded on the stimulable phosphor sheet 11 as described above as a focusing image.
3, the reproduced image is observed to determine the focus state, and the focus may be corrected by operating the focusing knob based on the determination result. In this case, after erasing the focusing image as described above, the correctly focused enlarged scattering image 8b is recorded again on the stimulable phosphor sheet 11 as an image for sample observation,
Just read it. Note that when the focusing image is recorded on the stimulable phosphor sheet 11 and reproduced on the image reproducing device 23 as described above, the focusing image does not need to be output in the same size as the final output image; Excitation light irradiation and stimulated emission light detection may be performed on a portion of the image area of the output image, and an image of only that portion may be output. By doing so, the time required to reproduce this focusing image is shortened, and the efficiency of the focusing work is improved. In addition, the same effect as described above can be obtained even if the image is read in larger pixel units when reproducing the focusing image than when reproducing the final output image.

Further, the above-mentioned focusing image can be used not only to simply focus the enlarged scattered image 8b, but also to determine the visual field range of the final output image.

Note that damage to the sample 8 can be further prevented by providing a shutter between the sample 8 of the mirror body 1a and the electron gun 3 to block the electron beam 2 except when photographing.

Next, a second embodiment of the present invention will be described with reference to FIG. In addition, in this Figure 2,
Elements equivalent to those in FIG. 1 are given the same numbers, and explanations thereof will be omitted (the same applies hereinafter). This electron microscope image recording/reading device 5 in FIG.
0, of the first and second optical deflectors 13a and 13b that deflect the excitation light beam 12a, the second optical deflector 13b, which is closer to the stimulable phosphor sheet 11, and the fθ lens 13c, It is movable along the guide bar 25. This second optical deflector 13b and f ₁ θ lens 13c
When placed in the use position shown by the solid line in the figure, the excitation light beam 12a is deflected at a portion facing the center of the stimulable phosphor sheet and scans the sheet 1. Therefore, in this case as well, the scanning beam spot diameter does not differ greatly between the center part and the edge part of the sheet as described above, and the fθ lens 13
A normal two-dimensional fθ lens can be used as c, and the image information stored and recorded on the sheet 11 can be read very accurately. In the second embodiment, the erasing light 16a is also scanned by the optical deflectors 13a and 13b, so that the entire surface of the stimulable phosphor sheet 11 is irradiated.

Although the embodiment of recording and reproducing an enlarged scattering image of the sample 8 by a transmitted electron beam has been described above, the present invention can also be applied to recording and reproducing the diffraction pattern of the sample described above. FIG. 3 shows how the diffraction pattern 8c of the sample 8 is recorded. In this embodiment, the electron microscope 40 includes an intermediate lens 41 between the objective lens 6 and the projection lens 7.
The diffraction pattern 8c of the sample 8 formed on the back focal plane of the objective lens 7 is reflected onto the imaging plane 9 by the intermediate lens 41 and the projection lens 7, which are focused on the back focal plane. It is enlarged and projected. In this case as well, if a stimulable phosphor sheet 11 is placed as a two-dimensional sensor on the imaging plane 9, an enlarged image of the diffraction pattern 8c by the transmitted electron beam 2 is stored and recorded on the sheet 11. This accumulated and recorded diffraction pattern 8c can be read in exactly the same manner as explained in the first embodiment,
The scanned image can be displayed on a CRT or reproduced as a hard copy.

Furthermore, in order to eliminate the effects of fluctuations in recording conditions or to obtain electron microscope images with excellent observability,
A recording pattern determined by the recording state of the transmission electron beam image (enlarged scattering image or enlarged diffraction pattern) accumulated and recorded on the stimulable phosphor sheet 11, the properties of the sample, the recording method, etc. is used for sample observation. It is preferable to grasp the visual image before outputting it, and adjust the reading gain of the photo frame 15 to an appropriate value based on the accumulated recorded information thus grasped, or perform appropriate signal processing. Furthermore, in order to obtain reproduced images with excellent observability, it is required to determine the recording scale factor so that the separation power is optimized according to the contrast of the recorded pattern.

As a method for ascertaining the information stored and recorded in the stimulable phosphor sheet 11 prior to outputting a visible image, for example, a method such as that disclosed in Japanese Patent Application Laid-open No. 89245/1983 can be used. That is, prior to the main reading, a stimulable phosphor sheet is prepared using excitation light with an energy lower than that of the excitation light to be irradiated during the reading operation (main reading) to obtain a visible image for observation of the sample 8. A reading operation (pre-reading) is performed to grasp the accumulated record information accumulated and recorded on the sheet 11, and the accumulated record information of the sheet 11 is grasped.After that, the main reading is performed, and the reading gain is calculated based on the above-mentioned pre-read information. Adjust appropriately,
The recording scale factor can be determined or appropriate signal processing can be performed.

In addition, in order to appropriately adjust the reading gain or recording scale factor or perform appropriate signal processing as described above, in addition to performing the above-mentioned pre-reading, it is necessary to use the above-mentioned focusing image on a CRT.
etc., and while looking at this display, determine the appropriate reading gain, recording scale factor, or signal processing conditions in advance in an interactive manner. Image reading and signal processing may be performed based on the set reading gain, recording scale factor, or signal processing conditions.

Furthermore, when a thermophosphor sheet is used instead of the stimulable phosphor sheet 11 described above, in order to release the stored energy from this sheet by heating, a heating source that emits heat rays, such as a CO ₂ laser, is used. The thermal phosphor sheet may be scanned using this hot wire, and for that purpose, for example, the description in Japanese Patent Publication No. 55-47720 may be referred to.

(Effects of the Invention) As explained in detail above, according to the device of the present invention,
Since electron microscope images are stored and recorded on a two-dimensional sensor such as a stimulable phosphor sheet, it is now possible to record electron microscope images with high sensitivity, thereby reducing the amount of electron beam exposure from the electron microscope. This can reduce damage to the sample. In addition, it is possible to immediately display a reproduced image of a recorded image on a CRT, etc. with high sensitivity, so if this reproduced image is used as a monitor image for focusing an electron microscope, a clear monitor image can be obtained, which is unlike conventional methods. Focus adjustment becomes possible with a low electron beam exposure amount, which was previously possible.

Moreover, in the apparatus of the present invention, since an electron microscope image is read as an electric signal, it is extremely easy to perform image processing such as gradation processing and frequency emphasis processing on the electron microscope image. , 3D image reconstruction, image 2
Image analysis such as value conversion can also be performed much more easily and quickly than before by inputting the electrical signals into a computer.

Furthermore, since the two-dimensional sensor that accumulates and records electron microscopic images can be reused by applying treatments such as light irradiation and heating, the present invention can be used more easily than when conventional silver halide photography systems are used. , electron microscope images can be reproduced more economically.

In addition, since the two-dimensional sensor is fixed in the vacuum system and scanned in the X-Y direction with a light beam or heat ray, there is no need to break the vacuum system every time a reading operation is performed, and the two-dimensional sensor can be scanned in the sub-scanning direction. Since there is no need for a means to move the device in the direction, the device can be made compact, and the photodetector can be installed in close contact with or close to the side opposite to the scanning surface of the two-dimensional sensor via an optical filter or optical shutter. As a result, the solid angle of light reception can be increased, and the S/
N is increased.

Moreover, in the device of the present invention, a movable deflection element is used to irradiate the light beam or heat ray to the two-dimensional sensor from a position facing approximately the center of the sensor, so Using the lens, a sufficiently uniform scanning beam spot diameter can be obtained, and the electron microscope image stored and recorded on the two-dimensional sensor can be read very accurately.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram showing a first embodiment of the device of the present invention, FIG. 2 is a schematic diagram showing a second embodiment of the device of the present invention, and FIG. 3 is a schematic diagram of an electron microscope that can be combined with the device of the present invention. It is a schematic diagram showing an example. 1,40...electron microscope, 2...electron beam, 8...
...Sample, 9...Image plane of electron microscope, 10,50
... Electron microscope image recording and reading device, 11 ... Storable phosphor sheet, 12 ... Excitation light source, 12a ... Excitation light beam, 13 ... Light scanning system, 13a, 13b
...Light deflector, 13c...fθ lens, 13d...
Mirror, 15... Photomaru, 16... Erasing light source, 25... Guide bar.

Claims (1)

[Claims] 1. A two-dimensional sensor fixed to the imaging plane of an electron microscope and accumulating the energy of an electron beam transmitted through a sample;
an excitation unit that scans in the Y direction and emits the electron beam energy accumulated in the sensor as light; a photodetector that photoelectrically detects the emitted light from the two-dimensional sensor; and a photodetector that photoelectrically detects the emitted light from the two-dimensional sensor; and an erasing means that irradiates or heats the two-dimensional sensor with light to release the energy remaining in the sensor, and the excitation means faces approximately the center of the two-dimensional sensor. An electron microscope image recording/reading device comprising a deflection element that is movable from a position to a retracted position that does not impede irradiation of the electron beam to the sensor. 2. The electron microscope image recording and reading device according to claim 1, wherein the two-dimensional sensor is made of a stimulable phosphor. 3. The photodetector is connected to the surface of the two-dimensional sensor opposite to the surface receiving the scan through an optical filter that cuts out light or infrared rays at the excitation light wavelength, and a shutter that opens during reading and closes during erasing. An electron microscope image recording/reading device according to claim 1 or 2, wherein the electron microscope image recording and reading device is arranged in close contact with each other or in close proximity to each other.